CA2338607A1 - High speed optoelectronic devices - Google Patents
High speed optoelectronic devices Download PDFInfo
- Publication number
- CA2338607A1 CA2338607A1 CA002338607A CA2338607A CA2338607A1 CA 2338607 A1 CA2338607 A1 CA 2338607A1 CA 002338607 A CA002338607 A CA 002338607A CA 2338607 A CA2338607 A CA 2338607A CA 2338607 A1 CA2338607 A1 CA 2338607A1
- Authority
- CA
- Canada
- Prior art keywords
- coating
- electrode
- substrate
- high frequency
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000005693 optoelectronics Effects 0.000 title description 4
- 239000011248 coating agent Substances 0.000 claims abstract description 32
- 238000000576 coating method Methods 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 239000004020 conductor Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 6
- 239000000945 filler Substances 0.000 claims description 4
- 239000004593 Epoxy Substances 0.000 claims description 3
- DJHGAFSJWGLOIV-UHFFFAOYSA-K Arsenate3- Chemical compound [O-][As]([O-])([O-])=O DJHGAFSJWGLOIV-UHFFFAOYSA-K 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- 229940000489 arsenate Drugs 0.000 claims description 2
- 239000000835 fiber Substances 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- UJXZVRRCKFUQKG-UHFFFAOYSA-K indium(3+);phosphate Chemical compound [In+3].[O-]P([O-])([O-])=O UJXZVRRCKFUQKG-UHFFFAOYSA-K 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 6
- 229910052742 iron Inorganic materials 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 1
- 229920006334 epoxy coating Polymers 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
- G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Light Receiving Elements (AREA)
Abstract
The invention in accordance with one aspect is an optical device including a substrate (21) adapted to propogate light therethrough, and an electrode (23, 25, 26) formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light. Formed over the electrode on at least an end portion (d) is a coating (24) which absorbs a significant portion of the high frequency signals FIG. 2.
Description
A. Chen 1 HIGH SPEED OPTOELECTRONIC DEVICES
Field of the Invention This invention relates to optoelectronics, and in particular to devices and networks using a high frequency electrical signal, and a method for fabricating the devices.
Background of the Invention In modern optical networks, speed is a crucial factor. Thus, in many networks, devices are operated with high frequency electrical signals, i.e., at least 0.1 GHz.
For example, high speed modulators, such as lithium niobate modulators, are usually biased by a traveling wave electrode which is placed on top of the device and carries high frequency electrical signals. In order to prevent reflection of the electrical signal from the end of the electrode, the electrode is usually terminated with an impedance matched resistor and/or capacitor network. Such an approach is usually costly, and can result in degraded performance for high bandwidth signals.
It is desirable, therefore, to provide a low cost structure and method for preventing unwanted reflections of electrical signals in optoelectronics devices.
Summary of the Invention The invention in accordance with one aspect is an optical device including a substrate adapted to propogate light therethrough, and an electrode formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light.
Formed over the electrode on at least an end portion is a coating which absorbs a significant portion of the high frequency signals.
Brief Descriution of the Fieures These and other features of the invention are delineated in detail in the following description. In the drawing:
Fig 1 is a schematic illustration of a portion of an optical network which may incorporate a device in accordance with one embodiment of an aspect of the invention;
Figs 2 and 3 are cross sectional and plan views, respectively, of a device in accordance with one embodiment of an aspect of the invention; and A. Chen 1 Figs. 4 and 5 are cross-sectional and plan views, respectively, of a device in accordance with another embodiment of the invention.
It will be appreciated that, for purposes of illustration, these figures are not necessarily drawn to scale.
Detailed Description Fig 1 illustrates a portion of a typical optical network, 10, which may utilize the principles of the invention. An optical transmitter, 11, typically includes a source of light, 12, usually a semiconductor laser, which is optically coupled to a modulator, 13.
In this example, the modulator is a separate crystal component such as a lithium niobate modulator, but can be integral with the laser, such as in an Electroabsorption Modulated Laser (EML). The modulator, 13, is driven by a source of electrical signal, 14, which is preferably a high frequency signal operating in the range 100 MHz to 100 GHz. The invention appears to be most advantageous for microwave signals (1 GHz - 100 GHz), and works particularly well at frequencies above 5 GHz.
