CN100347227C - Composite for grinding - Google Patents
Composite for grinding Download PDFInfo
- Publication number
- CN100347227C CN100347227C CNB031407102A CN03140710A CN100347227C CN 100347227 C CN100347227 C CN 100347227C CN B031407102 A CNB031407102 A CN B031407102A CN 03140710 A CN03140710 A CN 03140710A CN 100347227 C CN100347227 C CN 100347227C
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- China
- Prior art keywords
- polishing
- composition
- grinding
- abrasive
- letter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000000227 grinding Methods 0.000 title claims description 63
- 239000002131 composite material Substances 0.000 title 1
- 239000000203 mixture Substances 0.000 claims abstract description 69
- 238000005498 polishing Methods 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 150000001875 compounds Chemical class 0.000 claims abstract description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000004721 Polyphenylene oxide Substances 0.000 claims abstract description 11
- 229920000570 polyether Polymers 0.000 claims abstract description 11
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 19
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 8
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 abstract description 26
- 230000002093 peripheral effect Effects 0.000 abstract description 25
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 abstract description 11
- 229920000642 polymer Polymers 0.000 abstract description 7
- 150000003839 salts Chemical class 0.000 abstract description 6
- 229920005862 polyol Polymers 0.000 abstract 2
- 150000003077 polyols Chemical class 0.000 abstract 2
- 150000002430 hydrocarbons Chemical group 0.000 abstract 1
- 239000000178 monomer Substances 0.000 abstract 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 38
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 18
- 239000001384 succinic acid Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 239000002253 acid Substances 0.000 description 13
- 239000000126 substance Substances 0.000 description 12
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 10
- 238000010077 mastication Methods 0.000 description 9
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 239000003112 inhibitor Substances 0.000 description 8
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 7
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- 229910000420 cerium oxide Inorganic materials 0.000 description 6
- LVHBHZANLOWSRM-UHFFFAOYSA-N itaconic acid Chemical compound OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 6
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
- 229960001866 silicon dioxide Drugs 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 6
- 238000005096 rolling process Methods 0.000 description 5
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical group CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 4
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 4
- -1 sodium alkyl benzene Chemical class 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical compound OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 3
- TVMUHOAONWHJBV-UHFFFAOYSA-N dehydroglycine Chemical compound OC(=O)C=N TVMUHOAONWHJBV-UHFFFAOYSA-N 0.000 description 3
- HCPOCMMGKBZWSJ-UHFFFAOYSA-N ethyl 3-hydrazinyl-3-oxopropanoate Chemical compound CCOC(=O)CC(=O)NN HCPOCMMGKBZWSJ-UHFFFAOYSA-N 0.000 description 3
- 238000005242 forging Methods 0.000 description 3
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 3
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- TYABRSHZJIYHQI-UHFFFAOYSA-N CCOC(CC(C(OC(O)=O)=O)S(O)(=O)=O)=O Chemical compound CCOC(CC(C(OC(O)=O)=O)S(O)(=O)=O)=O TYABRSHZJIYHQI-UHFFFAOYSA-N 0.000 description 2
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 2
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000002500 ions Chemical group 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- KBJMLQFLOWQJNF-UHFFFAOYSA-N nickel(ii) nitrate Chemical compound [Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O KBJMLQFLOWQJNF-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- QBYIENPQHBMVBV-HFEGYEGKSA-N (2R)-2-hydroxy-2-phenylacetic acid Chemical compound O[C@@H](C(O)=O)c1ccccc1.O[C@@H](C(O)=O)c1ccccc1 QBYIENPQHBMVBV-HFEGYEGKSA-N 0.000 description 1
- UOFGSWVZMUXXIY-UHFFFAOYSA-N 1,5-Diphenyl-3-thiocarbazone Chemical compound C=1C=CC=CC=1N=NC(=S)NNC1=CC=CC=C1 UOFGSWVZMUXXIY-UHFFFAOYSA-N 0.000 description 1
- FHVDTGUDJYJELY-UHFFFAOYSA-N 6-{[2-carboxy-4,5-dihydroxy-6-(phosphanyloxy)oxan-3-yl]oxy}-4,5-dihydroxy-3-phosphanyloxane-2-carboxylic acid Chemical compound O1C(C(O)=O)C(P)C(O)C(O)C1OC1C(C(O)=O)OC(OP)C(O)C1O FHVDTGUDJYJELY-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004471 Glycine Substances 0.000 description 1
- QNAYBMKLOCPYGJ-REOHCLBHSA-N L-alanine Chemical compound C[C@H](N)C(O)=O QNAYBMKLOCPYGJ-REOHCLBHSA-N 0.000 description 1
- 229920001732 Lignosulfonate Polymers 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
- PVNIIMVLHYAWGP-UHFFFAOYSA-N Niacin Chemical compound OC(=O)C1=CC=CN=C1 PVNIIMVLHYAWGP-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- IWYDHOAUDWTVEP-UHFFFAOYSA-N R-2-phenyl-2-hydroxyacetic acid Natural products OC(=O)C(O)C1=CC=CC=C1 IWYDHOAUDWTVEP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- BQODPTQLXVVEJG-UHFFFAOYSA-N [O].C=C Chemical group [O].C=C BQODPTQLXVVEJG-UHFFFAOYSA-N 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 238000012644 addition polymerization Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229940072056 alginate Drugs 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 229910021431 alpha silicon carbide Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229940077388 benzenesulfonate Drugs 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- DRVWBEJJZZTIGJ-UHFFFAOYSA-N cerium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ce+3].[Ce+3] DRVWBEJJZZTIGJ-UHFFFAOYSA-N 0.000 description 1
