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CA572560A - Etching silicon semiconductors - Google Patents

Etching silicon semiconductors

Info

Publication number
CA572560A
CA572560A CA572560A CA572560DA CA572560A CA 572560 A CA572560 A CA 572560A CA 572560 A CA572560 A CA 572560A CA 572560D A CA572560D A CA 572560DA CA 572560 A CA572560 A CA 572560A
Authority
CA
Canada
Prior art keywords
etching silicon
silicon semiconductors
semiconductors
etching
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA572560A
Other languages
French (fr)
Inventor
R. Landgren Clarence
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Publication date
Application granted granted Critical
Publication of CA572560A publication Critical patent/CA572560A/en
Expired legal-status Critical Current

Links

CA572560A Etching silicon semiconductors Expired CA572560A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA572560T

Publications (1)

Publication Number Publication Date
CA572560A true CA572560A (en) 1959-03-17

Family

ID=35748398

Family Applications (1)

Application Number Title Priority Date Filing Date
CA572560A Expired CA572560A (en) Etching silicon semiconductors

Country Status (1)

Country Link
CA (1) CA572560A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4015986A (en) * 1974-10-03 1977-04-05 International Business Machines Corporation Method of developing and stripping positive photoresist

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4015986A (en) * 1974-10-03 1977-04-05 International Business Machines Corporation Method of developing and stripping positive photoresist

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