The modulated light signal is optically coupled to an optical fiber, 15, which couples the signal to an optical receiver, 16. It will be appreciated that the network typically includes many other components, such as isolators, routers, and fiber amplifiers, which are not shown for the sake of simplicity.
Figs 2 and 3 illustrate one embodiment of a modulator, 20, in accordance with principles of the invention. The modulator includes a substrate, 21, made of a crystalline material such as lithium niobate. Other possible materials include indium phosphate and gallium arsenate. An optical waveguide, 22, is preferably formed in the top surface of the substrate. The waveguide is typically formed by diffusion of impurities such as titanium in the top surface, but could be formed by other well known techniques. A thin layer, 29, of a dielectric such as Si02is preferably deposited on the top surface of the substrate. A traveling wave electrode is also deposited over the top surface of the substrate. The electrode includes a center conductor, 23, and side conductors, 25 and 26, on either side of the center conductor. The electrode is typically made of gold and is electroplated onto the dielectric layer, 29. The electrical signal is supplied to the center conductor, 23, while the side conductors are grounded so as to launch a microwave signal in the electrode. This signal modifies the optical characteristics of the underlying waveguide, 22, in order to modulate the light signal, represented by arrow, 27, which is coupled into the waveguide and propogates therethrough essentially parallel to the top surface of the substrate.
Field of the Invention This invention relates to optoelectronics, and in particular to devices and networks using a high frequency electrical signal, and a method for fabricating the devices.
Background of the Invention In modern optical networks, speed is a crucial factor. Thus, in many networks, devices are operated with high frequency electrical signals, i.e., at least 0.1 GHz.
For example, high speed modulators, such as lithium niobate modulators, are usually biased by a traveling wave electrode which is placed on top of the device and carries high frequency electrical signals. In order to prevent reflection of the electrical signal from the end of the electrode, the electrode is usually terminated with an impedance matched resistor and/or capacitor network. Such an approach is usually costly, and can result in degraded performance for high bandwidth signals.
It is desirable, therefore, to provide a low cost structure and method for preventing unwanted reflections of electrical signals in optoelectronics devices.
Summary of the Invention The invention in accordance with one aspect is an optical device including a substrate adapted to propogate light therethrough, and an electrode formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light.
Formed over the electrode on at least an end portion is a coating which absorbs a significant portion of the high frequency signals.
Brief Descriution of the Fieures These and other features of the invention are delineated in detail in the following description. In the drawing:
Fig 1 is a schematic illustration of a portion of an optical network which may incorporate a device in accordance with one embodiment of an aspect of the invention;
Figs 2 and 3 are cross sectional and plan views, respectively, of a device in accordance with one embodiment of an aspect of the invention; and A. Chen 1 Figs. 4 and 5 are cross-sectional and plan views, respectively, of a device in accordance with another embodiment of the invention.
It will be appreciated that, for purposes of illustration, these figures are not necessarily drawn to scale.
Detailed Description Fig 1 illustrates a portion of a typical optical network, 10, which may utilize the principles of the invention. An optical transmitter, 11, typically includes a source of light, 12, usually a semiconductor laser, which is optically coupled to a modulator, 13.
In this example, the modulator is a separate crystal component such as a lithium niobate modulator, but can be integral with the laser, such as in an Electroabsorption Modulated Laser (EML). The modulator, 13, is driven by a source of electrical signal, 14, which is preferably a high frequency signal operating in the range 100 MHz to 100 GHz. The invention appears to be most advantageous for microwave signals (1 GHz - 100 GHz), and works particularly well at frequencies above 5 GHz.
The modulated light signal is optically coupled to an optical fiber, 15, which couples the signal to an optical receiver, 16. It will be appreciated that the network typically includes many other components, such as isolators, routers, and fiber amplifiers, which are not shown for the sake of simplicity.
