Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B82—NANOTECHNOLOGY
  • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
  • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B82—NANOTECHNOLOGY
  • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
  • B82Y40/00—Manufacture or treatment of nanostructures
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
  • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
  • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
  • Y10S430/143—Electron beam

Landscapes

• Engineering & Computer Science (AREA)
• Chemical & Material Sciences (AREA)
• Nanotechnology (AREA)
• Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• General Physics & Mathematics (AREA)
• Crystallography & Structural Chemistry (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Mathematical Physics (AREA)
• Theoretical Computer Science (AREA)
• Analytical Chemistry (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
• Preparing Plates And Mask In Photomechanical Process (AREA)
• Electron Beam Exposure (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=7531832

Family Applications (1)

Country Status (8)

Cited By (3)

Families Citing this family (6)

Family Cites Families (9)

• 1967
  • 1967-10-23 DE DE19671614635 patent/DE1614635A1/de active Pending
  • 1967-10-23 AT AT10251/68A patent/AT301620B/de not_active IP Right Cessation
• 1968
  • 1968-09-27 NL NL6813891A patent/NL6813891A/xx unknown
  • 1968-10-18 US US768797A patent/US3607382A/en not_active Expired - Lifetime
  • 1968-10-18 FR FR1589571D patent/FR1589571A/fr not_active Expired
  • 1968-10-22 GB GB1230469D patent/GB1230469A/en not_active Expired
  • 1968-10-23 SE SE14341/68A patent/SE331315B/xx unknown
  • 1968-10-23 CH CH1581068A patent/CH485327A/de not_active IP Right Cessation

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