CN100343702C - Method and device for forming film photoelectric device and its making method - Google Patents

Abstract

When using the scanning of the inkjet head to manufacture optical components such as color filters, all the nozzles of the inkjet head can accurately pass through the formation area of the pixel, improve the accuracy of the inkjet position from the nozzle, and improve the use efficiency of the nozzle (thus drawing efficiency ), prevent the color dispersion of each pixel, and make the optical characteristics of the optical member uniform on the plane. The subject of the present invention is a method of manufacturing a color filter (1) for performing main scanning and sub-scanning on a substrate (2) using a plurality of inkjet heads (22) equipped with nozzles (27). Assuming that among the plurality of inkjet heads (22), the mutual interval between the nozzles (27) at the respective endmost parts of the adjacent inkjet heads (22) is W, and when the constant arrangement pitch of the nozzles (27) is D, W=mD (in the formula, m is an integer greater than or equal to 2) In addition, when the sub-scan movement pitch of the shower head 22 is assumed to be P, P=nD (in the formula, n is an integer greater than or equal to 1).

Description

Film forming method and device, electro-optical device and manufacturing method thereof

This application is a divisional application, the application number of its parent case is 02141207.3, the earliest prior application number is JP01-203807, and the earliest priority date is July 4, 2001.

[technical field]

The present invention relates to a manufacturing method and manufacturing apparatus of a color filter, a manufacturing method and manufacturing apparatus of a liquid crystal display device, a manufacturing method and manufacturing apparatus of a substrate on which an electroluminescence emitting layer is arranged, and a manufacturing method and manufacturing apparatus of an electroluminescent device. In addition, the present invention relates to a scanning method of a shower head and a scanning device of the shower head, which eject a discharge material onto the base material while scanning a substrate with the shower head. In addition, the present invention relates to a film forming method and a film forming apparatus for forming a film on a substrate. In addition, the present invention relates to an electro-optical device, a manufacturing method thereof, and an electronic device.

[Background technique]

In recent years, display devices such as liquid crystal display devices and electroluminescence devices have been widely used in display sections of electronic devices such as mobile phones and portable computers. In addition, such a display device is often used to perform a full-color display on a display portion of an electronic device.

For example, full-color display of a liquid crystal display device is performed by passing light modulated by a liquid crystal layer through a color filter. By arranging R (red), G (green) and B (blue) dot-shaped color filter elements according to the prescribed arrangement methods such as strip arrangement, triangle arrangement or mosaic arrangement, they are arranged on glass, plastic, etc. On the surface of the constituent substrate, such color filters are formed.

In addition, the full-color display of the electroluminescent device can be carried out by such a method: for example, the dot-shaped light-emitting layers of R (red), G (green), and B (blue) are arranged in stripes, triangles, or Specific arrangement methods such as mosaic arrangement are arranged on the surface of a substrate made of glass, plastic, etc. to form an electroluminescent substrate, and a pair of electrodes sandwich the light-emitting layer of the electroluminescent substrate to form a plurality of display points. For each display point, the current or voltage applied to these electrodes is controlled so that the display point emits light of the desired color.

So far, in the case of patterning the color filter elements of R (red), G (green), and B (blue) of the color filter, or in the case of patterning the R (red), G (green), and When patterning each light-emitting layer of the B (blue) color, a photolithography method can be used. However, in this photolithography method, it is necessary to use a mask with a different pattern for each display point, and perform complicated processes such as exposure, development, and cleaning. issues such as heightening.

In order to solve this problem, a method of spraying a color filter material or a material for forming a light-emitting layer in dots by an inkjet method to form a color filter element or a light-emitting layer has been proposed. This inkjet method can be performed, for example, using an inkjet head equipped with a piezoelectric thin film element.

In this inkjet method, the ink for forming pixels is stored in the pressurized chamber of the inkjet head, and the ink is ejected by utilizing the volume change of the pressurized chamber caused by the vibration of the above-mentioned piezoelectric body element. Pixels are formed on the substrate of the color chip. According to this inkjet method, the production efficiency of color filters and the like can be improved. In addition, in this inkjet method, since the height of the amount of ink can be controlled, high-definition color filters can be produced efficiently.

FIG. 25 and FIG. 26 show an example of a method of forming color filter elements or light emitting layers arranged in dots by spraying a color filter or light emitting layer forming material in dots by an inkjet method.

Using an inkjet head 306 equipped with a nozzle column 305 in which a plurality of nozzles 304 shown in FIG. In the inner region of the plurality of panel regions 302 formed on the surface of the formed large-area substrate (so-called motherboard) 301, as shown in FIG. 25(b), a plurality of color filter elements 303 arranged in dots are formed.

In this case, as shown in FIG. 25(b), for example, the inkjet head 306 is made to perform a plurality of main scans on one panel area 302 along the direction shown by the arrow nozzle A1 and the arrow nozzle A2. In FIG. 25(b) ) shows two main scans, and between these main scans, ink, for example, a color filter material is selectively ejected from a plurality of nozzles 304 to form color filter elements 303 at desired positions.

Here, the color filter elements 303 are formed by arranging R (red), G (green) and B (blue) colors in a stripe arrangement, a triangle arrangement, or a mosaic arrangement. Therefore, forming the color filter unit 303 with the inkjet head 306 shown in FIG. The inkjet head 306 of one color of ejecting R (red), G (green), and B (blue) can be used repeatedly in sequence corresponding to the three colors to form R ( Red), G (green), B (blue) three-color arrangement.

However, in the inkjet head 306, generally speaking, the ink ejection amounts of the plurality of nozzles 304 constituting the nozzle row 305 vary. For example, as shown in FIG. 26(a), the inkjet head 306 often has the following inkjet characteristics Q: the ejection amount at the positions corresponding to the two ends of the nozzle row 305 is large, the central portion is second, and the middle portion of them is large. The injection volume of the part is small. In addition, the case where the number of nozzles 304 is 180 is shown in FIG.26(a).

Considering such dispersion of the amount of ink ejection, as shown in FIG. 25(b), in the case where the color filter element 303 is formed by the inkjet head 306, as shown in FIG. In the formation area P1 of the color filter element 303 corresponding to the nozzles at both ends of the head 306 or the formation area P2 of the color filter element 303 corresponding to the nozzle located in the center, stripes with high density are formed, and the flat light of the color filter exists. Problems with non-uniform transmission or reflection characteristics. Also, depending on the circumstances, streaks with high density may be formed in both the formation regions P1 and P2.

In addition, in the case of using such an inkjet method to manufacture a color filter, it is required to move the inkjet head accurately so that the nozzles of the inkjet head pass accurately on the formation area of the pixel, that is, the display dot, and at an appropriate position inkjet. However, in the current situation, it is not always possible to find a way to sufficiently solve this problem.

This problem will be specifically described below. That is, when forming a color filter element or a light-emitting layer by inkjet, that is, when forming a pixel, in order to prevent ink that should enter one pixel forming area from leaking into another adjacent pixel forming area to cause color mixing, it is necessary to make the nozzle flow from the pixel to the adjacent pixel forming area. Pass directly above the formation area so that the ink droplet attaches as close to the center of the pixel as possible. Assuming that the nozzle is not directly above the pixel formation area, ink cannot be ejected from the nozzle.

This is an ideal situation. On the other hand, the mutual arrangement interval (i.e., the filter element pitch or pixel pitch) of the pixels in the direction of the line feed (i.e., the sub-scanning direction) of the shower head, and the mutual arrangement interval (i.e., the pitch of the nozzles) of the nozzles in the sub-scanning direction ( That is, the nozzle pitch) is usually inconsistent. In this state, when the inkjet head is only used for main scanning, nozzles that do not pass directly above the pixel forming region, that is, nozzles that cannot be used appear, and the usage efficiency of the nozzles (that is, the scanning efficiency) is low. An adequate solution to this problem has not necessarily been found so far.

[Content of the invention]

The present invention has been accomplished in view of the above-mentioned problems. The purpose of the present invention is to improve the efficiency of nozzles by making all the nozzles of the inkjet head accurately pass through the region where pixels are formed when the inkjet head scans the color filter or the electroluminescence substrate. The usage efficiency (ie, rendering efficiency) of .

In addition, the purpose of the present invention is to accurately move the inkjet head relative to the object, so that the ink can be ejected to an appropriate position on the object, thereby preventing the color dispersion of each pixel and improving the color display characteristics of the liquid crystal display device. The optical properties of the optical member, such as the light emitting properties of the light emitting layer, are uniform on a plane.

As a result of earnest research by the present inventors in order to achieve the above object, it was found that the distance (W) , and the sub-scan movement pitch (P) in the line-feed direction when the print head (droplet material ejection mechanism) is carried out in the main scanning direction and the line-feeding direction (that is, the vertical and horizontal direction) of the printing head and the sub-scanning direction (P) is specially designated as the constant of the nozzle An actual integer multiple of the arrangement pitch (D) can achieve the above object and complete the present invention. That is, according to the present invention, the following color filter manufacturing method and manufacturing device, liquid crystal display device manufacturing method and manufacturing device, electroluminescent substrate manufacturing method and manufacturing device, electroluminescent device manufacturing method and manufacturing device are provided , a film forming method and a film forming device, an electro-optic device and a manufacturing method thereof, and an electronic device.

(1) The manufacturing method of the color filter of the present invention is characterized in that: comprising: moving a plurality of shower heads arranged with a plurality of nozzles according to a predetermined pitch along the scanning direction of the shower heads to perform main scanning on the substrate; The process of sub-scanning the above-mentioned substrate by moving the line-feeding direction of the print head intersecting with the scanning direction of the above-mentioned print head according to a predetermined moving pitch; Among the plurality of shower heads, the adjacent shower heads are located at the intervals (W) between the above-mentioned nozzles at the respective end portions and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relational expression

W=mD (where m is an integer above 2)

The sub-scanning movement pitch (P) of the above-mentioned shower head and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relationship

P=nD (where n is an integer of 1 or more)

With this structure, in one main scan of the shower head, the possibility of spraying the color filter material onto adjacent pixels can be reduced regardless of whether the shower head passes near the area where the pixels are formed. In addition, in all the main scans, nozzles that cannot eject the color filter can be reduced or eliminated, so that the usage efficiency of the nozzles (that is, the drawing efficiency) can be improved. In addition, color filter elements can be efficiently arranged in relation to the number of scans of the print head.

In addition, only an almost necessary amount of color filter material can be sprayed from the nozzle to form a color filter element in a desired area. Therefore, it is not necessary to go through complicated processes such as exposure, development, and cleaning when using photolithography. In addition, the usage-amount of the color filter material necessary for manufacture can be reduced.

(2) In the manufacturing method of the color filter of the above-mentioned configuration, the above-mentioned shower heads can be arranged at an angle of 0°<θ<180° with respect to the direction of the head-wrapping of the above-mentioned shower heads, and the above-mentioned adjacent shower heads are located at the respective endmost nozzles. The distance between each other (W) and the arrangement spacing (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles can actually satisfy the following relationship

W＝mDcosθ (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head along the line-changing direction of the above-mentioned shower head and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned shower head can actually satisfy the following relational expression

P=nDcosθ (where n is an integer above 1)

If this structure is adopted, since the nozzle arrangement pitch can be actually an integer multiple of the interval between each filter element in the sub-scanning direction (i.e., the filter element pitch), it is possible to effectively use the droplet material ejection head (ink-jet nozzle). All nozzles in the head) are equipped with color filter elements.

(3) In the method of manufacturing a color filter having the above configuration, it is preferable that the nozzle located at the end of the head does not spray the color filter material onto the color filter element formation region on the substrate.

If this structure is adopted, even in the case of using a droplet material ejection head (ink jet head) whose ejection distribution characteristics of the color filter material vary greatly, an appropriate amount of ink can be ejected from the droplet material ejection head (ink jet head), Therefore, the color filter elements having a uniform planar shape and thickness can be arranged in the color filter element formation region of the substrate, that is, the pixel formation region, so that color dispersion for each pixel can be prevented.

(4) In the manufacturing method of the color filter of the above-mentioned constitution, the above-mentioned color filter material can be constituted by a plurality of colors of liquid materials, and the above-mentioned plurality of nozzles included in each of the above-mentioned plurality of nozzles spray a part of the above-mentioned plurality of colors color.

Assuming that all the nozzles only spray a part of the liquid material, it is necessary to use another machine or replace the liquid material to adapt to the remaining colors. Different from this, if the above-mentioned structure is adopted, each nozzle can simultaneously spray liquid materials of different colors, therefore, the nozzle efficiency when the color filter element is arranged in the color filter element formation area of the substrate, that is, the pixel formation area can be improved. Use efficiency, that is, drawing efficiency.

Here, three colors of R (red), G (green), and B (blue) are generally used as the plurality of colors, but of course, C (dark blue), M (magenta), and Y (yellow) can also be used. Ink of other colors.

(5) In the method for manufacturing a color filter having the above-mentioned configuration, the color filter material can be composed of a plurality of colors of liquid materials, and the plurality of nozzles included in each of the plurality of heads eject each of the plurality of colors. kinds of colors.

Assuming that the nozzles only spray a part of the liquid material, if all the nozzles spray the same type of liquid material, it is necessary to use additional machinery or replace the liquid material to adapt to the remaining colors. In contrast, if the above-mentioned structure is adopted, each nozzle can simultaneously spray liquid materials of various colors in a plurality of colors. The drawing efficiency can be improved when the region is selected.

Here, three colors of R (red), G (green), and B (blue) are generally used as the plurality of colors, but of course, C (dark blue), M (magenta), and Y (yellow) can also be used. Ink of other colors.

(6) Next, the manufacturing device of the color filter of the present invention is characterized in that: there are a plurality of nozzles for ejecting droplet-shaped color filter materials; a plurality of nozzles for arranging the above-mentioned plurality of nozzles according to a constant arrangement interval (D) ; the main scanning drive device that moves the above-mentioned printhead along the printhead scanning direction; and the sub-scanning drive device that moves the above-mentioned printhead along the printhead line-changing direction intersecting with the above-mentioned printhead scanning direction according to a specified moving pitch (P), the above-mentioned multiple The distance (W) between the above-mentioned nozzles of the adjacent nozzles located at the extreme ends of the shower heads and the constant arrangement pitch (D) of the above-mentioned nozzles can actually satisfy the following relationship

W=mD (where m is an integer above 2)

The sub-scanning movement pitch (P) of the above-mentioned shower head and the constant arrangement pitch (D) of the above-mentioned nozzles can actually satisfy the following relationship

P=nD (where n is an integer above 1)

With this structure, in one main scan of the shower head, the possibility of spraying the color filter material onto adjacent pixels can be reduced regardless of whether the shower head passes near the area where the pixels are formed. In addition, nozzles that cannot eject ink can be reduced or eliminated during all the main scans, so that the use efficiency of the nozzles (that is, the drawing efficiency) can be improved. In addition, color filter elements can be efficiently arranged in relation to the number of scans of the print head.

(7) In the manufacturing apparatus of the color filter having the above-mentioned configuration, the above-mentioned shower heads can be arranged at an angle of 0°<θ<180° with respect to the direction of the head-wrapping of the above-mentioned shower heads, and the above-mentioned adjacent shower heads are located at the respective endmost nozzles. The distance between each other (W) and the arrangement spacing (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles can actually satisfy the following relationship

W＝mDcosθ (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head along the line-changing direction of the above-mentioned shower head and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned shower head can actually satisfy the following relational expression

P=nDcosθ (where n is an integer above 1)

If this structure is adopted, since the nozzle arrangement pitch can be actually an integer multiple of the interval between each filter element in the sub-scanning direction (i.e., the filter element pitch), it is possible to effectively use the droplet material ejection head (ink-jet nozzle). All nozzles in the head) are equipped with color filter elements.

(8) Next, the method for manufacturing a liquid crystal display device of the present invention is a method for manufacturing a liquid crystal display device including a process of forming a color filter, and is characterized in that by using the method for manufacturing a color filter described above, forming a color filter piece. According to this method of producing a color filter, it is possible to efficiently manufacture a liquid crystal display device having a color filter having excellent optical characteristics and having uniform color display characteristics on a plane.

(9) Next, the manufacturing device of the liquid crystal display device of the present invention is a kind of manufacturing device of the liquid crystal display device that is equipped with the liquid crystal display device of the color filter, is characterized in that the manufacturing device of the above-mentioned color filter is equipped with . According to the manufacturing apparatus of the color filter, it is possible to efficiently manufacture a liquid crystal display device having a color filter having excellent optical characteristics and uniform color display characteristics on a plane.

(10) Next, the method for manufacturing an electroluminescent substrate of the present invention is characterized in that: comprising: moving a plurality of shower heads arranged with a plurality of nozzles at a predetermined pitch along the scanning direction of the shower heads to perform main scanning on the substrate; The process of sub-scanning the above-mentioned substrate by moving according to a predetermined movement pitch along the head-changing direction intersecting with the above-mentioned head scanning direction; In the process, the interval (W) between the above-mentioned nozzles of the adjacent ones of the above-mentioned plurality of shower heads located at the respective endmost parts and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relational expression

W=mD (where m is an integer of 2 or more)

The sub-scanning movement pitch (P) of the above-mentioned shower head and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relationship

P=nD (where n is an integer above 1)

With this structure, in one main scan of the shower head, the possibility of spraying the functional layer forming material onto the adjacent functional layer can be reduced regardless of whether the shower head passes near the region where the functional layer is formed. In addition, in all the main scans, nozzles that cannot eject the functional layer forming material can be reduced or eliminated, so that the usage efficiency of the nozzles (that is, the drawing efficiency) can be improved. In addition, functional layers can be efficiently arranged in relation to the number of scans of the head.

In addition, only a substantially necessary amount of functional layer forming material can be sprayed from the nozzle to form a functional layer in a desired region. Therefore, it is not necessary to go through complicated steps such as exposure, development, and cleaning as in the case of photolithography. In addition, the usage-amount of the functional layer forming material necessary for manufacture can be reduced.

(11) In the method for manufacturing an electroluminescent substrate having the above-mentioned configuration, the above-mentioned showerheads can be arranged at an angle of 0°<θ<180° with respect to the row-wrapping direction of the above-mentioned showerheads, and the above-mentioned adjacent showerheads are located at the respective ends of the above-mentioned The distance (W) between the nozzles and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles can actually satisfy the following relationship

W＝mDcosθ (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head along the line-changing direction of the above-mentioned shower head and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned shower head can actually satisfy the following relational expression

P=nDcosθ (where n is an integer above 1)

If this structure is adopted, since the nozzle arrangement pitch can be substantially an integer multiple of the interval between the functional layers in the sub-scanning direction (i.e., the functional layer pitch), it is possible to effectively use the droplet material ejection head (ink jet head) All nozzles inside are equipped with functional layers.

(12) In the method of manufacturing an electroluminescent substrate having the above configuration, the nozzles positioned at the ends of the shower head may prevent the functional layer forming material from being sprayed onto the functional layer forming region on the substrate.

If this structure is adopted, even in the case of using a droplet material discharge head (ink jet head) whose ejection distribution characteristics of the functional layer forming material, i.e., liquid material, vary greatly, An appropriate amount of liquid material is sprayed, therefore, a functional layer having a uniform planar shape and thickness can be arranged in the functional layer formation area of the substrate, that is, the pixel formation area, and therefore, the discoloration of each pixel, that is, each functional layer can be prevented. discrete. In addition, colors that can prevent color dispersion in this way include colors represented by blue series such as spectral transmittance and spectral reflectance (Yxy).

(13) In the method of manufacturing an electroluminescent substrate having the above-mentioned configuration, it is preferable that the functional layer forming material is a light emitting layer forming material.

(14) In the method for manufacturing an electroluminescent substrate having the above-mentioned configuration, it is preferable that the functional layer forming material is a hole injection and transport layer forming material.

(15) In the method for manufacturing an electroluminescence substrate having the above configuration, the functional layer forming material preferably includes a material selected from the group consisting of a light emitting layer forming material and a hole injection and transport layer forming material.

(16) In the method for manufacturing an electroluminescent substrate having the above-mentioned configuration, it is preferable that the material for forming the light-emitting layer includes a plurality of materials having different light-emitting colors, and each of the above-mentioned shower heads sprays the plurality of materials with different light-emitting colors from the respective nozzles. each corresponding to a material. Assuming that all the nozzles only spray a part of the luminescent layer forming material, it is necessary to use another machine or replace the luminescent layer forming material to adapt to the remaining types of colors. On the other hand, according to the above-mentioned structure, each head can simultaneously spray different colors of light-emitting layer forming materials, so that the drawing efficiency can be improved when the light-emitting layer is arranged on the light-emitting layer forming area of the substrate, that is, the pixel forming area. , That is, the use efficiency of the nozzle, that is, the drawing efficiency.

Here, three colors of R (red), G (green), and B (blue) are generally used as the plurality of colors, but of course, C (dark blue), M (magenta), and Y (yellow) can also be used. Equal-color light-emitting layer-forming materials.

(17) In the method for manufacturing an electroluminescence substrate having the above-mentioned configuration, it is preferable that the material for forming the light-emitting layer contains a plurality of materials having different light-emitting colors, and each of the plurality of nozzles sprays the plurality of materials having different light-emitting colors. each corresponding to a material.

Assuming that the nozzles only spray a part of the luminescent layer forming material, if all the nozzles spray the same type of luminescent layer forming material, it is necessary to use another machine or replace the luminescent layer forming material to adapt to the remaining colors. On the other hand, according to the above-mentioned structure, each nozzle can simultaneously eject the luminescent layer forming material of each color among a plurality of colors, and therefore, the luminescent layer is arranged in the luminescent layer forming region of the substrate, that is, the pixel forming region. can improve drawing efficiency.

Here, three colors of light-emitting layer forming materials of R (red), G (green), and B (blue) are generally used as the plurality of colors, but of course, C (dark blue), M (magenta), and Y (magenta) can also be used. (yellow) and other colors.

(18) Next, the manufacturing apparatus of the electroluminescence substrate of the present invention is characterized in that: there are a plurality of nozzles for ejecting the droplet-shaped functional layer forming material; a print head; a main scanning drive device that moves the print head along the scan direction of the print head; and a sub-scan drive device that moves the print head along the line feed direction intersecting with the print head scan direction according to a specified moving pitch (P), the above-mentioned Among the plurality of shower heads, the adjacent shower heads are located at the intervals (W) between the above-mentioned nozzles at the respective end portions and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relational expression

W=mD (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relational expression

P=nD (where n is an integer above 1)

With this structure, in one main scan of the shower head, regardless of whether it passes near the area where the functional layer is formed, that is, the area where the pixel is formed, the amount of spraying of the functional layer forming material to the adjacent functional layer, that is, the adjacent pixel can be reduced. on possibility. In addition, in all the main scans, nozzles that cannot eject the functional layer forming material can be reduced or eliminated, so that the usage efficiency of the nozzles (that is, the drawing efficiency) can be improved. In addition, functional layers can be efficiently arranged in relation to the number of scans of the head.

In addition, only a substantially necessary amount of functional layer forming material can be sprayed from the nozzle to form a functional layer in a desired region. Therefore, it is not necessary to go through complicated steps such as exposure, development, and cleaning as in the case of photolithography. In addition, the usage-amount of the color filter material necessary for manufacture can be reduced.

(19) In the electroluminescence substrate manufacturing apparatus having the above-mentioned configuration, the above-mentioned showerheads can be arranged at an angle of θ°<θ<180° with respect to the direction of the row-feeding of the above-mentioned showerheads, and the above-mentioned adjacent showerheads are located at the respective extreme ends of the above-mentioned The distance (W) between the nozzles and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles can actually satisfy the following relationship

W＝mDcosθ (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head along the line-changing direction of the above-mentioned shower head and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned shower head can actually satisfy the following relational expression

P=nDcosθ (where n is an integer above 1)

If this structure is adopted, since the nozzle arrangement pitch can be substantially an integer multiple of the interval between the functional layers in the sub-scanning direction (i.e., the functional layer pitch), it is possible to effectively use the droplet material ejection head (ink jet head) All nozzles inside are equipped with functional layers.

(20) Next, the method for manufacturing an electroluminescent device of the present invention is a method for manufacturing an electroluminescent device including a step of forming a functional layer, characterized in that by using the method for manufacturing an electroluminescent substrate described above, forming functional layer. According to this method of manufacturing an electroluminescent device, it is possible to efficiently manufacture an electroluminescent device having an electroluminescent substrate having excellent optical characteristics and having uniform display characteristics on a plane.

(21) Next, the manufacturing device of the electroluminescent device of the present invention is a manufacturing device of the electroluminescent device for manufacturing the electroluminescent device equipped with the electroluminescent substrate, which is characterized in that the electroluminescent device described above is equipped with Manufacturing equipment for light-emitting substrates. According to this electroluminescent device manufacturing apparatus, it is possible to efficiently manufacture an electroluminescent device having an electroluminescent substrate having excellent optical characteristics and having uniform display characteristics on a plane.

(22) Next, the nozzle scanning method of the present invention is characterized in that it includes: moving a plurality of nozzles arranged with a plurality of nozzles at predetermined intervals along the nozzle scanning direction to perform main scanning on the substrate; The process of sub-scanning the above-mentioned substrate by moving the line-feeding direction of the printhead intersecting with the scanning direction of the printhead according to a prescribed movement pitch; The interval (W) between the above-mentioned nozzles at the respective extreme ends of the shower head and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relationship

W=mD (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relational expression

P=nD (where n is an integer above 1)

With this structure, in one main scan of the head, regardless of whether the nozzle passes near the area where the element is formed, the possibility of spraying the ejected material onto the adjacent element can be reduced. In addition, in all the main scans, it is possible to reduce or eliminate the number of nozzles that cannot eject the ejected material, so that the use efficiency of the nozzles (that is, the drawing efficiency) can be improved. In addition, the ejected objects can be efficiently arranged in relation to the number of scans of the head.

In addition, the elements in the desired area can be formed by ejecting only a substantially necessary amount of ejected material from the head, so there is no need to go through complicated steps such as exposure, development, and cleaning as in the case of photolithography. In addition, It is possible to reduce the amount of ejected material required for manufacturing. The scanning method of the shower head of the above-mentioned structure can be used in all industrial technologies that carry out fine patterning on the base material. For example, as an example of its application range, various semiconductor elements (such as thin film transistors, thin film diodes, etc.) can be considered. , and the formation of insulating films, etc.

In addition, depending on the elements to be formed, various choices can be made for the discharge material. For example, in addition to the above-mentioned color filter material and functional layer forming material, conductive materials such as silica glass precursors and metal compounds can be considered as examples. material, dielectric material, or semiconductor material, etc.

(23) In the nozzle scanning method with the above configuration, the nozzles can be arranged at an angle of 0°<θ<180° with respect to the row-feeding direction of the nozzles, and the adjacent nozzles are located between the nozzles at their respective ends The spacing (W) of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles (Dcosθ) can actually satisfy the following relationship

W＝mDcosθ (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head along the line-changing direction of the above-mentioned shower head and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned shower head can actually satisfy the following relational expression

P=nDcosθ (where n is an integer above 1)

If this structure is adopted, since the nozzle arrangement pitch can be actually an integer multiple of the interval between each element in the sub-scanning direction, all the nozzles in the droplet material ejection head (inkjet head) can be effectively used, and the arrangement of ejection things.

(24) In the head scanning method having the above configuration, the nozzles positioned at the ends of the head can prevent the ejection material from being ejected onto the ejection-attached area on the substrate.

If this structure is adopted, even in the case of using a droplet material discharge head (inkjet head) whose discharge distribution characteristics vary greatly, an appropriate number of ink jets can be ejected from the droplet material discharge head (inkjet head). Since the ejection material can be ejected, elements having a uniform planar shape and thickness can be arranged in the element formation region of the substrate, that is, the pixel formation region, so that the characteristics of each element can be prevented from being scattered.

(25) In the head scanning method with the above configuration, preferably, the ejected material includes a plurality of materials having different properties, and each of the heads ejects a corresponding one of the plurality of materials having different properties from the respective nozzles. Assuming that all the nozzles only eject one type of ejection material, it is necessary to use another machine or replace the ink to adapt to the remaining types of colors. On the other hand, according to the above-mentioned structure, each head can eject materials with different characteristics at the same time. Therefore, it is possible to improve the drawing efficiency when the element is arranged in the element formation area of the substrate, that is, the pixel formation area, that is, the nozzle. The usage efficiency, that is, the drawing efficiency.

(26) In the head scanning method with the above configuration, preferably, the ejected material includes a plurality of materials having different properties, and each of the plurality of nozzles ejects a material corresponding to each of the plurality of materials having different properties. Assuming that the nozzles only eject one type of ejection material, if all the nozzles eject the same type of ejection material, it is necessary to use another machine or replace the ejection material to adapt to the colors of the remaining types. On the other hand, according to the above configuration, discharge materials with different characteristics can be simultaneously discharged from a plurality of nozzles, and therefore, drawing efficiency can be improved when arranging components in the component formation region of the substrate.

(27) Secondly, the nozzle scanning device of the present invention is characterized in that: there are a plurality of nozzles for ejecting droplet-shaped color filter materials; a plurality of nozzles are arranged with a plurality of nozzles at constant arrangement intervals (D); the above-mentioned The main scanning driving device that moves the printing head along the scanning direction of the printing head; and the sub-scanning driving device that moves the printing head along the line-changing direction of the printing head that intersects with the scanning direction of the printing head according to the specified moving pitch (P). The distance (W) between the above-mentioned nozzles of the adjacent spray heads located at the respective extreme ends and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relational expression

W=mD (where m is an integer above 2)

The sub-scanning movement pitch (P) of the above-mentioned shower head and the constant arrangement pitch (D) of the above-mentioned nozzles actually satisfy the following relationship

P=nD (where n is an integer above 1)

With this structure, in one main scan of the head, the possibility of spraying the ejected matter, that is, ink, onto adjacent elements can be reduced regardless of whether the head passes near the region where the elements are formed. In addition, in all the main scans, nozzles that cannot eject material can be reduced or eliminated, so that the use efficiency of the nozzles (that is, the drawing efficiency) can be improved. In addition, elements can be efficiently arranged in relation to the number of scans of the head.

In addition, only an almost necessary amount of ejection material can be ejected from the ejection head to form the elements in the desired area, so there is no need to go through complicated steps such as exposure, development, and cleaning as in the case of photolithography. In addition, It is possible to reduce the amount of ejection material necessary for manufacturing.

(28) In the nozzle scanning device with the above configuration, the nozzles can be arranged at an angle of 0°<θ<180° with respect to the direction of line feed of the nozzles, and the adjacent nozzles are located between the nozzles at the endmost parts of each other. The spacing (W) of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles (Dcosθ) can actually satisfy the following relationship

W＝mDcosθ (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head along the line-changing direction of the above-mentioned shower head and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned shower head can actually satisfy the following relational expression

P=nDcosθ (where n is an integer above 1)

If this structure is adopted, since the nozzle arrangement pitch can be actually an integer multiple of the interval between the elements in the sub-scanning direction, all the nozzles in the droplet material ejection head (ink jet head) can be effectively used, and each element can be arranged. .

(29) Next, the film forming method of the present invention is characterized in that it includes the step of moving a plurality of shower heads arranged with a plurality of nozzles at predetermined intervals along the head scanning direction to perform main scanning on the substrate; The process of sub-scanning the above-mentioned substrate by moving the heads in the line-feeding direction intersecting with the scanning direction according to a predetermined movement pitch; The distance (W) between the above-mentioned nozzles of the adjacent spray heads located at the respective end portions and the constant arrangement pitch (D) of the above-mentioned nozzles satisfy the following relational expression

W≈mD (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head and the constant arrangement pitch (D) of the above-mentioned nozzles satisfy the following relational expression

P≈nD (where n is an integer above 1)

With this configuration, the possibility of ejecting the film material to the adjacent ejection target area can be reduced regardless of whether the head passes near the area where the film material should be ejected (hereinafter referred to as the ejection target area) during one main scan. In addition, in all the main scans, nozzles that cannot eject the film material can be reduced or eliminated, so that the use efficiency of the nozzles (that is, the drawing efficiency) can be improved. In addition, a film can be efficiently formed in relation to the number of scans of the shower head.

In addition, only an almost necessary amount of film material is sprayed from the nozzle, and a film can be formed in a desired area. Therefore, it is not necessary to go through complicated steps such as exposure, development, and cleaning when using photolithography. In addition, it can Reduce the amount of membrane material used for manufacturing.