Figs 2 and 3 illustrate one embodiment of a modulator, 20, in accordance with principles of the invention. The modulator includes a substrate, 21, made of a crystalline material such as lithium niobate. Other possible materials include indium phosphate and gallium arsenate. An optical waveguide, 22, is preferably formed in the top surface of the substrate. The waveguide is typically formed by diffusion of impurities such as titanium in the top surface, but could be formed by other well known techniques. A thin layer, 29, of a dielectric such as Si02is preferably deposited on the top surface of the substrate. A traveling wave electrode is also deposited over the top surface of the substrate. The electrode includes a center conductor, 23, and side conductors, 25 and 26, on either side of the center conductor. The electrode is typically made of gold and is electroplated onto the dielectric layer, 29. The electrical signal is supplied to the center conductor, 23, while the side conductors are grounded so as to launch a microwave signal in the electrode. This signal modifies the optical characteristics of the underlying waveguide, 22, in order to modulate the light signal, represented by arrow, 27, which is coupled into the waveguide and propogates therethrough essentially parallel to the top surface of the substrate.
A. Chen 1 It will be understood that if the microwave signal were reflected at the end, 28, of the electrode, the proper modulation of the propogating light would be disrupted due to a disturbance to the driver, 14, which applies the signal to the electrode.
In order to absorb a substantial portion of the microwave signal, a coating, 24, is applied over an area of the electrode including the end, 28. Preferably, the coating covers an end portion, d, of the electrode which is at least 1 mm to ensure adequate absorption.
Desirably, the coating will absorb at least 50 percent of the microwave signal. The coating may be deposited, for example, by applying a drop of the material through a standard dispenser. It can also be brushed on the electrode. In a particular example, the coating comprised an epoxy with Fe fillers which is sold by Emerson & Cuming Microwave Products, Inc. under the designation ECCOSORB~.
Other materials which would be advantageous include silicone rubber. In general, any coating which absorbs at least 50 percent of the signal could be useful in order to prevent disruption of the driver, 14.
It will be noted that the coating, 24, is preferably deposited outside the active region of the modulator. The active region length, indicated by "A" in Figs. 2 and 3, represents the desired length of interaction between the electrical signal and the light propogating in the underlying waveguide, 22. This length will be determined primarily based on the voltage required to operate the device and the desired bandwidth. For example, in a device requiring 3 volts and with a bandwidth of 10 GHz, a standard length is approx. 4 cm and will usually fall within the range 1-4 cm. In most designs, the coating will cover no more than 2 cm of the electrode material.
It will be appreciated that the coating can be applied easily and at low cost since only a drop of the material is needed and the material itself is inexpensive.
Further, the coating will absorb at high frequencies (at least 5 GHz) whereas traditional impedance-matched terminations usually do not work well at high frequencies. Thus, the invention is both less expensive and more effective than traditional approaches.
The embodiment illustrated in Figs. 2 and 3 shows a curved traveling wave electrode, 23, 25, 26, which terminates at a side of the substrate, 21. This is a standard type of electrode shape for providing impedance matching terminations. However, with the present invention, the electrodes can be straight as shown in Figs. 4 and 5, where elements corresponding to Figs. 2 and 3 are similarly numbered. The presently preferred embodiment in fact provides straight electrodes extending to the ends of the substrate as shown in Figs. 4 and 5.
It will be noted that the coating, 24, is still preferably applied over an end portion of the electrode, defined by length A. Chen 1 d, which is outside the active region, defined by length A. If desired, the electrode, 23, 25, 26, need not extend all the way to the ends of the substrate.
It will be appreciated that the invention is preferably employed with the type of traveling wave electrode where the center, 23, and two side conductors, 25,26, are formed on the same surface since most of the electric field will be established on top of the electrode where the coating, 24, can provide significant absorption. However, it may be possible in some applications to use the coating with a microstrip line where the center conductor and grounded conductor are on opposite surfaces of the substrate.
In order to absorb a substantial portion of the microwave signal, a coating, 24, is applied over an area of the electrode including the end, 28. Preferably, the coating covers an end portion, d, of the electrode which is at least 1 mm to ensure adequate absorption.
