AU7491598A - Lithographically defined microelectronic contact structures - Google Patents
Lithographically defined microelectronic contact structuresInfo
- Publication number
- AU7491598A AU7491598A AU74915/98A AU7491598A AU7491598A AU 7491598 A AU7491598 A AU 7491598A AU 74915/98 A AU74915/98 A AU 74915/98A AU 7491598 A AU7491598 A AU 7491598A AU 7491598 A AU7491598 A AU 7491598A
- Authority
- AU
- Australia
- Prior art keywords
- contact structures
- lithographically defined
- microelectronic contact
- defined microelectronic
- lithographically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000004377 microelectronic Methods 0.000 title 1
Classifications
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- H01L2924/38—Effects and problems related to the device integration
- H01L2924/381—Pitch distance
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4092—Integral conductive tabs, i.e. conductive parts partly detached from the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Wire Bonding (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
WOUS9708634 | 1997-05-15 | ||
PCT/US1997/008634 WO1997043654A1 (en) | 1996-05-17 | 1997-05-15 | Microelectronic spring contact elements |
US7367998P | 1998-02-04 | 1998-02-04 | |
US60073679 | 1998-02-04 | ||
US3247398A | 1998-02-26 | 1998-02-26 | |
US09032473 | 1998-02-26 | ||
PCT/US1998/009999 WO1998052224A1 (en) | 1997-05-15 | 1998-05-14 | Lithographically defined microelectronic contact structures |
Publications (1)
Publication Number | Publication Date |
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AU7491598A true AU7491598A (en) | 1998-12-08 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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AU74915/98A Abandoned AU7491598A (en) | 1997-05-15 | 1998-05-14 | Lithographically defined microelectronic contact structures |
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EP (1) | EP0985231A1 (en) |
JP (3) | JP3378259B2 (en) |
KR (2) | KR100577131B1 (en) |
AU (1) | AU7491598A (en) |
WO (1) | WO1998052224A1 (en) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US6520778B1 (en) | 1997-02-18 | 2003-02-18 | Formfactor, Inc. | Microelectronic contact structures, and methods of making same |
US7063541B2 (en) | 1997-03-17 | 2006-06-20 | Formfactor, Inc. | Composite microelectronic spring structure and method for making same |
US6807734B2 (en) | 1998-02-13 | 2004-10-26 | Formfactor, Inc. | Microelectronic contact structures, and methods of making same |
US6441315B1 (en) | 1998-11-10 | 2002-08-27 | Formfactor, Inc. | Contact structures with blades having a wiping motion |
US6672875B1 (en) | 1998-12-02 | 2004-01-06 | Formfactor, Inc. | Spring interconnect structures |
US6491968B1 (en) | 1998-12-02 | 2002-12-10 | Formfactor, Inc. | Methods for making spring interconnect structures |
US6255126B1 (en) | 1998-12-02 | 2001-07-03 | Formfactor, Inc. | Lithographic contact elements |
US6268015B1 (en) | 1998-12-02 | 2001-07-31 | Formfactor | Method of making and using lithographic contact springs |
EP1135690B1 (en) * | 1998-12-02 | 2003-06-04 | Formfactor, Inc. | Lithographic contact elements |
US6208225B1 (en) | 1999-02-25 | 2001-03-27 | Formfactor, Inc. | Filter structures for integrated circuit interfaces |
US6218910B1 (en) | 1999-02-25 | 2001-04-17 | Formfactor, Inc. | High bandwidth passive integrated circuit tester probe card assembly |
US6448865B1 (en) | 1999-02-25 | 2002-09-10 | Formfactor, Inc. | Integrated circuit interconnect system |
US6459343B1 (en) | 1999-02-25 | 2002-10-01 | Formfactor, Inc. | Integrated circuit interconnect system forming a multi-pole filter |
US6713374B2 (en) | 1999-07-30 | 2004-03-30 | Formfactor, Inc. | Interconnect assemblies and methods |
US7189077B1 (en) | 1999-07-30 | 2007-03-13 | Formfactor, Inc. | Lithographic type microelectronic spring structures with improved contours |
KR100807426B1 (en) * | 1999-07-30 | 2008-02-25 | 폼팩터, 인크. | Interconnect Assemblies and Methods |
US6780001B2 (en) | 1999-07-30 | 2004-08-24 | Formfactor, Inc. | Forming tool for forming a contoured microelectronic spring mold |
US6888362B2 (en) | 2000-11-09 | 2005-05-03 | Formfactor, Inc. | Test head assembly for electronic components with plurality of contoured microelectronic spring contacts |
US6939474B2 (en) * | 1999-07-30 | 2005-09-06 | Formfactor, Inc. | Method for forming microelectronic spring structures on a substrate |
DE19958328A1 (en) | 1999-10-08 | 2001-07-12 | Flexchip Ag | Production of an electrical connection between chip contact element units and external contact connections comprises pressing the contact element material into the contact connection material by stamping or pressing |
US6827584B2 (en) * | 1999-12-28 | 2004-12-07 | Formfactor, Inc. | Interconnect for microelectronic structures with enhanced spring characteristics |
TW490832B (en) * | 1999-12-29 | 2002-06-11 | Formfactor Inc | Spring interconnect structures and methods for making spring interconnect structures |
WO2001080315A2 (en) * | 2000-04-12 | 2001-10-25 | Formfactor, Inc. | Shaped springs and methods of fabricating and using shaped springs |
US7458816B1 (en) | 2000-04-12 | 2008-12-02 | Formfactor, Inc. | Shaped spring |
US6640432B1 (en) | 2000-04-12 | 2003-11-04 | Formfactor, Inc. | Method of fabricating shaped springs |
TW558856B (en) * | 2000-11-09 | 2003-10-21 | Formfactor Inc | Lithographic type microelectronic spring structures with improved contours |
JP2002286758A (en) * | 2001-03-28 | 2002-10-03 | Yamaha Corp | Probe unit and its manufacturing method |
WO2003007003A1 (en) | 2001-07-11 | 2003-01-23 | Formfactor, Inc. | Method of manufacturing a probe card |
US6729019B2 (en) | 2001-07-11 | 2004-05-04 | Formfactor, Inc. | Method of manufacturing a probe card |
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-
1998
- 1998-05-14 AU AU74915/98A patent/AU7491598A/en not_active Abandoned
- 1998-05-14 JP JP54959498A patent/JP3378259B2/en not_active Expired - Fee Related
- 1998-05-14 KR KR1020047003178A patent/KR100577131B1/en not_active IP Right Cessation
- 1998-05-14 WO PCT/US1998/009999 patent/WO1998052224A1/en not_active Application Discontinuation
- 1998-05-14 EP EP98922344A patent/EP0985231A1/en not_active Withdrawn
- 1998-05-14 KR KR1019997010532A patent/KR100577132B1/en not_active IP Right Cessation
-
2001
- 2001-12-12 JP JP2001378598A patent/JP2002231718A/en not_active Withdrawn
-
2002
- 2002-05-27 JP JP2002152167A patent/JP2003031289A/en active Pending
Also Published As
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KR100577131B1 (en) | 2006-05-10 |
JP2002231718A (en) | 2002-08-16 |
KR100577132B1 (en) | 2006-05-09 |
KR20040034685A (en) | 2004-04-28 |
JP2000512437A (en) | 2000-09-19 |
WO1998052224A1 (en) | 1998-11-19 |
JP3378259B2 (en) | 2003-02-17 |
KR20010012575A (en) | 2001-02-15 |
EP0985231A1 (en) | 2000-03-15 |
JP2003031289A (en) | 2003-01-31 |
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