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CA956187A - Method of depositing a coating by vapor deposition - Google Patents

Method of depositing a coating by vapor deposition

Info

Publication number
CA956187A
CA956187A CA124,393A CA124393A CA956187A CA 956187 A CA956187 A CA 956187A CA 124393 A CA124393 A CA 124393A CA 956187 A CA956187 A CA 956187A
Authority
CA
Canada
Prior art keywords
depositing
coating
vapor deposition
deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA124,393A
Inventor
Frank P. Talboom (Jr.)
Dennis J. Evans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Application granted granted Critical
Publication of CA956187A publication Critical patent/CA956187A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CA124,393A 1971-02-18 1971-10-04 Method of depositing a coating by vapor deposition Expired CA956187A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11633671A 1971-02-18 1971-02-18

Publications (1)

Publication Number Publication Date
CA956187A true CA956187A (en) 1974-10-15

Family

ID=22366577

Family Applications (1)

Application Number Title Priority Date Filing Date
CA124,393A Expired CA956187A (en) 1971-02-18 1971-10-04 Method of depositing a coating by vapor deposition

Country Status (5)

Country Link
AU (1) AU3513471A (en)
CA (1) CA956187A (en)
DE (1) DE2207483A1 (en)
FR (1) FR2125259A1 (en)
IT (1) IT947180B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19514836C2 (en) * 1995-04-21 2000-06-08 Fraunhofer Ges Forschung bearing shell
DE19514835C1 (en) * 1995-04-21 1997-01-23 Fraunhofer Ges Forschung Process for producing sliding elements concavely curved on the sliding surface

Also Published As

Publication number Publication date
AU3513471A (en) 1973-05-03
FR2125259A1 (en) 1972-09-29
IT947180B (en) 1973-05-21
DE2207483A1 (en) 1972-08-31

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