CN100399003C - Laser Measurement Method of Vibration Displacement of Rolling Bearing - Google Patents
Laser Measurement Method of Vibration Displacement of Rolling Bearing Download PDFInfo
- Publication number
- CN100399003C CN100399003C CNB2005100498041A CN200510049804A CN100399003C CN 100399003 C CN100399003 C CN 100399003C CN B2005100498041 A CNB2005100498041 A CN B2005100498041A CN 200510049804 A CN200510049804 A CN 200510049804A CN 100399003 C CN100399003 C CN 100399003C
- Authority
- CN
- China
- Prior art keywords
- bearing
- vibration
- laser
- displacement
- psd position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
本发明公开了一种滚动轴承振动位移的激光测量方法。将被测轴承安装在试验台的转轴上,利用激光经过轴承表面反射到达PSD传感器表面上,由PSD位置传感器给出光斑位置,由于轴承外圈所受轴向力的作用,轴承内圈和主轴可视为一刚体,当转轴转动时,轴承内圈、外圈和滚动体存在的缺陷引起振动,利用反射激光在PSD位置传感器上的位置变化,反映出被测轴承表面某一点振动的位移s。本发明机构简单,原理明确,拾振效果远较其他类型的振动测试好,精度较高,并且对轴承系统振动本身的影响几乎可以忽略。对进一步提高轴承振动的测量精度和应用稳定性具有实用价值和较大的经济开发前景,并且适用于任何反光面的振动测量,如机动车表面的振动情况等。
The invention discloses a laser measuring method for the vibration displacement of a rolling bearing. Install the tested bearing on the rotating shaft of the test bench, and use the laser to reflect on the surface of the PSD sensor through the bearing surface, and the position of the light spot is given by the PSD position sensor. Due to the axial force on the outer ring of the bearing, the inner ring of the bearing and the main shaft It can be regarded as a rigid body. When the rotating shaft rotates, the defects of the inner ring, outer ring and rolling elements of the bearing cause vibration. The position change of the reflected laser on the PSD position sensor reflects the displacement s of a certain point on the bearing surface under test. . The invention has simple mechanism, clear principle, better vibration picking effect than other types of vibration tests, high precision, and almost negligible influence on the vibration of the bearing system itself. It has practical value and great economic development prospects for further improving the measurement accuracy and application stability of bearing vibration, and is suitable for vibration measurement of any reflective surface, such as the vibration situation of the surface of a motor vehicle.
Description
技术领域 technical field
本发明涉及机械振动测量,具体涉及一种滚动轴承振动位移的激光测量方法。The invention relates to mechanical vibration measurement, in particular to a laser measurement method for vibration displacement of a rolling bearing.
背景技术 Background technique
轴承振动测量一般有速度型和加速度型测量方法两种,原理分别是用磁性速度测量传感和压电晶体加速度传感。但无论如何,都需要拾振器和轴承外表面接触,并保持一定的结合程度,也即一定刚度,以提高系统的频响。其存在的问题是:机械型的拾振器频率响应不可能太高,而传感器的接触式安装方式也造成测量系统的不稳定。为了改进系统频率响应不高的缺点,曾经出现了传感器的磁吸式装卡方式,但是系统复杂,拆装不便,应用较为困难,而且还需要增加一道退磁的过程。Bearing vibration measurement generally has two types of measurement methods: velocity type and acceleration type. The principle is to use magnetic velocity measurement sensor and piezoelectric crystal acceleration sensor respectively. But in any case, it is necessary for the vibration pickup to be in contact with the outer surface of the bearing, and to maintain a certain degree of combination, that is, a certain rigidity, so as to improve the frequency response of the system. The existing problems are: the frequency response of the mechanical vibration pickup cannot be too high, and the contact installation method of the sensor also causes the instability of the measurement system. In order to improve the shortcoming of the low frequency response of the system, a magnetic suction clamping method of the sensor has appeared, but the system is complex, inconvenient to disassemble and assemble, and the application is more difficult, and a demagnetization process needs to be added.
发明内容 Contents of the invention
为此,本发明的目的在于提供无接触式的一种滚动轴承振动位移的激光测量方法,它克服了现有技术中的不足。Therefore, the object of the present invention is to provide a non-contact laser measurement method for the vibration displacement of rolling bearings, which overcomes the deficiencies in the prior art.
