CA2184738A1 - Ion beam process for deposition of highly abrasion-resistant coatings - Google Patents
Ion beam process for deposition of highly abrasion-resistant coatingsInfo
- Publication number
- CA2184738A1 CA2184738A1 CA002184738A CA2184738A CA2184738A1 CA 2184738 A1 CA2184738 A1 CA 2184738A1 CA 002184738 A CA002184738 A CA 002184738A CA 2184738 A CA2184738 A CA 2184738A CA 2184738 A1 CA2184738 A1 CA 2184738A1
- Authority
- CA
- Canada
- Prior art keywords
- ion beam
- substrate
- abrasion
- deposition
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005299 abrasion Methods 0.000 title abstract 4
- 238000000576 coating method Methods 0.000 title abstract 4
- 230000008021 deposition Effects 0.000 title abstract 2
- 238000010884 ion-beam technique Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 5
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000007737 ion beam deposition Methods 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 230000003213 activating effect Effects 0.000 abstract 1
- 239000000356 contaminant Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 229930195733 hydrocarbon Natural products 0.000 abstract 1
- 150000002430 hydrocarbons Chemical class 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 238000000992 sputter etching Methods 0.000 abstract 1
Landscapes
- Physical Vapour Deposition (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
An ion beam deposition method is provided for manufacturing a coated sub-strate with improved abrasion resistance, and improved lifetime. The substrate is first chemically cleaned to remove con-taminants. Secondly, the substrate is in-serted into a vacuum chamber (1) on holder (3), and the air therein is evacuated via pump (2). Then the substrate surface is bombarded with energetic ions from ion beam source (4) supplied from inert (5) or reactive (6) gas inlets to assist in re-moving residual hydrocarbons and surface oxides, and activating the surface. After sputter-etching the surface, a protective, abrasion-resistant coating is deposited by ion beam deposition where reactive gas in-lets (7, 8 and 9) may be employed. The ion beam-deposited coating may contain one or more layers. Once the chosen coat-ing thickness is achieved, deposition is ter-minated, vacuum chamber pressure is in-creased to atmospheric pressure and the coated substrate products having improved abrasion-resistance are removed from the chamber. These coated products may be plastic sunglass lenses, ophthalmic lenses, bar codes scanner windows, and indus-trial wear parts needing protection from scratches and abrasion.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US205,898 | 1994-03-03 | ||
US08/205,898 US5508368A (en) | 1994-03-03 | 1994-03-03 | Ion beam process for deposition of highly abrasion-resistant coatings |
PCT/US1995/002762 WO1995023652A1 (en) | 1994-03-03 | 1995-03-01 | Ion beam process for deposition of highly abrasion-resistant coatings |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2184738A1 true CA2184738A1 (en) | 1995-09-08 |
CA2184738C CA2184738C (en) | 2005-11-22 |
Family
ID=35474764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002184738A Expired - Lifetime CA2184738C (en) | 1994-03-03 | 1995-03-01 | Ion beam process for deposition of highly abrasion-resistant coatings |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA2184738C (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN118407020A (en) * | 2024-07-02 | 2024-07-30 | 成都中云世纪科技有限责任公司 | Preparation method of wear-resistant self-lubricating coating for inner hole of undercarriage of aircraft |
-
1995
- 1995-03-01 CA CA002184738A patent/CA2184738C/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN118407020A (en) * | 2024-07-02 | 2024-07-30 | 成都中云世纪科技有限责任公司 | Preparation method of wear-resistant self-lubricating coating for inner hole of undercarriage of aircraft |
Also Published As
Publication number | Publication date |
---|---|
CA2184738C (en) | 2005-11-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKEX | Expiry |
Effective date: 20150302 |