CH626479A5 - - Google Patents
Download PDFInfo
- Publication number
- CH626479A5 CH626479A5 CH628379A CH628379A CH626479A5 CH 626479 A5 CH626479 A5 CH 626479A5 CH 628379 A CH628379 A CH 628379A CH 628379 A CH628379 A CH 628379A CH 626479 A5 CH626479 A5 CH 626479A5
- Authority
- CH
- Switzerland
- Prior art keywords
- plates
- resonators
- electronic component
- electrodes
- component according
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 14
- 235000012431 wafers Nutrition 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 238000007711 solidification Methods 0.000 claims description 2
- 230000008023 solidification Effects 0.000 claims description 2
- 230000005494 condensation Effects 0.000 claims 1
- 238000009833 condensation Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 230000008569 process Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000005538 encapsulation Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 241001137251 Corvidae Species 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000000763 evoking effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0595—Holders or supports the holder support and resonator being formed in one body
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH628379A CH626479A5 (fi) | 1979-07-05 | 1979-07-05 | |
| FR7921599A FR2460565B1 (fr) | 1979-07-05 | 1979-08-22 | Composants electroniques comportant au moins un resonateur piezoelectrique, et leur procede de fabrication |
| JP9050580A JPS5610723A (en) | 1979-07-05 | 1980-07-02 | Electronic element and method of manufacturing same |
| IT23198/80A IT1150027B (it) | 1979-07-05 | 1980-07-02 | Componente elettronico comprendente almeno un risonatore piezoelettrico e metodo di fabbricazione dello stesso |
| CA000355524A CA1152586A (en) | 1979-07-05 | 1980-07-04 | Electronic component comprising at least one piezoelectric resonator and method of manufacture thereof |
| DE19803025477 DE3025477A1 (de) | 1979-07-05 | 1980-07-04 | Elektronisches bauteil |
| GB8021945A GB2056764B (en) | 1979-07-05 | 1980-07-04 | Piezoelectric resonators and method of manufacture thereof |
| US06/345,283 US4445256A (en) | 1979-07-05 | 1982-02-03 | Method of manufacturing piezoelectric resonator components |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH628379A CH626479A5 (fi) | 1979-07-05 | 1979-07-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH626479A5 true CH626479A5 (fi) | 1981-11-13 |
Family
ID=4307109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH628379A CH626479A5 (fi) | 1979-07-05 | 1979-07-05 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4445256A (fi) |
| JP (1) | JPS5610723A (fi) |
| CA (1) | CA1152586A (fi) |
| CH (1) | CH626479A5 (fi) |
| DE (1) | DE3025477A1 (fi) |
| FR (1) | FR2460565B1 (fi) |
| GB (1) | GB2056764B (fi) |
| IT (1) | IT1150027B (fi) |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3038261A1 (de) * | 1980-10-10 | 1982-04-29 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Baueinheit mit piezoelektrischen resonatoren |
| JPS58172008A (ja) * | 1982-04-02 | 1983-10-08 | Toyo Commun Equip Co Ltd | 圧電振動子の構造及びその製造方法 |
| GB2125211A (en) * | 1982-08-03 | 1984-02-29 | Standard Telephones Cables Ltd | Mechanical support of piezoelectric devices |
| DE3373594D1 (en) * | 1982-12-22 | 1987-10-15 | Nec Corp | Method of producing electrostrictive effect element |
| JPS6082831U (ja) * | 1983-11-10 | 1985-06-08 | 松下電器産業株式会社 | 圧電磁器振動子 |
| JPS60264108A (ja) * | 1984-06-12 | 1985-12-27 | Toko Inc | 圧電濾波器の製造方法 |
| US5001169A (en) * | 1984-10-24 | 1991-03-19 | Collagen Corporation | Inductive collagen-based bone repair preparations |
