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BE770704A - Procede et appareil pour le controle du depot de films metalliques - Google Patents

Procede et appareil pour le controle du depot de films metalliques

Info

Publication number
BE770704A
BE770704A BE770704A BE770704A BE770704A BE 770704 A BE770704 A BE 770704A BE 770704 A BE770704 A BE 770704A BE 770704 A BE770704 A BE 770704A BE 770704 A BE770704 A BE 770704A
Authority
BE
Belgium
Prior art keywords
deposit
control
metal films
films
metal
Prior art date
Application number
BE770704A
Other languages
English (en)
Inventor
D F Sheahan
G C Callander
Original Assignee
Gte Automatic Electric Lab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gte Automatic Electric Lab Inc filed Critical Gte Automatic Electric Lab Inc
Publication of BE770704A publication Critical patent/BE770704A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
BE770704A 1970-08-05 1971-07-30 Procede et appareil pour le controle du depot de films metalliques BE770704A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6115470A 1970-08-05 1970-08-05

Publications (1)

Publication Number Publication Date
BE770704A true BE770704A (fr) 1972-01-31

Family

ID=22033986

Family Applications (1)

Application Number Title Priority Date Filing Date
BE770704A BE770704A (fr) 1970-08-05 1971-07-30 Procede et appareil pour le controle du depot de films metalliques

Country Status (3)

Country Link
US (1) US3699916A (fr)
BE (1) BE770704A (fr)
CA (1) CA946505A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4015319A (en) * 1975-03-20 1977-04-05 Bindicator Company Method for manufacturing an ultrasonic transducer
US3987214A (en) * 1975-09-19 1976-10-19 Rca Corporation Method of forming conductive coatings of predetermined thickness by vacuum depositing conductive coating on a measuring body
AU5952186A (en) * 1985-05-28 1986-12-24 Emkay Manufacturing Co. High speed digital frequency counter
WO1998031847A1 (fr) * 1997-01-22 1998-07-23 Specialty Coating Systems, Inc. Porte-cristal
AT512949B1 (de) * 2012-06-04 2016-06-15 Leica Microsysteme Gmbh Verfahren zur Beschichtung mit einem Verdampfungsmaterial
CN105603379B (zh) * 2016-01-05 2019-04-02 京东方科技集团股份有限公司 一种检测真空蒸镀膜厚的检测装置和真空蒸镀装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2470737A (en) * 1944-08-29 1949-05-17 Premier Crystal Lab Inc Method and means of finishing piezoelectric crystals
US2479264A (en) * 1945-07-09 1949-08-16 Rosenberg Paul Combined coaxial and crystal holder
US2595037A (en) * 1948-02-25 1952-04-29 John M Wolfskill Piezoelectric crystal apparatus
US2711646A (en) * 1950-04-25 1955-06-28 Jean S Mendousse Acoustic impedance measuring device for liquids
US2761076A (en) * 1951-08-10 1956-08-28 Marjorie B Hansell Ultrasonic generator and crystal holder
US3383238A (en) * 1965-05-27 1968-05-14 Unzicker Arlyn Eugene Method and apparatus of controlling thin film deposition in a vacuum

Also Published As

Publication number Publication date
CA946505A (en) 1974-04-30
US3699916A (en) 1972-10-24

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