CH463232A - Vakuumanlage, insbesondere Bedampfungseinrichtung - Google Patents

Vakuumanlage, insbesondere Bedampfungseinrichtung

Info

Publication number: CH463232A
Authority: CH; Switzerland
Prior art keywords: vacuum system; steaming device; particular steaming; vacuum; steaming
Prior art date: 1966-07-13

Application number

CH993667A

Other languages

English (en)

Inventor

Oakley Dubois Andrew

Original Assignee

Libbey Owens Ford Glass Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1966-07-13

Filing date

1967-07-12

Publication date

1968-09-30

1967-07-12 Application filed by Libbey Owens Ford Glass Co filed Critical Libbey Owens Ford Glass Co

1968-09-30 Publication of CH463232A publication Critical patent/CH463232A/de

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Medicines Containing Material From Animals Or Micro-Organisms (AREA)

CH993667A 1966-07-13 1967-07-12 Vakuumanlage, insbesondere Bedampfungseinrichtung CH463232A (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US564811A US3360600A (en)	1966-07-13	1966-07-13	Vapor source assembly

Publications (1)

Publication Number	Publication Date
CH463232A true CH463232A (de)	1968-09-30

Family

ID=24255989

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH993667A CH463232A (de)	1966-07-13	1967-07-12	Vakuumanlage, insbesondere Bedampfungseinrichtung

Country Status (10)

Country	Link
US (1)	US3360600A (de)
AT (1)	AT294511B (de)
BE (1)	BE701306A (de)
CH (1)	CH463232A (de)
ES (1)	ES342858A1 (de)
GB (1)	GB1151126A (de)
LU (1)	LU53955A1 (de)
NL (1)	NL6709464A (de)
NO (1)	NO127425B (de)
SE (1)	SE335269B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3502499A (en) *	1967-05-22	1970-03-24	Texas Instruments Inc	Cladding method and apparatus
US3613633A (en) *	1970-03-18	1971-10-19	Schjeldahl Co G T	Method and apparatus for coating articles utilizing rotating crucible coating apparatus including a centrifugal-type crucible
US4048462A (en) *	1975-01-17	1977-09-13	Airco, Inc.	Compact rotary evaporation source
DE2519537C2 (de) *	1975-05-02	1982-11-04	Leybold-Heraeus GmbH, 5000 Köln	Elektronenstrahlgerät für Heiz-, Schmelz- und Verdampfungszwecke mit Ablenksystemen
DE3228311C2 (de) *	1982-07-29	1984-07-05	Leybold-Heraeus GmbH, 5000 Köln	Verdampfertiegel für Vakuum-Aufdampfanlagen
KR101785562B1 (ko) *	2010-10-18	2017-10-18	삼성디스플레이 주식회사	연속 증착이 가능한 박막 증착 장치 및 그 박막 증착 장치에 사용되는 마스크유닛과 도가니유닛

1966
- 1966-07-13 US US564811A patent/US3360600A/en not_active Expired - Lifetime
1967
- 1967-06-26 LU LU53955D patent/LU53955A1/xx unknown
- 1967-06-27 NO NO00168765A patent/NO127425B/no unknown
- 1967-06-29 SE SE09709/67*A patent/SE335269B/xx unknown
- 1967-07-07 NL NL6709464A patent/NL6709464A/xx unknown
- 1967-07-10 AT AT642667A patent/AT294511B/de not_active IP Right Cessation
- 1967-07-10 ES ES342858A patent/ES342858A1/es not_active Expired
- 1967-07-11 GB GB31852/67A patent/GB1151126A/en not_active Expired
- 1967-07-12 CH CH993667A patent/CH463232A/de unknown
- 1967-07-13 BE BE701306D patent/BE701306A/xx unknown

Also Published As

Publication number	Publication date
BE701306A (de)	1967-12-18
DE1621203B2 (de)	1972-12-28
AT294511B (de)	1971-11-25
NL6709464A (de)	1968-01-15
DE1621203A1 (de)	1971-06-03
NO127425B (de)	1973-06-18
ES342858A1 (es)	1968-08-16
US3360600A (en)	1967-12-26
SE335269B (de)	1971-05-17
GB1151126A (en)	1969-05-07
LU53955A1 (de)	1967-08-28

Publication	Publication Date	Title
NL156986B (nl)	1978-06-15	Vellensorteerinrichting.
NL145135B (nl)	1975-03-17	Extra-corticaalklem.
CH452795A (de)	1968-03-15	Textilie, insbesondere Verbandstoff
NL156643B (nl)	1978-05-16	Reminrichting.
NL153803B (nl)	1977-07-15	Drukinrichting.
NL140093B (nl)	1973-10-15	Exotherme getterinrichting.
NL156321B (nl)	1978-04-17	Dialyse-apparaat.
CH463232A (de)	1968-09-30	Vakuumanlage, insbesondere Bedampfungseinrichtung
DK126608B (da)	1973-07-30	Pneumatisk tidsforsinkelsesapparat.
DK117909B (da)	1970-06-15	Halvlederapparat.
AT287169B (de)	1971-01-11	Vakuumpumpe, insbesondere Wassering-Vakummpumpe
DK119624B (da)	1971-02-01	Præservativ.
CH438614A (de)	1967-06-30	Serviette, insbesondere Papierserviette
BR6803831D0 (pt)	1973-03-29	Dispositivo de sujeicao
NL151678B (nl)	1976-12-15	Draaginrichting.
NL156367B (nl)	1978-04-17	Grijper.
FI52626C (fi)	1977-10-10	Lukituslaite.
NL144399B (nl)	1974-12-16	Monopuls volgradarapparaat.
FR1483157A (fr)	1967-06-02	Aspirateur
FR1483158A (fr)	1967-06-02	Aspirateur
FR1483159A (fr)	1967-06-02	Aspirateur
FR1483160A (fr)	1967-06-02	Aspirateur
NL149643B (nl)	1976-05-17	Supergeleidende inrichting.
AT277316B (de)	1969-12-29	Stromabnehmer, insbesondere Halbscherenstromabnehmer
ES123770Y (es)	1967-04-01	Dispositivo escurridor perfeccionado.