- 229910000421 cerium(III) oxide Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- JGUQDUKBUKFFRO-CIIODKQPSA-N dimethylglyoxime Chemical compound O/N=C(/C)\C(\C)=N\O JGUQDUKBUKFFRO-CIIODKQPSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 239000003995 emulsifying agent Substances 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 239000000174 gluconic acid Substances 0.000 description 1
- 235000012208 gluconic acid Nutrition 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910017053 inorganic salt Inorganic materials 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 235000019357 lignosulphonate Nutrition 0.000 description 1
- 229960002510 mandelic acid Drugs 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- KELHQGOVULCJSG-UHFFFAOYSA-N n,n-dimethyl-1-(5-methylfuran-2-yl)ethane-1,2-diamine Chemical compound CN(C)C(CN)C1=CC=C(C)O1 KELHQGOVULCJSG-UHFFFAOYSA-N 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229960003512 nicotinic acid Drugs 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000002891 organic anions Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TZMFJUDUGYTVRY-UHFFFAOYSA-N pentane-2,3-dione Chemical compound CCC(=O)C(C)=O TZMFJUDUGYTVRY-UHFFFAOYSA-N 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- KOUKXHPPRFNWPP-UHFFFAOYSA-N pyrazine-2,5-dicarboxylic acid;hydrate Chemical compound O.OC(=O)C1=CN=C(C(O)=O)C=N1 KOUKXHPPRFNWPP-UHFFFAOYSA-N 0.000 description 1
- 239000003352 sequestering agent Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000003206 sterilizing agent Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 125000005190 thiohydroxy group Chemical group 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- GQUJEMVIKWQAEH-UHFFFAOYSA-N titanium(III) oxide Chemical compound O=[Ti]O[Ti]=O GQUJEMVIKWQAEH-UHFFFAOYSA-N 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
A polishing composition that prevents a peripheral portion of the surface of a substrate for a magnetic disk from being excessively polished. A first polishing composition according to the present invention includes a compound, which is represented by the following general formula. The letter X represents a residue of polyether polyol. The letter m represents a number equal to the number of hydroxyl groups in one molecule of the polyether polyol. The letter Y represents a divalent hydrocarbon group. The letter Z represents a residue of a monovalent compound, which has an active hydrogen atom. The letter n represents an integer number of at least three. A second polishing composition according to the present invention includes a polymer, which has a monomer unit derived from isoprene sulfonic acid or its salt. These polishing compositions also comprise an abrasive, a polishing accelerator and water.
Description
Technical field
The present invention relates to a kind of composition for polishing that is used to grind such as magnetic disk substrate etc.
Background technology
When using magnetic disk substrate to make disk, to grind the fluctuating of removing substrate surface usually and make smooth surface.The general composition for polishing that comprises abrasive and grind promotor that uses grinds substrate surface.
Yet, when using conventional composition for polishing to grind substrate surface, compare the outer peripheral portion over-lapping of substrate surface with other surface portions outside the outer peripheral portion.This has hindered the increase of disk size.
Summary of the invention
One of purpose of the present invention provides a kind of composition for polishing, when using this composition for polishing to grind the magnetic disk substrate surface, can prevent the outer peripheral portion over-lapping of substrate surface.
In order to achieve the above object, the invention provides a kind of composition for polishing that comprises abrasive, grinds promotor and water.This composition for polishing further comprises the compound that is expressed as following general formula:
Letter X represents the residue of polyether glycol.Letter m represents to be equal to the numeral of a hydroxyl value in the polyether glycol molecule.Letter Y represents bivalent hydrocarbon radical.Zed represents to have the residue of the unit price compound of active hydrogen atom.Letter n represents to be equal to or greater than 3 integer.
The present invention also provides a kind of composition for polishing that comprises abrasive, grinds promotor and water.This composition for polishing further comprises a kind of polymkeric substance of the monomeric unit derived from isoprene sulfonic acid or its salt.
In conjunction with the accompanying drawings, with the elaboration and the principle of the present invention of by way of example, other aspects of the present invention and advantage will become obvious from following description.
Description of drawings
The present invention with and purpose and advantage can be by being best understood, wherein with reference to following description and following accompanying drawing to existing preferred embodiment:
Fig. 1 (a) explains to roll (roll-off) figure; With
Fig. 1 (b) explains flat (dub-off) figure that hangs down.
Embodiment
First embodiment of the present invention is described now.
Composition for polishing according to first embodiment of the present invention is made of the compound that is expressed as following general formula (1), abrasive, grinding promotor and water.
In general formula (1), alphabetical X represents the residue of polyether glycol.Polyether glycol preferably causes synthetic making by the compound that comprises active hydrogen atom and epoxy alkane.The polyether chain of polyether glycol preferably comprises the oxygen ethylene group of 20～90 weight %.Letter m equals a hydroxyl value in the polyether glycol molecule.Letter m is preferably 2～8 integer.Letter Y represents bivalent hydrocarbon radical.Zed represents to have the residue of the unit price compound of active hydrogen atom.The object lesson of letter Y and Z is to be less than or equal to the addition polymer that 8 lower alcohol or alkyl form by addition polymerization by at least one and carbonatoms in oxyethane and the propylene oxide.Letter n represents to be at least 3 integer.
