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CA530299A - Formation of metallic films by thermal evaporation - Google Patents

Formation of metallic films by thermal evaporation

Info

Publication number
CA530299A
CA530299A CA530299A CA530299DA CA530299A CA 530299 A CA530299 A CA 530299A CA 530299 A CA530299 A CA 530299A CA 530299D A CA530299D A CA 530299DA CA 530299 A CA530299 A CA 530299A
Authority
CA
Canada
Prior art keywords
formation
thermal evaporation
metallic films
films
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA530299A
Other languages
French (fr)
Inventor
A. Johnson Stanley
Weber Ernst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New York University NYU
Original Assignee
New York University NYU
Publication date
Application granted granted Critical
Publication of CA530299A publication Critical patent/CA530299A/en
Expired legal-status Critical Current

Links

CA530299A Formation of metallic films by thermal evaporation Expired CA530299A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA530299T

Publications (1)

Publication Number Publication Date
CA530299A true CA530299A (en) 1956-09-11

Family

ID=35684052

Family Applications (1)

Application Number Title Priority Date Filing Date
CA530299A Expired CA530299A (en) Formation of metallic films by thermal evaporation

Country Status (1)

Country Link
CA (1) CA530299A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4395440A (en) * 1980-10-09 1983-07-26 Matsushita Electric Industrial Co., Ltd. Method of and apparatus for manufacturing ultrafine particle film
JPS60143628A (en) * 1984-07-09 1985-07-29 Hitachi Ltd Tube for heat treatment
US4573431A (en) * 1983-11-16 1986-03-04 Btu Engineering Corporation Modular V-CVD diffusion furnace

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4395440A (en) * 1980-10-09 1983-07-26 Matsushita Electric Industrial Co., Ltd. Method of and apparatus for manufacturing ultrafine particle film
US4573431A (en) * 1983-11-16 1986-03-04 Btu Engineering Corporation Modular V-CVD diffusion furnace
JPS60143628A (en) * 1984-07-09 1985-07-29 Hitachi Ltd Tube for heat treatment

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