CA2246115A1 - Dispositif optique de mesure de la rugosite - Google Patents
Dispositif optique de mesure de la rugosite Download PDFInfo
- Publication number
- CA2246115A1 CA2246115A1 CA 2246115 CA2246115A CA2246115A1 CA 2246115 A1 CA2246115 A1 CA 2246115A1 CA 2246115 CA2246115 CA 2246115 CA 2246115 A CA2246115 A CA 2246115A CA 2246115 A1 CA2246115 A1 CA 2246115A1
- Authority
- CA
- Canada
- Prior art keywords
- roughness
- light
- interference pattern
- rough surface
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2246115 CA2246115A1 (fr) | 1998-09-15 | 1998-09-15 | Dispositif optique de mesure de la rugosite |
GB9902029A GB2346440A (en) | 1998-09-15 | 1999-02-01 | Optical device for roughness measurement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2246115 CA2246115A1 (fr) | 1998-09-15 | 1998-09-15 | Dispositif optique de mesure de la rugosite |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2246115A1 true CA2246115A1 (fr) | 2000-03-15 |
Family
ID=4162784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA 2246115 Abandoned CA2246115A1 (fr) | 1998-09-15 | 1998-09-15 | Dispositif optique de mesure de la rugosite |
Country Status (2)
Country | Link |
---|---|
CA (1) | CA2246115A1 (fr) |
GB (1) | GB2346440A (fr) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3804521A (en) * | 1972-02-22 | 1974-04-16 | Itek Corp | Optical device for measuring surface roughness |
US4334780A (en) * | 1979-06-29 | 1982-06-15 | Grumman Aerospace Corporation | Optical surface roughness detection method and apparatus |
DE19733775A1 (de) * | 1997-08-05 | 1999-02-18 | Honeywell Ag | Verfahren zur Messung von Eigenschaften einer Materialoberfläche |
-
1998
- 1998-09-15 CA CA 2246115 patent/CA2246115A1/fr not_active Abandoned
-
1999
- 1999-02-01 GB GB9902029A patent/GB2346440A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
GB2346440A (en) | 2000-08-09 |
GB9902029D0 (en) | 1999-03-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
FZDE | Dead |