At first, the compound that is expressed as top general formula (1) is described.
The compound of general formula (1) expression is a kind of inhibitor, when using composition for polishing according to first embodiment of the present invention to grind magnetic disk substrate surperficial, compare with other surface portions beyond the outer peripheral portion, this inhibitor can prevent the outer peripheral portion over-lapping of substrate surface.
Specific examples by the compound of general formula (1) expression is a polyurethane surfactant, UHBERMODE PUR series as AKZO NOBEL manufacturing, ASAHI DENKA CO., the ADEKA NOL series that LTD. makes, and the Primal series of Rohmand Hass company manufacturing.
The amount of the compound of the general formula that comprises in the composition for polishing according to first embodiment (1) expression is preferably between 0.001～1 weight %, more preferably between 0.005～0.5 weight %, most preferably between 0.005～0.3 weight %.
Abrasive is described now.
When use was surperficial according to the composition for polishing grinding magnetic disk substrate of first embodiment, abrasive mechanically ground the surface of substrate.
Abrasive ground specific examples is: aluminum oxide, as Alpha-alumina, δ-aluminum oxide, θ-aluminum oxide, κ-aluminum oxide and forging aluminum oxide; Silicon-dioxide is as colloid silica and fumed silica; Cerium oxide, as cerium dioxide, cerous oxide, hexagonal cerium dioxide, cube cerium dioxide and face-centered cubic cerium dioxide; Zirconium white, as the forging zirconium white, monoclinic zirconia, tetragonal zirconium white and amorphous oxidation zirconium; Titanium oxide is as titanium monoxide, titanium sesquioxide, titanium dioxide and forging titanium; Silicon nitride is as α-Dan Huagui, beta-silicon nitride and amorphous silicon nitride; And silicon carbide, as alpha-silicon carbide, silicon B-carbide and amorphous carborundum.The species number of the abrasive that comprises in the composition for polishing according to first embodiment can be a kind of, two kinds or more.
When abrasive is silicon-dioxide, by record based on the BET method from the median size of the abrasive of surf zone preferably between 0.005～0.5 μ m, more preferably between 0.01～0.3 μ m.When abrasive is aluminum oxide, zirconium white, titanium oxide, silicon nitride or silicon carbide, the median size (D50%) of the abrasive that records by laser diffraction particle size analyzer (for example Beckman Coulter company make LS-230) is preferably between 0.05～2 μ m, more preferably between 0.1～1.5 μ m.When abrasive was cerium oxide, the median size of the abrasive that records by scanning electron microscope was preferably between 0.01～0.5 μ m, more preferably between 0.05～0.45 μ m.
The amount of abrasive that comprises in the composition for polishing according to first embodiment is preferably at 0.1～40 weight %, more preferably at 1～25 weight %.
Describe now and grind promotor.
When use is surperficial according to the composition for polishing grinding magnetic disk substrate of first embodiment, grinds promotor and chemically grind substrate surface.
The specific examples that grinds promotor is: oxysuccinic acid, oxyacetic acid, Succinic Acid, citric acid, toxilic acid, methylene-succinic acid, propanedioic acid, imino-acetic acid, gluconic acid, lactic acid, mandelic acid, butenoic acid, niacin, acetate, glycine, L-Ala, thioacetic acid, thiohydroxy Succinic Acid, sulfo-Succinic Acid carboxyl ethyl ester, aluminum nitrate, Tai-Ace S 150 and iron nitrate (III).Preferred grinding promotor is oxysuccinic acid, oxyacetic acid, Succinic Acid and citric acid.Particularly preferred grinding promotor is Succinic Acid.Can be according to the grinding promotor kind quantity that the composition for polishing kind of first embodiment contains only for a kind of, perhaps two or more.
The amount of the grinding promotor of containing in the composition for polishing according to first embodiment is preferably between 0.01～25 weight %, more preferably between 0.1～20 weight %, most preferably between 0.2～10 weight %.
Now water is described.
In the composition for polishing according to first embodiment, water is used as the dispersion medium and the solvent of compound, abrasive and the grinding promotor of general formula (1) expression.Preferably water does not contain impurity.More particularly, water is preferably filtered ion exchanged water and distilled water.
Composition for polishing according to first embodiment is to get by compound, abrasive and the grinding promotor of general formula (1) expression are mixed back dissolving decentralized system with water.In mixing, can use propeller agitator or ultrasonic disperser.
According to the pH value of the composition for polishing of first embodiment preferably between 2～7.
First embodiment provides following advantage.
When using composition for polishing according to first embodiment to grind magnetic disk substrate surperficial, compare with other surface portions beyond the outer peripheral portion, can prevent the outer peripheral portion over-lapping of substrate surface.This is increased the capacity of disk.Because composition for polishing contains the compound of general formula (1) expression, suppress the outer peripheral portion of over-mastication substrate surface according to the composition for polishing of first embodiment.The compound of general formula (1) expression reduces substrate fully and is used for grinding friction between the grinding pad of substrate.Therefore think that the minimizing of friction has suppressed the over-mastication of the outer peripheral portion of substrate surface.
