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CH332306A - Polarisationsladungsfreie Blende für Elektronen- und Ionengeräte - Google Patents

Polarisationsladungsfreie Blende für Elektronen- und Ionengeräte

Info

Publication number
CH332306A
CH332306A CH332306DA CH332306A CH 332306 A CH332306 A CH 332306A CH 332306D A CH332306D A CH 332306DA CH 332306 A CH332306 A CH 332306A
Authority
CH
Switzerland
Prior art keywords
electron
polarization charge
free screen
ion devices
ion
Prior art date
Application number
Other languages
English (en)
Inventor
Ardenne Manfred Von
Original Assignee
Ardenne Manfred Von
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ardenne Manfred Von filed Critical Ardenne Manfred Von
Publication of CH332306A publication Critical patent/CH332306A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
CH332306D 1955-05-10 1955-06-02 Polarisationsladungsfreie Blende für Elektronen- und Ionengeräte CH332306A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2851611X 1955-05-10

Publications (1)

Publication Number Publication Date
CH332306A true CH332306A (de) 1958-08-31

Family

ID=7999691

Family Applications (1)

Application Number Title Priority Date Filing Date
CH332306D CH332306A (de) 1955-05-10 1955-06-02 Polarisationsladungsfreie Blende für Elektronen- und Ionengeräte

Country Status (2)

Country Link
US (1) US2851611A (de)
CH (1) CH332306A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL261531A (de) * 1960-02-22
BE634472A (de) * 1962-07-05 1964-01-03

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE895350C (de) * 1938-11-06 1953-11-02 Siemens Ag Elektronenmikroskop
US2352043A (en) * 1940-01-15 1944-06-20 Ardenne Manfred Von Diaphragm for electron optical apparatus

Also Published As

Publication number Publication date
US2851611A (en) 1958-09-09

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