本发明采用的技术方案是:将被测轴承安装在试验台的转轴上,利用激光器发出的激光经过被测轴承表面反射到达PSD位置传感器表面上,由PSD位置传感器给出光斑位置,由于被测轴承外圈所受轴向力的作用,被测轴承内圈和转轴可视为一刚体,当转轴转动时,轴承内圈、外圈和滚动体存在的缺陷引起振动,利用反射激光在PSD位置传感器上的位置变化,反映出被测轴承表面某一点振动的位移s。The technical solution adopted in the present invention is: install the tested bearing on the rotating shaft of the test bench, and use the laser light emitted by the laser to reflect on the surface of the tested bearing to reach the surface of the PSD position sensor, and the PSD position sensor gives the spot position. Under the action of the axial force on the outer ring of the bearing, the inner ring of the tested bearing and the rotating shaft can be regarded as a rigid body. When the rotating shaft rotates, the defects existing in the inner ring, outer ring and rolling body of the bearing cause vibration. The position change on the sensor reflects the vibration displacement s of a certain point on the bearing surface under test.
调整激光器的入射角θ/2和PSD位置传感器)的入射角π/2-β,使激光对被测轴承表面的入射角θ/2在15°以内,通过调整接收激光对PSD位置传感器表面的入射角β,使得接受激光范围处于PSD位置传感器的测量范围内。Adjust the incident angle θ/2 of the laser and the incident angle π/2-β of the PSD position sensor) so that the incident angle θ/2 of the laser on the surface of the bearing to be tested is within 15°. Angle of incidence β, so that the receiving laser range is within the measurement range of the PSD position sensor.
所述的振动的位移s为:The displacement s of the vibration is:
以初始位移为0点,s:轴承测量点位移,θ:两倍激光入射角,β:π/2-β-PSD位置传感器的入射角,S:PSD位置传感器的测量位移;测量后取位移s的有效值作为测量评判指标。 Take the initial displacement as 0 point, s: the displacement of the bearing measurement point, θ: twice the incident angle of the laser, β: the incident angle of the π/2-β-PSD position sensor, S: the measured displacement of the PSD position sensor; take the displacement after measurement The effective value of s is used as the measurement evaluation index.
本发明具有的有益的效果是:The beneficial effects that the present invention has are:
1、避免接触式装卡方法中的不稳定现象,也即拾振器的刚度不稳定;无接触式测量方法的装卡较为简单,使用方便,精度容易保证,除了一般实验室测量以外,还可应用于轴承生产现场的质量控制和在线检测;1. Avoid the unstable phenomenon in the contact-type clamping method, that is, the stiffness of the vibration pickup is unstable; the non-contact measurement method is relatively simple, easy to use, and easy to guarantee accuracy. In addition to general laboratory measurements, it is also It can be applied to the quality control and online detection of the bearing production site;
2、使得被测轴承振动的速度测量和加速度测量相互统一的方法基础,也即位移测量;将位移对时间进行一次差分和二次差分(或者微分,可以采用模拟电路以提高速度),将会分别得到振动的速度值和加速度值。2. The basis of the method of unifying the velocity measurement and acceleration measurement of the vibration of the bearing under test, that is, the displacement measurement; the primary difference and the secondary difference (or differential, an analog circuit can be used to increase the speed) of the displacement versus time will be Obtain the velocity value and acceleration value of the vibration respectively.
3、系统频率响应可以达到很高的程度(2MHz以上),测量范围几乎可覆盖轴承所有频率的振动(在轴承测量标准规定的转速下)。3. The frequency response of the system can reach a very high level (above 2MHz), and the measurement range can almost cover the vibration of all frequencies of the bearing (at the speed specified by the bearing measurement standard).
4、测量后取位移s的有效值作为测量评判指标。4. After the measurement, take the effective value of the displacement s as the measurement evaluation index.
本发明不仅适用于轴承振动行业,而且也适用于任何反光表面的振动情况的检测,如发动机或者机动车表面的振动情况。The invention is not only applicable to the bearing vibration industry, but also applicable to the detection of the vibration of any reflective surface, such as the vibration of the surface of an engine or a motor vehicle.