When the compound amount of the general formula that contains in the composition for polishing according to first embodiment (1) expression during more than or equal to 0.001 weight %, the composition for polishing that is provided can fully suppress the outer peripheral portion over-lapping of substrate surface.When the amount of the compound of general formula (1) expression during, can effectively suppress over-mastication to the outer peripheral portion of substrate surface more than or equal to 0.005 weight %.
When the amount of the compound of the general formula in being included in composition for polishing (1) expression is less than or equal to 1 weight %, can prevent to reduce and the increase of cost because of the extreme that adds the grinding rate that too much compound causes.When the content of the compound of general formula (1) expression is less than or equal to 0.5 weight %, can prevent more reliably that the extreme of grinding rate from reducing.When the compound of general formula (1) expression is less than or equal to 0.3 weight %, can prevent in fact inevitably that the extreme of grinding rate from reducing.
When abrasive is silicon-dioxide, the median size of abrasive is greater than or equal to 0.005 μ m, when abrasive is aluminum oxide, zirconium white, titanium oxide, silicon nitride or silicon carbide, median size is greater than or equal to 0.05 μ m, when abrasive is cerium oxide, when median size is greater than or equal to 0.01 μ m, can prevent because the extreme of the grinding rate that the excessive small particle size of abrasive causes reduces.When abrasive is silicon-dioxide, when the median size of abrasive is greater than or equal to 0.01 μ m, abrasive and is aluminum oxide, zirconium white, titanium oxide, silicon nitride or silicon carbide, median size is greater than or equal to 0.1 μ m, when abrasive is cerium oxide, when median size is greater than or equal to 0.05 μ m, can prevent more reliably that the extreme of grinding rate from reducing.
When abrasive is silicon-dioxide or cerium oxide, the median size of abrasive is less than or equal to 0.5 μ m, abrasive when being aluminum oxide, zirconium white, titanium oxide, silicon nitride or silicon carbide, when median size is less than or equal to 2 μ m, can prevent because the increase of the surfaceness of the lapped face that the median size of excessive abrasive causes and the formation of cut.When abrasive is silicon-dioxide, the median size of abrasive is less than or equal to 0.3 μ m, abrasive when being aluminum oxide, zirconium white, titanium oxide, silicon nitride or silicon carbide, median size is less than or equal to 1.5 μ m, abrasive is the situation of cerium oxide, when the median size of abrasive is less than or equal to 0.45 μ m, can prevent the increase of the surfaceness of lapped face more reliably.
When the amount of the abrasive that contains in the composition for polishing according to first embodiment is greater than or equal to 0.1 weight %, can prevent reduction owing to the not enough grinding rate that causes of abrasive levels.When the content of abrasive is greater than or equal to 1 weight %, can prevent the reduction of grinding rate more reliably.
When the amount of the abrasive that contains in the composition for polishing according to first embodiment is less than or equal to 40 weight %, can prevent that the viscosity that causes owing to too much abrasive levels from increasing, grinding pad stops up and the surface imperfection of lapped face.When content is less than or equal to 25 weight %, can prevent more reliably that viscosity from increasing, grinding pad stops up and the surface imperfection of lapped face.The increase of viscosity reduces the operability of composition for polishing.
When grinding promotor when being oxysuccinic acid, oxyacetic acid, Succinic Acid or citric acid, grinding rate increases and has suppressed the formation of lapped face upper surface defective.When grinding promotor was Succinic Acid, grinding rate further increased, and can suppress the formation of the surface imperfection on the lapped face more reliably.
When the amount of the grinding promotor of containing in the composition for polishing according to first embodiment is greater than or equal to 0.01 weight %, can prevent to descend owing to grinding the not enough grinding rate that causes of accelerator content.When content is greater than or equal to 0.1 weight %, can prevent the reduction of grinding rate more reliably.When content is greater than or equal to 0.2 weight %, can prevent the reduction of grinding rate in fact inevitably.
When the amount of the grinding promotor of containing in the composition for polishing according to first embodiment is less than or equal to 25 weight %, can prevent because the cost that excessive grinding promotor causes increases.When content is lower than or equal 20 weight %, prevent that more reliably cost from increasing.When content is less than or equal to 10 weight %, can prevent in fact inevitably that cost from increasing.
When the pH value according to the composition for polishing of first embodiment is greater than or equal to 2, can prevents to grind and be corroded by composition for polishing with shredder.
When the pH value according to the composition for polishing of first embodiment is less than or equal to 7, can prevent owing to composition for polishing is that the surfaceness of reduction, the lapped face of the grinding rate that causes of alkalescence increases and the cut of lapped face forms.
Second embodiment of the present invention will be described now.
According to second embodiment by the polymkeric substance, abrasive, grinding promotor and the water that have derived from the monomeric unit of isoprene sulfonic acid or its salt.
Polymkeric substance is as inhibitor, when using composition for polishing according to second embodiment to grind substrate surperficial of disk, compares with other surface portions beyond the outer peripheral portion, can prevent the outer peripheral portion over-lapping of substrate surface.
Polymkeric substance can comprise the monomeric unit that is not derived from isoprene sulfonic acid or its salt.Be not derived from the example of the monomeric unit of isoprene sulfonic acid or its salt for this monomeric unit derived from isoprene or vinylformic acid.
The amount of polymers that contains in the composition for polishing according to second embodiment is preferably between 0.001～1 weight %, more preferably between 0.005～0.5 weight %, most preferably between 0.005～0.3 weight %.