Desirably, the coating will absorb at least 50 percent of the microwave signal. The coating may be deposited, for example, by applying a drop of the material through a standard dispenser. It can also be brushed on the electrode. In a particular example, the coating comprised an epoxy with Fe fillers which is sold by Emerson & Cuming Microwave Products, Inc. under the designation ECCOSORB~.
Other materials which would be advantageous include silicone rubber. In general, any coating which absorbs at least 50 percent of the signal could be useful in order to prevent disruption of the driver, 14.
It will be noted that the coating, 24, is preferably deposited outside the active region of the modulator. The active region length, indicated by "A" in Figs. 2 and 3, represents the desired length of interaction between the electrical signal and the light propogating in the underlying waveguide, 22. This length will be determined primarily based on the voltage required to operate the device and the desired bandwidth. For example, in a device requiring 3 volts and with a bandwidth of 10 GHz, a standard length is approx. 4 cm and will usually fall within the range 1-4 cm. In most designs, the coating will cover no more than 2 cm of the electrode material.
It will be appreciated that the coating can be applied easily and at low cost since only a drop of the material is needed and the material itself is inexpensive.
Further, the coating will absorb at high frequencies (at least 5 GHz) whereas traditional impedance-matched terminations usually do not work well at high frequencies. Thus, the invention is both less expensive and more effective than traditional approaches.
The embodiment illustrated in Figs. 2 and 3 shows a curved traveling wave electrode, 23, 25, 26, which terminates at a side of the substrate, 21. This is a standard type of electrode shape for providing impedance matching terminations. However, with the present invention, the electrodes can be straight as shown in Figs. 4 and 5, where elements corresponding to Figs. 2 and 3 are similarly numbered. The presently preferred embodiment in fact provides straight electrodes extending to the ends of the substrate as shown in Figs. 4 and 5.
It will be noted that the coating, 24, is still preferably applied over an end portion of the electrode, defined by length A. Chen 1 d, which is outside the active region, defined by length A. If desired, the electrode, 23, 25, 26, need not extend all the way to the ends of the substrate.
It will be appreciated that the invention is preferably employed with the type of traveling wave electrode where the center, 23, and two side conductors, 25,26, are formed on the same surface since most of the electric field will be established on top of the electrode where the coating, 24, can provide significant absorption. However, it may be possible in some applications to use the coating with a microstrip line where the center conductor and grounded conductor are on opposite surfaces of the substrate.
Claims (21)
1. An optical device comprising:
a substrate (21) adapted for propogating light therethrough;
an electrode (23,25,26) formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light; and a coating (28) which absorbs a significant portion of the high frequency signals formed over the electrode on at least an end portion (d).
a substrate (21) adapted for propogating light therethrough;
an electrode (23,25,26) formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light; and a coating (28) which absorbs a significant portion of the high frequency signals formed over the electrode on at least an end portion (d).
2. The device according to claim 1 wherein the substrate comprises a material selected from lithium niobate, indium phosphate and gallium arsenate.
3. The device according to claim 1 wherein the substrate comprises lithium niobate.
4. The device according to claim 1 wherein the electrode is a traveling wave electrode.
5. The device according to claim 4 wherein the electrode comprises a center conductor (23) and at least one side conductor (25,26) over the same surface of the substrate.
6. The device according to claim 1 wherein the electrode comprises gold.
7. The device according to claim 1 wherein the coating comprises an epoxy.
8. The device according to claim 7 wherein the coating comprises an iron filler.
9. The device according to claim 1 wherein the coating absorbs at least 50 percent of the high frequency signal.
10. The device according to claim 1 wherein the coating covers an end portion which is at least 1 mm long.
11. The device according to claim 1 wherein the device includes an active region, (A) and the coating is deposited over a portion of the electrode outside the active region.
12. The device according to claim 11 wherein the coating is deposited over a portion whose length is within the range 1 mm - 2 cm.
