CA864473A - Photoresist compositions - Google Patents

Photoresist compositions

Info

Publication number: CA864473A
Authority: CA; Canada
Prior art keywords: photoresist compositions; photoresist; compositions
Prior art date: 1971-02-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA864473A

Inventor

S. Kozak Gary

Bakos Peter

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

International Business Machines Corp

Original Assignee

International Business Machines Corp

Publication date

1971-02-23

1971-02-23 Application granted granted Critical

1971-02-23 Publication of CA864473A publication Critical patent/CA864473A/en

Status Expired legal-status Critical Current

Links

CA864473A Photoresist compositions Expired CA864473A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA864473T

Publications (1)

Publication Number	Publication Date
CA864473A true CA864473A (en)	1971-02-23

Family

ID=36349805

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA864473A Expired CA864473A (en)			Photoresist compositions

Country Status (1)

Country	Link
CA (1)	CA864473A (en)

0
- CA CA864473A patent/CA864473A/en not_active Expired

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