(30) In the film forming method with the above configuration, the above-mentioned shower heads can be arranged at an angle of 0°<θ<180° with respect to the direction of line change of the above-mentioned shower heads, and the above-mentioned adjacent shower heads are located between the nozzles at the endmost parts of each other. The spacing (W) of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles (Dcosθ) can satisfy the following relationship

W≈mDcosθ (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head along the line-changing direction of the above-mentioned shower head and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned shower head can satisfy the following relational expression

P≈nDcosθ (where n is an integer above 1)

If this structure is adopted, since the nozzle arrangement pitch can be substantially an integer multiple of the interval between the respective ejection target areas in the sub-scanning direction, all the nozzles in the droplet material ejection head (ink jet head) can be effectively used, Spray film material.

(31) In the film forming method having the above configuration, the nozzles located at the ends of the shower head can prevent the film material from being sprayed onto the film formation region on the substrate.

According to this structure, even in the case of using a droplet material discharge head (ink jet head) whose ejection distribution characteristics of the film material vary greatly, an appropriate amount of film material can be ejected from the droplet material discharge head (ink jet head) , That is, a liquid material, therefore, a film having a uniform planar shape and thickness can be formed in the film formation region on the substrate, and therefore, dispersion of film characteristics with positions can be prevented.

(32) In the film-forming method of the above-mentioned constitution, the above-mentioned film material preferably includes a plurality of film materials with different characteristics, and each of the above-mentioned spray heads sprays a material corresponding to each of the above-mentioned various film materials with different characteristics from the respective above-mentioned nozzles. . Assuming that all nozzles only spray one kind of film material, it is necessary to use another machine or replace the film material to adapt to the color of the remaining types of film materials. On the other hand, according to the configuration described above, different types of film materials can be simultaneously ejected from each head, thereby improving the use efficiency of the nozzles when ejecting the film materials to the film formation region of the substrate, that is, the drawing efficiency.

(33) In the film forming method of the above configuration, preferably, the film material includes a plurality of materials having different properties, and each of the plurality of nozzles sprays a corresponding one of the plurality of materials having different properties. Assuming that the nozzles only spray one kind of film material, if all the nozzles spray the same kind of film material, it is necessary to use another machine or replace the film material to adapt to the remaining colors. On the other hand, according to the above-mentioned structure, various film materials among a plurality of film materials can be sprayed at the same time, so that the drawing efficiency when spraying the film materials to the film formation region on the substrate can be improved.

(34) Next, the film forming device of the present invention is characterized in that: there are a plurality of nozzles for ejecting droplet-shaped film materials; a plurality of nozzles with the plurality of nozzles arranged at a constant arrangement interval (D); The main scanning driving device that moves along the scanning direction of the printing head; and the sub-scanning driving device that moves the printing head along the line-changing direction of the printing head intersecting with the scanning direction of the printing head according to the specified moving pitch (P), and the adjacent printing heads of the plurality of printing heads are The distance (W) between the above-mentioned nozzles of the spray heads located at the respective extreme parts and the constant arrangement pitch (D) of the above-mentioned nozzles satisfy the following relationship

W≈mD (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head and the constant arrangement pitch (D) of the above-mentioned nozzles satisfy the following relational expression

P≈nD (where n is an integer above 1)

With this configuration, the possibility of ejecting the film material to the adjacent ejection target area can be reduced regardless of whether the head passes near the area where the film material should be ejected (hereinafter referred to as the ejection target area) during one main scan. In addition, in all the main scans, nozzles that cannot eject the film material can be reduced or eliminated, so that the use efficiency of the nozzles (that is, the drawing efficiency) can be improved. In addition, a film can be efficiently formed in relation to the number of scans of the shower head.

In addition, only an almost necessary amount of film material is sprayed from the nozzle, and a film can be formed in a desired area. Therefore, it is not necessary to go through complicated steps such as exposure, development, and cleaning when using photolithography. In addition, it can Reduce the amount of membrane material used for manufacturing.

(35) In the film forming apparatus having the above configuration, the above-mentioned shower heads can be arranged at an angle of 0°<θ<180° with respect to the row-wrapping direction of the above-mentioned shower heads, and the above-mentioned adjacent shower heads are located between the nozzles at the endmost portions of each other. The spacing (W) of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles (Dcosθ) can satisfy the following relationship

W≈mDcosθ (where m is an integer above 2)

In addition, the sub-scanning movement pitch (P) of the above-mentioned shower head along the line-changing direction of the above-mentioned shower head and the arrangement pitch (Dcosθ) of the above-mentioned nozzles along the line-changing direction of the above-mentioned shower head can satisfy the following relational expression

P≈nDcosθ (where n is an integer above 1)

If this structure is adopted, since the nozzle arrangement pitch can be substantially an integer multiple of the interval between the respective ejection target areas in the sub-scanning direction, all the nozzles in the droplet material ejection head (ink jet head) can be effectively used, Spray film material.

(36) The method for manufacturing an electro-optical device according to the present invention is characterized by employing the film-forming method with the structure of (26) above.

(37) The electro-optical device of the present invention is characterized in that it is manufactured using the method for manufacturing an electro-optical device having the configuration of (33) above.

(38) The electronic device of the present invention is characterized in that it includes the electro-optical device having the configuration of (34) above.

(39) The electronic device of the present invention is characterized by comprising a liquid crystal display device manufactured by the method for manufacturing a liquid crystal display device having the configuration of (8) above.

(40) An electronic device of the present invention is characterized by comprising an electroluminescent device manufactured by the method for manufacturing an electroluminescent device having the configuration of (17) above.

[Description of drawings]

FIG. 1 is a plan view showing main steps of an embodiment of a method of manufacturing a color filter of the present invention.

2 is another embodiment of the manufacturing method of the color filter of the present invention, which is a plan view showing an embodiment when the inkjet head (droplet material discharge head) 22 is arranged at an angle θ with respect to the head feed direction Y.

3 is a perspective view showing an example of a print head (ink drop material ejection mechanism) used in the color filter manufacturing apparatus of the present invention.

4 is a plan view showing another example of the print head (ink drop material ejection mechanism) used in the manufacturing apparatus of the color filter of the present invention.

5 is a plan view showing the planar shape of the color filter obtained by the method of manufacturing the color filter and the device thereof according to the present invention. In particular, (a) shows the overall motherboard before the color filter is cut out, and (b) shows the color filter after being cut out. of a color filter.

Fig. 6 shows the main steps of the manufacturing method of the color filter of the present invention by using the change of the cross-sectional structure of the color filter, and each figure showing the cross-sectional structure shows the cross-section of the color filter along the line VII-VII in Fig. 5(b) Structural changes. In particular, (a) shows the state before the color filter is sprayed, (b) shows the state after the color filter is sprayed, (c) shows the state where the color filter is arranged, and (d) shows the state after the protective film is formed again. .

7 is a plan view showing an example of an arrangement of display dots for three colors of R (red), G (green), and B (blue) in a color filter.

8 shows an embodiment of an inkjet device (droplet material ejection device) constituting a main part of each manufacturing device of a color filter manufacturing device, a liquid crystal display device manufacturing device, and an electroluminescent device manufacturing device according to the present invention. Example oblique view.

Fig. 9 is a perspective view showing an enlarged main part of the device shown in Fig. 8 .

FIG. 10 is an enlarged perspective view showing an inkjet head (droplet material discharge head), which is a main part of the device shown in FIG. 9 .

Fig. 11 is a perspective view showing a modification of the inkjet head (droplet material discharge head).

Fig. 12 is a plan view showing another modification of the inkjet head (droplet material discharge head).

Fig. 13 is a plan view showing still another modification of the inkjet head (droplet material discharge head).

Fig. 14 is a plan view showing still another modification of the inkjet head (droplet material discharge head).

Fig. 15 is a diagram showing an example of the internal structure of an inkjet head (droplet material discharge head), (a) is a perspective view showing the internal structure partially cut away, and (b) is a view along the J-J line in (a) A cutaway view of the sectional structure.

Fig. 16 is a plan view showing still another modification of the inkjet head (droplet material discharge head).

Fig. 17 is a block diagram showing an electrical control system used in the inkjet head (droplet material discharge head) device shown in Fig. 8 .

FIG. 18 is a flowchart showing a control flow executed by the control system shown in FIG. 17 .

Fig. 19 is a perspective view showing still another modification of the inkjet head (droplet material discharge head).

FIG. 20 is a process diagram showing an example of a method of manufacturing a liquid crystal display device of the present invention.

21 is a perspective view showing an example of a liquid crystal display device manufactured by the method for manufacturing a liquid crystal display device of the present invention in an exploded state.

FIG. 22 is a cross-sectional view showing the cross-sectional structure of the liquid crystal display device along line X-X in FIG. 21 .

Fig. 23 is a process diagram showing an example of a method of manufacturing the electroluminescence device of the present invention.

FIG. 24 is a cross-sectional view of the electroluminescent device corresponding to the process diagram shown in FIG. 23 .

FIG. 25 is a plan view showing an example of a conventional method of manufacturing a color filter.

Fig. 26 is a diagram for explaining characteristics of a conventional color filter.

Fig. 27 is a perspective view showing a digital camera as an example of the electronic device of the present invention.

28(A) to (C) show application examples of the electronic device of the present invention, (A) is a mobile phone, (B) is a watch, and (C) is a portable information device.

[Detailed ways]

(Example of Manufacturing Method of Color Filter)

Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. FIG. 1 shows a method of using an inkjet head (droplet material discharge head) 22 which is an example of a method of manufacturing a color filter according to the present invention. In this embodiment, as shown in FIG. 1( a), a printing head (droplet material ejection mechanism) 22a in which one or more inkjet heads (droplet material ejection heads) 22 are arranged at predetermined adjacent intervals is used. . Each inkjet head (droplet material ejection head) 22 has a plurality of nozzles 27 arranged in a row at a constant arrangement pitch D. As shown in FIG.

The printing head (droplet material ejection mechanism) 22a performs main scanning on the substrate 2 along the head scanning direction (X direction as the longitudinal direction in FIG. The direction of the line feed of the nozzle (the Y direction as the horizontal direction in FIG. 1( a )) performs sub-scanning on the substrate 2 according to a predetermined moving pitch P.

Each inkjet head (droplet material ejection head) 22 ejects a color filter material as ink from each of the plurality of nozzles 27, and the ejected color filter material is selectively supplied to the plurality of color filter element forming regions 7 on the substrate 2. , that is, in the pixel forming region. In addition, the main scan and the sub scan of the inkjet head (droplet material discharge head) 22 are repeated as many times as necessary, so that the color filter material is attached to the color filter element formation region 7 of the substrate 2 with a predetermined shape and a predetermined thickness. . Therefore, the color filter element 3 having a predetermined shape and a predetermined thickness is formed on the substrate 2 to form a pixel.

As shown in this embodiment, in the case of performing color display using color filter elements 3 corresponding to three primary colors of R (red), G (green), and B (blue), one color filter element 3 forms one display point, and R ( Red), G (green), and B (blue) three-color display points form a unit and form a pixel.

In the present embodiment, assuming that the constant arrangement pitch of the nozzles 27 is "D", among the plurality of nozzles 27 respectively provided by the adjacent inkjet heads (droplet material nozzles) 22, the nozzles that are located at the most ends and are closest to each other The interval between is "W", set the

W=mD (where m is an integer above 2)

That is, the interval W between adjacent nozzles 27 between adjacent inkjet heads (droplet material ejection heads) 22 is configured to be an integral multiple of the arrangement pitch D of nozzles 27 .

In addition, as shown in Figure 1(b) at the same time, assuming that the sub-scanning movement pitch of the print head (droplet material ejection mechanism) 22a along the head feed direction Y is "P", and the constant arrangement pitch of the nozzles 27 is "D" ,set up

P=nD (where n is an integer above 1)

That is, the movement pitch P of the sub-scanning of the inkjet head (droplet material discharge head) 22 is constituted by an integral multiple of the array pitch D of the nozzles 27 .

By setting the above-mentioned relationship between the nozzle interval W between the adjacent inkjet heads (droplet material ejection heads), the sub-scanning movement pitch P, and the arrangement pitch D of the nozzles, the printing head (droplet material ejection mechanism) ) 22a during the main scanning and sub-scanning, the nozzles 27 can be made to accurately face all the color filter element forming regions 7 and pass over them, so that the drawing efficiency can be improved and ink can be ejected at an appropriate position. In addition, color filter elements 3 having a uniform planar shape and uniform thickness can be formed thereby to form pixels on the substrate 2 .

FIG. 2 shows a method of using an inkjet head (droplet material discharge head) 22 according to another embodiment of the color filter manufacturing method of the present invention. In this embodiment, more than one inkjet head (droplet material ejection head) 22 is arranged at an angle θ with respect to the direction Y in which the heads change lines. However, θ is an angle larger than 0° and smaller than 180°.

Assuming that the constant arrangement pitch of the nozzles 27 is "D", then the arrangement pitch of the nozzles 27 along the direction Y of the nozzle changeover is "Dcosθ". In addition, when assuming that the interval between the nozzles at the most end and the nozzles closest to each other among the plurality of nozzles 27 respectively provided in the inkjet heads (droplet material ejection heads) 22 adjacent to each other is "W", set

W＝mDcosθ (where m is an integer above 2)

That is, the spacing W between adjacent nozzles 27 in the head-changing direction between adjacent inkjet heads (droplet material discharging heads) 22 is constituted by an integer multiple of the arrangement pitch Dcosθ of the nozzles 27 along the head-changing direction.

In addition, at the same time, the sub-scanning movement pitch P (refer to FIG. 1(b)) of the print head (droplet material ejection mechanism) 22a along the direction Y of the nozzle line change is an integer multiple of the arrangement pitch Dcosθ of the nozzles 27 along the line change direction Y of the nozzle, that is

P=nDcosθ (where n is an integer above 1)

With this structure, even when the interval between the color filter elements 3 (refer to FIG. All the nozzles 27 of the droplet material discharge head) 22 accurately pass through the pixel formation area, and therefore, all the nozzles 27 can be used to eject ink to an appropriate position on the substrate 2 . Furthermore, the pixel forming efficiency of the color filter, that is, the drawing efficiency can be improved by this.

In addition, in the printing head (droplet material ejection mechanism) 22a shown in FIG. 1 or FIG. One nozzle 27 at each end can also be configured so that no color filter material is sprayed into the color filter element formation region 7 on the substrate 2 .

If this is done, even if the ink ejection distribution characteristics of the inkjet head (droplet material ejection head) 22 along the nozzle row 28 vary greatly, an appropriate amount of ink can be ejected from the inkjet head (droplet material ejection head) 22. Ink, the color filter elements having a uniform planar shape and thickness can be arranged in the respective color filter element forming regions 7 in the substrate 2 .

Suppose, in the case of using all 180 nozzles 304 along the nozzle row 305 shown in FIG. Or the reflectance decreases, and as a result, band-shaped portions extending in the main scanning direction may be formed in an image observed through the color filter.

In contrast, as described above, for example, in FIGS. 1 and 2 , if the respective 10 nozzles 27 at both ends are not configured to spray color filter materials, the number of nozzles 27 is equivalent to (180-10-10 ) = 160 inkjet, each color filter element 3 becomes a color filter element having a uniform planar shape and thickness, and therefore, the obtained color filter is formed into an optically uniform color filter.

In addition, in the case of forming the color filter element 3 on the substrate 2 using the printing head (droplet material ejection mechanism) 22a shown in FIG. 1 or FIG. When three kinds of inks constitute the color filter material, more than one inkjet head (droplet material nozzle) 22 can be divided into three types, so that all the plurality of nozzles 27 arranged respectively only eject R (red), G (green) , B (blue) and one of the three inks to form a color filter element 3 of a corresponding color.

In this case, one or more inkjet heads (droplet material ejection heads) 22 are arranged at predetermined adjacent intervals in the print head (droplet material ejection mechanism) 22a, The mechanism) 22a scans the substrate 2, and the color filter elements 3 corresponding to R (red), G (green), and B (blue) colors can be formed on the substrate 2 at the same time in one main scan. Therefore, pixel formation efficiency, that is, drawing efficiency can be improved.

In addition, in the case where the color filter material is composed of three kinds of inks R (red), G (green), and B (blue), it is possible to adopt such a structure that among the plurality of inkjet heads (droplet material ejection heads) 22 A plurality of, for example, three independent flow paths are formed inside at least one of them, and each of the three inks of R (red), G (green), and B (blue) is respectively introduced into each flow of these flow paths. on the road.

In this case, inks of different colors can be ejected from nozzles 27 in the same inkjet head (droplet material ejection head) 22, and R (red), G (green), For each color of B (blue), color filter elements 3 corresponding to each color can be formed on the substrate 2 at the same time. Also in this method, the pixel formation efficiency, that is, the drawing efficiency can be improved.

(Example of Manufacturing Apparatus for Color Filter)

In FIG. 1 , the color filter manufacturing apparatus of the present invention is an apparatus for manufacturing a color filter 1 configured by arranging pixels on a substrate 2 by color filter elements 3 having a predetermined shape and thickness.

FIG. 1, FIG. 8 and FIG. 9 show an embodiment of the manufacturing apparatus of the color filter of the present invention. The control device of the color filter shown here is equipped with: a printing head (droplet material ejection mechanism) 22a (refer to FIG. 1 ) with a plurality of nozzles 27; (not shown in the figure); Make the printing head (droplet material ejection mechanism) 22a move, carry out the main scanning driving device 19 (referring to Fig. 2 and Fig. 3) of main scanning to substrate 2; Mechanism) 22a moves, and the sub-scan driving device 21 (referring to Fig. 2 and Fig. 3) that substrate 2 is sub-scanned; The nozzle injection control device (not shown) that controls the work of nozzle 27; A main scanning control device (not shown in the figure) for the operation of the sub-scanning control device (not shown in the figure);

In the above-mentioned structure, a plurality of nozzles 27 are arranged into more than one inkjet head (droplet material ejection head) 22 in a column according to a constant arrangement pitch D, and then such more than one inkjet head (droplet material ejection head) ) 22 are arranged at predetermined adjacent intervals to form a printing head (droplet material ejection mechanism) 22a. In addition, a color filter material supply device (not shown in the figure) supplies the color filter material to a plurality of nozzles 27 constituting the print head (droplet material ejection mechanism) 22a. The color filter material supplied from the nozzles 27 is selectively sprayed into the color filter element formation area 7 on the substrate 2, thereby sprayed into the pixel formation area, to form the color filter element 3, thereby forming a pixel.

The main scanning drive unit 19 scans the substrate 2 by moving the print head (droplet material ejection mechanism) 22 a along the head scanning direction (that is, the vertical direction X in FIG. 1 ) which is a constant direction. In addition, the sub-scan driving device 21 sub-scans the substrate 2 by moving the print head (droplet material ejection mechanism) 22a along the head-feeding direction Y at a predetermined movement pitch P (see FIG. 1( b )). In addition, the aforementioned nozzle spraying control device not shown in the figure controls the spraying amount and spraying time of the color filter material sprayed from the plurality of nozzles 27 .

In the manufacturing apparatus of the color filter of the present embodiment, the printing head (droplet material ejection mechanism) 22a is moved along the head scanning direction (that is, the longitudinal direction X in FIG. 1( a)) as a constant direction, and the substrate 2 Do the main scan. In addition, at the same time, the substrate 2 is sub-scanned by moving it at a predetermined movement pitch P along the head feed direction Y.

During these main scanning and sub-scanning, a color filter material is selectively ejected from a plurality of nozzles 27 arranged in one or more inkjet heads (droplet material ejection heads) 22 into the color filter element formation region 7 on the substrate 2 , thereby spraying into the pixel forming region. In addition, the above-mentioned main scanning and sub-scanning are repeated as many times as necessary to deposit the color filter material in the color filter element formation region 7 on the substrate 2 with a predetermined shape and predetermined thickness, and thus adhere to the pixel formation region. Therefore, color filter elements 3 having a predetermined shape and a predetermined thickness, and thus pixels, are arranged on the substrate 2 .

In addition, in the manufacturing apparatus of the color filter of the present embodiment, in FIG. 1 , the mutual interval W between the nozzles of the inkjet heads (droplet material nozzles) 22 respectively located at the endmost and at the same time the closest nozzles is Integer multiples of the arrangement spacing D of 27, namely

W=mD (where m is an integer above 2)

And at the same time, the sub-scan movement pitch of the print head (droplet material ejection mechanism) 22a along the line feed direction Y of the nozzle is an integral multiple of the constant arrangement pitch D of the nozzles 27, that is

P=nD (where n is an integer above 1)

FIG. 3 shows an example of a print head (droplet material ejection mechanism) 22a in the color filter manufacturing apparatus of the present invention. In this example, the printing head (droplet material ejection mechanism) 22a has six inkjet heads (droplet material ejection heads) 22, and a plurality of, for example, 12 inkjet heads (droplet material ejection heads) 22 are formed. The nozzles 27 form a linear nozzle row 28 . The arrangement pitch P3 of the nozzles 27 is, for example, 141 microns, the diameter D1 of the nozzles 27 is, for example, 28 microns, and the formation pitch of the color filter elements (thus, pixels) is, for example, 141 microns.

In addition, as mentioned above, as shown in FIG. 2 , the inkjet heads (droplet material ejection heads) 22 can be arranged at an angle of θ with respect to the direction Y in which the heads change lines. This angle θ is an angle larger than 0° and smaller than 180°. And in this case, the mutual spacing W of the nozzles 27 at the adjacent ends of the adjacent inkjet heads (droplet material nozzles) 22 is an integer multiple of the arrangement pitch Dcosθ of the nozzles 27 along the direction Y of the nozzle line, that is,

W＝mDcosθ (where m is an integer above 2)

And at the same time, the sub-scan movement pitch P (referring to FIG. 1 ) of the print head (droplet material ejection mechanism) 22a along the line-changing direction Y of the nozzle is an integer multiple of the arrangement pitch Dcosθ of the nozzles 27 along the line-changing direction Y of the nozzle, that is

P=nDcosθ (where n is an integer above 1)

FIG. 4 shows another example of the print head (droplet material ejection mechanism) 22a in the color filter manufacturing apparatus of the present invention. In this example, the printing head (droplet material ejection mechanism) 22a has 6 inkjet heads (droplet material ejection heads) 22, and a plurality of, for example, 12 inkjet heads (droplet material ejection heads) 22 are provided. The nozzles 27 form a nozzle row 28 . The inkjet head (droplet material ejection head) 22 is disposed at an inclination angle θ, which is set to, for example, 57.9°.

In addition, the arrangement pitch of the nozzles 27 is, for example, 141 microns, the diameter of the nozzles 27 is, for example, 28 microns, and the formation pitch of the color filter elements (thus, pixels) is, for example, 75 microns.

(An example of a color filter)

Hereinafter, the color filter manufactured by the manufacturing method of the color filter and its manufacturing apparatus of this invention is demonstrated. FIG. 5 is a plan view showing the planar shape of the color filter, and in particular, (a) shows the entire motherboard before each color filter is cut out, and (b) shows one cut out color filter.

FIG. 6 shows the manufacturing process of the color filter in the order of steps, and each figure corresponds to a part of the cross-sectional structure of the color filter along line VII-VII in FIG. 5( b ). Especially in Fig. 6, (a) shows the state before spraying the color filter material, (b) shows the state after spraying the color filter material, (c) shows the state of disposing the color filter element, (d) shows the state after forming The state after the protective film.

In FIG. 5, the color filter 1 is formed by disposing a plurality of color filter elements 3 in a dot pattern (in FIG. 5(b), in a dot matrix) on a rectangular substrate 2 made of glass, plastic, etc. On the surface, as shown in Fig. 6(d), the protective layer 4 is laminated on it. In addition, FIG. 5( b ) shows the color filter 1 in a state where the protective layer 4 has been removed.

As shown in FIG. 6( d ), the color filter elements 3 are formed in regions divided by the partition walls 6 . The partition wall 6 is formed in a grid-like pattern as viewed from the arrow head B in FIG. 6( a ) by using a non-transparent resin material. The partition walls 6 form a plurality of rectangular regions arranged in a dot matrix, and the color filter elements 3 are formed by embedding color materials in these regions.

In addition, these color filter elements 3 are each formed of a color filter material of any one of R (red), G (green), and B (blue), and these color filter elements 3 of each color are arranged in a predetermined form. As this arrangement, any of the stripe arrangement, mosaic arrangement, and triangle arrangement shown in FIGS. 7( a ) to 7 ( c ) may be used.

A bar arrangement is an arrangement in which the columns of the matrix are all of the same color. The mosaic arrangement is an arrangement of any three color filter elements arranged on vertical and horizontal lines in three colors of R (red), G (green), and B (blue). The triangular arrangement makes the configuration of the color filter elements very different, and any three adjacent color filter elements are arranged in three colors of R (red), G (green), and B (blue).

In FIG. 5(b), the size T0 of the color filter 1 is, for example, 1.8 inches. In addition, the size of one color filter element 3 is, for example, horizontal x vertical = L0 x L1 = 30 microns x 100 microns. In addition, the interval (so-called inter-element pitch) P4 between the color filter elements 3 is, for example, 75 micrometers.

In addition, the pitch of the color filters 1 in the sub-scanning direction is preferably an integer multiple of the pitch of the color filter elements 3 . With such a configuration, the color filter element 3 can be formed more efficiently.

When such a color filter 1 is used as an optical element for full-color display, three color filter elements 3 of R (red), G (green), and B (blue) are used as a unit to form one pixel, and there is By selectively allowing light to pass through any one of R (red), G (green), and B (blue) in one pixel, or a combination thereof, full-color display can be performed. In this case, the partition wall 6 formed of a non-translucent resin material functions as a black matrix.

For example, the above-mentioned color filter 1 can be formed by cutting out from the large-area mother substrate 12 shown in FIG. 5( a ). Specifically, first, a pattern of one color filter 1 is formed on each surface of a plurality of color filter formation regions 11 formed in the mother substrate 12, and a pattern for cutting is formed around these color filter formation regions 11. grooves, and by cutting the mother substrate 12 along these grooves, color filters 1 can be formed one by one.

(Examples of Manufacturing Method and Apparatus for Color Filter)

Hereinafter, taking the case of manufacturing the color filter 1 shown in FIG. 5( b ) as an example, the manufacturing method and manufacturing apparatus of the color filter of the present invention will be more specifically described. In addition, in FIG. 6( a ), partition walls 6 in a grid-like pattern seen from the direction of the arrow head B are formed on the surface of the mother substrate 12 using a non-light-transmitting resin material. The mesh hole portion 7 in a mesh pattern is an area where the color filter element 3 is formed. When viewed from the direction of the nozzle head B, the planar size of each color filter element forming region 7 formed by the partition wall 6 is, for example, horizontal x vertical = 30 microns x 100 microns.

The partition wall 6 has the function of preventing the flow of the color filter material supplied to the color filter element forming region 7 and the function of the black matrix at the same time. In addition, partition walls 6 are formed by any patterning method, such as photolithography, and then heated and baked with a heater if necessary.

After the partition walls 6 are formed, in FIG. 6( b ), the color filter material 13 is filled in each color filter element formation region 7 by supplying the color filter material droplet 8 to the color filter element formation region 7 . In addition, in FIG. 6( b ), a case where an R (red) color filter 13R, a G (green) color filter 13G, and a B (blue) color filter 13B are used is shown.

When a predetermined amount of color filter material 13 is filled in each color filter element forming region 7, the mother substrate 12 is heated to, for example, about 70°C with a heater to evaporate the solvent in the color filter material 13. By this evaporation, as shown in FIG. 6(c), the volume of the color filter material 13 decreases. When the volume decreases rapidly, the supply of the liquid droplets 8 of the color filter material 13 and the heating of the liquid droplets 8 are repeated until a sufficient film thickness can be obtained as a color filter. Through the above-mentioned processing, only the solid part of the color filter material 13 is finally formed into a film, so that the desired color filter elements 3 can be formed.

After the color filter elements 3 are formed as described above, heat treatment is performed at a predetermined temperature for a predetermined time in order to completely dry the color filter elements 3 . Then, the protective film 4 is formed by an appropriate method such as spin coating, roll coating, or slitting, for example. The protective film 4 is formed mainly to protect the color filter element 3 and the like and to flatten the surface of the color filter 1 .

FIG. 8 shows an example of an inkjet device (droplet material ejection device) for performing the supply process of the color filter material 13 shown in FIG. 6( b ). The inkjet device (droplet material ejection device) 16 uses one of R (red), G (green), and B (blue), for example, a color filter material of R color as an ink droplet, and sprays and attaches it to the substrate. A device for a predetermined position in each color filter forming region 11 on the substrate 12 (see FIG. 5( a )). Inkjet devices (droplet material ejection devices) for the G-color filter material and the B-color color filter material can also be prepared separately, and their configurations are the same as those shown in FIG. 8 .

In FIG. 8 , the inkjet device (droplet material ejection device) 16 is equipped with: a print head (droplet material ejection head) 22 formed by arranging one or more inkjet heads (droplet material ejection heads) 22 at predetermined adjacent intervals. Mechanism) 22a (refer to Fig. 1) head unit 26; Control the head position control device 17 of the position of printing head (droplet material ejection mechanism) 22a; Control the substrate position control device 18 of the position of mother substrate 12; Make ink jet head (Liquid material spray head) 22 carries out the main scan driving device 19 that main scanning moves to mother substrate 12; Make inkjet head (drop material spray head) 22 carry out sub-scan driving device 21 to carry out sub-scanning movement to mother substrate 12; The substrate 12 is supplied to a predetermined working position in the inkjet device (droplet material ejection device) 16;

Devices such as a head position control device 17 , a substrate position control device 18 , a main scanning drive device 19 , and a sub-scanning drive device 21 are provided on the base 9 . In addition, these devices are covered with a cover 14 as needed.

As shown in FIG. 10 , the inkjet head (droplet material discharge head) 22 has, for example, a nozzle row 28 formed by arranging a plurality of nozzles 27 in a row. The number of nozzles 27 is, for example, 180, the diameter D1 of the nozzles 27 is, for example, 28 microns, and the nozzle pitch P3 between the nozzles 27 is, for example, 141 microns. In addition, with respect to the print head scanning direction (that is, the main scanning direction) X and the sub-scanning direction Y orthogonal to the color filter 1 and the mother substrate 12 in FIG. 5(a) and FIG. X direction and Y direction in FIG. 10 .

In addition, as shown in FIG. 11 , it is also possible to arrange two rows of nozzle rows 28 along the head scanning direction X, and use two nozzles 27 on the same main scanning line to supply color filter materials to one color filter element forming region 7. . At this time, the arrangement pitch P3 of the nozzles 27 can be set to about 141 micrometers.

In addition, as shown in FIG. 12 , two nozzle rows 28 may also be arranged along the print head scanning direction X, and a plurality of nozzles 27 may be arranged in a zigzag shape, and the color filter material may be supplied to the color filter element formation region 7 through these nozzles 27. (Refer to Figure 1(a)). In this case, if the arrangement pitch D of the nozzles 27 is 141 micrometers, the actual pitch P5 between the plurality of scanning lines extending in the main scanning direction X is 70.5 micrometers which is half of it.

In addition, as shown in FIG. 13 , a plurality of adjacent pairs of nozzle rows 28 are arranged along the nozzle scanning direction X, and a plurality of nozzles 27 included in the pair of nozzle rows 28 are arranged in a zigzag shape at the same time, forming an inkjet head (liquid drop material discharge head) 22, and these nozzles 27 can also be used to supply the color filter material to the color filter element forming region 7. In addition, in FIG. 13 , two sets of a pair of nozzle rows 28 having nozzles 27 arranged in a zigzag shape are shown. In addition, although the arrangement pitch D of the nozzles 27 is 141 micrometers, the actual pitch P5 on the main scanning line extending in the X direction is 70.5 micrometers which is half of that.

In addition, as shown in FIG. 14 , along the scanning direction X of the print head, three nozzle rows 28 may be arranged at 1/3 intervals to supply the color filter material to the color filter element forming region 7 . In this case, although the arrangement pitch D of the nozzles 27 is 141 micrometers, the actual pitch P5 on the main scanning line extending in the X direction is 47 micrometers which is one third of it.

