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CA2169826A1 - Robinet micro-usine - Google Patents

Robinet micro-usine

Info

Publication number
CA2169826A1
CA2169826A1 CA 2169826 CA2169826A CA2169826A1 CA 2169826 A1 CA2169826 A1 CA 2169826A1 CA 2169826 CA2169826 CA 2169826 CA 2169826 A CA2169826 A CA 2169826A CA 2169826 A1 CA2169826 A1 CA 2169826A1
Authority
CA
Canada
Prior art keywords
layer
valve seat
port opening
valve
handling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2169826
Other languages
English (en)
Inventor
Cynthia R. Nelson
Fred C. Sittler
Gregory A. Boser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2169826A1 publication Critical patent/CA2169826A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Fluid-Driven Valves (AREA)
  • Micromachines (AREA)
  • Lift Valve (AREA)

Abstract

Une vanne de régulation du débit d'un fluide comprend une couche fragile (12) de matériau possédant un orifice d'ouverture (30, 32) et un siège (24A-24F) de vanne situé autour d'un périmètre de l'orifice d'ouverture (30, 32). Le siège (24A-24F) de vanne est couvert sélectivement, de façon à réguler le débit du fluide à travers l'orifice d'ouverture (30, 32). Une deuxième couche de matériau (20) est espacée de la couche fragile (12) et possède une surface opposée au siège (24A-24F) de vanne. Une feuille souple de matériau (18) prise en sandwich entre la couche fragile de matériau (12) et la deuxième couche de matériau (20) comprend une membrane (22A-22F) actionnée par une force de commande, de façon à couvrir sélectivement le siège (22A-24F) de vanne, afin de réguler le débit du fluide à travers l'orifice d'ouverture (30, 32). La feuille souple de matériau (18) comporte un matériau déformable (64) dont une partie se conforme à un profil du siège (24A-24F) de vanne. Le matériau déformable (64) est de préférence combiné à un matériau organique souple (66).
CA 2169826 1993-09-24 1994-08-18 Robinet micro-usine Abandoned CA2169826A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12636693A 1993-09-24 1993-09-24
US08/126,366 1993-09-24

Publications (1)

Publication Number Publication Date
CA2169826A1 true CA2169826A1 (fr) 1995-03-30

Family

ID=22424441

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2169826 Abandoned CA2169826A1 (fr) 1993-09-24 1994-08-18 Robinet micro-usine

Country Status (4)

Country Link
JP (1) JPH09505130A (fr)
CN (1) CN1133080A (fr)
CA (1) CA2169826A1 (fr)
WO (1) WO1995008716A2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8133629B2 (en) 2007-03-21 2012-03-13 SOCIéTé BIC Fluidic distribution system and related methods
US8679694B2 (en) 2007-03-21 2014-03-25 Societe Bic Fluidic control system and method of manufacture

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997033094A1 (fr) * 1996-03-05 1997-09-12 Westonbridge International Limited Valve micro-usinee a membrane
DE19631693A1 (de) * 1996-08-06 1998-02-12 Gaswaerme Inst E V Ventilanordnung
US6612535B1 (en) 1997-01-24 2003-09-02 California Institute Of Technology MEMS valve
US5932799A (en) * 1997-07-21 1999-08-03 Ysi Incorporated Microfluidic analyzer module
US6293012B1 (en) 1997-07-21 2001-09-25 Ysi Incorporated Method of making a fluid flow module
US6073482A (en) * 1997-07-21 2000-06-13 Ysi Incorporated Fluid flow module
DE19816283A1 (de) * 1998-04-11 1999-10-14 Festo Ag & Co Mengenverstärkereinrichtung für Fluidströme
US6770322B1 (en) 2000-03-03 2004-08-03 Ysi Incorporated Method of making a platform for use in a sensor in a microfluidic device
US6551496B1 (en) 2000-03-03 2003-04-22 Ysi Incorporated Microstructured bilateral sensor
ATE401566T1 (de) * 2001-04-03 2008-08-15 Micronics Inc Getrennt fokussierendes zytometer
EP1679121A3 (fr) * 2001-04-06 2006-07-26 Fluidigm Corporation Éléments et applications de circuit fluidique microfabriqués
US6802342B2 (en) 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
GB2434643B (en) * 2006-01-31 2011-06-01 Microsaic Systems Ltd Planar micromachined valve and thermal desorber
RU2422204C2 (ru) 2006-03-20 2011-06-27 Конинклейке Филипс Электроникс Н.В. Платформа система в корпусе для электронно-микрофлюидных устройств
ES2504215T3 (es) 2007-03-21 2014-10-08 SOCIéTé BIC Colector de fluido y procedimiento para el mismo
CN101713471B (zh) * 2007-06-15 2011-12-28 微邦科技股份有限公司 阀门结构及应用阀门结构的微型帮浦
CN101324226B (zh) * 2007-06-15 2010-09-01 微邦科技股份有限公司 阀门结构及应用阀门结构的微型帮浦
EP2766606B1 (fr) * 2012-12-21 2015-12-16 Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. Ensemble pompe comprenant un ensemble soupape de sûreté
JP7452927B2 (ja) * 2018-03-02 2024-03-19 ナショナル リサーチ カウンシル オブ カナダ 高分子マイクロ流体バルブ
US10767789B2 (en) * 2018-07-16 2020-09-08 Asm Ip Holding B.V. Diaphragm valves, valve components, and methods for forming valve components
EP4484945A1 (fr) * 2022-02-24 2025-01-01 Shimadzu Corporation Système d'analyse de gaz

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
DE4139668A1 (de) * 1991-12-02 1993-06-03 Kernforschungsz Karlsruhe Mikroventil und verfahren zu dessen herstellung

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8133629B2 (en) 2007-03-21 2012-03-13 SOCIéTé BIC Fluidic distribution system and related methods
US8679694B2 (en) 2007-03-21 2014-03-25 Societe Bic Fluidic control system and method of manufacture
US9118042B2 (en) 2007-03-21 2015-08-25 Intelligent Energy Limited Fluidic distribution system and related methods
US9728796B2 (en) 2007-03-21 2017-08-08 Intelligent Energy Limited Fluidic distribution system and related methods

Also Published As

Publication number Publication date
CN1133080A (zh) 1996-10-09
WO1995008716A3 (fr) 1995-05-11
WO1995008716A2 (fr) 1995-03-30
JPH09505130A (ja) 1997-05-20

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Legal Events

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