CN100362666C - Package structure of light sensing chip and manufacturing method thereof - Google Patents
Package structure of light sensing chip and manufacturing method thereof Download PDFInfo
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- CN100362666C CN100362666C CNB2004100085805A CN200410008580A CN100362666C CN 100362666 C CN100362666 C CN 100362666C CN B2004100085805 A CNB2004100085805 A CN B2004100085805A CN 200410008580 A CN200410008580 A CN 200410008580A CN 100362666 C CN100362666 C CN 100362666C
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- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
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Abstract
Description
技术领域technical field
本发明涉及一种光感测芯片的封装结构及其制造方法,特别是涉及一种利用封装的制造方法以制作光感测芯片的封装结构。The present invention relates to a packaging structure of a photo-sensing chip and a manufacturing method thereof, in particular to a packaging structure of a photo-sensing chip produced by a manufacturing method of packaging.
背景技术Background technique
公知的光感测芯片封装结构如图1所示,先在大晶片上制造多个光感测芯片(图未示),且采用切割工艺以分离成个别的光感测芯片10a,再提供印刷电路板基板20a,以承载该光感测芯片10a,并黏置支撑部30a于该印刷电路板基板20a上以形成一凹部21a,再利用接合剂将该光感测芯片10a黏于该基板20a的凹部21a内,并加热使其固化,再进行打线,接着在该支撑部30a上点接合剂,再在其上封一玻璃上盖40a。The known photo-sensing chip packaging structure is shown in FIG. 1 . First, a plurality of photo-sensing chips (not shown) are manufactured on a large wafer, and a dicing process is used to separate them into individual photo-
公知的光感测芯片具有下列缺点:The known light sensing chip has the following disadvantages:
1.公知的工艺是切割大晶片以形成个别的光感测芯片后,再胶黏于该基板上,且该光感测芯片的感光区朝上,再进行打线及封装等芯片封装工艺,因此容易因微粒沾附该芯片的感光区,而影响光感测效果,以至于必须提高制备环境的洁净度要求,所以增加制备成本。1. The known process is to cut a large wafer to form individual light-sensing chips, and then glue them on the substrate with the photosensitive area of the light-sensing chip facing upwards, and then perform chip packaging processes such as wire bonding and packaging. Therefore, it is easy to affect the light-sensing effect due to the particles adhering to the photosensitive area of the chip, so that the cleanliness requirement of the preparation environment must be improved, thus increasing the preparation cost.
2.公知的光感测芯片封装结构,其支撑部体积大,增大该光感测芯片封装结构体积,因此增加材料成本,并且减小运用于体积小的装置上的机会。2. The supporting part of the known photo-sensing chip packaging structure is bulky, which increases the volume of the photo-sensing chip packaging structure, thereby increasing the cost of materials and reducing the chance of being applied to small-sized devices.
发明内容Contents of the invention
本发明的其一目的,在于提供一种光感测芯片的封装结构及其制造方法,由此减小封装结构体积及其设置位置。One object of the present invention is to provide a packaging structure of a photo-sensing chip and a manufacturing method thereof, thereby reducing the volume of the packaging structure and its location.
本发明的其二目的,在于提供一种光感测芯片的封装结构及其制造方法,通过翻转芯片以黏接该感光芯片于该透光基板上的印刷式电路迹线层上,因此使该感光芯片上的感光区朝下以相邻于该透光基板,使得在制备过程中可避免微粒掉落于该感光芯片的感光区内,且同时降低芯片封装环境的洁净度要求,所以减少制备成本。The second purpose of the present invention is to provide a packaging structure of a light sensing chip and a manufacturing method thereof, by flipping the chip to bond the photosensitive chip on the printed circuit trace layer on the transparent substrate, so that the The photosensitive area on the photosensitive chip faces down to be adjacent to the light-transmitting substrate, so that particles can be prevented from falling into the photosensitive area of the photosensitive chip during the preparation process, and at the same time, the cleanliness requirements of the chip packaging environment are reduced, so the preparation process is reduced. cost.
为了达到上述目的,本发明提供了一种光感测芯片的封装结构,其包括:一透光基板,一感光芯片及一印刷电路板,还包括一印刷式电路迹线层,其附着于该透光基板的一侧,并连接有多个电连接凸块;该感光芯片具有至少一感光区及多个电连接部,且位于该感光芯片的同一侧,所述电连接部电连接于该印刷式电路迹线层;及该印刷电路板电连接该印刷式电路迹线层的电连接凸块,并相邻该感光芯片的无感光区的一侧;基此,在封装时,翻转该感光芯片,即感光区朝下的相邻该透光基板,使电连接部电连接于该印刷式电路迹线层。In order to achieve the above object, the present invention provides a package structure of a photosensitive chip, which includes: a light-transmitting substrate, a photosensitive chip and a printed circuit board, and also includes a printed circuit trace layer, which is attached to the One side of the light-transmitting substrate, and connected with a plurality of electrical connection bumps; the photosensitive chip has at least one photosensitive area and a plurality of electrical connection parts, and is located on the same side of the photosensitive chip, and the electrical connection parts are electrically connected to the photosensitive chip. The printed circuit trace layer; and the printed circuit board is electrically connected to the electrical connection bump of the printed circuit trace layer, and is adjacent to the side of the non-photosensitive area of the photosensitive chip; basically, when packaging, flip the The photosensitive chip, that is, the photosensitive area facing downwards adjacent to the light-transmitting substrate, makes the electrical connection part electrically connected to the printed circuit trace layer.
根据上述构想,该光感测芯片的封装结构还包括至少一保护胶,其黏着于该感光芯片的周围及该透明基板上,以密封该感光区于该透明基板上。According to the idea above, the packaging structure of the photosensitive chip further includes at least one protective glue, which is adhered to the surrounding of the photosensitive chip and the transparent substrate to seal the photosensitive area on the transparent substrate.
根据上述构想,该感光芯片的电连接部为电连接凸起,且电连接于该印刷式电路迹线层上。According to the idea above, the electrical connection portion of the photosensitive chip is an electrical connection bump, and is electrically connected to the printed circuit trace layer.
根据上述构想,所述电连接凸起为金及锡的一种制成。According to the above idea, the electrical connection bumps are made of one of gold and tin.
根据上述构想,该透光基板对应于该感光区的部位无附着印刷式电路迹线层。According to the above idea, the portion of the light-transmitting substrate corresponding to the photosensitive region has no printed circuit trace layer attached thereto.
根据上述构想,该透光基板为玻璃板。According to the above idea, the transparent substrate is a glass plate.
本发明的另一方面还提供了一种光感测芯片的封装结构的制造方法,其中包括下述步骤:Another aspect of the present invention also provides a method for manufacturing a packaging structure of an optical sensing chip, which includes the following steps:
提供一透明基板;providing a transparent substrate;
附着一印刷式电路迹线层于该透明基板的一侧,接着该印刷式电路迹线层熔焊有多个电连接凸块;attaching a printed circuit trace layer on one side of the transparent substrate, and then welding the printed circuit trace layer with a plurality of electrical connection bumps;
提供一感光芯片,其具有多个电连接部且电连接于该印刷式电路迹线层上,并且,该感光芯片具有一感光区相邻于该透明基板;A photosensitive chip is provided, which has a plurality of electrical connections and is electrically connected to the printed circuit trace layer, and the photosensitive chip has a photosensitive area adjacent to the transparent substrate;
提供一印刷电路板,其电连接该电连接凸块,并相邻该感光芯片的无感光区的一侧;providing a printed circuit board, which is electrically connected to the electrical connection bump, and is adjacent to one side of the non-photosensitive area of the photosensitive chip;
基此,在封装时,翻转该感光芯片,即感光区朝下的相邻该透光基板,使感光芯片通过该电连接部电连接于该印刷式电路迹线层。Based on this, during packaging, the photosensitive chip is turned over, that is, the light-sensitive area faces downward adjacent to the light-transmitting substrate, so that the photosensitive chip is electrically connected to the printed circuit trace layer through the electrical connection portion.
根据上述构想,该光感测芯片的封装结构的制造方法还包括黏着保护胶于该感光芯片周缘及该透明基板上,以密封该感光芯片的感光区于该透明基板上。According to the above idea, the manufacturing method of the packaging structure of the photosensitive chip further includes adhering protective glue on the periphery of the photosensitive chip and the transparent substrate, so as to seal the photosensitive area of the photosensitive chip on the transparent substrate.
根据上述构想,该光感测芯片的封装结构的制造方法还包括熔焊多个电连接凸块于该感光芯片周缘的印刷式电路迹线层上,且提供一印刷电路板于所述电连接凸块上,且相邻于该感光芯片。According to the above idea, the manufacturing method of the packaging structure of the photosensitive chip further includes welding a plurality of electrical connection bumps on the printed circuit trace layer around the photosensitive chip, and providing a printed circuit board on the electrical connection on the bump and adjacent to the photosensitive chip.
根据上述构想,所述电连接部位于该感光芯片的感光区同一侧面周围。According to the above idea, the electrical connection part is located around the same side of the photosensitive area of the photosensitive chip.
根据上述构想,在该光感测芯片的封装结构的制造方法中,该透光基板为玻璃基板。According to the idea above, in the manufacturing method of the packaging structure of the photo-sensing chip, the light-transmitting substrate is a glass substrate.
根据上述构想,在该光感测芯片的封装结构的制造方法中,该印刷式电路迹线层印涂于该透光基板的一侧。According to the above idea, in the manufacturing method of the packaging structure of the photo-sensing chip, the printed circuit trace layer is printed on one side of the transparent substrate.
根据上述构想,在该光感测芯片的封装结构的制造方法中,该印刷式电路迹线层是贴附于该透光基板的一侧。According to the above idea, in the manufacturing method of the packaging structure of the photo-sensing chip, the printed circuit trace layer is attached to one side of the transparent substrate.
根据上述构想,在该光感测芯片的封装结构的制造方法中,所述电连接部为金电连接凸起,且以热超声波焊接的方式焊接于该印刷式电路迹线层上。According to the above idea, in the manufacturing method of the packaging structure of the photo-sensing chip, the electrical connection part is a gold electrical connection bump, and is welded on the printed circuit trace layer by thermosonic welding.
根据上述构想,在该光感测芯片的封装结构的制造方法中,所述电连接部为锡电连接凸起,且以熔接的方式熔接于该印刷式电路迹线层上。According to the idea above, in the manufacturing method of the packaging structure of the photo-sensing chip, the electrical connection part is a tin electrical connection bump, and is welded to the printed circuit trace layer by welding.
这样,本发明能够减小封装结构体积及其设置位置,且进一步提供翻转芯片以黏接该感光芯片于该透光基板上的印刷式电路迹线层上,以使该感光区朝下,因此在制备中可避免微粒掉入感光区内,且还可因此降低芯片封装环境的快捷方式度要求,所以减少制备成本。In this way, the present invention can reduce the volume of the packaging structure and its setting position, and further provide a flip chip to bond the photosensitive chip on the printed circuit trace layer on the transparent substrate, so that the photosensitive area faces downward, so During the preparation, particles can be prevented from falling into the photosensitive area, and the requirements for the shortcut degree of the chip packaging environment can be reduced, thereby reducing the preparation cost.
附图说明Description of drawings
图1是公知的光感测芯片的封装结构侧视图;Fig. 1 is a side view of a package structure of a known light sensing chip;
图2是本发明的光感测芯片的封装结构侧视图;Fig. 2 is a side view of the packaging structure of the light sensing chip of the present invention;
图3是本发明的透光基板附着有印刷式电路迹线层的俯视示意图;3 is a schematic top view of a printed circuit trace layer attached to a light-transmitting substrate of the present invention;
图4A是本发明的大晶片内具有多个光感测芯片俯视示意图;FIG. 4A is a schematic top view of a plurality of light-sensing chips in a large wafer of the present invention;
图4B是本发明的光感测芯片俯视示意图;FIG. 4B is a schematic top view of the light sensing chip of the present invention;
图5是本发明的一感光芯片倒装黏接于透光基板上的印刷式电路迹线层上侧视图;Fig. 5 is an upper side view of a printed circuit trace layer in which a photosensitive chip is flip-chip bonded on a light-transmitting substrate according to the present invention;
图6是本发明利用保护胶密封感光芯片的感测区及电连接凸块于透光基板示意图;Fig. 6 is a schematic diagram of the invention using protective glue to seal the sensing area of the photosensitive chip and the electrical connection bumps on the light-transmitting substrate;
图7是本发明的光感测芯片的封装结构侧视图;Fig. 7 is a side view of the packaging structure of the light sensing chip of the present invention;
图8是本发明的一玻璃基板具有多个光感测芯片的封装结构俯视示意图。FIG. 8 is a schematic top view of a packaging structure of a glass substrate with a plurality of photo-sensing chips according to the present invention.
其中,附图标记说明如下:Wherein, the reference signs are explained as follows:
10a-光感测芯片;20a-印刷电路板基板;21a-凹部;30a-支撑部;10a-optical sensing chip; 20a-printed circuit board substrate; 21a-recessed part; 30a-supporting part;
40a-玻璃上盖;10-透光基板;20-印刷式电路迹线层;40a-glass upper cover; 10-light-transmitting substrate; 20-printed circuit trace layer;
30-感光芯片;31-电连接部;32-感光区;40-保护胶;30-photosensitive chip; 31-electrical connection; 32-photosensitive area; 40-protective glue;
50-电连接凸块;60-印刷电路板;70-大晶片。50-electrical connection bump; 60-printed circuit board; 70-big chip.
具体实施方式Detailed ways
请参阅图2所示,本发明为一种光感测芯片的封装结构,其包括有透光基板10及印刷式电路迹线层20附着于该透光基板10的一侧面,并使感光芯片30的电连接部31电连接于该印刷式电路迹线层20上,且该感光芯片30上的电连接部31与感光区32位于同一侧面,还有保护胶40黏着于该感光芯片30及该透明基板10上,以密封该感光芯片30于该透明基板10上,且利用多个电连接凸块50形成于该印刷式电路迹线层20上的光感测芯片30周缘,以电连接于该印刷电路板60。Please refer to FIG. 2, the present invention is a package structure of a photosensitive chip, which includes a light-
请参阅图3所示,其中先提供一透明基板10,该透明基板10可为不特定形状的玻璃基板,再利用印刷或黏贴方式使多个印刷式电路迹线层20附着于该透明基板10的一侧面,以形成印刷玻璃基板。Please refer to FIG. 3 , where a
请参阅图4A及图4B所示,其中再提供一大晶片(wafer)70,其中该大晶片70上具有多个感光芯片30,且每一感光芯片30具有一感光区32及多个电连接部31形成于该感光芯片30的同一侧面,且所述电连接部31位于该感光区32的周围,所述多个电连接部31为该感光芯片焊垫上的电连接凸起(bump),再切割该大晶片70以形成个别的感光芯片30,该电连接凸起可为金材或高温型锡材制成。Please refer to FIG. 4A and shown in FIG. 4B, wherein a large wafer (wafer) 70 is provided again, wherein there are a plurality of
请参阅图5所示,其中再切割大晶片以形成单个的感光芯片30,并翻转该感光芯片30以反盖于该透明基板10上,以使电连接凸起当作支撑部,以支撑于该印刷式电路迹线层20上,并使用热超声波加工方式将该感光芯片30上的金电连接部31连接于该印刷式电路迹线层20的电信号传输点上,以产生共金结合,并使该感光区32相邻于该透光基板10,因此该透光基板10相对应该感光区32处并无该印刷式电路迹线层20覆盖,借以使该透光基板10保护该感光芯片30,以使光透过该透光基板10而被该感光区32检测,另外,当该感光芯片30上的电连接凸起为高温型锡材时,通过熔焊(reflow)的方式使所述感光芯片30的电连接凸起熔焊(reflow)于所述印刷式电路迹线层20的电信号传输点上。此制备过程通过翻转该感光芯片30,所以使该感光芯片30上的感光区32朝下以相邻于该透光基板10,以使此制备过程中或其后的制备过程可避免微粒掉落于该感光芯片30的感光区32内,因此降低芯片封装中环境的洁净度要求,进而减少制备成本。Please refer to Fig. 5, wherein the large wafer is cut to form a single
请参阅图6所示,其中利用保护胶40黏着于该感光芯片30周缘及该透光基板10上,以使所述电连接凸起及该感光区32被密封于该透光基板10上,因此可避免水气及微粒(Particle)进入。Please refer to FIG. 6 , wherein a
请参阅图7所示,其更进一步利用熔焊(reflow)工艺再使该感光芯片30周缘的印刷式电路迹线层20的多个预定部位形成有电连接凸块50,所述电连接凸块50可为低温型锡材制成。Please refer to FIG. 7 , which further uses the reflow process to form electrical connection bumps 50 at a plurality of predetermined positions of the printed
请参阅图8及图2所示,切割该透光基板10以形成单个状,再一一地利用所述电连接凸块50连接该印刷电路板60,使印刷电路板60相邻于该感光芯片30的无感光区32的一侧,因此通过光透过该透光基板10以被该感光区32所检测,并通过该感光芯片30上的电连接凸起传递电信号至该印刷式电路迹线层20,再通过该电连接凸块50将该印刷式电路迹线层20传递电信息至该印刷电路板60上。8 and 2, the light-transmitting
综上所述,通过本发明的光感测芯片的封装结构及其制造方法,即可通过减小封装结构体积及其设置位置,同时可通过翻转芯片以黏接该感光芯片于该透光基板上的印刷式电路迹线层上,因此使该感光芯片上的感光区朝下以相邻于该透光基板,以使制备中可避免微粒掉落于该感光芯片的感光区内,且同时降低芯片封装环境的快捷方式度要求,所以减少制备成本。To sum up, through the package structure of the light sensing chip and the manufacturing method thereof of the present invention, the volume of the package structure and its installation position can be reduced, and at the same time, the photosensitive chip can be bonded to the light-transmitting substrate by flipping the chip Therefore, the photosensitive area on the photosensitive chip faces down to be adjacent to the light-transmitting substrate, so that particles can be prevented from falling into the photosensitive area of the photosensitive chip during preparation, and at the same time The shortcut degree requirement of the chip packaging environment is reduced, so the preparation cost is reduced.
以上所述仅为本发明的较佳可行实施例,非因此局限本发明的专利范围,故凡运用本发明的说明书及附图内容所做的等效结构变化,均应包含于本发明的保护范围内。The above descriptions are only preferred feasible embodiments of the present invention, and therefore do not limit the patent scope of the present invention. Therefore, all equivalent structural changes made by using the description and accompanying drawings of the present invention should be included in the protection of the present invention. within range.
Claims (15)
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US6297551B1 (en) * | 1999-09-22 | 2001-10-02 | Agere Systems Guardian Corp. | Integrated circuit packages with improved EMI characteristics |
CN1364053A (en) * | 2001-01-09 | 2002-08-14 | 胜开科技股份有限公司 | Improved package structure and package method of image sensor |
CN1364050A (en) * | 2001-01-09 | 2002-08-14 | 胜开科技股份有限公司 | Packaging structure and packaging method of image sensor |
CN1450651A (en) * | 2003-05-15 | 2003-10-22 | 王鸿仁 | Image sensor packaging structure and image capture module using the image sensor |
CN2691057Y (en) * | 2004-03-24 | 2005-04-06 | 宏齐科技股份有限公司 | Packaging structure of light sensing chip |
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US6297551B1 (en) * | 1999-09-22 | 2001-10-02 | Agere Systems Guardian Corp. | Integrated circuit packages with improved EMI characteristics |
CN1364053A (en) * | 2001-01-09 | 2002-08-14 | 胜开科技股份有限公司 | Improved package structure and package method of image sensor |
CN1364050A (en) * | 2001-01-09 | 2002-08-14 | 胜开科技股份有限公司 | Packaging structure and packaging method of image sensor |
CN1450651A (en) * | 2003-05-15 | 2003-10-22 | 王鸿仁 | Image sensor packaging structure and image capture module using the image sensor |
CN2691057Y (en) * | 2004-03-24 | 2005-04-06 | 宏齐科技股份有限公司 | Packaging structure of light sensing chip |
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