Composition for polishing according to second embodiment makes by polymkeric substance, abrasive and grinding promotor are mixed back dissolving and dispersion with water after.
According to the pH value of the composition for polishing of second embodiment preferably between 2～7.
The compound of the general formula that contains in the composition for polishing according to first embodiment (1) expression is replaced according to the polymkeric substance in the composition for polishing of second embodiment.Therefore, the composition for polishing according to second embodiment also has following advantage except the advantage of first embodiment.
When using composition for polishing according to second embodiment to grind the magnetic disk substrate surface, compare with other parts except that outer peripheral portion, can prevent the outer peripheral portion over-lapping of substrate surface.Because contain polymkeric substance in the composition for polishing, the composition for polishing of second embodiment can suppress the over-mastication to the substrate surface outer peripheral portion.With the identical mode of compound of general formula (1) expression, polymkeric substance has reduced at substrate and has been used for grinding the frictional force that produces between the grinding pad of substrate.Therefore think that the minimizing of frictional force has suppressed the over-mastication of the outer peripheral portion of substrate surface.
The amount of polymers that contains in the composition for polishing according to second embodiment is greater than or equal to 0.001 weight %, and the composition for polishing of the outer peripheral portion over-mastication that can suppress substrate surface fully can be provided.This composition for polishing also allows the surface of grinding substrate with a sufficient speed.When the content of polymkeric substance is greater than or equal to 0.005 weight %, can suppress the over-mastication of the outer peripheral portion of substrate surface effectively.
When the amount of polymers that contains in the composition for polishing according to second embodiment is less than or equal to 1 weight %, can prevent to reduce and the increase of cost because of the extreme that adds the grinding rate that polymkeric substance causes.When polymer content is less than or equal to 0.5 weight %, can prevent more reliably that grinding rate from extremely reducing.When polymer content is less than or equal to 0.3 weight %, can prevent in fact inevitably that the extreme of grinding rate from reducing.
The present invention can embody and not break away from the spirit and scope of the present invention with other concrete forms, and this is tangible for a person skilled in the art.Especially should be understood to the present invention and can show as following form.
Composition for polishing according to first embodiment may further include the polymkeric substance that has derived from the monomeric unit of isoprene sulfonic acid or its salt.
Composition for polishing according to second embodiment may further include the compound of being represented by general formula (1).
Composition for polishing according to first and second embodiments may further include the additive that is generally comprised within the composition for polishing commonly used.The example of additive is: cellulose family, as Mierocrystalline cellulose, carboxymethyl cellulose and Natvosol; Water soluble alcohols is as ethanol, propyl alcohol and ethylene glycol; Tensio-active agent is as the formalin condensation product of sodium alkyl benzene sulfonate and naphthene sulfonic acid; Polymerization organic anion material is as sulfonated lignin and polyacrylate; Water-soluble polymers (emulsifying agent) is as polyvinyl alcohol; Sequestrant is as dimethyl glyoxime, dithizone, oxinate, methyl ethyl diketone, EDTA and NTA; Sterilizing agent is as sodiun alginate and potassium bicarbonate; Inorganic salt, as Tai-Ace S 150, single nickel salt, aluminum nitrate, nickelous nitrate, iron nitrate and molybdenum acid ammonia; Higher fatty acid acid amide; Sulfonate; Rust-preventive agent; And water emulsifiable oils.
Composition for polishing according to first and second embodiments can be a stoste, and this stoste comprises compound or polymkeric substance, abrasive and the grinding promotor of general formula (1) expression of high density.Stoste water before being used for grinding dilutes.In this case, improved the operability of the composition for polishing in storing and transporting.
Composition for polishing according to first and second embodiments can also be used to grinding grinding element except being used for grinding the disk.Under this kind situation, compare with other lapped faces except the edges abut part, can prevent the over-lapping of lapped face edges abut part.
Referring now to embodiment and Comparative Examples the present invention is described in more detail.
Aluminum oxide (median size the is 0.8 μ m) abrasive of 20 weight %, grinding promotor and the inhibitor that is shown in the following table 1 are mixed the composition for polishing of back preparation embodiment 1～31 and Comparative Examples 1～4 with ion exchanged water.Grinding condition below uses the composition for polishing in each example to grind the top surface and the basal surface of magnetic disk substrate down.
Substrate: 3.5 inches (about 95mm) substrates of φ that are coated with electroless nickel phosphorous coating
Shredder: twin grinder with the upper and lower machine platens that is of a size of φ 720mm
Grinding pad: the BELLATRIX N0048 that Kanebo company makes
Grind load: 100g/cm
2(about 10kPa)
Top board rotating speed: 24rpm
Press table rotating speed: 16rpm
Composition for polishing feed rate: 150ml/min
Amount of grinding: 3 μ m on two surfaces of whole substrate
Ground the back at substrate and assigned to test the Vr value of rolling (roll-off) at the peripheral part of substrate by the MicroXAM that ADE Phase Shift (U.S.) makes.Measured value Vr by in the formula (2) below the substitution to obtain rolling the rate of descent of (roll-off).If the rate of descent that rolls (roll-off) is greater than 20%, this rate of descent is evaluated as ◎, if the rate of descent that rolls (roll-off) is greater than 10% and be less than or equal to 20%, it is evaluated as zero, if the rate of descent that rolls (roll-off) is greater than 0% and be less than or equal to 10%, it is evaluated as △, is less than or equal to 0% if roll the rate of descent of (roll-off), it is evaluated as *.The result is shown in " rolling (roll-off) " hurdle in the following table 1.
