CH259829A - Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier. - Google Patents
Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier.Info
- Publication number
- CH259829A CH259829A CH259829DA CH259829A CH 259829 A CH259829 A CH 259829A CH 259829D A CH259829D A CH 259829DA CH 259829 A CH259829 A CH 259829A
- Authority
- CH
- Switzerland
- Prior art keywords
- metal
- wire
- evaporated
- evaporation
- melting
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/183—Composition or manufacture of getters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/186—Getter supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
Einrichtung zur Verdampfung mindestens eines Metalles, bei der das zu verdampfende Metall auf einem drahtförmigen Träger angebracht ist. Die Erfindung bezieht sieh auf eine Ein- richtluig zur Verdampfung mindestens eines Metalles, bei der das zu verdampfende Metall auf einem drahtförmigen Träger angebracht ist, der bei der Verdainpfungstemperatur des zii verdampfenden Metalles fest bleibt.
Es ist bekannt, Metalle von einem Draht aus hoehsehinelzendein Metall abzudanipfeil. Das zu verdampfende Metall wird als gleich- inä13ige Schicht (z. B. auf elektrol3 tischein Wege) auf dein hochsehmelzenden Draht an- gebraclit oder als Draht schraubeilliiiieniör- inig auf diesen Draht gewunden.
Diesem bekannten Verdampfungsverfah- ren haftet der Naehteil an, dass das zu ver dampfende Metall beim Schmelzen Tropfen bildet, die eine Abkühlung des Drahtes an den betreffenden Stellen herbeiführen, wo gegen der Draht an andern, nicht mehr be deckten Stellen zn heiss wird und leicht durch- schmilzt. Es verdampft dann nicht nur das zum Verdampfen bestimmte Metall, sondern in geringem Masse auch das Metall des Trä: gerdralltes. Letzteres kann z.
B. beim Auf dampfen von Aluminiumspiegeln für optische Zwecke sehr unerwünscht sein.
Die Erfindung sucht diese Nachteile zu beheben.
Bei der erfindungsgemässen Einrichtung zur Verdampfung mindestens eines Metalles, bei der das zu verdampfende Metall auf einem drahtförmigen Träger angebracht ist, der bei der Verdampfungstemperatur des zu ver- dampfenden 3letalles fest bleibt, ist gemäss der Erfindung das zu verdampfende Metall in mindestens einem schraubenlinienförmigen Kanal ain drahtförmigen Träger unterge bracht, wobei die Wände des Kanals ausl boehsehmelzendenn Material.
bestehen.
Ilierdurch wird erzielt, dass das zu ver dampfende Metall gleiehniä.ssig über die ganze Länge des Trägers verteilt bleibt, wenn es geschmolzen ist, und vollständig verdampfen kann.
Vorzugsweise wird das zni verdampfende Metall als Draht neben einem Dralit aus hoch sehmelzendein Metall auf den Träger gewun den. Der Draht aus hochschnielzendein Metall bildet dann mit denn Träger zusammen den sehraubenlinienförmigen Kanal mit hoch schmelzenden Wänden.
Gegebenenfalls können mehrere Drähte des zu verdampfenden Metalles oder Drähte aus verschiedenen zu verdampfenden Metal len nebeneinander in den Kanal gelegt wer den, oder man kann mittels mehrerer hoch schmelzender Drähte mehr als einen Kanal auf dem Träger anbringen.
Man kann auch eine Anzahl Drähte aus dein hochschmelzenden und dem zu verdamp fenden Metall ineinanderdrehen.
Es ist nicht unbedingt erforderlich, das zu verdampfende Metall in Drahtform anzubrin gen, sondern es ist auch möglich, es als Pul- ver, mit einem feuerfesten Bindemittel ge mischt, in dem Kanal auf dem Träger anzu- bringen.
Es ist auch möglich, in einen verhältnis mässig starken Träger eine schraubenlinien- förmige Rinne einzuschneiden, die dann den Kanal bildet.
Die geschilderte Vorrichtung zur Ver dampfung von Metallen ist verwendbar zum Bedecken von Kristallen für Hochfrequenz zwecke mit leitenden Schichten. Weiter zum Aufdampfen optischer Spiegel mit Alumi nium, Silber oder Chrom und zum Überzie hen von Wickelschichten für Papierkonden satoren mit Zink oder Aluminium. Es soll dafür gesorgt werden, dass die Schmelzpunkte des zu verdampfenden und des tragenden Metalles hinreichend voneinander verschieden sind.
Zur Verdampfung eines Metalles wie Zir- konium oder Tantal verwendet man zweck- mässig einen Wolframträger und einen eben falls aus Wolfram bestehenden, auf diesen aufgewickelten Draht.
Mit auf diese Weise verdampften Metal len sind in elektrischen Entladungsröhren vorzügliche Fangstoffspiegel erzielbar; es kann z. B. in einer elektrischen Entladungs röhre als Träger ein mit einem Durchmesser von einigen Millimetern sehraubenlinienför- mig gewickelter Wolframdraht mit einem Durchmesser von 0,6 mm angeordnet werden, auf den ein Zirkoniumdraht in einer Stärke von 0,
2 mm und neben ihm ein Wolfram- draht, ebenfalls in einer Stärke von 0,2 mm, schraubenlinienförmig gewickelt worden ist. Unmittelbar nach Abschmelzen der Röhre von der Pumpanlage wird der schrauben- linienförmig gewundene Träger erhitzt, bis z. B. die Hälfte des Zirkoniums verdampft worden ist.
Wenn Gase aus den Elektroden ausbrechen, kann während des Betriebes der Entladungsröhre oder während einer Be triebsunterbrechung abermals eine Menge Zirkonium in der Röhre verdampft werden.
Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier. The invention relates to a device for vaporizing at least one metal, in which the metal to be vaporized is attached to a wire-shaped carrier which remains solid at the vaporization temperature of the metal to be vaporized.
It is known to strip metals from a wire made of high-pinned metal. The metal to be vaporized is applied as a uniform layer (e.g. by means of an electrical table) to your high-silt wire or is screwed onto this wire as a screw.
This known evaporation process has the inherent part that the metal to be evaporated forms droplets as it melts, which cool the wire in the relevant places, where the wire becomes too hot and slightly through in other places that are no longer covered - melts. It then not only vaporizes the metal intended for vaporizing, but also, to a small extent, the metal of the carrier twisted. The latter can e.g.
B. be very undesirable in the vaporization of aluminum mirrors for optical purposes.
The invention seeks to remedy these disadvantages.
In the device according to the invention for the evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped support which remains solid at the evaporation temperature of the metal to be evaporated, the metal to be evaporated is in accordance with the invention in at least one helical channel wire-shaped carrier housed, the walls of the channel made of boehsehmelzendenn material.
consist.
This ensures that the metal to be evaporated remains uniformly distributed over the entire length of the carrier when it is melted and can evaporate completely.
The zni-evaporating metal is preferably wound onto the support as a wire in addition to a twist made of high-melting metal. The wire made of high-snapping metal then forms the very dome-shaped channel with high-melting walls together with the carrier.
If necessary, several wires of the metal to be evaporated or wires made of different metals to be evaporated can be placed next to one another in the channel, or more than one channel can be attached to the carrier by means of several high-melting wires.
You can also twist a number of wires made of your refractory metal and the metal to be vaporized into one another.
It is not absolutely necessary to apply the metal to be vaporized in wire form, but it is also possible to apply it as a powder, mixed with a refractory binder, in the channel on the carrier.
It is also possible to cut a helical groove into a relatively strong support, which then forms the channel.
The described device for evaporation of metals can be used for covering crystals for high frequency purposes with conductive layers. Then there is the vapor deposition of optical mirrors with aluminum, silver or chrome and the coating of winding layers for paper capacitors with zinc or aluminum. Care should be taken to ensure that the melting points of the metal to be evaporated and that of the supporting metal are sufficiently different from one another.
To vaporize a metal such as zirconium or tantalum, it is advisable to use a tungsten carrier and a wire that is also made of tungsten and wound on it.
With metal len evaporated in this way, excellent levels of capture material can be achieved in electrical discharge tubes; it can e.g. B. in an electrical discharge tube as a carrier with a diameter of a few millimeters very dome lines wound tungsten wire with a diameter of 0.6 mm, on which a zirconium wire with a thickness of 0,
2 mm and next to it a tungsten wire, also 0.2 mm thick, has been helically wound. Immediately after the tube has melted from the pumping system, the helically wound support is heated until, for example, B. half of the zirconium has been evaporated.
If gases break out of the electrodes, a quantity of zirconium can again be vaporized in the tube during operation of the discharge tube or during an interruption in operation.
Claims (1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB941441A GB550848A (en) | 1941-07-24 | 1941-07-24 | Improvements in and relating to the vaporisation of metals |
Publications (1)
Publication Number | Publication Date |
---|---|
CH259829A true CH259829A (en) | 1949-02-15 |
Family
ID=9871505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH259829D CH259829A (en) | 1941-07-24 | 1947-10-02 | Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier. |
Country Status (6)
Country | Link |
---|---|
CH (1) | CH259829A (en) |
DE (1) | DE804747C (en) |
DK (1) | DK71216C (en) |
FR (1) | FR957503A (en) |
GB (1) | GB550848A (en) |
NL (1) | NL65091C (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019003764A1 (en) * | 2019-05-29 | 2020-12-03 | Schneider Gmbh & Co. Kg | Coating device, evaporation device and coating source |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1219309B (en) * | 1960-03-24 | 1966-06-16 | Philips Nv | Heating conductor made of at least two twisted wires for vacuum evaporation of metal layers |
US3190771A (en) * | 1962-01-11 | 1965-06-22 | Electra Mfg Company | Filament for vacuum deposition apparatus and method of making it |
WO2016070267A1 (en) * | 2014-11-04 | 2016-05-12 | General Fusion Inc. | System and method for evaporating a metal |
-
0
- NL NL65091D patent/NL65091C/xx active
-
1941
- 1941-07-24 GB GB941441A patent/GB550848A/en not_active Expired
-
1947
- 1947-10-02 CH CH259829D patent/CH259829A/en unknown
- 1947-11-25 DK DK437947A patent/DK71216C/en active
- 1947-12-19 FR FR957503D patent/FR957503A/fr not_active Expired
-
1948
- 1948-12-24 DE DEP26548A patent/DE804747C/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019003764A1 (en) * | 2019-05-29 | 2020-12-03 | Schneider Gmbh & Co. Kg | Coating device, evaporation device and coating source |
Also Published As
Publication number | Publication date |
---|---|
NL65091C (en) | |
DK71216C (en) | 1950-07-10 |
GB550848A (en) | 1943-01-27 |
DE804747C (en) | 1951-04-30 |
FR957503A (en) | 1950-02-23 |
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