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CH537986A - Apparatus for vacuum evaporation and use of the same - Google Patents

Apparatus for vacuum evaporation and use of the same

Info

Publication number
CH537986A
CH537986A CH901070A CH901070A CH537986A CH 537986 A CH537986 A CH 537986A CH 901070 A CH901070 A CH 901070A CH 901070 A CH901070 A CH 901070A CH 537986 A CH537986 A CH 537986A
Authority
CH
Switzerland
Prior art keywords
same
vacuum evaporation
evaporation
vacuum
Prior art date
Application number
CH901070A
Other languages
German (de)
Inventor
Roland Jacobsson Jan
Martensson John-Olof
Original Assignee
Aga Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aga Ab filed Critical Aga Ab
Publication of CH537986A publication Critical patent/CH537986A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH901070A 1969-06-13 1970-06-15 Apparatus for vacuum evaporation and use of the same CH537986A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE840469A SE335294B (en) 1969-06-13 1969-06-13

Publications (1)

Publication Number Publication Date
CH537986A true CH537986A (en) 1973-06-15

Family

ID=20273982

Family Applications (1)

Application Number Title Priority Date Filing Date
CH901070A CH537986A (en) 1969-06-13 1970-06-15 Apparatus for vacuum evaporation and use of the same

Country Status (6)

Country Link
JP (1) JPS4842352B1 (en)
CH (1) CH537986A (en)
DE (1) DE2029020B2 (en)
FR (1) FR2052571A5 (en)
GB (1) GB1317052A (en)
SE (1) SE335294B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
DE102010032591A1 (en) 2010-07-23 2012-01-26 Leybold Optics Gmbh Apparatus and method for vacuum coating

Also Published As

Publication number Publication date
SE335294B (en) 1971-05-17
JPS4842352B1 (en) 1973-12-12
DE2029020B2 (en) 1973-03-29
DE2029020A1 (en) 1971-01-07
GB1317052A (en) 1973-05-16
FR2052571A5 (en) 1971-04-09

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Legal Events

Date Code Title Description
PUE Assignment

Owner name: PHAROS AB

PFA Name/firm changed

Owner name: PHAROS AB

PL Patent ceased