Roll rate of descent [%]=(Vr of 1-Vr/ Comparative Examples 1) * 100 of (roll-off) ... (2)
Rolling (roll-off) is one of the parameter of over-mastication degree that is illustrated in the peripheral part office of substrate surface.Rolling (roll-off) in this manual is defined as follows.Shown in Fig. 1 (a), on substrate surface, be positioned at from the point of the inside 0.3mm in neighboring of substrate and be assumed to an A, on substrate surface, be positioned at from the point of the inside 3.8mm of substrate edge and be assumed to a B.Roll (roll-off) and be defined in the cross-section curve of tie point A and some B and the ultimate range between the straight line between tie point A and the some B.
After grinding substrate, test the value Vd of hang down flat (dub-off) at the outer peripheral portion of substrate by MicroXAM.Rate of descent with obtain in the formula (3) below the measured value Vd substitution hanging down flat (dub-off).The rate of descent of flat (dub-off) is greater than 20% if hang down, this rate of descent is evaluated as ◎, the rate of descent of putting down (dub-off) if hang down is greater than 10% and be less than or equal to 20%, it is evaluated as zero, the rate of descent of putting down (dub-off) if hang down is greater than 0% and be less than or equal to 10%, it is evaluated as △, if the rate of descent of hang down flat (dub-off) is less than or equal to 0%, it is evaluated as *.The result is shown in " hang down flat (dub-off) " hurdle in the following table 1.
Hang down and put down rate of descent [%]=(Vd of 1-Vd/ Comparative Examples 1) * 100 of (dub-off) ... (3)
Hang down flat (dub-off) be one of the parameter of over-mastication degree that is illustrated in the peripheral part office of substrate surface.Vertical in this manual flat (dub-off) is defined as follows.Shown in Fig. 1 (b), on substrate surface, be positioned at from the point of the inside 4.30mm in neighboring of substrate and be assumed to a C, on substrate surface, be positioned at from the point of the inside 3.30mm of substrate edge and be assumed to a D, on substrate surface, be positioned at from the point of the inside 0.30mm of substrate edge and be assumed to an E.Line L describes with the cross-section curve of some D from tie point C by method of least squares.The point from the inside 0.30mm of substrate peripheral edge that is positioned on the line L is assumed to an E '.Vertical flat (dub-off) is defined as the distance between an E and the some E '.
Grinding rate when grinding substrate obtains according to following formula (4).If resulting grinding rate is greater than or equal to 0.70 μ m/min, this grinding rate is evaluated as ◎, if grinding rate is greater than or equal to 0.65 μ m/min and less than 0.70 μ m/min, it is evaluated as zero, if grinding rate is greater than or equal to 0.60 μ m/min and less than 0.65 μ m/min, it is evaluated as △, if grinding rate less than 0.60 μ m/min, it is evaluated as *.The result is shown in " grinding rate " hurdle in the following table 1.
Grinding rate [μ m/min]=because of grinding weight minimizing [g] ÷ (milling area [cm of substrate of substrate
2Density [the g/cm of] * nickel-phosphorus coating
3] * milling time [min] * 10000 ... (4)
Table 1
| Grind promotor | Inhibitor | The pH value | Roll | It is flat to hang down | Grinding rate | ||||
| Kind | Content (wt%) | Kind | Viscosity (cps) | Content (wt%) | |||||
| Embodiment 1 | Succinic Acid | 0.125 | A | 9500 | 0.0025 | 3.5 | ◎ | ◎ | △ |
| Embodiment 2 | Succinic Acid | 0.25 | A | 9500 | 0.0125 | 3.5 | ○ | ○ | ○ |
| Embodiment 3 | Succinic Acid | 0.25 | A | 9500 | 0.0025 | 3.5 | ◎ | ◎ | ○ |
| Embodiment 4 | Succinic Acid | 0.25 | A | 9500 | 0.025 | 3.5 | ◎ | ◎ | △ |
| Embodiment 5 | Succinic Acid | 0.375 | A | 9500 | 0.0025 | 3.5 | ◎ | ◎ | △ |
| Embodiment 6 | Succinic Acid | 0.25 | A | 30000 | 0.0025 | 3.5 | ◎ | ◎ | ○ |
| Embodiment 7 | Succinic Acid | 0.25 | A | 8500 | 0.0025 | 3.5 | ◎ | ◎ | ○ |
| Embodiment 8 | Oxysuccinic acid | 0.25 | A | 9500 | 0.0025 | 3.0 | ◎ | ◎ | △ |
| Embodiment 9 | Citric acid | 0.25 | A | 9500 | 0.0025 | 2.4 | ○ | ○ | △ |
| Embodiment 10 | Oxyacetic acid | 0.5 | A | 9500 | 0.0025 | 2.9 | ◎ | ◎ | △ |
| Embodiment 11 | Toxilic acid | 0.25 | A | 9500 | 0.0025 | 2.2 | ◎ | ◎ | △ |
| Embodiment 12 | Methylene-succinic acid | 0.25 | A | 9500 | 0.0025 | 2.9 | ○ | ○ | △ |
| Embodiment 13 | Propanedioic acid | 0.25 | A | 9500 | 0.0025 | 2.4 | ◎ | ◎ | △ |
| Embodiment 14 | Imino-acetic acid | 0.25 | A | 9500 | 0.0025 | 2.8 | ◎ | ◎ | △ |
| Embodiment 15 | The thiohydroxy Succinic Acid | 0.25 | A | 9500 | 0.0025 | 3.1 | ○ | ○ | ◎ |
| Embodiment 16 | Sulfo-Succinic Acid carboxyl ethyl ester | 0.25 | A | 9500 | 0.0025 | 3.2 | ○ | ○ | ◎ |
| Embodiment 17 | Aluminum nitrate | 1 | A | 9500 | 0.0025 | 2.8 | ◎ | ◎ | △ |
| Embodiment 18 | Succinic Acid | 0.125 | B1 | 180 | 0.0025 | 3.5 | ◎ | ◎ | ◎ |
| Embodiment 19 | Succinic Acid | 0.25 | B1 | 180 | 0.0025 | 3.5 | ◎ | ◎ | ◎ |
| Embodiment 20 | Succinic Acid | 0.375 | B1 | 180 | 0.0025 | 3.5 | ◎ | ◎ | ◎ |
| Embodiment 21 | Succinic Acid | 0.25 | B1 | 180 | 0.0075 | 3.5 | ◎ | ◎ | ◎ |
| Embodiment 22 | Succinic Acid | 0.25 | B1 | 180 | 0.02 | 3.5 | ◎ | ◎ | ◎ |
| Embodiment 23 | Succinic Acid | 0.25 | B1 | 90 | 0.0025 | 3.5 | ◎ | ◎ | ◎ |
| Embodiment 24 | Oxysuccinic acid | 0.25 | B1 | 180 | 0.0025 | 3.0 | ◎ | ◎ | ○ |
| Embodiment 25 | Citric acid | 0.25 | B1 | 180 | 0.0025 | 2.4 | ○ | ○ | ○ |
| Embodiment 26 | Oxyacetic acid | 0.5 | B1 | 180 | 0.0025 | 2.9 | ◎ | ◎ | ○ |
| Embodiment 27 | Toxilic acid | 0.25 | B1 | 180 | 0.0025 | 2.2 | ◎ | ◎ | ○ |
| Embodiment 28 | Methylene-succinic acid | 0.25 | B1 | 180 | 0.0025 | 2.9 | ○ | ○ | ◎ |
| Embodiment 29 | Propanedioic acid | 0.25 | B1 | 180 | 0.0025 | 2.4 | ◎ | ◎ | ○ |
| Embodiment 30 | Imino-acetic acid | 0.25 | B1 | 180 | 0.0025 | 2.8 | ◎ | ◎ | ○ |
| Embodiment 31 | Aluminum nitrate | 1 | B1 | 180 | 0.0025 | 3.8 | ◎ | ◎ | ○ |
| Comparative Examples 1 | Succinic Acid | 0.25 | - | - | - | 3.5 | × | × | ○ |
| Comparative Examples 2 | Oxysuccinic acid | 0.25 | - | - | - | 3.0 | × | × | △ |
| Comparative Examples 3 | Citric acid | 0.25 | - | - | - | 2.4 | × | × | △ |
| Comparative Examples 4 | Oxyacetic acid | 0.5 | - | - | - | 2.9 | × | × | △ |
In the inhibitor kind hurdle as shown in table 1, alphabetical A represents the expressed compound of general formula (1), letter b 1 expression isoprene sulfonic acid and acrylic acid multipolymer, the multipolymer of letter b 2 expression isoprene sulfonic acid and isoprene.
The viscosity number of value shown in the viscosity hurdle of inhibitor for using BH type rotational viscosimeter to obtain by the inhibitor aqueous solution of measuring the prepared active ingredient that contains 30 weight % 25 degrees centigrade the time.When the viscosity of the compound of measuring general formula (1) expression, use the speed of rotation of No. 6 rotors and No. 6 rotors to be 10rpm.When the viscosity of the multipolymer of measuring isoprene sulfonic acid and acrylic acid multipolymer and isoprene sulfonic acid and isoprene, use No. 3 rotor, the speed of rotation of No. 3 rotors is 62.5rpm.
Therefore, it is exemplary with nonrestrictive that existing embodiment and embodiment should be considered to, and the present invention is not subjected to the restriction of details given herein, but can change the present invention in claim and equivalency range thereof.
Claims (2)
1, a kind of composition for polishing, wherein this abrasive composition comprises abrasive, grinds promotor and water, it is characterized in that described composition for polishing further comprises the represented compound of the general formula by following of 0.001～1 weight %:
Wherein alphabetical X represents the residue of polyether glycol, letter m represents the numeral that equates with hydroxyl value in the polyether glycol molecule, letter Y represents bivalent hydrocarbon radical, and zed represents to have the residue of the unit price compound of active hydrogen atom, and alphabetical n represents to be equal to, or greater than 3 integer.
2, a kind of method that is used for grinding the surface of magnetic disk substrate is characterized in that, uses composition for polishing according to claim 1.
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| JP2002157964 | 2002-05-30 | ||
| JP2002157964A JP4095833B2 (en) | 2002-05-30 | 2002-05-30 | Polishing composition |
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| CNB031407102A Expired - Fee Related CN100347227C (en) | 2002-05-30 | 2003-05-30 | Composite for grinding |
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| JP4068499B2 (en) * | 2003-05-09 | 2008-03-26 | 株式会社フジミインコーポレーテッド | Polishing composition |
| US20050139119A1 (en) * | 2003-12-24 | 2005-06-30 | Rader W. S. | Polishing composition |
| WO2006025572A1 (en) * | 2004-08-30 | 2006-03-09 | Showa Denko K.K. | Glass substrate for magnetic recording medium and magnetic recording medium |
| JP2006099949A (en) * | 2004-08-30 | 2006-04-13 | Showa Denko Kk | Glass substrate for magnetic recording medium and magnetic recording medium |
| JP4667848B2 (en) * | 2004-12-13 | 2011-04-13 | 花王株式会社 | Polishing liquid composition for glass substrate |
| JP4637003B2 (en) * | 2005-11-11 | 2011-02-23 | 花王株式会社 | Manufacturing method of hard disk substrate |
| KR101267971B1 (en) * | 2005-08-31 | 2013-05-27 | 가부시키가이샤 후지미인코퍼레이티드 | Polishing Composition and Polishing Method |
| JP2007063440A (en) * | 2005-08-31 | 2007-03-15 | Fujimi Inc | Polishing composition and polishing method |
| GB2433516B (en) * | 2005-12-22 | 2010-11-03 | Kao Corp | Polishing composition for glass substrate |
| TWI402335B (en) * | 2006-09-08 | 2013-07-21 | Kao Corp | Polishing composition |
| JP5957292B2 (en) * | 2012-05-18 | 2016-07-27 | 株式会社フジミインコーポレーテッド | Polishing composition, polishing method using the same, and substrate manufacturing method |
| KR101353315B1 (en) * | 2013-08-07 | 2014-01-21 | 소문식 | Composition for cutting wheel and cutting wheel comprising the same |
| EP3819352A4 (en) * | 2018-07-04 | 2022-03-23 | Sumitomo Seika Chemicals Co., Ltd. | Polishing composition |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1253963A (en) * | 1998-11-17 | 2000-05-24 | 不二见株式会社 | Grinding composite and potching composite |
| CN1288920A (en) * | 1999-09-21 | 2001-03-28 | 不二见株式会社 | Polishing composition |
| CN1291630A (en) * | 1999-09-28 | 2001-04-18 | 不二见株式会社 | Polishing composition used for manufacturing storage hard disk and polishing method |
| CN1307079A (en) * | 2000-02-03 | 2001-08-08 | 花王株式会社 | Polishing composition |
| CN1315991A (en) * | 1999-06-28 | 2001-10-03 | 昭和电工株式会社 | Composition for polishing substrate for magnetic disk and method for producing substrate for magnetic disk |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2590790B2 (en) * | 1988-04-15 | 1997-03-12 | 日本合成ゴム株式会社 | Method for producing conjugated diene sulfonated polymer |
| JP3891604B2 (en) * | 1996-04-17 | 2007-03-14 | 花王株式会社 | Abrasive composition and polishing method using the same |
| JP4250831B2 (en) * | 1999-06-23 | 2009-04-08 | Ｊｓｒ株式会社 | Cleaning fluid for semiconductor parts |
| US6258140B1 (en) * | 1999-09-27 | 2001-07-10 | Fujimi America Inc. | Polishing composition |
| JP2003313542A (en) * | 2002-04-22 | 2003-11-06 | Jsr Corp | Aqueous dispersion for chemomechanical polishing use |
-
2002
- 2002-05-30 JP JP2002157964A patent/JP4095833B2/en not_active Expired - Lifetime
-
2003
- 2003-05-29 MY MYPI20031978A patent/MY137251A/en unknown
- 2003-05-30 GB GB0312182A patent/GB2390370B/en not_active Expired - Fee Related
- 2003-05-30 TW TW092114853A patent/TWI307359B/en not_active IP Right Cessation
- 2003-05-30 CN CN200610103020.7A patent/CN101012313B/en not_active Expired - Fee Related
- 2003-05-30 CN CNB031407102A patent/CN100347227C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1253963A (en) * | 1998-11-17 | 2000-05-24 | 不二见株式会社 | Grinding composite and potching composite |
| CN1315991A (en) * | 1999-06-28 | 2001-10-03 | 昭和电工株式会社 | Composition for polishing substrate for magnetic disk and method for producing substrate for magnetic disk |
| CN1288920A (en) * | 1999-09-21 | 2001-03-28 | 不二见株式会社 | Polishing composition |
| CN1291630A (en) * | 1999-09-28 | 2001-04-18 | 不二见株式会社 | Polishing composition used for manufacturing storage hard disk and polishing method |
| CN1307079A (en) * | 2000-02-03 | 2001-08-08 | 花王株式会社 | Polishing composition |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI307359B (en) | 2009-03-11 |
| GB2390370A (en) | 2004-01-07 |
| CN1461766A (en) | 2003-12-17 |
| JP4095833B2 (en) | 2008-06-04 |
| JP2003342556A (en) | 2003-12-03 |
| TW200400250A (en) | 2004-01-01 |
| CN101012313A (en) | 2007-08-08 |
| CN101012313B (en) | 2010-12-08 |
| GB2390370B (en) | 2006-10-11 |
| MY137251A (en) | 2009-01-30 |
| GB0312182D0 (en) | 2003-07-02 |
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