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CH519699A - Device for measuring the change in an optical path length with the aid of an interferometer - Google Patents

Device for measuring the change in an optical path length with the aid of an interferometer

Info

Publication number
CH519699A
CH519699A CH800368A CH800368A CH519699A CH 519699 A CH519699 A CH 519699A CH 800368 A CH800368 A CH 800368A CH 800368 A CH800368 A CH 800368A CH 519699 A CH519699 A CH 519699A
Authority
CH
Switzerland
Prior art keywords
interferometer
aid
measuring
change
optical path
Prior art date
Application number
CH800368A
Other languages
German (de)
Inventor
Lang Hendrik De
Tapley Ferguson Eric
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH519699A publication Critical patent/CH519699A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Polarising Elements (AREA)
CH800368A 1967-06-02 1968-05-30 Device for measuring the change in an optical path length with the aid of an interferometer CH519699A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6707681A NL6707681A (en) 1967-06-02 1967-06-02

Publications (1)

Publication Number Publication Date
CH519699A true CH519699A (en) 1972-02-29

Family

ID=19800297

Family Applications (1)

Application Number Title Priority Date Filing Date
CH800368A CH519699A (en) 1967-06-02 1968-05-30 Device for measuring the change in an optical path length with the aid of an interferometer

Country Status (7)

Country Link
JP (1) JPS494668B1 (en)
BE (1) BE715999A (en)
CH (1) CH519699A (en)
FR (1) FR1579550A (en)
GB (1) GB1233597A (en)
NL (1) NL6707681A (en)
SE (1) SE330991B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2177476B1 (en) * 1972-03-03 1974-08-02 Onera (Off Nat Aerospatiale)
JPS5147266U (en) * 1974-10-07 1976-04-08
DD201191B1 (en) * 1981-09-24 1987-07-15 Ilmenau Tech Hochschule KIPPINVARIANT INTERFEROMETER WITH LEVELS MIRROR
JPH0198902A (en) * 1987-10-12 1989-04-17 Res Dev Corp Of Japan Optical interference length measurement device
DE59006437D1 (en) * 1990-03-27 1994-08-18 Sohler Wolfgang Integrated acousto-optical heterodyne interferometer.
FR2685763B1 (en) * 1991-12-27 1994-03-25 Aime Vareille OPTICAL METHOD AND DEVICE FOR DISTANCE MEASUREMENT AND THEIR APPLICATION TO THE RELATIVE POSITIONING OF WORKPIECES.
DE19628200B4 (en) * 1996-07-12 2007-03-01 Deutsches Zentrum für Luft- und Raumfahrt e.V. Apparatus for performing interferometric measurements
DE19840523A1 (en) * 1998-01-29 1999-08-12 Hewlett Packard Co Deadpath compensating interferometer for displacement measurements
RU2177605C1 (en) * 2000-12-04 2001-12-27 Атнашев Виталий Борисович Spectrometry process and device for its realization ( variants )

Also Published As

Publication number Publication date
BE715999A (en) 1968-12-02
JPS494668B1 (en) 1974-02-02
DE1773541B2 (en) 1975-07-17
DE1773541A1 (en) 1971-06-09
SE330991B (en) 1970-12-07
GB1233597A (en) 1971-05-26
NL6707681A (en) 1968-12-03
FR1579550A (en) 1969-08-29

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Legal Events

Date Code Title Description
PL Patent ceased