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CA896240A - Cryopumping installations with high flow-rates - Google Patents

Cryopumping installations with high flow-rates

Info

Publication number
CA896240A
CA896240A CA896240A CA896240DA CA896240A CA 896240 A CA896240 A CA 896240A CA 896240 A CA896240 A CA 896240A CA 896240D A CA896240D A CA 896240DA CA 896240 A CA896240 A CA 896240A
Authority
CA
Canada
Prior art keywords
cryopumping
installations
rates
high flow
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA896240A
Inventor
Rapinat Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Publication date
Application granted granted Critical
Publication of CA896240A publication Critical patent/CA896240A/en
Expired legal-status Critical Current

Links

CA896240A Cryopumping installations with high flow-rates Expired CA896240A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA896240T

Publications (1)

Publication Number Publication Date
CA896240A true CA896240A (en) 1972-03-28

Family

ID=36402205

Family Applications (1)

Application Number Title Priority Date Filing Date
CA896240A Expired CA896240A (en) Cryopumping installations with high flow-rates

Country Status (1)

Country Link
CA (1) CA896240A (en)

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