As shown in FIG. 1, the inkjet head (droplet material ejection head) 22 is configured so that the nozzle row 28 is located in a direction perpendicular to the ejection head scanning direction X. In addition, depending on the situation, as shown in FIG. It is inclined by a predetermined angle θ with respect to the direction perpendicular to the head scanning direction X. During the translation of the inkjet head (droplet material nozzle) 22 along the scanning direction X of the nozzle, the color filter material, i.e. ink, is selectively ejected from a plurality of nozzles 27, so that the color filter material is attached to the mother substrate 12 (refer to FIG. 5( a) In the color filter element forming region 7 (see FIG. 6( a )). In addition, by shifting the inkjet head (droplet material discharge head) 22 by a predetermined distance in the sub-scanning direction Y, the main scanning position of the inkjet head (liquid droplet material discharge head) 22 can be shifted by a predetermined interval. The inkjet head (droplet material discharge head) 22 has, for example, the internal structure shown in FIG. 15( a ) and FIG. 15( b ). Specifically, the inkjet head (droplet material discharge head) 22 includes, for example, a stainless steel nozzle plate 29 ; a vibrating plate 31 facing the same; and a plurality of spacers 32 connecting them together. Between the nozzle plate 29 and the vibrating plate 31 , a plurality of ink chambers 33 and reservoirs 34 are formed with a partition member 32 . The plurality of ink chambers 33 and the reservoir 34 communicate with each other through passages 38 . An ink supply hole 36 is formed at an appropriate position of the vibrating plate 31 , and an ink supply device 37 is connected to the ink supply hole 36 . The ink supply device 37 supplies the color filter M of one of R (red), G (green), and B (blue), for example, an R color, to the ink supply hole 36 . The supplied color filter material M is filled in the reservoir 34 and then filled into the ink chamber 33 through the passage 38 .

Nozzles 27 for jetting the color filter material M from the ink chamber 33 are provided on the nozzle plate 29 . In addition, the ink pressurizing body 39 is attached to the back of the vibrating plate 31 on which the ink chamber 33 is formed corresponding to the ink chamber 33 . As shown in FIG. 15(b), the ink pressurizing body 39 has a piezoelectric element 41 and a pair of electrodes 42a and 42b sandwiching it. When the piezoelectric element 41 is energized to the electrodes 42 a and 42 b , it protrudes outward as indicated by the arrow head C and bends and deforms, thereby increasing the volume of the ink chamber 33 . Then, the color filter material M corresponding to the increased volume portion flows from the reservoir 34 through the passage 38 into the ink chamber 33 .

Next, when the energization to the piezoelectric element 41 is released, both the piezoelectric element 41 and the vibrating plate 31 return to their original shapes. Therefore, the ink chamber 33 also returns to the original volume, so the pressure of the color filter material M inside the ink chamber 33 rises, and the color filter material M becomes a droplet 8, which is directed toward the mother substrate 12 from the nozzle 27 (refer to FIG. 5 (a) )injection. In addition, in order to prevent deflection of the droplet 8 and clogging of the nozzle 27 , an ink repellent layer 43 made of, for example, Ni-tetrafluoroethylene eutectoid plating is provided on the peripheral portion of the nozzle 27 .

In Fig. 9, the nozzle position control device 17 has: the α motor 44 that makes the inkjet head (droplet material ejection mechanism) 22a rotate in the plane; The β motor 46 that the axis of direction Y swings and rotates; The γ motor 47 that makes the inkjet head (droplet material ejection mechanism) 22a swing and rotate around the axis parallel to the nozzle scanning direction X; and the inkjet head (droplet material ejection mechanism) ) 22a Z motor 48 that translates in the up and down direction.

As shown in FIG. 9 , the substrate position control device 18 shown in FIG. 8 includes: a table 49 on which the mother substrate 12 is placed; and a θ motor 51 that rotates the table 49 in a plane along the arrow head θ. In addition, as shown in FIG. 9, the main scanning drive unit 19 shown in FIG. 8 includes: a guide rail 52 extending in the main scanning direction X; and a slider 53 internally equipped with a pulse-driven linear motor. When the internally installed linear motor works, the slider 53 translates along the guide rail 52 toward the main scanning direction X.

In addition, as shown in FIG. 9 , the sub-scanning driving device 21 shown in FIG. 8 includes: a guide rail 54 extending in the sub-scanning direction Y; and a slider 56 incorporating a pulse-driven linear motor. When the built-in linear motor works, the slider 56 translates along the guide rail 54 toward the sub-scanning direction Y.

In the slider 53 or the slider 56, the pulse-driven linear motor can accurately control the rotation angle of the output shaft according to the pulse signal supplied to the motor, and therefore, the inkjet head supported on the slider 53 can be controlled with high precision. The position of the (droplet material discharge head) 22 in the head scanning direction X, the position of the stage 49 in the sub-scanning direction Y, and the like.

In addition, the position control of the print head (droplet material ejection mechanism) 22a and the stage 49 is not limited to position control using a pulse motor, but feedback control using a servo motor or other arbitrary control methods may be used.

The substrate supply device 23 shown in FIG. 8 includes: a substrate storage portion 57 for accommodating the mother substrate 12 ; and a robot arm 58 for transporting the mother substrate 12 . Manipulator 58 has: the base 59 that is arranged on the floor, ground etc.; the second arm 63; and the adsorption pad 64 provided under the front end of the second arm 63. The adsorption pad 64 can adsorb the motherboard 12 by air suction or the like.

In FIG. 8 , the capping device 76 and the cleaning device 77 are arranged below the trajectory of the printing head (droplet material ejection mechanism) 22a driven by the main scanning drive device 19 for main scanning movement, and on one side of the sub-scanning drive device 21. side position. In addition, the electronic balance 78 is arranged at the other side. The cleaning device 77 is a device for cleaning the inkjet head (droplet material discharge head) 22 . The electronic balance 78 is a device for measuring the weight of ink droplets ejected from each nozzle 27 (see FIG. 10 ) in the inkjet head (droplet material ejection head) 22 for each nozzle. Furthermore, the capping device 76 is a device for preventing the nozzles 27 (see FIG. 10 ) from drying out when the inkjet head (droplet material discharge head) 22 is in the waiting state.

The head camera 81 is disposed in the vicinity of the print head (droplet material ejection mechanism) 22a so as to move integrally with the printhead (droplet material ejection mechanism) 22a. In addition, a substrate camera 82 supported by a supporting device (not shown) provided on the susceptor 9 is arranged at a position capable of capturing an image of the mother substrate 12 .

The control device 24 shown in FIG. 8 includes: a computer body 66 housing a processor; a keyboard 67 as an input device; and a CRT (cathode ray tube) display 68 as a display device. As shown in FIG. 17, the processor includes: a CPU (Central Processing Unit) 69 for performing arithmetic processing; and a memory 71 as an information storage medium for storing various information.

As shown in FIG. 17, the pressure in the head position control device 17 shown in FIG. Each device of the head driving circuit 72 of the electric device 41 (see FIG. 15( b )) is connected to the CPU 69 through the input/output interface 73 and the bus 74 . In addition, various devices such as the substrate supply device 23 , the input device 67 , the display 68 , the electronic balance 78 , the cleaning device 77 , and the capping device 76 are also connected to the CPU 69 through the input/output interface 73 and the bus 74 .

The memory 71 is a concept including semiconductor memories such as RAM (Random Access Memory) and ROM (Read Only Memory), or external storage devices such as hard disks, CD-ROM reading devices, and disk-type storage media, and functions as follows: District: the storage area of the storage program software that has described the operation control order of inkjet device (droplet material ejection device) 16; Each of R (red), G (green), B (blue) shown in Fig. 7 will be realized; One of R (red), G (green), and B (blue) colors (for example, R1 color) for the arrangement is stored as coordinate data at the ejection position in the motherboard 12 (see FIG. 15( a )). A storage area for reading; a storage area for storing the sub-scanning movement amount of the mother substrate 12 along the sub-scanning direction Y in FIG. 9; an area that functions as a work area for the CPU 69 or a temporary file; storage area.

According to the program software stored in the memory 71, the CPU 69 controls the ejection of the color filter material, that is, the ink, to a predetermined position on the surface of the mother substrate 12. Cleaning operation section; Capping operation section for performing operation for capping processing; Weight measurement operation section for performing operation for weight measurement with electronic balance 78 (refer to FIG. 8 ); and Color filtering by inkjet drawing The drawing calculation part of the calculation for materials.

The drawing calculation section has: the drawing start position calculation section that sets the printing head (droplet material ejection mechanism) 22a to the initial position of drawing; The main scanning control operation unit for controlling the scanning movement at the speed; the sub-scanning control calculation unit for calculating the control to make the motherboard 12 stagger the sub-scanning amount along the sub-scanning direction Y according to the predetermined sub-scanning movement pitch; One of the plurality of nozzles 27 in the ink head (droplet material ejection head) 22 operates to eject ink, that is, various function calculation units such as a nozzle ejection control calculation unit for calculation of color filter material.

In addition, when a part or all of the above-mentioned various functions are realized by a separate logic circuit or an electronic circuit that does not use a CPU, instead of using the CPU 69 to realize a part or all of the above-mentioned various functions by software, it can replace the CPU 69 or In addition to the CPU 69, such electronic circuits and the like are used.

Next, the operation of the ink jet device (droplet material ejection device) 16 in FIG. 8 configured as above will be described based on the flowchart shown in FIG. 18 .

After the operator turns on the power, once the inkjet device (droplet material ejection device) 16 starts to operate, first, initial setting is performed in step S1. Specifically, the head unit 26, the substrate supply device 23, the control device 24, and the like are set to a predetermined initial state.

Next, if arrive weight measurement time (in step S2, yes), then by main scanning driving device 19, the shower head unit 26 shown in Figure 9 is moved to the position of electronic balance 78 shown in Figure 8 (step S3), use The electronic balance 78 measures the amount of ink ejected from the nozzles 27 for each of the nozzles 27 (step S4). Then, the voltage applied to the piezoelectric element 41 corresponding to each nozzle 27 is adjusted in conformity with the ink ejection characteristics of the nozzles 27 (step S5).

Next, if arrive cleaning time (in step S6, yes), then by main scan driving device 19, head unit 26 is moved to the position of cleaning device 77 (step S7), utilize this cleaning device 77 to ink-jet head (droplet) material nozzle) 22 for cleaning (step S8).

When the weight measurement time or cleaning time has not been reached (No in steps S2 and S6), or when these processes have ended, in step S9, the substrate supply device 23 shown in FIG. 8 is operated, Mother board 12 is supplied to stage 49 . Specifically, the mother substrate 12 in the substrate accommodating portion 57 is sucked and held by the suction pad 64, and then the lifting shaft 61, the first arm 62, and the second arm 63 are moved to transport the mother substrate 12 to the workbench 49, and then It comes into contact with a positioning pin 50 (refer to FIG. 9 ) provided in advance at an appropriate position on the table 49 . In addition, in order to prevent the mother substrate 12 from shifting on the stage 49, it is preferable to fix the mother substrate 12 on the stage 49 by means of air suction or the like.

Next, the substrate camera 82 shown in FIG. 8 is used to rotate the output shaft of the θ motor 51 shown in FIG. 9 in small angular units while observing the mother substrate 12, so that the table 49 is positioned on the plane in small angular units. Internally rotate to position the mother substrate 12 (step S10). Next, use the head camera 81 shown in FIG. 8 to determine the position where the inkjet head (droplet material discharge head) 22 starts to draw by calculation while observing the mother base 12 (step S11), and then make the main scanning drive The device 19 and the sub-scanning drive device 21 operate appropriately to move the inkjet head (droplet material discharge head) 22 to the drawing start position (step S12).

At this time, it is preferable to arrange the print head (droplet material ejection mechanism) 22a as shown in FIG. The angle θ is inclined. This is a measure taken for the purpose that, in the case of a general inkjet device (droplet material ejection device) 16, the nozzle pitch D as the interval between adjacent nozzles 27 and the distance between adjacent filter colors The elements 3, that is, the element pitches between the color filter element forming regions 7 are mostly different. When the print head (droplet material ejection mechanism) 22a is moved along the head scanning direction X, geometrically, the nozzle pitch D is in the sub-scanning direction. The dimension component in direction Y is equal to the element pitch.

In step S12 shown in FIG. 18, the inkjet head (droplet material nozzle) 22 is placed in the drawing start position, and then, in step S13 shown in FIG. 18, the main scan along the nozzle scanning direction X is started, Simultaneously, ink ejection starts. Specifically, after the main scanning driving device 19 shown in FIG. When the nozzle 27 corresponding to the color filter element formation area 7 arrives, the color filter material, that is, ink, is ejected from the nozzle 27 .

In addition, the amount of ink ejected at this time is not the amount to fill the entire volume of the color filter element forming region 7, but a fraction of the total volume, specifically, 1/4 of the total volume. As will be described later, this is because each color filter element forming region 7 cannot be buried by one ink ejection from the nozzle 27, and it is better to fill up the entire volume by repeated ink ejection several times, for example, four times.

If the main scanning of the one-line portion of the mother substrate 12 by the print head (droplet material ejection mechanism) 22a is completed (in step S14, Yes), the reverse movement returns to the initial position (refer to FIG. 1(a)) (step S15 ). Then, the print head (droplet material ejection mechanism) 22a is driven by the sub-scanning driving device 21 to move in the sub-scanning direction Y by a predetermined sub-scanning movement pitch P (step S16).

The print head (droplet material ejection mechanism) 22a that performs the sub-scanning movement toward the position shown in FIG. 1(b) repeats the main-scanning movement and ink ejection in step S13. In addition, thereafter, the print head (droplet material ejection mechanism) 22a repeats the main scanning movement and ink ejection while repeating the sub scanning movement (step S13 to step S16), so the color filter element forming region 11 of the motherboard 12 The ink adhesion processing of the 1-column portion is completed.

In addition, in this embodiment, ink jetting is performed multiple times, for example, four times, and a predetermined amount of ink having a predetermined film thickness, that is, a color filter material, is fully supplied to the entire volume.

In addition, when the nozzle rows 28 sequentially perform sub-scanning movement, the nozzle rows 28 at each position do not overlap with the nozzle rows 28 at other positions along the sub-scanning direction Y, but the nozzle rows 28 between the positions move continuously along the sub-scanning direction Y. Sub scan moves. Therefore, the thickness of the ejected color filter material is uniform.

As above, when the ink ejection of one column of the color filter forming region 11 in the mother substrate 12 shown in FIG. And it is transported to the initial position of the color filter forming area 11 of the next column (step S19), and the main scanning, sub-scanning and inkjet are repeatedly performed on the color filter forming area 11 of the column, and a color filter is formed in the color filter element forming area 7. Color filter unit (steps S13-S16).

Afterwards, if a kind of color of R (red), G (green) and B (blue), such as the color filter element 3 of R1 color is formed in all the color filter forming regions 11 in the mother substrate 12 (in step S17 and S18, yes), then in step 20, the processed mother substrate 12 is discharged to the outside by using the substrate supply device 23 or another conveying device.

Thereafter, as long as the operator does not instruct the process to end (No in step S21), the process returns to step S2, and the inkjet deposition operation of the R1 color is repeated on the other motherboard 12 .

If there is an indication from the operator that the job ends (in step S21, Yes), in FIG. A capping process is performed on the print head (droplet material ejection mechanism) 22a (step S22).

Above, the patterning of the first color of the three colors of R (red), G (green), and B (blue) constituting the color filter, such as the R color, is completed. The second color in G (green), B (blue), for example, G color is the inkjet device (droplet material ejection device) 16 of the color filter material, carries out the patterning of G color, and finally delivers to R (red) , G (green), B (blue), the third color, for example, color B is an inkjet device (droplet material ejection device) 16 that is a color filter material, and patterning of color B is performed. Therefore, it is possible to manufacture a mother substrate having a plurality of dot arrays of desired R (red), G (green), and B (blue) colors such as stripe arrays (refer to FIG. 12.

In addition, in the case of using the color filter 1 for color display of a liquid crystal display device, an electrode, an alignment film, and the like are further laminated on the surface of the color filter 1 . In such a case, if the mother substrate 12 is cut to cut out individual color filters 1 before laminating the electrodes and the alignment film, etc., it will be very troublesome in the subsequent formation process of the electrodes and the like. Therefore, in such a case, it is better not to cut the mother substrate 12 immediately after the color filter 1 is completed on the mother substrate 12, but to cut the mother substrate 12 after necessary additional steps such as electrode formation and alignment film formation are completed.

As mentioned above, each color filter element 3 in the color filter 1 shown in FIG. The color element 3 is formed with a predetermined film thickness by repeatedly receiving ink ejection n times, for example, four times, from a plurality of nozzles 27 belonging to different nozzle groups. Therefore, even if there is variation in the amount of ink ejection among the plurality of nozzles 27, the variation in film thickness can be prevented among the plurality of color filter elements 3, so that the light transmission characteristics of the color filter can be adjusted in a plane. become even.

In addition, as described above, the distribution of the ink ejection amount of the plurality of nozzles 27 forming the nozzle row 28 of the inkjet head (droplet material discharge head) 22 becomes uneven, and in particular, there are More than one (for example, 10 at each end) nozzles 27 particularly correspond to increasing the amount of ink ejection, as shown in FIG. It is preferable that one or more (for example, about 10) of both ends E of 28 are configured so as not to eject ink. For example, when the number of nozzles 27 is 180, the applied voltage and the like are conditional so that 10 nozzles 27 at both ends, a total of 20 nozzles 27, do not eject ink, and the remaining 160 nozzles in the center can eject ink. .

In the above description, although an opaque resin material is used as the partition wall 6 in FIG. 6 , a translucent resin material may also be used as the partition wall 6 . In this case, a light-shielding metal film or resin material may be additionally provided as a black mask at corresponding positions between the color filter elements 3 , for example, on the upper side of the partition wall 6 or the lower side of the partition wall 6 .

In addition, although colors such as R (red), G (green), and B (blue) are used as the color filter element 3, they are not limited to R (red), G (green), and B (blue). For example, C (dark blue), M (dark red), Y (yellow) and other colors. In this case, instead of the color filter materials of R (red), G (green), B (blue) colors, color filter materials having colors of C, M, Y, etc. may be used.

In the above description, although the partition wall 6 was formed by the photolithography method, like the color filter 3, it may also be formed by the inkjet method.

(Modification of inkjet head (droplet material discharge head))

FIG. 19 shows an inkjet head (droplet material ejection mechanism) 22A used in another embodiment of the color filter manufacturing method and manufacturing apparatus of the present invention. This inkjet head (droplet material ejection mechanism) 22A differs from the inkjet head (droplet material ejection head) 22 shown in FIG. 15 (a) and 15 In the inkjet system shown in (b), the R ink supply device 37R is connected to the inkjet system corresponding to the R color nozzle row 28R, and the G ink supply device 37G is connected to the inkjet system corresponding to the G color nozzle row 28G , and the B ink supply device 37B is connected to the inkjet system corresponding to the B color nozzle column 28B.

(Modification of color filter manufacturing method and manufacturing apparatus)

In addition, for example, in the embodiment of the manufacturing method and manufacturing apparatus of the color filter described above, as shown in FIG. In the case of forming the color filter element 3 in each color filter forming area 11 with an inkjet head (droplet material ejection head) 22 smaller than these color filter forming areas 11, it is also possible to use a color filter whose length is shorter than one color filter. A nozzle row 28 having a longer side of the region 11 but shorter than a side of the motherboard 12 is formed to form the color filter element 3 in one motherboard 12 .

In addition, although the case where a plurality of columns of color filter formation regions 11 are formed on the motherboard 12 is shown as an example, one column of color filter formation regions 11 may be formed on the motherboard 12 . In addition, one color filter forming region 11 may be formed on the mother substrate 12 with a size substantially the same as or much smaller than that of the mother substrate 12 .

In addition, in the inkjet device (droplet material ejection device) 16 shown in FIG. 8 and FIG. The scanning drive device 21 moves the substrate 12 in the Y direction, and the print head (droplet material ejection mechanism) 22a performs sub-scanning on the substrate 12, but it may also be reversed by moving the substrate 12 in the Y direction to perform the main scan. The inkjet head (droplet material discharge head) 22 moves in the X direction to perform sub-scanning.

(Manufacturing method of liquid crystal display device)

FIG. 20 shows an example of a method of manufacturing a liquid crystal display device according to the present invention in process diagrams. In addition, FIG. 21 shows an example of a liquid crystal display device manufactured by this manufacturing method. In addition, FIG. 22 shows a cross-sectional structure of the liquid crystal display device along line X-X in FIG. 21 .

The liquid crystal display device described here is a transflective liquid crystal display device that performs full-color display in a simple matrix system.

In FIG. 21, a liquid crystal display device 101 is formed by mounting driving ICs 103a and 103b as semiconductor chips on a liquid crystal panel 102, connecting an FPC (flexible printed circuit) 104 as a wiring connection element to the liquid crystal panel 102, and then The illuminating device 106 is provided on the back of the liquid crystal panel 102 as a backlight.

The liquid crystal panel 102 is formed by bonding the first substrate 107 a and the second substrate 107 b together by using the sealing material 108 . For example, the sealing material 108 is formed by attaching epoxy resin in a ring shape on the inner surface of the first substrate 107 a or the second substrate 107 b by using methods such as screen printing. In addition, as shown in FIG. 22 , a spherical or cylindrical conduction material 109 made of a conductive material is contained in a dispersed state inside the sealing material 108 .

As shown in FIG. 22, the first substrate 107a has a plate-shaped base material 111a made of transparent glass or transparent plastic. A reflective film 112 is formed on the inner surface (upper surface in FIG. 22 ) of the base material 111a, an insulating film 113 is laminated thereon, and a first electrode 114a is formed on the insulating film 113. Viewed from the arrow nozzle D direction, the The first electrodes 114a are striped (see FIG. 21), and an alignment film 116a is formed on the first electrodes 114a. In addition, the polarizing plate 117a is attached to the outer surface (the lower surface in FIG. 22 ) of the base material 111a by a method such as sticking.

In FIG. 21 , in order to clearly show the arrangement of the first electrodes 114a, the intervals between these strips are drawn larger than the actual width. Therefore, the number of first electrodes 114a drawn is small, but in reality the number of strips of the first electrodes 114a is small. More strips of first electrodes 114a can be formed on 111a.

In FIG. 22, the second substrate 107b has a plate-shaped base material 111b made of transparent glass or transparent plastic. A color filter 118 is formed on the inner surface (the lower surface in FIG. 22 ) of the base material 111b, and a second electrode 114b is formed on it, along the direction perpendicular to the above-mentioned first electrode 114a from the arrow head D direction. It can be seen that the second electrode 114b is in a stripe shape (refer to FIG. 21 ), and an alignment film 116b is formed on the second electrode 114b. In addition, the polarizing plate 117b is mounted on the outer surface (the upper surface in FIG. 22 ) of the base material 111b by a method such as sticking.

In FIG. 21, in order to clearly show the arrangement of the second electrodes 114b, as in the case of the first electrodes 114a, the intervals between these stripes are drawn larger than the actual width. Therefore, the stripes of the drawn second electrodes 114b The number is small, but actually more second electrodes 114b can be formed on the base material 111b.

In FIG. 22 , liquid crystals such as STN (Super Twisted Nematic) liquid crystals are enclosed in a gap (so-called cell gap) surrounded by a first substrate 107 a , a second substrate 107 b and a sealing material 108 . Many tiny spherical spacers 119 are dispersed on the inner surface of the first substrate 107a or the second substrate 107b, and since these spacers 119 exist in the cell gap, the thickness of the cell gap can be maintained uniformly.

The first electrodes 114a and the second electrodes 114b are arranged orthogonally to each other, and their intersections are arranged in a dot matrix from the direction of the arrow nozzle D in FIG. 22 . And, each intersection point of this dot matrix form constitutes one display point. Viewed from the direction of the arrow nozzle D, the color elements of R (red), G (green) and B (blue) are arranged in a prescribed pattern, such as a strip arrangement, a triangle arrangement, a mosaic arrangement, etc., to form a color filter 118 . The above-mentioned one display point corresponds to each of these R (red), G (green), and B (blue), and the three-color display points of R (red), G (green), and B (blue) become A unit constitutes a pixel.

Images such as letters and numerals can be displayed on the outside of the second substrate 107b of the liquid crystal panel 102 by selectively emitting light from a plurality of display dots (and thus pixels) arranged in a dot matrix. The region where an image can be displayed in this way is an effective pixel region, and the effective display region V is a rectangular region on a plane indicated by an arrow V in FIGS. 21 and 22 .

In FIG. 22, the reflective film 112 is formed of a light reflective material such as APC alloy or Al (aluminum), and an opening 121 is formed at a position corresponding to each display point that is an intersection of the first electrode 114a and the second electrode 114b. . As a result, viewed from the direction of the arrow head D in FIG. 22 , the openings 121 are arranged in a dot matrix, the same as the display dots.

The first electrode 114a and the second electrode 114b are formed of, for example, ITO which is a transparent material. In addition, the alignment films 116a and 116b are formed by adhering polyimide-based resin in a film form with a uniform thickness. The initial alignment of the liquid crystal molecules on the surfaces of the first substrate 107a and the second substrate 107b is determined by rubbing these alignment films 116a and 116b.

In FIG. 21, the first substrate 107a is formed to have a larger area than the second substrate 107b, and when these substrates are bonded together with a sealing material 108, the first substrate 107a has a protrusion protruding to the outside of the second substrate 107b. Section 107c. And, on this protruding portion 107c, with appropriate patterning: the lead wire 114c extending from the first electrode 114a; the conduction material 109 (refer to FIG. The lead wire 114d for conducting the two electrodes 114b; the metal wiring 114e connected to the input bump (that is, the input terminal) of the driving IC 103a; and the metal wiring 114f connected to the input bump of the driving IC 103b. kind of wiring.

The lead 114c extending from the first electrode 114a and the lead 114d connected to the second electrode 114b are formed of ITO, which is a conductive oxide, which is the same material as these electrodes. In addition, the metal wirings 114e and 114f which are input-side wirings of the driving ICs 103a and 103b are formed of a metal material having a low resistance value, for example, an APC alloy. The APC alloy is an alloy mainly containing Ag and additionally containing Pd and Cu, for example, an alloy composed of Ag: 98%, Pd: 1%, and Cu: 1%.

The drive IC 103 a and the drive IC 103 b are bonded and mounted on the surface of the extension portion 107 c with an ACF (Anisotropic Conductive Film) 122 . That is, in this embodiment, a so-called COG (chip bonded on glass) liquid crystal panel having a structure in which a semiconductor chip is directly mounted on a substrate is formed. In this COG mounting structure, the input side bumps of the drive ICs 103a and 103b are conductively connected to the metal wirings 114e and 114f by using the conductive particles contained in the ACF122, and the output side bumps of the drive ICs 103a and 103b are electrically connected. The points are electrically connected to leads 114c and 114d.

In FIG. 21 , FPC 104 includes flexible resin film 123 , circuit 126 including chip component 124 , and metal wiring terminals 127 . The circuit 126 is directly mounted on the surface of the resin film 123 using soldering or other conductive connection methods. In addition, the metal wiring terminals 127 are formed of APC alloy, Cr, Cu, and other conductive materials. The portion of the FPC 104 where the metal wiring terminal 127 is formed is connected to the portion of the first substrate 107 a where the metal wiring 114 e and the metal wiring 114 f are formed by the ACF 122 . Furthermore, the metal wirings 114e and 114f on the substrate side are electrically connected to the metal wiring terminals 127 on the FPC side by the action of the conductive particles contained in the ACF 122 .

An external connection terminal 131 is formed on the opposite side end of the FPC 104 , and the external connection terminal 131 is connected to an external circuit not shown in the figure. Then, the driving ICs 103a and 103b are driven based on the signal transmitted from the external circuit, a scan signal is supplied to one of the first electrode 114a and the second electrode 114b, and a data signal is supplied to the other. Accordingly, the voltage applied to each display point arranged in a dot matrix in the effective display region V is individually controlled, and as a result, the orientation of the liquid crystal L is controlled for each display point.

In FIG. 21, the illuminating device 106 having a so-called backlight function, as shown in FIG. 22, includes: a light guide 132 made of acrylic resin or the like; ; the reflection sheet 134 provided on the surface opposite to the light exit surface 132 b of the light guide body 132 ; and an LED (Light Emitting Diode) 136 as a light source.

The LEDs 136 are supported on an LED substrate 137 mounted on, for example, a support portion (not shown) integrally formed with the light guide 132 . By attaching the LED board 137 to a predetermined position of the supporting portion, the LED 136 can be located at a position facing the light-taking surface 132 a that is a side end surface of the light guide 132 . In addition, reference numeral 138 denotes a cushioning material for cushioning the impact applied to the liquid crystal panel 102 .

Once the LED 136 emits light, it takes in the light from the light intake surface 132a, introduces it into the inside of the light guide 132, and propagates while reflecting on the reflective sheet 134 or the wall surface of the light guide 132. Passes through the diffusion sheet 133 and exits to the outside as planar light.

Since the liquid crystal display device 101 of this embodiment is configured as above, when the external light such as sunlight or indoor light is sufficiently bright, in FIG. The light passes through the liquid crystal L, is reflected on the reflective film 112, and is supplied to the liquid crystal L. The liquid crystal L performs alignment control for each display point of each color R (red), G (green), and B (blue) by the electrodes 114 a and 114 b sandwiching it. Therefore, the light supplied to the liquid crystal L is aligned for each display point. Modulation, by which images of characters, numerals, etc., are displayed on the outside of the liquid crystal panel 102 by light passing through the polarizing plate 117b and light not passing therethrough. Therefore, reflective display can be performed.

On the other hand, when the light quantity of external light cannot be obtained sufficiently, the LED 136 emits light, and the plane light is emitted from the light emitting surface 132b of the light guide body 132, and the light is supplied to the liquid crystal L through the opening 121 formed on the reflective film 112. . In this case, as in the reflective display, each display point is modulated by the liquid crystal L whose orientation is controlled by supplied light, so that an image can be displayed to the outside. Thus, transmissive display is performed.

The liquid crystal display device 101 configured as described above can be manufactured using the method and apparatus for manufacturing a liquid crystal display device of the present invention, specifically, the manufacturing method shown in FIG. 20 . In this manufacturing method, a series of steps from step P1 to step P6 is a step of forming the first substrate 107a, and a series of steps from step P11 to step P14 is a step of forming the second substrate 107b. Usually, the first substrate forming step and the second substrate forming step can be performed independently.

First, in the first substrate forming step, reflective films of a plurality of parts of the liquid crystal panel 102 are formed on the surface of a large-area parent material base material formed of translucent glass, translucent plastic, etc. by photolithography or the like. 112. Then, an insulating film 113 is formed thereon by a well-known film forming method (step P1). Next, a first electrode 114a and wirings 114c, 114d, 114e, and 114f are formed by photolithography or the like (step P2).

Next, an alignment film 116a is formed on the first electrode 114a by coating, printing, etc. (step P3), and the initial alignment of the liquid crystal is determined by rubbing the alignment film 116a (step P4). Next, the sealing material 108 is formed in a ring shape by, for example, screen printing (step P5), and then the spherical spacer 119 is dispersed thereon (step P6). Through the above processes, a large-area first mother substrate having a plurality of panel pattern portions on the first substrate 107a of the liquid crystal panel 102 is formed.

Unlike the above first substrate forming step, a second substrate forming step (step P11 to step P14 in FIG. 20 ) is carried out. First, a large-area parent material base material made of translucent glass, translucent plastic, etc. is prepared, and color filters 118 of a plurality of parts of the liquid crystal panel 102 are formed on the surface (step P11). The forming process of the color filter is carried out by the manufacturing method shown in FIG. device (droplet material ejection device) 16. The manufacturing method of these color filters and the control method of the inkjet head (droplet material discharge head) are the same as those already described.

As shown in FIG. 6( d), after the color filter 1, that is, the color filter 118, is formed on the mother substrate 12, that is, the mother raw material base material, then, the second electrode 114b is formed by photolithography (process P12), and then The alignment film 116b is formed by coating, printing, etc. (step P13), and the alignment film 116b is rubbed to determine the initial alignment of the liquid crystal (step P14). Through the above processes, a large-area second mother substrate having a plurality of panel pattern portions on the second substrate 107b of the liquid crystal panel 102 is formed.

After the large-area first mother substrate and the second mother substrate are formed above, the sealing material 108 is sandwiched between these mother substrates, aligned and bonded to each other (step P21). Therefore, it is possible to form an empty panel structure including a panel portion including a plurality of portions of the liquid crystal panel and a state where no liquid crystal is enclosed.

Next, form a scribed groove, that is, a groove for cutting, at a predetermined position of the completed empty panel structure, and then use the scribed groove as a reference to split the panel structure, that is, cut (process P22) . Therefore, a so-called elongated empty panel structure in a state in which the liquid crystal injection opening 110 (see FIG. 21 ) of the sealing material 108 of each liquid crystal panel portion is exposed to the outside is formed.

Thereafter, liquid crystal L is injected into each liquid crystal panel portion through the exposed liquid crystal injection opening 110, and each liquid crystal injection port 110 is sealed with resin or the like (step P23). The usual liquid crystal injection process is carried out as follows: for example, the liquid crystal is stored in a storage container, the storage container and the strip-shaped empty panel storing the liquid crystal are placed in a vacuum chamber, etc., and the vacuum chamber, etc. is evacuated. , dip a strip-shaped empty panel in liquid crystal inside the vacuum chamber, and then vent the vacuum chamber to atmospheric pressure. At this time, since the inside of the blank panel is in a vacuum state, the liquid crystal pressurized by the atmospheric pressure is introduced into the inside of the panel through the opening for liquid crystal injection. Since the liquid crystal adheres to the periphery of the liquid crystal panel structure after the liquid crystal injection, the elongated panel after the liquid crystal injection is cleaned in step P24.

Then, form a scribed groove at a predetermined position on the elongated mother panel after liquid crystal injection and cleaning, and then use the scribed groove as a reference to cut the elongated panel, and cut out a plurality of liquid crystal panels one by one. (Process P25). As shown in FIG. 21, drive ICs 103a and 103b are mounted on each liquid crystal panel 102 produced in this way, and an illumination device 106 is mounted as a backlight, and then connected to FPC 104 to complete the target liquid crystal display device 101 (step P26).

The manufacturing method and manufacturing apparatus of the liquid crystal display device described above can effectively utilize the characteristics of the manufacturing method in the stage of manufacturing the color filter, so the light transmission characteristics of the color filter can be more effectively adjusted in the plane. become even. This fact means that in the liquid crystal display device 101 shown in FIG. 22 , clear color display without color unevenness can be obtained.

In addition, in the manufacturing method and manufacturing apparatus of the liquid crystal display device of the present invention, since by using the inkjet device (droplet material ejection device) 16 shown in FIG. , to form the color filter element 3, so there is no need to go through a complicated process like photolithography, and there is no waste of material.

(Embodiment of Manufacturing Method of Electroluminescence Substrate)

Next, the method for manufacturing an electroluminescent substrate of the present invention has basically the same structure as the method for manufacturing a color filter except that a functional layer forming material is used instead of the color filter material in the method for manufacturing a color filter. An example illustrating a method of manufacturing the electroluminescence substrate is as follows. Here, the functional layer is a layer including a hole injection transport layer or a light emitting layer, and the functional layer forming material is a material including a hole injection transport layer forming material or a light emitting layer forming material.

For example, in Fig. 1 (a), a plurality of nozzles 27 are arranged in a row to form more than one inkjet head (droplet material nozzle) 22 with a constant arrangement pitch (D), and the nozzles are arranged at a predetermined adjacent interval. The above-mentioned one or more inkjet heads (droplet material ejection heads) 22 are arranged to form a printing head (liquid droplet material ejection mechanism) 22a. Then, the print head (droplet material ejection mechanism) 22 a is moved along the head scanning direction (vertical direction X in FIG. 1( a )) which is a constant direction, and the substrate 2 is main-scanned. In addition, at the same time, the print head (droplet material ejection mechanism) 22a is moved at a prescribed moving pitch (P ) moves to sub-scan the substrate 2.

During the above-mentioned main scanning and sub-scanning, the functional layer forming material is selectively ejected onto the functional layer forming area on the substrate 2 from a plurality of nozzles 27 arranged in one or more inkjet heads (droplet material ejecting heads) 22. (thus, display point). In addition, the main scanning and sub-scanning are repeated as many times as necessary, so that the functional layer forming material is deposited on the functional layer forming region of the substrate 2 in a predetermined shape and a predetermined thickness. Therefore, a functional layer having a predetermined shape and a predetermined thickness is formed in each display dot on the substrate 2 .

In the manufacturing method of the electroluminescent substrate of the present embodiment, assuming that the constant arrangement pitch of the nozzles 27 is "D", the plurality of nozzles 27 respectively provided by the adjacent inkjet heads (droplet material nozzles) 22 are located at the lowest position. When the distance between the ends and the nozzles closest to each other is "W", set

W=mD (where m is an integer above 2)

That is, the interval W between adjacent nozzles 27 between adjacent inkjet heads (droplet material ejection heads) 22 is constituted by an integral multiple of the arrangement pitch D of the nozzles 27 .

In addition, as shown in Figure 1(b) at the same time, assuming that the sub-scanning movement pitch of the print head (droplet material ejection mechanism) 22a along the head feed direction Y is "P", and the constant arrangement pitch of the nozzles 27 is "D" ,set up

P=nD (where n is an integer above 1)

That is, the movement pitch P of the sub-scanning of the inkjet head (droplet material discharge head) 22 is constituted by an integral multiple of the array pitch D of the nozzles 27 .

By setting the above-mentioned relationship between the nozzle interval W between the adjacent inkjet heads (droplet material ejection heads), the sub-scanning movement pitch P, and the arrangement pitch D of the nozzles, the printing head (droplet material ejection mechanism) ) 22a during the main scanning and sub-scanning, the nozzles 27 can accurately face all the functional layer forming regions and pass over them, so that the drawing efficiency can be improved and ink can be ejected at an appropriate position. Therefore, it is possible to form a functional layer having a uniform planar shape and a uniform thickness, thereby forming a pixel on the substrate 2 .

In addition, as shown in FIG. 2 , more than one inkjet head (droplet material ejection head) 22 can be arranged and arranged at an angle θ with respect to the direction Y of the head changing line. At this time, the angle θ is an angle larger than 0° and smaller than 180°.

Also, one or more nozzles 27 located at both ends of one or more inkjet heads (droplet material discharge heads) 22 can be configured so as not to eject the functional layer forming material to the functional layer forming region on the substrate 2 .

In addition, the light-emitting layer forming material can be formed of a material exhibiting three light-emitting colors of R (red), G (green), and B (blue). In addition, one or more inkjet heads (droplet material discharge heads) 22 can be configured, for example, as shown in FIG. 15 .

(Example of Manufacturing Apparatus for Electroluminescence Substrate)

The electroluminescent substrate manufacturing apparatus of the present invention can basically have the same configuration as the aforementioned color filter manufacturing apparatus. That is, the electroluminescent substrate manufacturing apparatus of the present invention is an apparatus for manufacturing an electroluminescent substrate configured by arranging a functional layer having a predetermined shape and a predetermined thickness on a substrate. An example of the manufacturing apparatus of the electroluminescent substrate will now be described as follows. Here, the functional layer is a layer including a hole injection transport layer or a light emitting layer, and the functional layer forming material is a material including a hole injection transport layer forming material or a light emitting layer forming material.

For example, in Fig. 1, the manufacturing apparatus of the electroluminescent substrate of the present embodiment has a plurality of nozzles 27 arranged in a row with a constant arrangement pitch (D) to form more than one inkjet head (droplet material ejection head) 22 , and a printing head (droplet material ejection mechanism) 22a formed by arranging the above-mentioned one or more inkjet heads (droplet material ejection heads) 22 at predetermined adjacent intervals. The functional layer forming material is selectively sprayed from the plurality of nozzles 27 to functional layer forming regions on the substrate 2 , and thus, the functional layer is formed on the substrate 2 .

A functional layer forming material supply device not shown in the figure is connected to a plurality of nozzles 27 in the print head (droplet material ejection mechanism) 22a, and the functional layer forming material is supplied to the nozzles by the operation of the functional layer forming material supply device. 27. In addition, a main scanning driving device not shown in the figure is connected to the printing head (droplet material ejection mechanism) 22a, and through the operation of the main scanning driving device, the printing head (droplet material ejection mechanism) 22a moves along the direction as a constant direction. The scanning direction of the shower head (that is, the longitudinal direction X in FIG. 1( a )) moves to perform main scanning on the substrate 2 .

In addition, the sub-scanning driving device not shown in the figure is connected on the printing head (droplet material ejection mechanism) 22a, and through the work of the sub-scanning driving device, the printing head (droplet material ejection mechanism) 22a along the The head feed direction (that is, the horizontal direction Y in FIG. 1( a )) in the direction perpendicular to the scanning direction moves at a predetermined movement pitch (P) to perform sub-scanning on the substrate 2 . In addition, the nozzle injection control device is connected to the plurality of nozzles 27, and the injection amount and injection time of the functional layer forming material injected from the nozzles 27 are controlled by the operation of the nozzle injection control device.

The operation of the above-mentioned main scanning driving device is controlled by a main scanning control device including, for example, a CPU. In addition, the operation of the aforementioned sub-scanning driving device is controlled by a sub-scanning control device including, for example, a CPU.

The print head (droplet material ejection mechanism) 22 a moves along the head scanning direction (ie, the longitudinal direction X in FIG. 1( a )) which is a constant direction, and performs main scanning on the substrate 2 . At the same time, the print head (droplet material ejection mechanism) 22 a moves along the head feed direction Y at a predetermined movement pitch (P), and sub-scans the substrate 2 .

During the above-mentioned main scanning and sub-scanning, the functional layer forming material is selectively ejected into the functional layer forming area on the substrate 2 from a plurality of nozzles 27 arranged in one or more inkjet heads (droplet material ejection heads) 22. . In addition, the main scanning and sub-scanning are repeated as many times as necessary, so that the functional layer forming material is deposited in the functional layer forming region on the substrate 2 in a predetermined shape and a predetermined thickness. Accordingly, a functional layer having a predetermined shape and a predetermined thickness is formed on the substrate 2 .

In the manufacturing device of the electroluminescent substrate of the present embodiment, assuming that the constant arrangement pitch of the nozzles 27 is "D", the adjacent inkjet heads (droplet material nozzles) 22 are respectively provided with a plurality of nozzles 27 located at the lowest position. When the distance between the ends and the nozzles closest to each other is "W", set

W=mD (where m is an integer above 2)

That is, the interval W between adjacent nozzles 27 between adjacent inkjet heads (droplet material ejection heads) 22 is constituted by an integer multiple of the arrangement pitch D of the nozzles 27 .

In addition, as shown in Figure 1(b) at the same time, assuming that the sub-scanning movement pitch of the print head (droplet material ejection mechanism) 22a along the head feed direction Y is "P", and the constant arrangement pitch of the nozzles 27 is "D" ,set up

P=nD (where n is an integer above 1)

That is, the movement pitch P of the sub-scanning of the inkjet head (droplet material discharge head) 22 is constituted by an integral multiple of the array pitch D of the nozzles 27 .

By setting the above-mentioned relationship between the nozzle interval W between the adjacent inkjet heads (droplet material ejection heads), the sub-scanning movement pitch P, and the arrangement pitch D of the nozzles, the printing head (droplet material ejection mechanism) ) 22a during the main scanning and sub-scanning, the nozzle 27 can accurately face all the functional layer forming regions and pass over them, so the drawing efficiency can be improved and the functional layer forming material can be sprayed at an appropriate position. And therefore, it is possible to form a functional layer having a uniform planar shape and a uniform thickness, thereby forming a pixel on the substrate 2 .

In addition, as shown in FIG. 2 , more than one inkjet head (droplet material ejection head) 22 can be arranged and arranged at an angle θ with respect to the direction Y of the head changing line. At this time, the angle θ is an angle larger than 0° and smaller than 180°.

(Modification of the manufacturing method and manufacturing apparatus of the electroluminescence substrate)

In addition, for example, in the embodiment of the manufacturing method and manufacturing apparatus of the electroluminescent substrate described above, although the mother substrate 12 is shown as an example with a plurality of panel units 11 arranged thereon, an inkjet head smaller than these panel units 11 is used. (Liquid material ejection head) 22, in the case of forming a functional layer in each panel unit 11, it is also possible to use a nozzle column 28 whose length is longer than one side of a panel unit 11 but shorter than one side of a mother substrate 12. Functional layers are formed in the mother substrate 12 .

In addition, although the case where a plurality of panel units 11 are arranged on the motherboard 12 is shown as an example, one panel unit whose size is substantially the same as that of the motherboard 12 or much smaller than that may be formed on the motherboard 12 in some cases. 11.

In addition, in the inkjet device (droplet material ejection device) 16 shown in FIG. 8 and FIG. The scanning driving device 21 moves the substrate 12 in the Y direction, and the print head (droplet material ejection mechanism) 22a performs sub-scanning on the substrate 12, but it can also be reversed, and the main scanning is performed by moving the substrate 12 in the Y direction. The inkjet head (droplet material discharge head) 22 is moved in the X direction to perform sub-scanning.

(Example of Manufacturing Method and Manufacturing Device of Electroluminescence Device)

The structure of the manufacturing method and manufacturing apparatus of the electroluminescent device of the present invention is basically the same as that of the aforementioned liquid crystal display device manufacturing method and manufacturing apparatus. That is, in one embodiment of the method for manufacturing an electroluminescent device according to the present invention, an electroluminescent substrate is manufactured by using the above-mentioned method for manufacturing an electroluminescent substrate, and a predetermined number of panels are cut out from the obtained electroluminescent substrate. unit.

In addition, a protective layer and a common electrode are formed on a substrate (ie, a common electrode substrate) of an electroluminescence substrate used in the panel unit, and a substrate (ie, a display panel) constituting a pair of substrates facing the above-mentioned common electrode substrate is formed. A display point electrode forming a pair of electrodes facing the common electrode is formed on the point electrode substrate).

In addition, the electroluminescent device manufacturing apparatus of the present invention is an apparatus for manufacturing an electroluminescent device having one substrate, such as a common electrode substrate, and another substrate facing it, such as a display point electrode substrate. A functional layer having a predetermined shape and a predetermined thickness is disposed on the common electrode substrate, whereby an electroluminescent substrate can be formed. In addition, a protective layer and a common electrode are formed on the common electrode substrate. In addition, on the display point electrode substrate facing the common electrode substrate, display point electrodes forming a pair of electrodes facing the common electrode are formed.

(Another embodiment of the manufacturing method and manufacturing apparatus of the electroluminescent device)

FIG. 23 is a process chart showing an example of the method of manufacturing the electroluminescent device of the present invention using process charts. In addition, FIG. 24 shows a cross-sectional structure of an electroluminescent device corresponding to each step in the process chart shown in FIG. 23 . As shown in Fig. 24(d), the electroluminescence device 201 is formed as follows: pixel electrodes 202 are formed on a transparent substrate 204, and banks 205 are formed in a grid pattern between the pixel electrodes 202 viewed from the direction of the arrow nozzle G. , the hole injection and transport layer (functional layer) 220 is formed in these grid-like recesses, and the R-color light-emitting layer (functional layer) 203R and the G-color light-emitting layer (functional layer) 203G are formed in each grid-like recess. , and the B-color light-emitting layer (functional layer) 203B, so that viewed from the direction of the arrow head G, they are arranged in a predetermined arrangement such as a strip arrangement, and then the opposite electrode 213 is formed on them.

When the pixel electrode 202 is driven by a two-terminal active element such as a TFD (thin film diode) element, the counter electrode 213 is formed in a stripe shape when viewed from the arrow head G direction. In addition, when the pixel electrode 202 is driven by a three-terminal active element such as a TFT (Thin Film Transistor: thin film transistor), the above-mentioned counter electrode 213 is formed as a single-surface electrode.

The area sandwiched by each pixel electrode 202 and each counter electrode 213 forms a display point, and the three-color display points of R (red), G (green) and B (blue) form a unit to form a pixel. By controlling the current flowing through each display point, a desired display point among a plurality of display points is selectively made to emit light, so that a desired full-color image can be displayed in the direction of the arrow head H.

For example, the electroluminescent device 201 described above can be manufactured by the manufacturing method shown in FIG. 23 . That is, as shown in step P51 and FIG. 24(a), active elements such as TFD elements and TFT elements are formed on the surface of the transparent substrate 204, and then the pixel electrodes 202 are formed. As a forming method, for example, a photolithography method, a vacuum evaporation method, a sputtering method, a molten glue method, and the like can be employed. As a material of the pixel electrode, ITO (indium tin oxide), tin oxide, a composite oxide of indium oxide and zinc oxide, or the like can be used.

Next, as shown in step P52 and FIG. 24( a ), a well-known patterning method, such as photolithography, is used to form a bank 205 which is a partition, and the transparent electrodes 202 are buried between the transparent electrodes 202 by the bank 205 . Therefore, it is possible to improve contrast, prevent color mixing of functional layer forming materials, prevent light leakage from pixel to pixel, and the like. The material of the bank 205 is not particularly limited as long as it has durability against the solvent of the functional layer forming material, but it is preferably a material that can be converted into a fluororesin by fluorocarbon gas plasma treatment, such as acrylic acid. Resin, epoxy resin, photosensitive polyimide and other organic materials.

Next, before applying the material for forming the hole injection and transport layer (material for forming the functional layer), the substrate 204 is continuously subjected to continuous plasma treatment of oxygen and fluorocarbon gas plasma (step P53). Therefore, the surface of the polyimide is made hydrophobic, and the surface of the ITO is made hydrophilic, so that the wettability on the substrate side for fine patterning of inkjet droplets can be controlled. The apparatus for generating plasma may be an apparatus for generating plasma in vacuum or an apparatus for generating plasma in air.

Next, as shown in step P54 and FIG. 24(a), the hole injection transport layer The forming material (functional layer forming material) is applied in a pattern on each pixel electrode 202 . As a specific control method of the inkjet head (droplet material discharge head), the above-mentioned method can be adopted. After the coating, the solvent is removed in vacuum (for example, 1 torr) at room temperature for 20 minutes (step P55), and then heat treatment is performed in the atmosphere at 20°C (for example, on a hot plate) for 10 minutes. Then, the hole injecting and transporting layer (functional layer) 220 incompatible with the material for forming the light-emitting layer (material for forming the functional layer) is formed (step P56). The film thickness is about 40 nm.

Next, as shown in step P57 and FIG. 24(b), the R luminescent layer forming material (functional layer forming material) and the G luminescent layer forming material (functional layer forming material) are coated on each color filter element area by an inkjet method. The holes inside are injected into the transport layer 220 . Here, also from the inkjet head (droplet material ejection head) 22 of the inkjet device (droplet material ejection device) 16 shown in FIG. A control method of an inkjet head (droplet material discharge head). If the inkjet method is used, fine patterning can be performed easily and in a short time. In addition, the film thickness can be changed by changing the concentration of solid components in the ink composition and the ejection amount.

After coating the light-emitting layer-forming material (functional layer-forming material), the solvent is removed in vacuum (for example, 1 torr) at room temperature for 20 minutes (step P58), followed by about 4 hours at 150°C in a nitrogen atmosphere. heat treatment for conjugation to form an R-color light-emitting layer (functional layer) 203R and a G-color light-emitting layer (functional layer) 203G (step P59). The film thickness is about 50 nm. The light-emitting layer conjugated by heat treatment is insoluble in solvents.

In addition, before forming the light-emitting layer, the hole injection and transport layer 220 may be subjected to continuous plasma treatment of oxygen and fluorocarbon gas plasma. Therefore, by forming the fluoride layer in the hole injection and transport layer 220, since the ionization potential is increased, the hole injection efficiency is increased, and an organic electroluminescent device with high luminous efficiency can be provided.

Next, as shown in step P60 and FIG. 24(c), a B-color light-emitting layer 203B is formed on the R-color light-emitting layer 203R, the G-color light-emitting layer 203G, and the hole injection and transport layer 220 in each display dot. Therefore, not only the three primary colors of R (red), G (green), and B (blue) are formed, but also the steps of the R-color light-emitting layer 203R, the G-color light-emitting layer 203G, and the bank 205 can be buried and planarized. Therefore, a short circuit between the upper and lower electrodes can be reliably prevented. By adjusting the film thickness of the B-color light-emitting layer 203B, the B-color light-emitting layer 203B functions as an electron injection transport layer in the laminated structure with the R-color light-emitting layer 203R and the G-color light-emitting layer 203G without emitting B-color light.

As the method for forming the B-color light-emitting layer 203B as described above, for example, a wet method may be used, such as a general spin coating method, or an ink-jet method similar to the method for forming the R-color light-emitting layer 203R and the G-color light-emitting layer 203G may be used. . Then, as shown in step P61 and FIG. 24(d), by forming the counter electrode 213, the target electroluminescent device 201 can be manufactured. When the opposite electrode 213 is a surface electrode, for example, Mg, Ag, Al, Li, etc. are used as materials, and the opposite electrode 213 is formed by a film-forming method such as a vapor deposition method or a sputtering method. In addition, when the counter electrode 213 is a strip-shaped electrode, a patterning method such as a photolithography method can be used to form a film-formed electrode layer.

According to the manufacturing method and manufacturing apparatus of the electroluminescent device described above, the above-mentioned control method can be adopted as the control method of the inkjet head (droplet material discharge head). Therefore, assuming that among the plurality of nozzles 27, even if there is variation in the amount of injection of the functional layer forming material, variation in film thickness can be prevented from occurring among a plurality of display points, and therefore, the electroluminescence device can be improved. The light emission distribution characteristic of the light emitting surface becomes uniform on the plane. This means that in the electroluminescent device 201 shown in FIG. 24(d), a clear color display without color unevenness can be obtained.

In addition, in the manufacturing method and manufacturing apparatus of the electroluminescent device of the present invention, since the inkjet device (droplet material ejection device) 16 shown in FIG. The spraying of functional layer forming materials forms R (red), G (green), and B (blue) color display dots, so there is no need to go through complicated processes like photolithography, and there is no waste of materials.

(Example of Film Formation Method and Film Formation Apparatus)

The film forming apparatus of the present invention can be constituted by an inkjet apparatus (droplet material ejection apparatus) 16 shown in FIG. 8 . 1, FIG. 2, FIG. 3, FIG. 4, FIG. 10, FIG. 11, FIG. , the inkjet head (droplet material discharge head) shown in FIG. 13, FIG. 14, FIG. 15, FIG. 16, or FIG. 19.

However, in the case of the present embodiment, the ink ejected from the nozzles 27 of these inkjet heads (droplet material ejection heads) 22 and the like is a film material. The film material is appropriately selected according to the kind of film to be formed on the substrate. In addition, during the main scanning and sub-scanning of the substrate by the inkjet head (droplet material ejecting head) 22, by appropriately controlling the nozzles 27 ejecting the film material, the form of the film, that is, the pattern can be freely selected.

In addition, the film forming method of the present invention can be realized by controlling the inkjet device (droplet material ejection device) 16 shown in FIG. 8 using the control circuit shown in FIG. 17 and the control program shown in FIG. 18 . However, in this case, the ink ejected from the inkjet head (droplet material ejection head) 22 is also a film material selected according to the type of film to be formed on the substrate.

(Embodiment of Electronic Device)

An example of an electronic device using the above-mentioned liquid crystal display device of the present invention as the electro-optical device of the present invention is shown below. Here, although an electronic device using the above-mentioned liquid crystal display device of the present invention is shown, it is not limited thereto. The electronic device of the present invention may also be an electroluminescent device using the above-mentioned electroluminescent device of the present invention, or a film formed by the above-mentioned present invention. Electronic device for electro-optic device fabricated by method

(1) Digital camera

A digital still camera using the liquid crystal display device 1100 of the fourth embodiment of the present invention in a viewfinder will now be described. Fig. 27 is a perspective view showing the structure of the digital camera, and also schematically shows how to connect it to an external device.

Unlike ordinary cameras that expose film to light using the light image of the subject, the digital camera 2000 uses an imaging element such as a CCD (Charge Coupled Device) to photoelectrically convert the light image of the subject to generate an imaging signal. Here, the liquid crystal panel of the above-mentioned liquid crystal display device 1100 is provided on the back (the front in FIG. 27 ) of the casing 2202 of the digital camera 2000, and displays based on the imaging signal generated by the CCD. Therefore, the liquid crystal display device 1100 functions as a viewfinder for displaying a subject. In addition, a light-receiving unit 2204 including an optical lens, a CCD, and the like is provided on the front surface (the rear surface in FIG. 27 ) of the housing 2202 .

Here, when the photographer checks the subject image displayed on the liquid crystal display device 1100 and presses the shutter button 2206 , the imaging signal of the CCD at that time is transmitted and stored in the memory of the circuit board 2208 . In addition, in this digital camera 2000 , a video signal output terminal 2212 and an input/output terminal 2214 for data communication are provided on the side surface of the housing 2202 . 27, a television monitor 2300 is connected to the former video signal output terminal 2212, and a personal computer 2400 is connected to the latter data communication input/output terminal 2214 as necessary. In addition, the imaging signal stored in the memory of the circuit board 2208 is output to the television monitor 2300 or the personal computer 2400 by a predetermined operation.

(2) Mobile phones, other electronic devices

28(A), (B), and (C) are external views showing examples of other electronic devices using a liquid crystal display device as the electro-optical device of the present invention. FIG. 28(A) shows a mobile phone 3000 having a liquid crystal display device 1100 on its upper front. FIG. 28(B) is a wrist watch 4000, in which a display unit using a liquid crystal display device 1100 is provided at the center of the front surface of the main body. FIG. 28(C) shows a portable information device 5000 which includes a display unit and an input unit 5100 constituted by a liquid crystal display device 1100 .

These electronic devices include various circuits such as a display information output source, a display information processing circuit, a clock generation circuit, and a power supply circuit for supplying power to these circuits, although not shown in the figure, except for the liquid crystal display device 1100. The display signal generation part. For example, in the case of the portable information device 5000, based on the information input from the input unit 5100, the display signal generated by the display signal generating unit is supplied to the display unit to form a display image.

As the electronic device on which the liquid crystal display device 1100 of the present invention is installed, it is not limited to a digital camera, a mobile phone, a watch, and a portable information device, but also considers: an electronic notebook, a pager, a POS terminal, an IC card, a mini-disc player, a liquid crystal Projectors, multimedia-compatible personal computers (PCs) and engineering workstations (EWS), notebook PCs, word processors, televisions, viewfinder or direct-view video tape recorders, electronic notebooks, desktop computers, vehicle guides Mobile devices, devices with touch panels, clocks and other electronic devices.

(other embodiments)

The present invention is not limited to the above-mentioned embodiments, and can be used in all industrial techniques for performing fine patterning on a base material. For example, formation of various semiconductor elements (for example, thin film transistors, thin film diodes, etc.), wiring patterns, and insulating films, etc. can be considered as an example of the application range.

In addition, in the present invention, as the ejection material, various selections can be made according to the elements of formation. For example, in addition to the above-mentioned color filter material, functional layer forming material, and film forming material, silica glass precursors, Examples thereof include conductive materials such as metal compounds, dielectric materials, or semiconductor materials. In addition, according to the present invention, for example, metal wiring can be formed on a substrate or a thin film provided on a substrate.

In addition, in the above-mentioned embodiment, in order to distinguish it from other components, although it is referred to as an "ink jet head (droplet material discharge head)", the ejected objects ejected from the inkjet head (droplet material discharge head) are not limited. The ink is, of course, a conductive material such as the above-mentioned functional layer forming material, a silica glass precursor, a metal compound, a dielectric material, or a semiconductor material.

In addition, in the above-mentioned embodiment, although the ink-jet head (droplet material discharge head) using the bending deformation of the piezoelectric element to discharge the ink (liquid material) structure is used, any other ink-jet head (liquid material discharge head) of any structure can also be used. droplet material discharge head), for example, a thermal inkjet inkjet head (droplet material discharge head) utilizing thermal expansion of ink (liquid material) is used.

In addition, the present invention is not limited to electro-optical devices such as liquid crystal devices and electroluminescent devices, and can also be applied to so-called electro-optical devices that require various films such as color filters and metal wiring to be formed on a substrate. The present invention can be applied to electro-optical devices such as inorganic electroluminescent devices, plasma display devices (PDP/plasma display), electrophoretic display devices (EPD/electrophoretic display), field emission display devices (FED/field emission display).

In addition, although the liquid crystal display device as an example of the electro-optical device shown in FIG. 21 is a simple matrix type liquid crystal display device, the present invention is also applicable to the use of two-terminal switching elements such as TFDs (thin film diodes) as active elements. An active matrix electro-optical device having a structure, or an active matrix electro-optic device having a structure using a three-terminal switching element such as a TFT (Thin Film Transistor) as an active element.

As described above, according to the present invention, when the printing head (droplet ejection mechanism) scans, all the nozzles that are constituent elements of the inkjet head (droplet ejection head) can accurately pass through the region where the pixels are formed. Therefore, the drawing efficiency is high, and the inkjet head (droplet material ejection head) can be accurately moved to scan the object so that ink can be ejected at an appropriate position.

In addition, the color dispersion of each pixel can be prevented, and the optical characteristics of optical members such as the light transmission characteristics of color filters, the color display characteristics of liquid crystal display devices, and the light emission characteristics of functional layers can be uniformed on a plane.

Claims (10)

1. A film-forming method, characterized in that: include: The process of performing main scanning on the substrate by moving a plurality of nozzles arranged with a plurality of nozzles at predetermined intervals along the scanning direction of the nozzles; The process of sub-scanning the above-mentioned substrate by moving according to the specified moving pitch P along the head-changing direction perpendicular to the above-mentioned head scanning direction; and a step of spraying the film material from the plurality of nozzles onto the film forming region on the substrate, Among the above-mentioned plurality of shower heads, the adjacent shower heads are located at the interval between the above-mentioned nozzles at the respective endmost parts and the constant arrangement pitch D of the above-mentioned nozzles satisfies the following relational expression: In the W=mD formula, m is an integer greater than 2, The sub-scanning movement pitch P of the above-mentioned nozzles and the constant arrangement pitch D of the above-mentioned nozzles satisfy the following relational expression: P=nD In the formula, n is an integer of 1 or more. 2. film forming method as claimed in claim 1, is characterized in that: Arranging the above-mentioned nozzles at an angle of 0°<θ<180° relative to the direction of the row-changing of the above-mentioned nozzles, Above-mentioned adjacent shower head is positioned at the interval between the above-mentioned nozzles of respective extreme parts and the arrangement pitch Dcosθ of above-mentioned nozzle along above-mentioned shower head line-wrapping direction satisfies following relational expression: W=mDcosθ In the formula, m is an integer above 2, The sub-scanning movement pitch P of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles and the arrangement pitch Dcosθ of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles satisfy the following relational expression: P=nD cos θ In the formula, n is an integer of 1 or more. 3. The film forming method according to claim 1 or 2, characterized in that: The nozzle located at the end of the shower head does not spray the film material to the film formation region on the substrate. 4. The film-forming method according to claim 1 or 2, characterized in that: The film material includes a plurality of film materials with different properties, and each of the spray heads sprays one material corresponding to each of the plurality of film materials with different properties from the nozzles. 5. The film forming method according to claim 1 or 2, characterized in that: The film material includes a plurality of materials having different properties, and each of the plurality of nozzles sprays one material corresponding to each of the plurality of materials having different properties. 6. A film forming device, characterized in that: have: Multiple nozzles for ejecting film material in droplet form; A plurality of nozzles of the plurality of nozzles are arranged according to a constant arrangement interval D; a main scanning driving device for moving the above-mentioned nozzle along the scanning direction of the nozzle; and a sub-scanning drive device that moves the above-mentioned print head along the print-head line feed direction perpendicular to the above-mentioned print head scanning direction according to a predetermined moving pitch P, Among the above-mentioned plurality of shower heads, the adjacent shower heads are located at the interval between the above-mentioned nozzles at the respective endmost parts and the constant arrangement pitch D of the above-mentioned nozzles satisfies the following relational expression: In the W=mD formula, m is an integer greater than 2, The sub-scanning movement pitch P of the above-mentioned nozzles and the constant arrangement pitch D of the above-mentioned nozzles satisfy the following relational expression: P=nD In the formula, n is an integer of 1 or more. 7. The film forming device according to claim 6, characterized in that: Arranging the above-mentioned nozzles at an angle of 0°<θ<180° relative to the direction of the row-changing of the above-mentioned nozzles, Above-mentioned adjacent shower head is positioned at the interval between the above-mentioned nozzles of respective extreme parts and the arrangement pitch Dcosθ of above-mentioned nozzle along above-mentioned shower head line-wrapping direction satisfies following relational expression: W=mDcosθ In the formula, m is an integer above 2, The sub-scanning movement pitch P of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles and the arrangement pitch Dcosθ of the above-mentioned nozzles along the line-changing direction of the above-mentioned nozzles satisfy the following relational expression: P=nD cos θ In the formula, n is an integer of 1 or more. 8. A method of manufacturing an electro-optical device, characterized in that: Adopt the film-forming method described in claim 1 or 2. 9. An electro-optic device, characterized in that: Manufactured by the method of manufacturing an electro-optical device described in claim 8 . 10. An electronic device, characterized in that: An electro-optic device as claimed in claim 9 is included.

Images