CA2033246C - Dispositif optique a semiconducteur - Google Patents
Dispositif optique a semiconducteurInfo
- Publication number
- CA2033246C CA2033246C CA 2033246 CA2033246A CA2033246C CA 2033246 C CA2033246 C CA 2033246C CA 2033246 CA2033246 CA 2033246 CA 2033246 A CA2033246 A CA 2033246A CA 2033246 C CA2033246 C CA 2033246C
- Authority
- CA
- Canada
- Prior art keywords
- stripe
- layer
- semi
- mesa structure
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Semiconductor Lasers (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1340101A JP2540964B2 (ja) | 1989-12-27 | 1989-12-27 | 光変調器と集積型光変調器と光検出器及びその製造方法 |
JP1-340101 | 1989-12-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2033246C true CA2033246C (fr) | 1995-05-30 |
Family
ID=18333729
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA 2033246 Expired - Fee Related CA2033246C (fr) | 1989-12-27 | 1990-12-27 | Dispositif optique a semiconducteur |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2540964B2 (fr) |
CA (1) | CA2033246C (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2726204B2 (ja) * | 1992-09-24 | 1998-03-11 | 日本電信電話株式会社 | 半導体導波路型素子の製造法 |
JPH11220205A (ja) * | 1998-01-30 | 1999-08-10 | Sharp Corp | 半導体レーザ素子及びその製造方法 |
JP4828018B2 (ja) * | 2000-11-06 | 2011-11-30 | 三菱電機株式会社 | 光変調器およびその製造方法並びに光半導体装置 |
US8358891B2 (en) | 2007-12-14 | 2013-01-22 | Nec Corporation | Waveguide type optical device |
CN103430084A (zh) * | 2011-03-17 | 2013-12-04 | 日本碍子株式会社 | 光调制元件 |
JP5906593B2 (ja) * | 2011-06-27 | 2016-04-20 | 富士通株式会社 | 光半導体集積素子の製造方法 |
-
1989
- 1989-12-27 JP JP1340101A patent/JP2540964B2/ja not_active Expired - Lifetime
-
1990
- 1990-12-27 CA CA 2033246 patent/CA2033246C/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH03198025A (ja) | 1991-08-29 |
JP2540964B2 (ja) | 1996-10-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0437836B1 (fr) | Dispositif optique semi-conducteur | |
CA2081898C (fr) | Dispositif opto-electronique | |
EP0378098B1 (fr) | Dispositif optique à semi-conducteur | |
JP2870632B2 (ja) | 半導体光集積回路およびその製造方法 | |
US8847357B2 (en) | Opto-electronic device | |
EP0672932B1 (fr) | Modulateur optique à semi-conducteur | |
CA2165711C (fr) | Source lumineuse a semiconducteurs produisant une lumiere tres puissante, a spectre large | |
US6391671B2 (en) | Method of producing an optical semiconductor device having a waveguide layer buried in an InP current blocking layer | |
Wang et al. | 1.55-μm AlGaInAs-InP laterally coupled distributed feedback laser | |
CA2033246C (fr) | Dispositif optique a semiconducteur | |
JP2827411B2 (ja) | 光半導体素子及びその製造方法 | |
US6931041B2 (en) | Integrated semiconductor laser device and method of manufacture thereof | |
US6509580B2 (en) | Semiconductor device with current confinement structure | |
US20050185689A1 (en) | Optoelectronic device having a Discrete Bragg Reflector and an electro-absorption modulator | |
Kasahara et al. | Monolithically integrated high-speed light source using 1.3-µm wavelength DFB-DC-PBH laser | |
JPH06112595A (ja) | 半導体光機能素子の製造方法 | |
JP2605911B2 (ja) | 光変調器及び光検出器 | |
EP1372229B1 (fr) | Element integré composé d'un laser semiconducteur et d'un guide d'ondes | |
JP7444290B2 (ja) | 半導体光素子 | |
JP2001148542A (ja) | 光半導体装置及びその製造方法並びに光通信装置 | |
KR100228395B1 (ko) | 반절연 인듐갈륨비소 회절격자를 이용한 복소 결합된 분포 궤환형 레이저 소자 | |
Sun et al. | Influence of wavelength detuning on device performance of electroabsorption modulator integrated distributed feedback lasers based on identical epitaxial layer approach | |
KR20050073383A (ko) | 전계흡수형 변조기가 집적된 레이저 장치 및 그 제조방법 | |
Xiong et al. | Low-threshold DFB-laser-integrated high-speed EA modulators based on ridge waveguide structure by ICP etching | |
JP2000156539A (ja) | 光半導体素子及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |