CN100385224C - Double point source interference detection method and device for spherical mirror - Google Patents
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Abstract
本发明涉及一种球面反射镜的双点源干涉检测方法及其装置，所述检测方法包括获取平行光，选出双点源，光束经平面反射返回，光束经球面反射返回，返回光束输出，球面反射镜误差检测的步骤，所述方法使用的装置包括光源、光束处理装置、光栅、凸透镜、透反平面镜、空间滤波器、小平面反射镜、球面反射镜安装调节平台、像屏和摄像机，所述器件安装于器件夹持调节装置上。本发明精度高，对振动、温度、气流敏感小，稳定性高，易于操作并能推广应用。
The present invention relates to a double-point source interference detection method of a spherical reflector and a device thereof. The detection method includes obtaining parallel light, selecting a double-point source, returning the beam through plane reflection, returning the beam through spherical reflection, and outputting the return beam. The step of spherical mirror error detection, the device used in the method includes a light source, a beam processing device, a grating, a convex lens, a transflective plane mirror, a spatial filter, a facet mirror, a spherical mirror installation and adjustment platform, an image screen and a camera, The device is installed on the device clamping adjustment device. The invention has high precision, little sensitivity to vibration, temperature and air flow, high stability, easy operation and can be popularized and applied.
Description
技术领域 technical field
本发明涉及光学装置，具体是一种球面反射镜的双点源干涉检测方法；The invention relates to an optical device, in particular to a double point source interference detection method of a spherical mirror;
本发明还涉及实现所述方法的一种球面反射镜的双点源干涉检测装置。The invention also relates to a double-point source interference detection device of a spherical mirror for realizing the method.
背景技术 Background technique
球面反射镜是常用的光学器件，在天文学、光学和仪器仪表等方面有广泛的应用。球面反射镜在应用前需要对其进行加工误差检测和质量评价，目前，公知的干涉检测方法有迈克尔逊(Michelson)干涉仪、马-曾(Mach-Zehnder)干涉仪和泰曼-格林(Twyman-Green)干涉仪以及斐索(Fizeau)干涉仪等。Spherical mirrors are commonly used optical devices and are widely used in astronomy, optics and instrumentation. Spherical mirrors need to be processed for error detection and quality evaluation before application. At present, the known interference detection methods include Michelson interferometer, Mach-Zehnder interferometer and Twyman-Green (Twyman) interferometer. -Green) interferometer and Fizeau interferometer, etc.
迈克尔逊(Michelson)干涉仪、马-曾(Mach-Zehnder)干涉仪和泰曼-格林(Twyman-Green)干涉仪需要采用两个光学臂，其对振动、温度、气流等较为敏感，稳定性不好，且光路复杂和难于调节及操作；斐索(Fizeau)干涉仪需要采用高质量的标准球面透镜或标准的平行玻璃平板，推广应用受到限制。Michelson interferometer, Mach-Zehnder interferometer and Twyman-Green interferometer need to use two optical arms, which are sensitive to vibration, temperature, airflow, etc. Not good, and the optical path is complicated and difficult to adjust and operate; Fizeau interferometer needs to use high-quality standard spherical lens or standard parallel glass plate, and its popularization and application are limited.
发明内容 Contents of the invention
本发明的目的在于提供一种球面反射镜的双点源干涉检测方法，克服现有技术中的不足，实现对中小型凹球面反射镜的检测。The purpose of the present invention is to provide a double-point source interference detection method for spherical reflectors, which overcomes the shortcomings in the prior art and realizes the detection of small and medium-sized concave spherical reflectors.
本发明的另一目的在于提供实现所述方法的一种球面反射镜的双点源干涉检测装置。Another object of the present invention is to provide a dual-point source interference detection device for a spherical mirror that realizes the method.
本发明的一种球面反射镜的双点源干涉检测方法包括如下步骤：A kind of double point source interference detection method of spherical reflector of the present invention comprises the following steps:
(1)获取平行光：通过光源发射一束单色光，使其经过光束平行处理装置形成一束平行光；(1) Obtain parallel light: emit a beam of monochromatic light through the light source, and make it pass through the beam parallel processing device to form a beam of parallel light;
(2)选出双点源：将所获取的平行光通过光栅和凸透镜在其焦平面上形成一排极大的光点，用空间滤波器选出其中两个极大光点，即为双点源；(2) Select a double point source: pass the acquired parallel light through a grating and a convex lens to form a row of extremely large light points on the focal plane, and use a spatial filter to select two of the maximum light points, which is the double point source. point source;
(3)光束经平面反射返回：将小平面反射镜置于上述凸透镜的焦平面位置，使上述双点源中的一个光点发出的光束经小平面反射镜反射后按原光路返回；(3) The light beam returns through plane reflection: the facet reflector is placed on the focal plane position of the above-mentioned convex lens, so that the light beam sent by one light point in the above-mentioned double point source returns by the original optical path after being reflected by the facet reflector;
(4)光束经球面反射返回：将待测球面反射镜置于所述小平面反射镜之后，与其距离等于待测球面反射镜的曲率半径，使得上述双点源中的另一光点发出的光束经待测球面反射镜反射后按原光路返回；(4) The light beam returns through spherical reflection: the spherical reflector to be measured is placed behind the facet reflector, and its distance is equal to the radius of curvature of the spherical reflector to be measured, so that another light point in the above-mentioned double point source emits The light beam is reflected by the spherical mirror to be tested and returns according to the original optical path;
(5)返回光束输出：将透反平面镜置于上述凸透镜和空间滤波器之间，使得经过步骤(3)、步骤(4)返回的光束经过透反平面镜，在远处输出干涉条纹；(5) return beam output: the transflective plane mirror is placed between the above-mentioned convex lens and the spatial filter, so that the light beam returned through step (3) and step (4) passes through the transflective plane mirror, and the interference fringes are output at a distance;
(6)球面反射镜误差检测：用图像接收装置接收上述干涉条纹，分析干涉条纹的分布及其变形情况，得出待测球面反射镜的误差信息。(6) Spherical mirror error detection: use the image receiving device to receive the above-mentioned interference fringes, analyze the distribution and deformation of the interference fringes, and obtain the error information of the spherical mirror to be tested.
优选方案如下：The preferred solution is as follows:
所述光源由相干长度大于待测球面反射镜的直径的激光器产生。The light source is generated by a laser with a coherence length greater than the diameter of the spherical mirror to be tested.
通过所述空间滤波器上的两个小孔与光栅和凸透镜配合获得双点源。A dual point source is obtained through the cooperation of two small holes on the spatial filter with a grating and a convex lens.
实现本发明方法的一种球面反射镜的双点源干涉检测装置由光源、光束平行处理装置、光栅、凸透镜、透反平面镜、空间滤波器、小平面反射镜、球面反射镜安装调节平台、像屏和摄像机，器件夹持调节装置构成，所述光源、光束平行处理装置、光栅、凸透镜、透反平面镜、空间滤波器、小平面反射镜、球面反射镜安装调节平台、图像接收装置依次安装于器件夹持调节装置上。A double-point source interference detection device for a spherical reflector that realizes the method of the present invention consists of a light source, a beam parallel processing device, a grating, a convex lens, a transflective plane mirror, a spatial filter, a facet reflector, and a spherical reflector installation and adjustment platform, an image Screen and camera, device clamping and adjusting device, the light source, beam parallel processing device, grating, convex lens, transflective plane mirror, spatial filter, facet mirror, spherical mirror installation and adjustment platform, image receiving device are installed in sequence The device is clamped on the adjustment device.
优选方案如下：The preferred solution is as follows:
所述光束平行处理装置由扩束镜或者短焦距透镜、针孔滤波器和准直透镜构成，其中，针孔滤波器置于扩束镜、准直透镜之间。The beam parallel processing device is composed of a beam expander or a short focal length lens, a pinhole filter and a collimator lens, wherein the pinhole filter is placed between the beam expander and the collimator lens.
所述小平面反射镜是具有光轴方向和转角微调的全反射镜。The facet reflector is a total reflector with fine adjustment of optical axis direction and rotation angle.
所述透反平面镜是厚度和折射率均匀、透反射比为1∶1、与光轴角度小于45度的透反平面镜。The transflective plane mirror is a transflective plane mirror with uniform thickness and refractive index, a transflective ratio of 1:1, and an angle of less than 45 degrees with the optical axis.
所述图像接收装置包括像屏和CCD摄像机。The image receiving device includes an image screen and a CCD camera.
所述器件夹持调节装置由底座、用于固定器件的夹持架构成，所述夹持架安装在可前后移动的底座上。The device clamping adjustment device is composed of a base and a clamping frame for fixing the device, and the clamping frame is installed on the base that can move back and forth.
与现有技术相比，本发明的优点是：Compared with prior art, the advantage of the present invention is:
(1)本发明的球面反射镜的双点源干涉检测方法不需制作标准球面镜和标准平行玻璃平板，光路简单，调节方便，易于实现；(1) The double-point source interference detection method of the spherical reflector of the present invention does not need to make a standard spherical mirror and a standard parallel glass plate, and the optical path is simple, easy to adjust, and easy to realize;
(2)本发明的球面反射镜的双点源干涉检测装置结构牢固，对振动、温度及气流变化不敏感，干涉条纹稳定可靠，且干涉条纹周期容易改变；(2) The dual-point source interference detection device of the spherical mirror of the present invention has a firm structure, is insensitive to vibration, temperature and air flow changes, and has stable and reliable interference fringes, and the interference fringe period is easy to change;
(3)本发明的球面反射镜的双点源干涉检测方法也适用于凹球面透镜的检查，精度高。(3) The double point source interference detection method of the spherical mirror of the present invention is also applicable to the inspection of the concave spherical lens, and has high precision.
附图说明 Description of drawings
图1是本发明的球面反射镜的双点源干涉检测装置的结构示意图。FIG. 1 is a schematic structural view of a dual-point source interference detection device for a spherical mirror of the present invention.
具体实施方式 Detailed ways
下面是本发明的双点源干涉检测装置的一个实施例，本发明不仅限于此。The following is an embodiment of the dual-point source interference detection device of the present invention, and the present invention is not limited thereto.
如图1所示的实施例中，光源1，扩束镜2，针孔滤波器3，准直透镜4，准光栅12，凸透镜5，透反平面镜6，空间滤波器7，小平面反射镜8，球面反射镜安装调节平台9，像屏10，CCD摄像机11依次安装于器件夹持调节装置。In the embodiment shown in Figure 1,
所述光源1选用He-Ne激光器，所述扩束镜2选用单片小透镜，所述针孔滤波器3是在一块黑色金属片上打直径为10到50微米的小孔，所述凸透镜5选用采用傅里叶变换透镜，所述透反平面镜6选用分束镜，所述空间滤波器7选用二元振幅滤波器，由在涂黑色的金属片两个孔制成，仅让二个极大光点通过，所述小平面反射镜8由玻璃基片上镀金属膜或介质膜制成，所述像屏10选用毛玻璃，所述光栅12选用RONCHI光栅。The
检测工作时，先将待测球面反射镜安装在球面反射镜安装调节平台9，按下列步骤操作：When testing, first install the spherical reflector to be tested on the spherical reflector installation and
(1)开启光源1，调节针孔滤波器3与扩束镜2之间的位置，获得一束光斑均匀且没有杂散光球面波，经准直透镜4形成一束平面平行光；(1) Turn on the
(2)调节光栅和凸透镜，使所获取的平行光经过光栅和凸透镜在焦平面上形成一排极大的光点，调节空间滤波器于焦平面位置选出两个极大光点；(2) Adjust the grating and the convex lens so that the acquired parallel light passes through the grating and the convex lens to form a row of maximum light spots on the focal plane, and adjust the spatial filter to select two maximum light spots at the focal plane position;
(3)调节小平面反射镜于上述凸透镜的焦平面位置，使其中一光点发出的光束经小平面反射镜反射后按原光路返回；(3) Adjust the focal plane position of the facet reflector on the above-mentioned convex lens, so that the light beam emitted by one of the light spots is reflected by the facet reflector and returns according to the original optical path;
(4)调节待测球面反射镜与上述小平面反射镜的距离等于待测球面反射镜的曲率半径，使得另一光点发出的光束经待测球面反射镜反射后按原光路返回；(4) adjust the distance between the spherical reflector to be measured and the above-mentioned facet reflector to be equal to the radius of curvature of the spherical reflector to be measured, so that the light beam sent by another spot is returned by the original optical path after being reflected by the spherical reflector to be measured;
(5)调节透反平面镜的位置，使得经过步骤(3)、步骤(4)返回的光束经过透反平面镜，在远处输出干涉条纹；(5) adjust the position of the transflective plane mirror so that the light beam returned through step (3) and step (4) passes through the transflective plane mirror to output interference fringes at a distance;
(6)用像屏和CCD摄像机接收上述干涉条纹，记录干涉条纹的周期和变形位移量，通过计算检测出待测球面反射镜的精度；(6) Receive above-mentioned interference fringes with image screen and CCD camera, record the period and deformation displacement of interference fringes, and detect the accuracy of the spherical reflector to be measured by calculation;
所述计算公式为：a＝(b/d)*λ/2，式中a为待测球面反射镜局部的高度差，d和b分别为干涉条纹的周期和变形位移量，λ为光源波长。The calculation formula is: a=(b/d)*λ/2, where a is the local height difference of the spherical mirror to be measured, d and b are the period and deformation displacement of the interference fringes respectively, and λ is the wavelength of the light source .
检测表明：本发明方法和装置测量球面反射镜局部高度差的精度达λ/40。Tests show that the accuracy of the method and device of the invention for measuring the local height difference of the spherical mirror reaches λ/40.
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| CN101986097B (en) * | 2010-07-09 | 2011-12-21 | 浙江大学 | Method for eliminating defocusing error and tilt error in spherical surface shape interference detection at high precision |
| CN102207378B (en) * | 2011-03-09 | 2012-11-14 | 浙江大学 | High-precision adjustment error correction method based on wavefront difference in spherical interference detection |
| CN102288392A (en) * | 2011-07-29 | 2011-12-21 | 温州医学院 | Two-dimensional Ronchi grating-based freeform surface spectacle lens focal power measuring device |
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| CN1193728A (en) * | 1998-01-21 | 1998-09-23 | 浙江大学 | Laser Bifocal Interferometric Spherical Profiler |
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