附图说明 Description of drawings
图1是本发明的激光法测量径向轴承振动示意图;Fig. 1 is the laser method measurement radial bearing vibration schematic diagram of the present invention;
图2是本发明轴承振动激光测量法中测量的计算示意图。Fig. 2 is a schematic diagram of measurement calculation in the bearing vibration laser measurement method of the present invention.
图中:1、激光器,2、转轴,3、径向轴承,4、推力装置,5、PSD位置传感器。In the figure: 1. laser device, 2. rotating shaft, 3. radial bearing, 4. thrust device, 5. PSD position sensor.
具体实施方式 Detailed ways
下面结合附图和具体实施例对本发明作进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
利用反射激光的发散角较小的特性,在反射激光末端安置PSD位置传感器,测量振动过程中的微小位移。由于测量采样频率要远远大过轴承测量最高振动频率,最高振动频率由测量标准给出,所以测量的结果可以反映轴承振动的幅值和频率状况。Taking advantage of the small divergence angle of the reflected laser, a PSD position sensor is placed at the end of the reflected laser to measure the tiny displacement during the vibration process. Since the measurement sampling frequency is much higher than the maximum vibration frequency of the bearing measurement, the maximum vibration frequency is given by the measurement standard, so the measurement results can reflect the amplitude and frequency of the bearing vibration.
如图1、图2所示,本发明将被测轴承3安装在试验台(如s0910型轴承振动测量试验台)的转轴2上,由推力装置4从被测轴承3端面加载,使得被测径向轴承3的外圈和滚动体以及内圈和滚动体之间没有间隙,以体现轴承加工精度引起的振动情况,利用激光器1(如氦氖激光器)发出的激光经过被测轴承3表面的反射到达PSD位置传感器5上,由PSD位置传感器5给出光斑位置,由于被测轴承外圈所受轴向力的作用,被测轴承内圈和转轴2可视为一刚体,当转轴2转动时,被测轴承内圈、外圈和滚动体存在的缺陷引起振动,利用反射激光在PSD位置传感器5上的位置变化,反映出被测轴承3表面某一点振动的位移s。As shown in Fig. 1 and Fig. 2, the present invention installs the tested bearing 3 on the rotating
调整激光器1的入射角θ/2和PSD位置传感器5的入射角π/2-β,使激光对被测轴承表面的入射角θ/2在15°以内,通过调整接收激光对PSD位置传感器5表面的入射角β,使得接受激光范围处于PSD位置传感器5的测量范围内。Adjust the incident angle θ/2 of the
所述的振动的位移s为:The displacement s of the vibration is:
以初始位移为0点,s:轴承测量点位移,θ:两倍激光入射角,β:π/2-β-PSD位置传感器的入射角,S:PSD位置传感器的测量位移;测量后取位移s的有效值作为测量评判指标。 Take the initial displacement as 0 point, s: the displacement of the bearing measurement point, θ: twice the incident angle of the laser, β: the incident angle of the π/2-β-PSD position sensor, S: the measured displacement of the PSD position sensor; take the displacement after measurement The effective value of s is used as the measurement evaluation index.
从图1可以看出,这种测量方法实现了无接触式拾振,并且系统响应频率只取决于传感器的响应频率和信号系统的处理速度。It can be seen from Figure 1 that this measurement method realizes non-contact vibration pickup, and the system response frequency only depends on the response frequency of the sensor and the processing speed of the signal system.
如图2所示,当被测轴承2的位置发生改变时,激光器1的发射激光所照射的表面位置也会有所改变,所以其入射角需要尽可能较小,这样才能够近似实现对某一点的测量。如图2所示,入射角为θ/2,反射激光对PSD位置传感器感光面的入射角为π/2-β,如果精度不够,可采用减小β的办法来加以提高。在PSD传感器的位移为S的情况下,可以得到被测轴承表面光斑点的位移s为:As shown in Figure 2, when the position of the
s=S[cos(β-θ)+tg(β-θ)tg-1(θ)]s=S[cos(β-θ)+tg(β-θ)tg -1 (θ)]
从以上公式可以看出,只要在一定的测量范围以内,即在一点附近的振动情况能够得到完全的和唯一的确定。并且由其位移可以得到其速度和加速度的振动情况。It can be seen from the above formula that as long as it is within a certain measurement range, that is, the vibration situation near a point can be completely and uniquely determined. And the vibration of its velocity and acceleration can be obtained from its displacement.
测量采样频率应该超过振动最高频率的8倍以上,正式使用应在20倍以上,可保证测量数据的稳定性。在PSD位置传感器上的有效激光光斑直径应不超过PSD位置传感器测量范围的15%。The measurement sampling frequency should be more than 8 times of the highest vibration frequency, and more than 20 times for formal use, which can ensure the stability of the measurement data. The effective laser spot diameter on the PSD position sensor shall not exceed 15% of the measuring range of the PSD position sensor.
本发明不仅适用于轴承振动,同时也适用于表面微小振动情况的测量,如发动机或者机动车表面的振动情况。The invention is not only applicable to the vibration of the bearing, but also applicable to the measurement of the micro vibration of the surface, such as the vibration of the surface of the engine or the motor vehicle.
上述具体实施方式用来解释说明本发明,而不是对本发明进行限制,在本实用新型的精神和权利要求的保护范围内,对本发明作出的任何修改和改变,都落入本发明的保护范围。The specific embodiments above are used to explain the present invention, rather than to limit the present invention. Within the spirit of the utility model and the protection scope of the claims, any modification and change made to the present invention will fall into the protection scope of the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100498041A CN100399003C (en) | 2005-05-24 | 2005-05-24 | Laser Measurement Method of Vibration Displacement of Rolling Bearing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100498041A CN100399003C (en) | 2005-05-24 | 2005-05-24 | Laser Measurement Method of Vibration Displacement of Rolling Bearing |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1687720A CN1687720A (en) | 2005-10-26 |
CN100399003C true CN100399003C (en) | 2008-07-02 |
Family
ID=35305762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100498041A Expired - Fee Related CN100399003C (en) | 2005-05-24 | 2005-05-24 | Laser Measurement Method of Vibration Displacement of Rolling Bearing |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100399003C (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102062581B (en) * | 2010-11-30 | 2012-08-29 | 中国科学院光电技术研究所 | Measuring device based on radial runout of pyramid prism axis system |
CN103822767B (en) * | 2014-02-14 | 2017-04-26 | 上海市建筑科学研究院(集团)有限公司 | Curtain wall panel earthquake simulation system vibration performance parameter detection device and method thereof |
CN103913217B (en) * | 2014-04-02 | 2016-04-13 | 太原理工大学 | Based on the main shaft of hoister method for detecting vibration of PSD laser triangulation |
CN105628175B (en) * | 2016-01-20 | 2018-10-30 | 华中科技大学 | A kind of air spindle vibration precision measurement apparatus and its method |
CN106092577B (en) * | 2016-06-25 | 2019-12-06 | 上海大学 | Dynamic characteristic testing device for high-speed angular contact ball bearing retainer |
CN107505475B (en) * | 2017-10-13 | 2019-07-12 | 河海大学 | A laser-based measuring device and method for the instantaneous rotational speed and swing of a rotating shaft |
CN109186501B (en) * | 2018-09-30 | 2024-05-17 | 珠海市运泰利自动化设备有限公司 | Calibration method and detection method of high-precision photoelectric sensor angle detection system |
CN109489923B (en) * | 2018-11-20 | 2020-09-01 | 中国船舶重工集团公司第七0七研究所 | System and method for measuring free vibration period of zero-length spring |
CN109764952B (en) * | 2019-01-24 | 2021-10-08 | 甘特科技(北京)有限公司 | Shaft jitter detection and rotating speed measurement method |
CN110440898B (en) * | 2019-07-25 | 2021-06-29 | 山西漳泽电力股份有限公司河津发电分公司 | Rotating machinery vibration measuring method |
CN111024392B (en) * | 2019-10-31 | 2020-07-14 | 哈尔滨理工大学 | Comprehensive analysis device and analysis method for full ball bearing with variable speed curved surface |
CN111272430A (en) * | 2020-04-13 | 2020-06-12 | 合肥工业大学 | Bearing vibration measuring device based on optical interference principle and measuring method thereof |
CN112161693A (en) * | 2020-09-04 | 2021-01-01 | 威凯检测技术有限公司 | A method of detecting the vibration frequency of an electric toothbrush |
CN112146881B (en) * | 2020-09-23 | 2022-09-30 | 温州大学激光与光电智能制造研究院 | Vibration deviation detection device of air bearing |
CN112697434B (en) * | 2021-01-19 | 2021-10-22 | 深圳市玄羽科技有限公司 | Bearing fault detection method and system for intelligent spindle |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2345701A1 (en) * | 1976-03-23 | 1977-10-21 | Cem Comp Electro Mec | Surface displacement or oscillation measurement - uses local interference between two scattered correlated point fields to permit larger stimulated oscillation amplitudes |
CN1357748A (en) * | 2001-12-18 | 2002-07-10 | 中国科学院长春光学精密机械与物理研究所 | Optoelectronic detector of angular displacement sensor |
US6628408B1 (en) * | 1999-04-15 | 2003-09-30 | Kimberly-Clark Worldwide, Inc. | Amplitude measurement for an ultrasonic horn |
JP2004239746A (en) * | 2003-02-06 | 2004-08-26 | Nsk Ltd | Revolution speed measuring device and method of bearing rolling body and bearing diagnostic device |
-
2005
- 2005-05-24 CN CNB2005100498041A patent/CN100399003C/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2345701A1 (en) * | 1976-03-23 | 1977-10-21 | Cem Comp Electro Mec | Surface displacement or oscillation measurement - uses local interference between two scattered correlated point fields to permit larger stimulated oscillation amplitudes |
US6628408B1 (en) * | 1999-04-15 | 2003-09-30 | Kimberly-Clark Worldwide, Inc. | Amplitude measurement for an ultrasonic horn |
CN1357748A (en) * | 2001-12-18 | 2002-07-10 | 中国科学院长春光学精密机械与物理研究所 | Optoelectronic detector of angular displacement sensor |
JP2004239746A (en) * | 2003-02-06 | 2004-08-26 | Nsk Ltd | Revolution speed measuring device and method of bearing rolling body and bearing diagnostic device |
Also Published As
Publication number | Publication date |
---|---|
CN1687720A (en) | 2005-10-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100399003C (en) | Laser Measurement Method of Vibration Displacement of Rolling Bearing | |
CN108981614B (en) | A device and method for measuring spindle rotation error with circular grating and autocollimator | |
CN106595433B (en) | Measuring method and measuring device for radial runout of bearing inner ring | |
CN102539072B (en) | Field dynamic balance measuring device and method for utility boiler side fan | |
CN101629814B (en) | Method and device for measuring the inner and outer contours and wall thickness of a trigger-type hollow sphere with differential confocal aiming | |
CN109000592B (en) | A kind of deep and long hole straightness detection device and method | |
CN102062581B (en) | Measuring device based on radial runout of pyramid prism axis system | |
CN102865802B (en) | Device for measuring coaxiality of bearing seat of aero-engine combustion chamber casing | |
CN105203066A (en) | Suspended swing arm contourgraph for ultra-large diameter surface shape detection | |
CN102359759B (en) | Measuring system for electrical runout amount of revolving body | |
CN106403989B (en) | Device and method for detecting swing frequency error and swing zeroing error of turntable | |
CN117260389A (en) | Multi-sensor fusion-driven large-scale deep hole part shape error in-situ measurement system | |
CN102590292A (en) | Method and device for measuring gas film stiffness of dynamic pressure motor based on double measuring heads | |
CN102650525B (en) | The scaling method of electrostatic gyro pole axis resolution of photoelectric sensor | |
CN103335704B (en) | A kind of laser interference rotor vibration detecting device and measuring method thereof | |
CN101857186B (en) | Silica optical fiber microprobe for three-dimensional micro-force measurement | |
CN204788210U (en) | Accurate angle detection device is lost in static position of accurate centrifugal separator | |
CN103017661A (en) | Lead screw detector and detection method using lead screw detector | |
CN118009944A (en) | An ultrasonic measurement and calibration device for roller bearing lubricating oil film thickness | |
CN102679939A (en) | Roundness detecting method for eccentric shaft part | |
KR20140103370A (en) | Machine Tool Spindle precision measuring device | |
CN113566887B (en) | Suspension motor rotor suspension position, deflection angle and rotating speed integrated detection system and application | |
CN110000639A (en) | A kind of roller diameter based on roll grinder and taper on-position measure device and measurement method | |
CN107478724A (en) | A kind of main pump main shaft of nuclear power station surface defect measurement apparatus and method | |
CN104197853A (en) | Contact type scanning measuring head and measuring method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080702 Termination date: 20110524 |