BR9004604A - Metodo e aparelho para a secagem de objetos - Google Patents
Metodo e aparelho para a secagem de objetosInfo
- Publication number
- BR9004604A BR9004604A BR909004604A BR9004604A BR9004604A BR 9004604 A BR9004604 A BR 9004604A BR 909004604 A BR909004604 A BR 909004604A BR 9004604 A BR9004604 A BR 9004604A BR 9004604 A BR9004604 A BR 9004604A
- Authority
- BR
- Brazil
- Prior art keywords
- drying objects
- drying
- objects
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/06—Controlling, e.g. regulating, parameters of gas supply
- F26B21/12—Velocity of flow; Quantity of flow, e.g. by varying fan speed, by modifying cross flow area
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP89117081A EP0423377B1 (en) | 1989-09-15 | 1989-09-15 | Method of and apparatus for drying articles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BR9004604A true BR9004604A (pt) | 1991-09-10 |
Family
ID=8201893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR909004604A BR9004604A (pt) | 1989-09-15 | 1990-09-14 | Metodo e aparelho para a secagem de objetos |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5133136A (pt) |
| EP (1) | EP0423377B1 (pt) |
| JP (1) | JPH0673353B2 (pt) |
| BR (1) | BR9004604A (pt) |
| DE (1) | DE68910825T2 (pt) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5331747A (en) * | 1992-03-04 | 1994-07-26 | General Electric Company | Hydraulic test apparatus and method for stator in electrical generator |
| US5366563A (en) * | 1992-12-28 | 1994-11-22 | General Electric Company | Hot argon cleaning and protective coating of components made of metal or alloy |
| DE4421843C2 (de) * | 1994-06-22 | 1997-02-06 | Ibm | Vorrichtung und Verfahren zum Ablösen von Partikeln auf Gegenständen |
| US5551671A (en) * | 1994-07-27 | 1996-09-03 | General Electric Company | Hot argon cleaning and protective coating of components made of metal or alloy |
| US5671546A (en) * | 1995-12-14 | 1997-09-30 | Haala; David M. | Vacuum remediation system |
| DE19701154B4 (de) * | 1997-01-15 | 2006-02-16 | Harald Wittler | Verfahren zum Trocknen von in einem Prozeßbehälter befindlichen kleinen Gegenständen sowie Vorrichtung zur Durchführung dieses Verfahrens |
| DE19756830A1 (de) | 1997-12-19 | 1999-07-01 | Wacker Chemie Gmbh | Vakuumtechnisches Trocknen von Halbleiterbruch |
| US6151796A (en) * | 1998-06-04 | 2000-11-28 | Kem-Tec Japan Co., Ltd. | Substrate drying device, drying method and substrate dried by the same |
| US6457259B1 (en) * | 2001-10-22 | 2002-10-01 | General Electric Company | Portable apparatus for drying stator windings and related process |
| DE102011004916B4 (de) * | 2011-03-01 | 2013-11-28 | Wacker Chemie Ag | Vorrichtung und Verfahren zum Trocknen von Polysilicium |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3233334A (en) * | 1962-09-28 | 1966-02-08 | Pennsalt Chemicals Corp | Flash drying apparatus and method utilizing intermittent pulses of drying gas |
| FR2247388B1 (pt) * | 1973-10-12 | 1977-08-05 | Anrep Rene | |
| DE3111223A1 (de) * | 1981-03-21 | 1982-10-07 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Vakuum-trockenverfahren |
| JPS60165727A (ja) * | 1984-02-08 | 1985-08-28 | Toshiba Corp | 半導体ウエ−ハの乾燥方法 |
| ATE27407T1 (de) * | 1984-03-08 | 1987-06-15 | Heinz Schumacher | Verfahren und vorrichtung zur reinigung von filterelementen, insbesondere filterkerzen. |
| IT1185911B (it) * | 1985-09-13 | 1987-11-18 | Art Ceramiche Srl | Procedimento per l'essiccazione rapida di ceramica e impianto per realizzarlo |
| JPS6314434A (ja) * | 1986-07-04 | 1988-01-21 | Dainippon Screen Mfg Co Ltd | 基板表面処理方法および装置 |
| JPS63222433A (ja) * | 1987-03-11 | 1988-09-16 | Mitsubishi Electric Corp | 凍結真空乾燥法 |
| US4911754A (en) * | 1987-07-16 | 1990-03-27 | American Cyanamid Company | Herbicidally active aryloxy saturated 5-membered benzo fused hetero-cyclic compounds |
-
1989
- 1989-09-15 DE DE68910825T patent/DE68910825T2/de not_active Expired - Fee Related
- 1989-09-15 EP EP89117081A patent/EP0423377B1/en not_active Expired - Lifetime
-
1990
- 1990-08-17 US US07/569,042 patent/US5133136A/en not_active Expired - Lifetime
- 1990-08-31 JP JP2232303A patent/JPH0673353B2/ja not_active Expired - Fee Related
- 1990-09-14 BR BR909004604A patent/BR9004604A/pt not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03106025A (ja) | 1991-05-02 |
| EP0423377B1 (en) | 1993-11-18 |
| DE68910825T2 (de) | 1994-05-19 |
| DE68910825D1 (de) | 1993-12-23 |
| US5133136A (en) | 1992-07-28 |
| EP0423377A1 (en) | 1991-04-24 |
| JPH0673353B2 (ja) | 1994-09-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B21A | Patent or certificate of addition expired [chapter 21.1 patent gazette] |
Free format text: PATENTE EXTINTA EM 14/09/2005 |