CN100360917C - 反扩散式氦探漏器的节省电力的运转方法 - Google Patents

反扩散式氦探漏器的节省电力的运转方法 Download PDF

Info

Publication number: CN100360917C
Authority: CN; China
Prior art keywords: anterior; pump; line valve; pressure; analyzer tube
Prior art date: 2002-08-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

CNB031275990A

Other languages

English (en)

Chinese (zh)

Other versions

CN1490603A (zh

Inventor

落合英二郎

大嶋弦

瀨户规正

松本善和

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

AIHATSUSHINA Co Ltd

Original Assignee

AIHATSUSHINA Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-08-09

Filing date

2003-08-08

Publication date

2008-01-09

2003-08-08 Application filed by AIHATSUSHINA Co Ltd filed Critical AIHATSUSHINA Co Ltd

2004-04-21 Publication of CN1490603A publication Critical patent/CN1490603A/zh

2008-01-09 Application granted granted Critical

2008-01-09 Publication of CN100360917C publication Critical patent/CN100360917C/zh

2023-08-08 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

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CNB031275990A 2002-08-09 2003-08-08 反扩散式氦探漏器的节省电力的运转方法 Expired - Lifetime CN100360917C (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2002233515		2002-08-09
JP2002233515A JP3947059B2 (ja)	2002-08-09	2002-08-09	逆拡散式ヘリウムリークディテクタの省電力化のための運転方法

Publications (2)

Publication Number	Publication Date
CN1490603A CN1490603A (zh)	2004-04-21
CN100360917C true CN100360917C (zh)	2008-01-09

Family

ID=32018626

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CNB031275990A Expired - Lifetime CN100360917C (zh)	2002-08-09	2003-08-08	反扩散式氦探漏器的节省电力的运转方法

Country Status (2)

Country	Link
JP (1)	JP3947059B2 (ja)
CN (1)	CN100360917C (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN115013338A (zh) *	2021-03-04	2022-09-06	中国科学院物理研究所	一种前级真空泵系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS57169647A (en) *	1981-04-13	1982-10-19	Ulvac Corp	He reverse diffusion type leakage detector using turbo molecular pump
JPH034133A (ja) *	1989-05-31	1991-01-10	Shimadzu Corp	ヘリウムリークディテクタ
US5107697A (en) *	1989-10-23	1992-04-28	Alcatel Cit	Tracer gas leak detection system
JPH07270272A (ja) *	1994-03-29	1995-10-20	Anelva Corp	逆拡散測定によるヘリウムリーク量検出方法
JPH09196797A (ja) *	1996-01-19	1997-07-31	Ulvac Japan Ltd	漏洩検査装置

2002
- 2002-08-09 JP JP2002233515A patent/JP3947059B2/ja not_active Expired - Fee Related
2003
- 2003-08-08 CN CNB031275990A patent/CN100360917C/zh not_active Expired - Lifetime

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS57169647A (en) *	1981-04-13	1982-10-19	Ulvac Corp	He reverse diffusion type leakage detector using turbo molecular pump
JPH034133A (ja) *	1989-05-31	1991-01-10	Shimadzu Corp	ヘリウムリークディテクタ
US5107697A (en) *	1989-10-23	1992-04-28	Alcatel Cit	Tracer gas leak detection system
JPH07270272A (ja) *	1994-03-29	1995-10-20	Anelva Corp	逆拡散測定によるヘリウムリーク量検出方法
JPH09196797A (ja) *	1996-01-19	1997-07-31	Ulvac Japan Ltd	漏洩検査装置

Also Published As

Publication number	Publication date
JP3947059B2 (ja)	2007-07-18
CN1490603A (zh)	2004-04-21
JP2004077130A (ja)	2004-03-11

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Legal Events

Date	Code	Title	Description
2004-04-21	C06	Publication
2004-04-21	PB01	Publication
2005-07-27	C10	Entry into substantive examination
2005-07-27	SE01	Entry into force of request for substantive examination
2008-01-09	C14	Grant of patent or utility model
2008-01-09	GR01	Patent grant
2023-08-25	CX01	Expiry of patent term	Granted publication date: 20080109
2023-08-25	CX01	Expiry of patent term