Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
  • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
  • G05B19/00—Programme-control systems
  • G05B19/02—Programme-control systems electric
  • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
  • G05B19/188—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by special applications and not provided for in the relevant subclasses, (e.g. making dies, filament winding)
• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
  • G05D3/00—Control of position or direction
  • G05D3/12—Control of position or direction using feedback
  • G05D3/14—Control of position or direction using feedback using an analogue comparing device
  • G05D3/18—Control of position or direction using feedback using an analogue comparing device delivering a series of pulses
  • G05D3/183—Control of position or direction using feedback using an analogue comparing device delivering a series of pulses using stepping motor

Landscapes

• Engineering & Computer Science (AREA)
• General Physics & Mathematics (AREA)
• Physics & Mathematics (AREA)
• Automation & Control Theory (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Human Computer Interaction (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Length Measuring Devices By Optical Means (AREA)
• Control Of Position Or Direction (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=25033946

Family Applications (1)

Country Status (6)

Families Citing this family (20)

Family Cites Families (7)

• 1968
  • 1968-08-21 US US754228A patent/US3598978A/en not_active Expired - Lifetime
• 1969
  • 1969-07-05 CA CA056269A patent/CA922796A/en not_active Expired
  • 1969-08-12 DE DE1941057A patent/DE1941057B2/de active Granted
  • 1969-08-14 GB GB40726/69A patent/GB1282105A/en not_active Expired
  • 1969-08-20 CH CH1266269A patent/CH514189A/de not_active IP Right Cessation
  • 1969-08-21 FR FR6928772A patent/FR2016991A1/fr not_active Withdrawn

Also Published As

Similar Documents

Legal Events