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CH259829A - Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier. - Google Patents

Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier.

Info

Publication number
CH259829A
CH259829A CH259829DA CH259829A CH 259829 A CH259829 A CH 259829A CH 259829D A CH259829D A CH 259829DA CH 259829 A CH259829 A CH 259829A
Authority
CH
Switzerland
Prior art keywords
metal
wire
evaporated
evaporation
melting
Prior art date
Application number
Other languages
German (de)
Inventor
Gloeilampenfabrieken N Philips
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH259829A publication Critical patent/CH259829A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18Means for absorbing or adsorbing gas, e.g. by gettering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183Composition or manufacture of getters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/186Getter supports
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

  

  Einrichtung zur Verdampfung mindestens eines     Metalles,    bei der das zu verdampfende  Metall auf einem drahtförmigen Träger angebracht ist.    Die Erfindung bezieht sieh auf eine     Ein-          richtluig    zur Verdampfung     mindestens    eines       Metalles,    bei der das zu verdampfende Metall  auf einem     drahtförmigen    Träger angebracht  ist, der bei der     Verdainpfungstemperatur    des       zii        verdampfenden        Metalles    fest bleibt.  



       Es    ist     bekannt,    Metalle von einem Draht  aus     hoehsehinelzendein    Metall     abzudanipfeil.     Das     zu    verdampfende Metall wird als     gleich-          inä13ige    Schicht (z. B. auf     elektrol3        tischein     Wege) auf dein     hochsehmelzenden    Draht     an-          gebraclit    oder als Draht     schraubeilliiiieniör-          inig    auf diesen Draht gewunden.  



  Diesem bekannten     Verdampfungsverfah-          ren    haftet der     Naehteil    an, dass das zu ver  dampfende Metall beim Schmelzen Tropfen  bildet, die eine Abkühlung des Drahtes an  den betreffenden Stellen herbeiführen, wo  gegen der Draht an andern, nicht mehr be  deckten Stellen     zn    heiss wird und leicht     durch-          schmilzt.    Es verdampft dann nicht nur das  zum Verdampfen bestimmte     Metall,        sondern     in     geringem    Masse auch das Metall des     Trä:          gerdralltes.    Letzteres kann z.

   B. beim Auf  dampfen von Aluminiumspiegeln für optische  Zwecke sehr unerwünscht sein.  



  Die Erfindung sucht diese Nachteile zu  beheben.  



  Bei der erfindungsgemässen Einrichtung  zur Verdampfung mindestens eines     Metalles,     bei der das zu verdampfende Metall auf einem       drahtförmigen    Träger angebracht ist, der bei    der     Verdampfungstemperatur    des zu     ver-          dampfenden        3letalles    fest bleibt, ist gemäss  der Erfindung das zu verdampfende Metall  in     mindestens    einem     schraubenlinienförmigen     Kanal     ain        drahtförmigen    Träger unterge  bracht, wobei die Wände des Kanals     ausl          boehsehmelzendenn    Material.

   bestehen.  



       Ilierdurch    wird erzielt, dass das zu ver  dampfende Metall     gleiehniä.ssig    über die ganze  Länge des Trägers verteilt bleibt, wenn es       geschmolzen    ist, und vollständig verdampfen  kann.  



  Vorzugsweise wird das     zni        verdampfende     Metall als Draht neben einem     Dralit    aus hoch  sehmelzendein Metall auf den Träger gewun  den. Der Draht aus     hochschnielzendein        Metall     bildet dann mit denn Träger zusammen den       sehraubenlinienförmigen    Kanal mit hoch  schmelzenden     Wänden.     



  Gegebenenfalls können mehrere Drähte  des zu verdampfenden     Metalles    oder Drähte  aus verschiedenen zu verdampfenden Metal  len nebeneinander in den Kanal gelegt wer  den, oder man     kann    mittels mehrerer hoch  schmelzender Drähte mehr als einen Kanal  auf dem Träger anbringen.  



  Man kann auch eine Anzahl Drähte aus  dein hochschmelzenden und dem zu verdamp  fenden Metall     ineinanderdrehen.     



  Es ist nicht unbedingt erforderlich, das     zu     verdampfende Metall in Drahtform anzubrin  gen, sondern es ist auch möglich, es als Pul-           ver,        mit    einem feuerfesten Bindemittel ge  mischt, in dem Kanal auf dem Träger     anzu-          bringen.     



  Es ist auch möglich, in einen verhältnis  mässig starken Träger eine     schraubenlinien-          förmige        Rinne    einzuschneiden, die     dann    den  Kanal bildet.  



  Die geschilderte Vorrichtung zur Ver  dampfung von Metallen ist verwendbar     zum     Bedecken von Kristallen für Hochfrequenz  zwecke mit leitenden Schichten. Weiter zum  Aufdampfen optischer Spiegel mit Alumi  nium, Silber oder Chrom und zum Überzie  hen von Wickelschichten für Papierkonden  satoren     mit    Zink oder     Aluminium.    Es soll  dafür gesorgt werden, dass die     Schmelzpunkte     des zu verdampfenden und des tragenden       Metalles    hinreichend voneinander verschieden  sind.  



  Zur     Verdampfung        eines        Metalles        wie        Zir-          konium    oder     Tantal    verwendet man     zweck-          mässig        einen        Wolframträger    und einen eben  falls aus Wolfram bestehenden, auf diesen       aufgewickelten    Draht.  



  Mit auf diese Weise verdampften Metal  len     sind        in    elektrischen Entladungsröhren       vorzügliche        Fangstoffspiegel    erzielbar; es  kann z. B. in     einer    elektrischen Entladungs  röhre     als    Träger ein     mit        einem        Durchmesser     von einigen Millimetern     sehraubenlinienför-          mig    gewickelter     Wolframdraht    mit einem  Durchmesser von 0,6 mm angeordnet werden,       auf    den ein     Zirkoniumdraht    in einer Stärke  von 0,

  2 mm und neben ihm ein     Wolfram-          draht,    ebenfalls in einer Stärke von 0,2 mm,       schraubenlinienförmig    gewickelt worden ist.       Unmittelbar    nach     Abschmelzen    der Röhre  von der     Pumpanlage        wird    der     schrauben-          linienförmig        gewundene    Träger erhitzt, bis  z. B. die Hälfte des     Zirkoniums    verdampft  worden ist.

   Wenn Gase aus den Elektroden    ausbrechen, kann während des Betriebes der  Entladungsröhre oder während einer Be  triebsunterbrechung abermals eine Menge       Zirkonium    in der Röhre verdampft werden.



  Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier. The invention relates to a device for vaporizing at least one metal, in which the metal to be vaporized is attached to a wire-shaped carrier which remains solid at the vaporization temperature of the metal to be vaporized.



       It is known to strip metals from a wire made of high-pinned metal. The metal to be vaporized is applied as a uniform layer (e.g. by means of an electrical table) to your high-silt wire or is screwed onto this wire as a screw.



  This known evaporation process has the inherent part that the metal to be evaporated forms droplets as it melts, which cool the wire in the relevant places, where the wire becomes too hot and slightly through in other places that are no longer covered - melts. It then not only vaporizes the metal intended for vaporizing, but also, to a small extent, the metal of the carrier twisted. The latter can e.g.

   B. be very undesirable in the vaporization of aluminum mirrors for optical purposes.



  The invention seeks to remedy these disadvantages.



  In the device according to the invention for the evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped support which remains solid at the evaporation temperature of the metal to be evaporated, the metal to be evaporated is in accordance with the invention in at least one helical channel wire-shaped carrier housed, the walls of the channel made of boehsehmelzendenn material.

   consist.



       This ensures that the metal to be evaporated remains uniformly distributed over the entire length of the carrier when it is melted and can evaporate completely.



  The zni-evaporating metal is preferably wound onto the support as a wire in addition to a twist made of high-melting metal. The wire made of high-snapping metal then forms the very dome-shaped channel with high-melting walls together with the carrier.



  If necessary, several wires of the metal to be evaporated or wires made of different metals to be evaporated can be placed next to one another in the channel, or more than one channel can be attached to the carrier by means of several high-melting wires.



  You can also twist a number of wires made of your refractory metal and the metal to be vaporized into one another.



  It is not absolutely necessary to apply the metal to be vaporized in wire form, but it is also possible to apply it as a powder, mixed with a refractory binder, in the channel on the carrier.



  It is also possible to cut a helical groove into a relatively strong support, which then forms the channel.



  The described device for evaporation of metals can be used for covering crystals for high frequency purposes with conductive layers. Then there is the vapor deposition of optical mirrors with aluminum, silver or chrome and the coating of winding layers for paper capacitors with zinc or aluminum. Care should be taken to ensure that the melting points of the metal to be evaporated and that of the supporting metal are sufficiently different from one another.



  To vaporize a metal such as zirconium or tantalum, it is advisable to use a tungsten carrier and a wire that is also made of tungsten and wound on it.



  With metal len evaporated in this way, excellent levels of capture material can be achieved in electrical discharge tubes; it can e.g. B. in an electrical discharge tube as a carrier with a diameter of a few millimeters very dome lines wound tungsten wire with a diameter of 0.6 mm, on which a zirconium wire with a thickness of 0,

  2 mm and next to it a tungsten wire, also 0.2 mm thick, has been helically wound. Immediately after the tube has melted from the pumping system, the helically wound support is heated until, for example, B. half of the zirconium has been evaporated.

   If gases break out of the electrodes, a quantity of zirconium can again be vaporized in the tube during operation of the discharge tube or during an interruption in operation.

 

Claims (1)

PATENTANSPRUCH: Einrichtung zur Verdampfung mindestens eines Metalles, bei der das zu verdampfende Metall auf einem drahtförmigen Träger an geordnet ist, der bei der Verdampfungstem- peratur des zu verdampfenden Metalles fest bleibt, dadurch gekennzeichnet, dass das zu verdampfende Metall in mindestens einem schraubenlinienförmigen Kanal am drahtför- migen Träger untergebracht ist, wobei die Wände dieser Kanäle aus hochschmelzendem Material bestehen. UNTERANSPRCCRE 1. PATENT CLAIM: Device for the evaporation of at least one metal, in which the metal to be evaporated is arranged on a wire-shaped carrier which remains solid at the evaporation temperature of the metal to be evaporated, characterized in that the metal to be evaporated is in at least one helical channel on wire-shaped carrier is accommodated, the walls of these channels being made of high-melting material. SUB-CLAIM 1. Einrichtung nach Patentanspruch, da durch gekennzeichnet, dass auf einen Träger aus hochschmelzendem Metall nebeneinander mindestens je ein Draht des zu verdampfen den Metalles und je ein Draht eines ebenfalls hochsehmelzenden Metalles gewunden sind. 2. Einrichtung nach Patentanspruch, da durch gekennzeichnet, dass mindestens ein Draht des zu verdampfenden Metalles und mindestens ein Draht eines hochschmelzen den Metalles schraubenlinienförmig inein- andergedreht sind. 3. Device according to patent claim, characterized in that at least one wire of the metal to be evaporated and one wire of a likewise high-melting metal are wound next to one another on a carrier made of high-melting metal. 2. Device according to claim, characterized in that at least one wire of the metal to be evaporated and at least one wire of a high-melting metal are twisted into one another in a helical manner. 3. Einrichtung nach Unteranspruch 2, da durch gekennzeichnet, dass das zu verdamp fende Metall Zirkonium ist und die hoch schmelzenden Drähte aus Wolfram bestehen. 4. Einrichtung nach Unteranspruch 2, da durch gekennzeichnet, dass das zu verdamp fende Metall Tantal ist und die hoehschmel- zenden Drähte aus Wolfram bestehen. Device according to dependent claim 2, characterized in that the metal to be vaporized is zirconium and the high-melting wires are made of tungsten. 4. Device according to dependent claim 2, characterized in that the metal to be vaporized is tantalum and the high-melting wires are made of tungsten.
CH259829D 1941-07-24 1947-10-02 Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier. CH259829A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB941441A GB550848A (en) 1941-07-24 1941-07-24 Improvements in and relating to the vaporisation of metals

Publications (1)

Publication Number Publication Date
CH259829A true CH259829A (en) 1949-02-15

Family

ID=9871505

Family Applications (1)

Application Number Title Priority Date Filing Date
CH259829D CH259829A (en) 1941-07-24 1947-10-02 Device for evaporation of at least one metal, in which the metal to be evaporated is attached to a wire-shaped carrier.

Country Status (6)

Country Link
CH (1) CH259829A (en)
DE (1) DE804747C (en)
DK (1) DK71216C (en)
FR (1) FR957503A (en)
GB (1) GB550848A (en)
NL (1) NL65091C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019003764A1 (en) * 2019-05-29 2020-12-03 Schneider Gmbh & Co. Kg Coating device, evaporation device and coating source

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1219309B (en) * 1960-03-24 1966-06-16 Philips Nv Heating conductor made of at least two twisted wires for vacuum evaporation of metal layers
US3190771A (en) * 1962-01-11 1965-06-22 Electra Mfg Company Filament for vacuum deposition apparatus and method of making it
WO2016070267A1 (en) * 2014-11-04 2016-05-12 General Fusion Inc. System and method for evaporating a metal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019003764A1 (en) * 2019-05-29 2020-12-03 Schneider Gmbh & Co. Kg Coating device, evaporation device and coating source

Also Published As

Publication number Publication date
NL65091C (en)
DK71216C (en) 1950-07-10
GB550848A (en) 1943-01-27
DE804747C (en) 1951-04-30
FR957503A (en) 1950-02-23

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