| US4750246A (en) * | 1984-10-29 | 1988-06-14 | Hughes Aircraft Company | Method of making compensated crystal oscillator |
| US4639631A (en) * | 1985-07-01 | 1987-01-27 | Motorola, Inc. | Electrostatically sealed piezoelectric device |
| GB2202989B (en) * | 1987-04-02 | 1991-01-09 | Stc Plc | Crystal resonnator |
| US4866683A (en) * | 1988-05-24 | 1989-09-12 | Honeywell, Inc. | Integrated acoustic receiver or projector |
| JPH02228114A (ja) * | 1989-03-01 | 1990-09-11 | Seiko Electronic Components Ltd | 水晶振動子ユニット |
| JPH0422566Y2 (fi) * | 1989-04-20 | 1992-05-25 | ||
| US5016255A (en) * | 1989-08-07 | 1991-05-14 | Omnipoint Data Company, Incorporated | Asymmetric spread spectrum correlator |
| US5022047A (en) * | 1989-08-07 | 1991-06-04 | Omnipoint Data Corporation | Spread spectrum correlator |
| US5499265A (en) * | 1989-08-07 | 1996-03-12 | Omnipoint Data Company, Incorporated | Spread spectrum correlator |
| JPH0379531U (fi) * | 1989-12-06 | 1991-08-14 | ||
| CA2087712A1 (en) * | 1990-07-23 | 1992-01-24 | Robert C. Dixon | Sawc phase-detection method and apparatus |
| US5081642A (en) * | 1990-08-06 | 1992-01-14 | Omnipoint Data Company, Incorporated | Reciprocal saw correlator method and apparatus |
| CA2094710C (en) * | 1990-10-23 | 1998-12-01 | Robert Clyde Dixon | Method and apparatus for establishing spread spectrum communications |
| US5402413A (en) * | 1991-04-08 | 1995-03-28 | Omnipoint Corporation | Three-cell wireless communication system |
| EP0584248B1 (en) * | 1991-05-13 | 2003-03-05 | XIRCOM Wireless, Inc. | Dual mode transmitter and receiver |
| US5285469A (en) * | 1991-06-03 | 1994-02-08 | Omnipoint Data Corporation | Spread spectrum wireless telephone system |
| US5339051A (en) * | 1991-12-09 | 1994-08-16 | Sandia Corporation | Micro-machined resonator oscillator |
| US5198716A (en) * | 1991-12-09 | 1993-03-30 | The United States Of America As Represented By The United States Department Of Energy | Micro-machined resonator |
| JP3766434B2 (ja) * | 1991-12-16 | 2006-04-12 | ザーカム ワイヤレス， インコーポレイテッド | スペクトル拡散データ送信システム |
| JP2976262B2 (ja) * | 1992-09-25 | 1999-11-10 | 株式会社村田製作所 | 電子部品の製造方法 |
| JPH06132769A (ja) * | 1992-10-19 | 1994-05-13 | Murata Mfg Co Ltd | 圧電共振子及びその製造方法 |
| EP0596522A1 (en) * | 1992-11-06 | 1994-05-11 | AVANCE TECHNOLOGY, Inc. | High frequency crystal resonator |
| US5410789A (en) * | 1992-11-13 | 1995-05-02 | Murata Manufacturing Co., Ltd. | Method of manufacturing piezoelectric-resonator having vibrating spaces formed therein |
| US5355389A (en) * | 1993-01-13 | 1994-10-11 | Omnipoint Corporation | Reciprocal mode saw correlator method and apparatus |
| US5839178A (en) * | 1993-02-01 | 1998-11-24 | Murata Manufacturing Co., Ltd. | Method of making a energy-trapped type piezoelectric resonator |
| JPH07106905A (ja) * | 1993-10-06 | 1995-04-21 | Matsushita Electric Ind Co Ltd | 発振子 |
| RU2153221C2 (ru) * | 1994-05-02 | 2000-07-20 | СИМЕНС МАЦУШИТА КОМПОНЕНТС ГмбХ УНД Ко. КГ | Устройство корпусирования для электронных конструктивных элементов |
| JP3531971B2 (ja) * | 1994-05-16 | 2004-05-31 | フィガロ技研株式会社 | ガスまたは湿度を検出するセンサとその製造方法 |
| US5784403A (en) * | 1995-02-03 | 1998-07-21 | Omnipoint Corporation | Spread spectrum correlation using saw device |
| US7003857B1 (en) * | 1995-11-24 | 2006-02-28 | Seiko Epson Corporation | Method of producing an ink-jet printing head |
| US5920145A (en) * | 1996-09-09 | 1999-07-06 | Mcdonnell Douglas Corporation | Method and structure for embedding piezoelectric transducers in thermoplastic composites |
| US6960870B2 (en) * | 1997-07-29 | 2005-11-01 | Seiko Epson Corporation | Piezo-electric resonator and manufacturing method thereof |
| US6976295B2 (en) * | 1997-07-29 | 2005-12-20 | Seiko Epson Corporation | Method of manufacturing a piezoelectric device |
| JP3511929B2 (ja) * | 1999-01-25 | 2004-03-29 | 株式会社村田製作所 | 電子部品の製造方法、圧電共振部品の製造方法、電子部品及び圧電共振部品 |
| JP2001352769A (ja) * | 2000-04-05 | 2001-12-21 | Seiko Instruments Inc | 圧電アクチュエータの製造方法及び圧電アクチュエータ |
| US6653762B2 (en) * | 2000-04-19 | 2003-11-25 | Murata Manufacturing Co., Ltd. | Piezoelectric type electric acoustic converter |
| JP3903842B2 (ja) * | 2001-07-03 | 2007-04-11 | 株式会社村田製作所 | 圧電共振子、フィルタおよび電子通信機器 |
| US9484522B2 (en) | 2013-03-13 | 2016-11-01 | Microgen Systems, Inc. | Piezoelectric energy harvester device with curved sidewalls, system, and methods of use and making |
| US9362480B2 (en) | 2013-03-13 | 2016-06-07 | Microgen Systems, Inc. | Symmetric dual piezoelectric stack microelectromechanical piezoelectric cantilever energy harvester |
| KR20150130972A (ko) | 2013-03-13 | 2015-11-24 | 마이크로젠 시스템즈, 인코포레이티드 | 스토퍼 구조물을 갖는 압전 에너지 수확 장치 |
| US9728707B2 (en) | 2014-02-05 | 2017-08-08 | Microgen Systems, Inc. | Packaged piezoelectric energy harvester device with a compliant stopper structure, system, and methods of use and making |
| US9502635B2 (en) * | 2014-03-07 | 2016-11-22 | Microgen Systems, Inc. | Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices |
| US9419546B2 (en) | 2014-04-24 | 2016-08-16 | Microgen Systems, Inc. | Piezoelectric energy harvester device with frequency offset vibrational harvesters |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3634787A (en) * | 1968-01-23 | 1972-01-11 | Westinghouse Electric Corp | Electromechanical tuning apparatus particularly for microelectronic components |
| US3766616A (en) * | 1972-03-22 | 1973-10-23 | Statek Corp | Microresonator packaging and tuning |
| JPS5081491A (fi) * | 1973-11-20 | 1975-07-02 | ||
| CH581906A5 (fi) * | 1974-05-06 | 1976-11-15 | Suisse Horlogerie | |
| JPS5260090A (en) * | 1975-11-12 | 1977-05-18 | Citizen Watch Co Ltd | Thin and small type piezo electric vibrator |
| JPS5291675A (en) * | 1976-01-29 | 1977-08-02 | Seiko Instr & Electronics Ltd | Vibrator unit |
| JPS5298495A (en) * | 1976-02-13 | 1977-08-18 | Seiko Instr & Electronics Ltd | Manufacture of box-type crystal vibrator unit |
| JPS53131792A (en) * | 1977-04-22 | 1978-11-16 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
| JPS53149788A (en) * | 1977-06-01 | 1978-12-27 | Seiko Instr & Electronics Ltd | Piezo-electric vibrator and its manufacture |
| JPS5421295A (en) * | 1977-07-19 | 1979-02-17 | Matsushima Kogyo Kk | Crystal oscillator |
| US4130628A (en) * | 1977-08-22 | 1978-12-19 | Pittsburgh Environmental And Energy Systems, Inc. | Process for removing SO2 and NOx from gases |
| JPS5434272A (en) * | 1977-08-23 | 1979-03-13 | Seiko Instr & Electronics Ltd | Electronic wristwatch |
| DE2750038A1 (de) * | 1977-11-09 | 1979-05-10 | Hauni Werke Koerber & Co Kg | Verfahren und anordnung zum steuern des perforierens von zigaretten oder anderen stabfoermigen rauchartikeln |
| JPS5925486B2 (ja) * | 1977-11-15 | 1984-06-18 | シチズン時計株式会社 | 圧電振動子の容器 |
| JPS54118191A (en) * | 1978-03-07 | 1979-09-13 | Matsushima Kogyo Co Ltd | Crystal oscillator |
| JPS5513553A (en) * | 1978-07-14 | 1980-01-30 | Matsushima Kogyo Co Ltd | Crystal vibrator |
| JPS5549012A (en) * | 1978-10-04 | 1980-04-08 | Seiko Instr & Electronics Ltd | Composite vibrator unit |
| JPS5549013A (en) * | 1978-10-04 | 1980-04-08 | Seiko Instr & Electronics Ltd | Composite vibrator unit |
| FR2441960A1 (fr) * | 1978-11-16 | 1980-06-13 | Suisse Horlogerie | Resonateur piezoelectrique travaillant en cisaillement d'epaisseur |
| FR2441959A1 (fr) * | 1978-11-16 | 1980-06-13 | Suisse Horlogerie | Resonateur piezoelectrique a diapason |
-
1979
- 1979-07-05 CH CH628379A patent/CH626479A5/fr not_active IP Right Cessation
- 1979-08-22 FR FR7921599A patent/FR2460565B1/fr not_active Expired
-
1980
- 1980-07-02 IT IT23198/80A patent/IT1150027B/it active
- 1980-07-02 JP JP9050580A patent/JPS5610723A/ja active Pending
- 1980-07-04 CA CA000355524A patent/CA1152586A/en not_active Expired
- 1980-07-04 GB GB8021945A patent/GB2056764B/en not_active Expired
- 1980-07-04 DE DE19803025477 patent/DE3025477A1/de not_active Ceased
-
1982
- 1982-02-03 US US06/345,283 patent/US4445256A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| GB2056764B (en) | 1983-03-30 |
| FR2460565A1 (fr) | 1981-01-23 |
| DE3025477A1 (de) | 1981-01-22 |
| GB2056764A (en) | 1981-03-18 |
| FR2460565B1 (fr) | 1987-05-22 |
| IT8023198A0 (it) | 1980-07-02 |
| CA1152586A (en) | 1983-08-23 |
| JPS5610723A (en) | 1981-02-03 |
| IT8023198A1 (it) | 1982-01-02 |
| IT1150027B (it) | 1986-12-10 |
| US4445256A (en) | 1984-05-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CH626479A5 (fi) | ||
| EP0638933B1 (fr) | Procédé d'interconnexion de pastilles semi-conductrices en trois dimensions, et composant en résultant | |
| EP1060562B1 (fr) | Dispositif a ondes acoustiques guidees dans une fine couche piezo-electrique collee sur un substrat porteur et procede de fabrication | |
| FR2974691B1 (fr) | Dispositif electromecanique a ondes acoustiques comprenant une zone de transduction et une cavite etendue | |
| EP1692761B1 (fr) | Composant electronique ayant un element resonateur dans un boitier hermetiquement ferme | |
| EP2091148A1 (fr) | Filtre à résonateurs acoustiques de type BAW reconfigurable par voie numérique et procédé | |
| WO2003069776A2 (fr) | Microresonateur mems a ondes acoustiques de volume accordable | |
| CH625372A5 (fi) | ||
| FR2553554A1 (fr) | Resonateur acoustique et son procede de fabrication | |
| FR2648642A1 (fr) | Dispositif resonateur piezo-electrique | |
| EP0557217A1 (fr) | Micro-capteur capacitif à faible capacité parasite et procédé de fabrication | |
| EP0593330B1 (fr) | Procédé d'interconnexion 3D de boítiers de composants électroniques, et composant 3D en résultant | |
| EP1499018A1 (fr) | Résonateur acoustique de volume à fréquence de résonance ajustée et procédé de réalisation | |
| EP2091147A1 (fr) | Circuit de filtrage comportant des résonateurs acoustiques couplés | |
| EP1863174A1 (fr) | Composant contenant un filtre BAW | |
| EP1964204B1 (fr) | Boitier avec fonction accordable en frequence | |
| FR2808919A1 (fr) | Microcomposant electronique du type capacite variable ou microswitch, ou procede de fabrication d'un tel composant | |
| EP2254243B1 (fr) | Résonateur à ondes acoustiques de volume et son procédé de fabrication | |
| FR2635920A1 (fr) | Procede de fabrication d'une zone de connexion pour un circuit hyperfrequence de type triplaque et circuit ainsi obtenu | |
| CH617794A5 (en) | Quartz crystal vibrator | |
| CA2358282A1 (fr) | Resonateur electrique | |
| EP2782868B1 (fr) | Procédé de fabrication d'un dispositif d'encapsulage | |
| EP1617503A1 (fr) | Filtre fréquentiel et son procédé de réalisation | |
| WO2004102796A1 (fr) | Resonateurs integres et base de temps incorporant de tels resonateurs | |
| FR2638894A1 (fr) | Dispositif et procede de connexion et de fixation de composants |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUE | Assignment |
Owner name: DRYAN-FORDAHL TECHNOLOGIES S.A. |
|
| PUE | Assignment |
Owner name: VIBRO-METER S.A. |
|
| PL | Patent ceased | ||
| PL | Patent ceased |