13. An optical device comprising:
a lithium niobate substrate (21) including a waveguide (22) for propogation of light;
a traveling wave electrode (23, 25, 26) formed over the substrate and adapted for propogating a microwave electrical signal therethrough which modulates the light in the waveguide in an active region (A);
an epoxy coating (24) including an iron filler formed on an end portion of the electrode outside the active region, which coating is adapted to absorb at least 50 percent of the microwave signal.
a lithium niobate substrate (21) including a waveguide (22) for propogation of light;
a traveling wave electrode (23, 25, 26) formed over the substrate and adapted for propogating a microwave electrical signal therethrough which modulates the light in the waveguide in an active region (A);
an epoxy coating (24) including an iron filler formed on an end portion of the electrode outside the active region, which coating is adapted to absorb at least 50 percent of the microwave signal.
14. An optical transmitter (11) comprising a light source (12) and a modulator (13), the modulator comprising:
a substrate (21) adapted for propogating light therethrough;
an electrode (23, 25, 26) formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light; and a coating (24) which absorbs a significant portion of the microwave signals formed over the electrode on at least an end portion.
a substrate (21) adapted for propogating light therethrough;
an electrode (23, 25, 26) formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light; and a coating (24) which absorbs a significant portion of the microwave signals formed over the electrode on at least an end portion.
15. An optical network comprising a transmitter (11), an optical fiber (15) coupled to the transmitter, and a receiver (16) coupled to the fiber, wherein the transmitter includes a modulator (13) comprising:
a substrate (21) adapted for propogating light therethrough;
an electrode (23, 25, 26) formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light; and a coating (24) which absorbs a significant portion of the high frequency signals formed over the electrode on at least an end portion.
a substrate (21) adapted for propogating light therethrough;
an electrode (23, 25, 26) formed over the substrate and adapted to propogate high frequency electrical signals in order to modulate the light; and a coating (24) which absorbs a significant portion of the high frequency signals formed over the electrode on at least an end portion.
16. A method for forming an optical device comprising the steps of:
forming an optical waveguide (22) in a substrate;
forming an electrode (23, 25, 26) over a major surface of the substrate which electrode is adapted for propogating a high frequency electrical signal; and forming a coating (24) over at least an end portion (d) of the electrode, which coating is adapted to absorb a significant portion of the high frequency signal.
forming an optical waveguide (22) in a substrate;
forming an electrode (23, 25, 26) over a major surface of the substrate which electrode is adapted for propogating a high frequency electrical signal; and forming a coating (24) over at least an end portion (d) of the electrode, which coating is adapted to absorb a significant portion of the high frequency signal.
17. The method according to claim 16 wherein the coating is formed by depositing a drop of material through a dispenser.
18. The method according to claim 16 wherein the coating comprises an epoxy.
19. The method according to claim 18 wherein the coating includes an iron filler.
20. The method according to claim 16 wherein the coating is deposited over an end portion which is at least 1 mm long
21. The method according to claim 16 wherein the device includes an active region (A), and the coating is formed over an end portion outside the active region.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US53569500A | 2000-03-27 | 2000-03-27 | |
| US09/535,695 | 2000-03-27 | ||
| EP01201179A EP1245992A3 (en) | 2000-03-27 | 2001-03-29 | High-speed optoelectronic devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2338607A1 true CA2338607A1 (en) | 2001-09-27 |
Family
ID=26076869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002338607A Abandoned CA2338607A1 (en) | 2000-03-27 | 2001-02-27 | High speed optoelectronic devices |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1245992A3 (en) |
| JP (1) | JP2001311923A (en) |
| CA (1) | CA2338607A1 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01252929A (en) * | 1988-03-31 | 1989-10-09 | Nec Corp | Optical control device |
| JP2825056B2 (en) * | 1994-02-24 | 1998-11-18 | 日本電気株式会社 | Light control device |
| US5548668A (en) * | 1994-10-25 | 1996-08-20 | Hughes Aircraft Company | Velocity-matched electrodes for electro-optic travelling-wave modulators and method for forming the same |
-
2001
- 2001-02-27 CA CA002338607A patent/CA2338607A1/en not_active Abandoned
- 2001-03-27 JP JP2001088958A patent/JP2001311923A/en active Pending
- 2001-03-29 EP EP01201179A patent/EP1245992A3/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP1245992A3 (en) | 2003-03-19 |
| EP1245992A2 (en) | 2002-10-02 |
| JP2001311923A (en) | 2001-11-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |