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AU6343600A - Clear pedestal for an inspection apparatus - Google Patents

Clear pedestal for an inspection apparatus

Info

Publication number
AU6343600A
AU6343600A AU63436/00A AU6343600A AU6343600A AU 6343600 A AU6343600 A AU 6343600A AU 63436/00 A AU63436/00 A AU 63436/00A AU 6343600 A AU6343600 A AU 6343600A AU 6343600 A AU6343600 A AU 6343600A
Authority
AU
Australia
Prior art keywords
inspection apparatus
pedestal
clear
clear pedestal
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU63436/00A
Inventor
Mark Shires
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SYSTEMATION ENGINEERED PRODUCTS Inc
Original Assignee
SYSTEMATION ENGINEERED PRODUCT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SYSTEMATION ENGINEERED PRODUCT filed Critical SYSTEMATION ENGINEERED PRODUCT
Publication of AU6343600A publication Critical patent/AU6343600A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
AU63436/00A 1999-07-12 2000-07-11 Clear pedestal for an inspection apparatus Abandoned AU6343600A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14337999P 1999-07-12 1999-07-12
US60143379 1999-07-12
PCT/US2000/018879 WO2001004605A1 (en) 1999-07-12 2000-07-11 Clear pedestal for an inspection apparatus

Publications (1)

Publication Number Publication Date
AU6343600A true AU6343600A (en) 2001-01-30

Family

ID=22503820

Family Applications (1)

Application Number Title Priority Date Filing Date
AU63436/00A Abandoned AU6343600A (en) 1999-07-12 2000-07-11 Clear pedestal for an inspection apparatus

Country Status (2)

Country Link
AU (1) AU6343600A (en)
WO (1) WO2001004605A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008053684B4 (en) * 2008-10-29 2010-10-14 Graphikon Gesellschaft für Bildverarbeitung und Computergraphik mbH Backlight device for semiconductor products
JP5831425B2 (en) * 2012-10-26 2015-12-09 株式会社島津製作所 Solar cell inspection equipment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5748389A (en) * 1996-09-30 1998-05-05 Motorola, Inc. Optical pedestal and method for using the same

Also Published As

Publication number Publication date
WO2001004605A1 (en) 2001-01-18

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase