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CN100387799C - 晶片承载器门以及带有c形凸轮从动件的锁闭机构 - Google Patents

晶片承载器门以及带有c形凸轮从动件的锁闭机构 Download PDF

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CN100387799C
CN100387799C CNB038022052A CN03802205A CN100387799C CN 100387799 C CN100387799 C CN 100387799C CN B038022052 A CNB038022052 A CN B038022052A CN 03802205 A CN03802205 A CN 03802205A CN 100387799 C CN100387799 C CN 100387799C
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CN1615388A (zh
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S·埃贡
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C19/00—Other devices specially designed for securing wings, e.g. with suction cups
    • E05C19/10—Hook fastenings; Fastenings in which a link engages a fixed hook-like member
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C9/00—Arrangements of simultaneously actuated bolts or other securing devices at well-separated positions on the same wing
    • E05C9/04—Arrangements of simultaneously actuated bolts or other securing devices at well-separated positions on the same wing with two sliding bars moved in opposite directions when fastening or unfastening
    • E05C9/043—Arrangements of simultaneously actuated bolts or other securing devices at well-separated positions on the same wing with two sliding bars moved in opposite directions when fastening or unfastening with crank pins and connecting rods
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C9/00—Arrangements of simultaneously actuated bolts or other securing devices at well-separated positions on the same wing
    • E05C9/04—Arrangements of simultaneously actuated bolts or other securing devices at well-separated positions on the same wing with two sliding bars moved in opposite directions when fastening or unfastening
    • E05C9/047—Arrangements of simultaneously actuated bolts or other securing devices at well-separated positions on the same wing with two sliding bars moved in opposite directions when fastening or unfastening comprising key-operated locks, e.g. a lock cylinder to drive auxiliary deadbolts or latch bolts
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    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S292/00—Closure fasteners
    • Y10S292/11—Cover fasteners
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S292/00—Closure fasteners
    • Y10S292/12—Closure operators
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    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0801—Multiple
    • Y10T292/0834—Sliding
    • Y10T292/0836—Operating means
    • Y10T292/0837—Cam and lever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0801—Multiple
    • Y10T292/0834—Sliding
    • Y10T292/0836—Operating means
    • Y10T292/0839—Link and lever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0801—Multiple
    • Y10T292/0834—Sliding
    • Y10T292/0836—Operating means
    • Y10T292/084—Cam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0801—Multiple
    • Y10T292/0848—Swinging
    • Y10T292/0849—Operating means
    • Y10T292/0851—Cam and lever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0911—Hooked end
    • Y10T292/0921—Multiple head
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0911—Hooked end
    • Y10T292/0945—Operating means
    • Y10T292/0947—Cam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/096—Sliding
    • Y10T292/0961—Multiple head
    • Y10T292/0962—Operating means
    • Y10T292/0964—Cam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/096—Sliding
    • Y10T292/1014—Operating means
    • Y10T292/1016—Cam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/20—Clamps
    • Y10T292/202—Hatch fastener
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

一种晶片容器，以及构造一种晶片容器的方法。晶片容器具有一个封闭部，该封闭部具有至少一个顶部，一个底部，一对对置的侧部，一个背部，一个开口前部，以及一个用于关闭该开口前部的门。门包括一带有至少一个第一锁闭机构的门板。锁闭机构具有一个可旋转的凸轮件和至少一个锁定臂。锁定臂具有一个与凸轮件的周边相配合的分叉凸轮从动件部。

Description

晶片承载器门以及带有C形凸轮从动件的锁闭机构
该申请依照35 U.S.C119(e)要求享有于2002年1月15日申请的申请号为No.60/349,068的美国临时申请的权利。
技术领域
本发明总体关于一种晶片承载器，用于支撑、约束、存储以及精确定位在集成电路生产中使用的半导体晶片盘。尤其是，本发明是关于用于晶片容器的锁闭机构。
背景技术
在把半导体晶片加工成最终的电子元件的过程中通常需要对晶片进行处理和加工多个加工步骤。晶片价值很高，并且非常易碎，容易被物理损坏和电击损坏。此外，连续的加工对清洁度，避免颗粒和其它污染物的要求极高。因此，用于晶片加工，处理和运输过程中的专门容器或者承载器被改进。这些容器保护晶片免受物理和电的损坏，并且可密封地保护保护晶片远离污染物。这些容器的一个重要特征是它们必须在使用中保持干净从而尽可能地保证清洁度。因此，承载器便于组装和拆卸是一所期望的特征。
用于封闭承载器的门封闭件和锁闭机构的多种结构是本领域所公知的。本领域公知的锁闭机构经常使用可旋转的凸轮件。这些凸轮件通常由带有长形的用于限定凸轮件表面的凹陷部的平塑料板制成。在早期的设计中，这些凸轮件表面仅仅在一个方向上提供凸轮从动件的运动，通常是一个单一的后退和前进的径向方向，该方向转化成锁定部件的延伸和缩回方向。后来，引入一个在轴线方向上的凸轮件锁闭运动从而提供一种用于密封目的且保证晶片承载器的门更紧密闭合的装置。这些轴线转化装置通常增加多个部件到锁定组件上。这些附加的部件增加了制造成本，加大了锁闭机构的复杂化，增大了组装和拆卸的困难，并且增加了产生更多摩擦和划伤表面的颗粒的数目。
美国专利US5957292公开了一种具有一改进的凸轮从动件的可旋转凸轮致动锁闭机构，在单一径向上移动的锁定臂为需要可作轴线移动，其内容在此全部作为参考引入。该发明涉及一种具有较少部件并具有较少摩擦和划伤接触的固定门锁闭装置，部分地由于一与凸轮件相啮合且捕获(capture)的s形凸轮从动件。然而，该s形凸轮从动件仍然需要由凸轮上的长形狭缝限定凸轮表面。这样的一个狭缝结构比起一个实体部件更难制造。此外，需要更多操作步骤来进行对凸轮件和凸轮从动件的组装。
需要更多的用于简化和更易于组装的门锁闭机构的改进，并需要以一些方式与旋转凸轮件的边缘相啮合并捕获凸轮从动件。
发明内容
本发明实现了用于一旋转凸轮件的对边缘捕获(edge-capturing)的凸轮从动件的需要。在本发明中，一种具有一个封闭部的晶片容器，该封闭部具有至少一个顶部，一个底部，一对对置的侧部，一个背部，一个开口的前部，以及一个用于关闭开口前部的门。门包括一个带有至少一个第一锁闭机构的门板。锁闭机构具有一个可旋转的凸轮件以及至少一个锁定臂。锁定臂具有一个与凸轮件的周边相配合的分叉凸轮从动件部分。本发明提供一种更简单的锁闭机构从而保持凸轮从动件与凸轮件可靠的啮合。
本发明的一个目的和优点是凸轮从动件与凸轮件可靠的啮合和捕获并且在凸轮件径向运动的同时允许其作轴线运动。
本发明的另一个目的和优点是凸轮从动件在凸轮件的边缘与凸轮件相啮合，而不是在细长的狭缝中，从而简化了凸轮件的制造以及部件的组装。
本发明的另一个目的和优点是一个用于晶片承载器门的锁闭机构，为清洗，该锁闭机构可以更加容易地组装和拆卸。
本发明的附加的目的、优点和新颖特征部分地将在随后的描述中被阐明，另一部分对于本领域技术人员来说在研读了随后的描述后将变的显而易见，或者可通过本发明的实践而被教导。本发明的目的和优点可通过附属权利要求所特别阐明的装置和装置的结合方式来实现并获得。
附图说明
图1为本发明的晶片承载器以及门的透视图；
图2为晶片承载器门的透视图；
图3为门的锁闭机构的透视图；
图4为本发明的凸轮件和凸轮从动件的目前最优选实施例的截面剖视图；
图5为本发明的凸轮件和凸轮从动件的一个可替换实施例的截面剖视图；
图6为本发明的凸轮件和凸轮从动件的另一个可替换实施例的截面剖视图；
图7为示出了本发明的凸轮件和凸轮从动件的目前最优选实施例的组装中一个步骤的剖视图；
图8为示出了本发明的凸轮和凸轮从动件的目前最优选实施例的组装中另一个步骤的剖视图；以及
图9为示出了本发明的凸轮和凸轮从动件的目前最优选实施例组装中又一个步骤的的剖视图；
发明的详细描述
附图描述了本发明晶片容器的实施例，以及晶片容器的特征和部件。任何前部和背部、右部和左部、顶部和底部，上部和下部，以及水平和垂直的标记是为了方便地进行描述，不是为了在任何一个位置或者特殊的方向上限制本发明或者发明的部件。在附图中用于任何说明的尺寸以及该说明可以在一个可能的设计中进行变化并且用于本发明的一个实施例不会偏离本发明的范围。
首先参照图1，一个晶片容器100设置于自动处理装置10上。晶片容器100具有一个封闭部102，其是由聚碳酸酯塑料制成，并且具有一个顶部104，一个底部106，一对对置的侧部108和110以及一个背部112。一个门114通过安装到门的凹陷部118中实现对封闭部102开口前部116的封闭从而完成封闭，在封闭部中设置有用于支撑半导体晶片的晶片支撑件120。设置在封闭底部106的外表面上的机器活动连接124用于在容器使用的过程中方便容器的自动操作，并在操作过程中提供一个定位腔室中的晶片位置的参考数据。机器提升凸缘126安装在封闭顶部104的外表面上并且在使用过程中便于容器100的自动操作和搬运。
参照图2，本发明的晶片承载器的门114被描述。门114通常包括一个门板150和锁闭机构160、200。并且机构盖300、302以保护锁闭机构160，200免受物理损坏和污染并且用于保持和导向锁闭机构部件。
现在参照图1，2和3，锁闭机构160、200的结构和操作可以被理解。在图3中，示出了锁闭机构160的一个部分视图。锁定臂162和164分别具有一个凸轮从动件部166和168，与凸轮部件170的周边256在凸轮部172和174上配合。如图2所示，每个锁定臂162和164具有一个在凸轮从动件部166和168的对置端上的锁定部176和178。当拴锁220插入到锁槽222中并旋转时，凸轮从动件部166和168可沿凸轮部分172和174滑动。由于凸轮部件170的形状，锁定臂162和164被径向地转化成通过锁定孔180和182延伸或者收回锁定部176和178。此外，凸轮件170可以平行于凸轮件170的旋转轴传递运动给锁定臂162和164，从而使门114可以更紧密地配合在门凹陷部118中以用于密封的目的。锁定部176和178分别被晶片承载器中的凹陷部(没有显示)接受，从而允许门可以被固定在适当的位置上。
凸轮从动件部166和凸轮件170的凸轮部172的一个部分截面剖视图，以本发明目前最优选的实施例在图4中示出。凸轮部172，它是凸轮件170的周边256上的一部分，具有上表面250和下表面252。凹陷部254形成在凸轮件170的周边256内侧的下表面252上。上升凸缘258从凸轮件170的上表面250上伸出。锁定臂162具有凸轮从动件部166，该部分叉成顶部分支260和底部分支262。顶部分支260在凸轮部172上延伸并且与上升凸缘258相啮合，并且底部分支262在凸轮部172下延伸。底部分支262的向上转动部分264与凸轮件170的凹陷部254相配合。因此凸轮部172被保持在凸轮从动件部166的分叉中，从而保证凸轮从动件部166跟随相对于凸轮的旋转轴在轴线方向上传递的凸轮运动。此外，凸轮部172同样被保持在凸轮从动件部166的分叉和向上的转动部分264中，保证凸轮在径向上移动。
在图5中，描述了凸轮从动件部166和凸轮件170的一个在剖面上可选择的实施例。在该实施例中，顶部表面250具有上升凸缘270并且底部表面252具有一个对置的上升凸缘272。凸轮从动件部166分叉成顶部分支274和底部分支276。凸轮部172被保持在顶部分支274和底部分支276之间，从而保证凸轮从动件部166跟随相对于凸轮的旋转轴在轴线方向上传递的凸轮运动。每个顶部分支274和底部分支276分别具有向内的转动部278和280，它们与周边256内侧的上升凸缘270和272相配合，从而保持凸轮部172并且保证凸轮从动件部166追随由凸轮件170传递的径向运动。
本发明的另一个实施例显示在图6中，在该实施例中，顶部表面250具有上升凸缘284。再次，凸轮从动件部166分成顶部分支286和底部分支288。凸轮部分172被保持在顶部分支286和底部分支288之间，从而保证凸轮从动件部166跟随相对于凸轮的旋转轴在轴线方向上传递的凸轮运动。顶部分支286具有一个向内的转动部分290，该转动部分与周边256内侧的上升凸缘284相配合，从而保持凸轮部172并且保证凸轮从动件部166跟随由凸轮件170传递的径向运动。
图7、8和9示出了图4中所示的实施例的一种组装方法。如图7所示顶部分支260首先与上升凸缘258相配合。当凸轮从动件部166朝着凸轮件170移动时，凸轮部172安装到顶部分支260和底部分支262之间的分叉中，如图8所示。如图9所示，凸轮从动件部166向下旋转，向上转动部分264与凹陷部254相配合。
当然应该理解的是，除了上述的特殊定向，在本发明的范围内许多其它的构造是可能的。例如，在图4所示的实施例中，结构可以反向，上升凸缘258可以设置在凸轮件170的下侧并且凹陷部254可以形成在顶侧。在这样的一个实施例中，凸轮从动件部166同样可以反向，因此分支262为顶部分支，分支260为底部分支。
本发明的凸轮件和凸轮从动件可以由任何适合的材料或者组合材料制成。塑料材料是这两者中目前最优选的材料。优选的，凸轮件170和凸轮部172由硬质、耐磨的材料模制而成，例如PPS，锁定臂和凸轮从动件优选地由乙缩醛塑料模制而成。碳纤维或者其它的弹性导体填充物可以被加入或用于提供导电性，并且PTFE可以加入用于降低摩擦。
虽然上述的描述包括许多特例，它们不是作为限制本发明的范围而构造而是仅仅作为提供了本发明目前一些优选实施例的说明。因此，本发明的范围应该由附属的权利要求以及它们法定的等效物来限定，而不是被所给的例子来限定。

Claims (15)

1.一种包括一个封闭部的晶片容器，该封闭部具有至少一个顶部，一个底部，一对对置的侧部，一个背部，一个开口前部，一个用于关闭该开口前部的门，以及一个设置在封闭部中的晶片支撑件，所述门包括：
一个门板；以及
至少一个在所述门板上的第一锁闭机构，所述第一锁闭机构包括：
一个可旋转的具有一第一表面、一对置的第二表面，以及一周边的凸轮件，该第一表面在周边上具有一个第一上升凸缘部，该第二表面在周边的内侧具有一个凹陷部；以及
至少一第一锁定臂，该第一锁定臂具有一个带有一对分支的分叉凸轮从动件部并且围绕凸轮件的至少一部分接触配合，所述一对分支中的第一分支适于与第一上升凸缘部相配合，所述一对分支中的第二分支适于与凹陷部相配合。
2.根据权利要求1所述的容器，所述门还包括一个与第一锁定臂相同的第二锁定臂。
3.根据权利要求1所述的容器，所述门还包括一个与第一锁闭机构相同的第二锁闭机构。
4.一种包括一个封闭部的晶片容器，该封闭部具有至少一个顶部，一个底部，一对对置的侧部，一个背部，一个开口前部，一个用于关闭该开口前部的门，以及一个设置在所述一对对置的侧部的每个侧部附近的晶片支撑件，所述门包括：
一个门板；以及
至少一个在所述门板上的第一锁闭机构，所述第一锁闭机构包括：
一个可旋转的具有一个第一表面，一个对置的第二表面，以及一个周边的凸轮件，该第一表面在周边上具有一第一上升凸缘部，该第二表面在周边上具有一个第二上升凸缘部；以及
至少一第一锁定臂，该第一锁定臂具有一个带有一对分支的分叉凸轮从动件部并且围绕凸轮件的至少一部分滑动配合，所述一对分支中的第一分支适于与第一上升凸缘部相配合，所述一对分支中的第二分支适于与第二上升凸缘部相配合。
5.根据权利要求4所述的容器，所述门还包括一个与第一锁定臂相同的第二锁定臂。
6.根据权利要求4所述的容器，所述门还包括一个与第一锁闭机构相同的第二锁闭机构。
7.一种包括一个封闭部的晶片容器，该封闭部具有至少一个顶部，一个底部，一对对置的侧部，一个背部，一个开口前部，一个用于关闭该开口前部的门，以及用于晶片支撑的装置，
所述门包括：
一个门板；以及
至少一个在所述门板上的第一锁闭机构，所述第一锁闭机构包括：
一个可旋转的具有一第一表面、一个对置的第二表面，以及一个周边的凸轮件，该第一表面在周边上具有一个上升凸缘部；以及
至少一第一锁定臂，该第一锁定臂具有一个带有一对分支的分叉凸轮从动件部并且围绕凸轮件的至少一部分相接触，所述一对分支中的第一分支适于与上升凸缘部相配合，所述一对分支中的第二分支适于与第二表面滑动地配合。
8.根据权利要求7所述的容器，所述门还包括一个与第一锁定臂相同的第二锁定臂。
9.根据权利要求7所述的容器，所述门还包括一个与第一锁闭机构相同的第二锁闭机构。
10.一种用于保持半导体晶片的晶片容器，包括：
一个封闭部，该封闭部具有至少一个顶部，一个底部，一对对置的侧部，一个背部，一个开口前部，一个用于关闭该开口前部的门，以及一个设置在封闭部中的晶片支撑件，所述门包括：
一个门板；以及
至少一个在所述门板上的第一锁闭机构，所述第一锁闭机构包括：
一个具有一周边的可旋转的凸轮件；以及
至少一个第一锁定臂，所述具有一个分叉凸轮从动件部的第一锁定臂适于围绕所述凸轮件的至少一部分周边连续地配合，所述分叉凸轮从动件部具有一对分支，所述分叉凸轮从动件部在所述分支的分叉处与所述凸轮件的周边滑动地配合。
11.根据权利要求10所述的容器，其中所述旋转凸轮件具有一个在所述周边上的上升凸缘部以及一个在所述周边内侧的凹陷部，并且其中所述分叉凸轮从动件部具有一个适于与上升凸缘部相配合的第一分支以及一个适于与凹陷部相配合的第二分支。
12.根据权利要求10所述的容器，其中所述旋转凸轮件在所述周边上具有一对对置的上升凸缘部，其中所述分叉凸轮从动件部具有一对分支，并且其中所述分叉凸轮从动件部的每个分支适于与所述一对对置的上升凸缘部中的单独一个相配合。
13.根据权利要求10所述的容器，其中所述旋转凸轮件具有一个在所述周边上的上升凸缘部，其中所述分叉凸轮从动件部具有一对分支并且其中分叉凸轮从动件部中的至少一个分支适于与上升凸缘部相配合。
14.根据权利要求10所述的容器，所述门还包括一个与第一锁定臂相同的第二锁定臂。
15.根据权利要求10所述的容器，所述门还包括一个与第一锁闭机构相同的第二锁闭机构。
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