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CH468077A - Device for processing workpieces with a beam of charged particles - Google Patents

Device for processing workpieces with a beam of charged particles

Info

Publication number
CH468077A
CH468077A CH1727667A CH1727667A CH468077A CH 468077 A CH468077 A CH 468077A CH 1727667 A CH1727667 A CH 1727667A CH 1727667 A CH1727667 A CH 1727667A CH 468077 A CH468077 A CH 468077A
Authority
CH
Switzerland
Prior art keywords
charged particles
processing workpieces
workpieces
processing
charged
Prior art date
Application number
CH1727667A
Other languages
German (de)
Inventor
C Holland Robert
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of CH468077A publication Critical patent/CH468077A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
CH1727667A 1966-12-14 1967-12-08 Device for processing workpieces with a beam of charged particles CH468077A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US601773A US3406273A (en) 1966-12-14 1966-12-14 Magnetic vapor deflector for an electron beam

Publications (1)

Publication Number Publication Date
CH468077A true CH468077A (en) 1969-01-31

Family

ID=24408709

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1727667A CH468077A (en) 1966-12-14 1967-12-08 Device for processing workpieces with a beam of charged particles

Country Status (4)

Country Link
US (1) US3406273A (en)
CH (1) CH468077A (en)
DE (1) DE1615473A1 (en)
FR (1) FR1549697A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3474220A (en) * 1967-05-17 1969-10-21 Webb James E Device for preventing high voltage arcing in electron beam welding
US3701922A (en) * 1970-08-31 1972-10-31 Northrop Corp Electron beam line scanner with transverse binary control
DE4430534A1 (en) * 1994-08-27 1996-04-11 Hell Ag Linotype Electron beam generator
KR20080101098A (en) * 2007-05-15 2008-11-21 전자빔기술센터 주식회사 Magnetic field deflector for microelectronic columns

Also Published As

Publication number Publication date
FR1549697A (en) 1968-12-13
DE1615473A1 (en) 1970-06-25
US3406273A (en) 1968-10-15

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