CH525288A - Verfahren zur Herstellung von auf Substraten kreisförmig aufgebrachten Schichten - Google Patents
Verfahren zur Herstellung von auf Substraten kreisförmig aufgebrachten SchichtenInfo
- Publication number
- CH525288A CH525288A CH539768A CH539768A CH525288A CH 525288 A CH525288 A CH 525288A CH 539768 A CH539768 A CH 539768A CH 539768 A CH539768 A CH 539768A CH 525288 A CH525288 A CH 525288A
- Authority
- CH
- Switzerland
- Prior art keywords
- substrates
- circle
- production
- layers applied
- layers
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEJ0033412 | 1967-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH525288A true CH525288A (de) | 1972-07-15 |
Family
ID=7204758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH539768A CH525288A (de) | 1967-04-11 | 1968-04-09 | Verfahren zur Herstellung von auf Substraten kreisförmig aufgebrachten Schichten |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3561993A (de) |
| CH (1) | CH525288A (de) |
| DE (1) | DE1621263B2 (de) |
| GB (1) | GB1217863A (de) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3773541A (en) * | 1970-11-02 | 1973-11-20 | Gte Sylvania Inc | Process for achieving a controlled gradient density coating on a light attenuation medium |
| US3914464A (en) * | 1971-04-19 | 1975-10-21 | Optical Coating Laboratory Inc | Striped dichroic filter and method for making the same |
| US3899996A (en) * | 1974-06-10 | 1975-08-19 | Zenith Radio Corp | Apparatus for making light attenuating filters |
| US4303489A (en) * | 1978-08-21 | 1981-12-01 | Vac-Tec Systems, Inc. | Method and apparatus for producing a variable intensity pattern of sputtering material on a substrate |
| CA1197088A (en) * | 1983-10-17 | 1985-11-26 | Jerzy A. Dobrowolski | Vapour deposition regulating apparatus |
| US4814056A (en) * | 1987-06-23 | 1989-03-21 | Vac-Tec Systems, Inc. | Apparatus for producing graded-composition coatings |
| DE3816578C1 (en) * | 1988-05-14 | 1989-03-16 | Agfa-Gevaert Ag, 5090 Leverkusen, De | Process and device for the vapour deposition of graded-light filter layers on transparent plates |
| US5100599A (en) * | 1989-06-15 | 1992-03-31 | The Boeing Company | Method for producing thin film particulates of controlled shape |
| US6176967B1 (en) | 1998-09-16 | 2001-01-23 | International Business Machines Corporation | Reactive ion etch chamber wafer masking system |
| TW574592B (en) * | 2003-01-29 | 2004-02-01 | Asia Optical Co Inc | Multi-color film-plating process of a single piece type filter and color rotation wheel set equipped with the filter |
| JP4078551B2 (ja) * | 2003-08-08 | 2008-04-23 | ミネベア株式会社 | カラーホイール、その製造方法、およびそれを備えた分光装置並びに画像表示装置 |
| DE102010021547A1 (de) * | 2010-05-20 | 2011-11-24 | Konstantinos Fostiropoulos | Verfahren und Vorrichtung zur Beschichtung von Substraten im Vakuumdepositionsverfahren |
-
1967
- 1967-04-11 DE DE19671621263 patent/DE1621263B2/de active Pending
-
1968
- 1968-04-09 GB GB06994/68A patent/GB1217863A/en not_active Expired
- 1968-04-09 CH CH539768A patent/CH525288A/de not_active IP Right Cessation
- 1968-04-10 US US720146A patent/US3561993A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB1217863A (en) | 1970-12-31 |
| DE1621263A1 (de) | 1970-08-20 |
| DE1621263B2 (de) | 1971-03-25 |
| US3561993A (en) | 1971-02-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |