CA2130605A1 - Dispositif thermo-optique en polymeres - Google Patents
Dispositif thermo-optique en polymeresInfo
- Publication number
- CA2130605A1 CA2130605A1 CA002130605A CA2130605A CA2130605A1 CA 2130605 A1 CA2130605 A1 CA 2130605A1 CA 002130605 A CA002130605 A CA 002130605A CA 2130605 A CA2130605 A CA 2130605A CA 2130605 A1 CA2130605 A1 CA 2130605A1
- Authority
- CA
- Canada
- Prior art keywords
- polymeric
- cladding
- waveguide
- layer
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000005253 cladding Methods 0.000 claims abstract description 76
- 238000010438 heat treatment Methods 0.000 claims abstract description 33
- 230000003287 optical effect Effects 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract description 62
- 239000012792 core layer Substances 0.000 abstract description 18
- 239000000463 material Substances 0.000 description 33
- 229920000642 polymer Polymers 0.000 description 21
- 239000011162 core material Substances 0.000 description 19
- 230000008878 coupling Effects 0.000 description 19
- 238000010168 coupling process Methods 0.000 description 19
- 238000005859 coupling reaction Methods 0.000 description 19
- 230000000694 effects Effects 0.000 description 10
- 239000011521 glass Substances 0.000 description 9
- 230000008901 benefit Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 7
- 230000001902 propagating effect Effects 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 4
- 239000004926 polymethyl methacrylate Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000004971 Cross linker Substances 0.000 description 1
- 230000005374 Kerr effect Effects 0.000 description 1
- 230000005697 Pockels effect Effects 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229920002396 Polyurea Polymers 0.000 description 1
- 239000004972 Polyurethane varnish Substances 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- -1 e.g. Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000003631 wet chemical etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material
- G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
- G02F1/3137—Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/02—Materials and properties organic material
- G02F2202/022—Materials and properties organic material polymeric
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP93202481 | 1993-08-24 | ||
| EP93202481.3 | 1993-08-24 | ||
| EP94201182.6 | 1994-04-29 | ||
| EP94201182 | 1994-04-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2130605A1 true CA2130605A1 (fr) | 1995-02-25 |
Family
ID=26133977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002130605A Abandoned CA2130605A1 (fr) | 1993-08-24 | 1994-08-22 | Dispositif thermo-optique en polymeres |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPH0784226A (fr) |
| KR (1) | KR950007186A (fr) |
| CN (1) | CN1115865A (fr) |
| AU (1) | AU7141794A (fr) |
| CA (1) | CA2130605A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023036991A1 (fr) * | 2021-09-13 | 2023-03-16 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Modulateur de phase et procédé de réalisation |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6084050A (en) * | 1997-01-09 | 2000-07-04 | Nippon Telegraph And Telephone Corporation | Thermo-optic devices |
| JP3343850B2 (ja) * | 1997-05-28 | 2002-11-11 | 日本電信電話株式会社 | 高分子光導波路 |
| KR100288447B1 (ko) | 1998-06-26 | 2001-06-01 | 윤종용 | 광강도변조기및그제조방법 |
| DE60038121T2 (de) * | 1999-09-08 | 2009-03-05 | E.I. Du Pont De Nemours And Co., Wilmington | Hybrider integrierter optischer einfüge- und abzweigmultiplexer |
| US7088892B2 (en) * | 2004-09-02 | 2006-08-08 | E. I. Du Pont De Nemours And Company | Normally dark Y-branch digital optical switches and variable optical attentuators |
| CN106405971B (zh) * | 2016-10-28 | 2019-05-07 | 天津医科大学 | 一维温度场调制方法 |
| CN108318967B (zh) * | 2018-01-26 | 2020-02-28 | 浙江大学 | 具有高品质因数的半导体-金属-聚合物非线性复合波导 |
| CN116381852B (zh) * | 2023-02-22 | 2023-10-17 | 武汉安湃光电有限公司 | 一种可承受大功率光输入的铌酸锂水平端面耦合器 |
-
1994
- 1994-08-22 CA CA002130605A patent/CA2130605A1/fr not_active Abandoned
- 1994-08-23 CN CN94116878A patent/CN1115865A/zh active Pending
- 1994-08-24 KR KR1019940020848A patent/KR950007186A/ko not_active Application Discontinuation
- 1994-08-24 JP JP6222516A patent/JPH0784226A/ja active Pending
- 1994-08-24 AU AU71417/94A patent/AU7141794A/en not_active Abandoned
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023036991A1 (fr) * | 2021-09-13 | 2023-03-16 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Modulateur de phase et procédé de réalisation |
| FR3127051A1 (fr) * | 2021-09-13 | 2023-03-17 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Modulateur de phase et procédé de réalisation |
Also Published As
| Publication number | Publication date |
|---|---|
| AU7141794A (en) | 1995-03-30 |
| KR950007186A (ko) | 1995-03-21 |
| JPH0784226A (ja) | 1995-03-31 |
| CN1115865A (zh) | 1996-01-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Dead |