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AU584816B2 - Method of detecting the position of a chrome-on-glass reticle in an electron beam lithography apparatus - Google Patents

Method of detecting the position of a chrome-on-glass reticle in an electron beam lithography apparatus

Info

Publication number
AU584816B2
AU584816B2 AU77365/87A AU7736587A AU584816B2 AU 584816 B2 AU584816 B2 AU 584816B2 AU 77365/87 A AU77365/87 A AU 77365/87A AU 7736587 A AU7736587 A AU 7736587A AU 584816 B2 AU584816 B2 AU 584816B2
Authority
AU
Australia
Prior art keywords
chrome
detecting
electron beam
beam lithography
lithography apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU77365/87A
Other versions
AU7736587A (en
Inventor
John Richard Shambroom
Alan Paul Sliski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Control Data Corp
Original Assignee
Control Data Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/546,760 external-priority patent/US4538069A/en
Application filed by Control Data Corp filed Critical Control Data Corp
Publication of AU7736587A publication Critical patent/AU7736587A/en
Application granted granted Critical
Publication of AU584816B2 publication Critical patent/AU584816B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
    • G03F9/7053—Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/082—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
AU77365/87A 1983-10-28 1987-08-24 Method of detecting the position of a chrome-on-glass reticle in an electron beam lithography apparatus Ceased AU584816B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US546760 1983-10-28
US06/546,760 US4538069A (en) 1983-10-28 1983-10-28 Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US589902 1984-03-14
US06/589,902 US4539835A (en) 1983-10-28 1984-03-14 Calibration apparatus for capacitance height gauges

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
AU33788/84A Division AU566214B2 (en) 1983-10-28 1984-10-03 Capacitance height gauge and reticle position sensor for electron beam lithography

Publications (2)

Publication Number Publication Date
AU7736587A AU7736587A (en) 1987-12-03
AU584816B2 true AU584816B2 (en) 1989-06-01

Family

ID=27068348

Family Applications (3)

Application Number Title Priority Date Filing Date
AU33788/84A Ceased AU566214B2 (en) 1983-10-28 1984-10-03 Capacitance height gauge and reticle position sensor for electron beam lithography
AU77365/87A Ceased AU584816B2 (en) 1983-10-28 1987-08-24 Method of detecting the position of a chrome-on-glass reticle in an electron beam lithography apparatus
AU77366/87A Ceased AU596208B2 (en) 1983-10-28 1987-08-24 Apparatus for calibrating a capacitance height gauge

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AU33788/84A Ceased AU566214B2 (en) 1983-10-28 1984-10-03 Capacitance height gauge and reticle position sensor for electron beam lithography

Family Applications After (1)

Application Number Title Priority Date Filing Date
AU77366/87A Ceased AU596208B2 (en) 1983-10-28 1987-08-24 Apparatus for calibrating a capacitance height gauge

Country Status (5)

Country Link
US (1) US4539835A (en)
AU (3) AU566214B2 (en)
DE (1) DE3435339A1 (en)
FR (1) FR2554223B1 (en)
GB (3) GB2149119B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4851831A (en) * 1981-05-13 1989-07-25 Drexelbrook Engineering Co. Two-wire level measuring instrument
US5049878A (en) * 1981-05-13 1991-09-17 Drexelbrook Engineering Company Two-wire compensated level measuring instrument
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges
DE3608884A1 (en) * 1986-03-17 1987-09-24 Mitec Moderne Ind Gmbh MEASURING ARRANGEMENT
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
US4841224A (en) * 1987-11-10 1989-06-20 Washington Technology Center Gap width probe and method
FR2640373B1 (en) * 1988-12-09 1992-12-11 Onera (Off Nat Aerospatiale) CAPACITIVE DIMENSIONAL MEASUREMENT CHAINS WITH LINEAR OUTPUT
GB9021447D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance probes
JP3175261B2 (en) * 1992-02-05 2001-06-11 株式会社日立製作所 Electromagnetic flow meter
SI9600141B (en) * 1996-04-30 2002-12-31 Fakulteta Za Elektroniko Integrated capacity measurement device for nanometric distances
EP1923670B1 (en) * 2006-11-17 2010-03-17 AMO Automatisierung Messtechnik Optik GmbH Position measuring device
US8570055B2 (en) * 2009-12-31 2013-10-29 Mapper Lithography Ip B.V. Capacitive sensing system
WO2017072976A1 (en) * 2015-10-30 2017-05-04 三菱電機株式会社 Wire electric discharge machine, and control method and positioning method for control device of wire electric discharge machine
JP2019005323A (en) * 2017-06-27 2019-01-17 ルネサスエレクトロニクス株式会社 Height measuring device, healthcare equipment and rotating gate
US10871409B2 (en) * 2017-12-15 2020-12-22 G.E. Avio S.r.l. SMD-coil-based torque-sensor for tangential field measurement
FR3084473B1 (en) * 2018-07-24 2021-06-18 Cgg Services Sas METHOD AND DEVICE FOR MONITORING THE SUB-SOIL UNDER A TARGET ZONE
US11493407B2 (en) 2018-09-28 2022-11-08 Ge Avio S.R.L. Torque measurement system
US10809048B2 (en) 2019-01-08 2020-10-20 Formfactor Beaverton, Inc. Probe systems and methods for calibrating capacitive height sensing measurements

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1032215A (en) * 1962-10-08 1966-06-08 Ass Elect Ind Improvements relating to capacitive clearance measurements
US3409774A (en) * 1966-05-25 1968-11-05 United States Steel Corp Method of determining the thickness of a coating on a metal base and method of calibrating the thickness gauge
US3523735A (en) * 1966-10-07 1970-08-11 Gen Dynamics Corp Interferometer system for distance measurement
US3533286A (en) * 1969-01-28 1970-10-13 Trans Sonics Inc Tank quantity gage
US3706919A (en) * 1970-08-17 1972-12-19 Ade Corp Capacitive gauge
US3805150A (en) * 1970-08-17 1974-04-16 Ade Corp Environment immune high precision capacitive gauging system
US3986109A (en) * 1975-01-29 1976-10-12 Ade Corporation Self-calibrating dimension gauge
GB1577135A (en) * 1977-03-08 1980-10-22 Rca Corp Capacitance distance sensor
US4190797A (en) * 1978-03-31 1980-02-26 Gould Inc. Capacitive gauging system utilizing a low internal capacitance, high impedance amplifier means
GB2034051A (en) * 1978-10-12 1980-05-29 Smiths Industries Ltd Fluid Gauging System
NL7905562A (en) * 1979-07-17 1981-01-20 Heerens Willem Christiaan CAPACITIVE METER.
JPS5651826A (en) * 1979-10-05 1981-05-09 Hitachi Ltd Image drawing apparatus by electron beam
JPS5664434A (en) * 1979-10-31 1981-06-01 Hitachi Ltd Electron beam drawing apparatus
JPS56125831A (en) * 1980-03-07 1981-10-02 Hitachi Ltd Z-sensor in electron beam patterning device
GB2094004B (en) * 1980-08-23 1984-05-02 Smiths Industries Ltd Fluid-gauging systems
US4461569A (en) * 1982-01-07 1984-07-24 The Electron Machine Corporation Concentricity gage
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus

Also Published As

Publication number Publication date
US4539835A (en) 1985-09-10
AU7736587A (en) 1987-12-03
GB2178171B (en) 1987-07-15
GB2178172A (en) 1987-02-04
AU7736687A (en) 1987-12-03
AU566214B2 (en) 1987-10-15
DE3435339A1 (en) 1985-05-23
FR2554223A1 (en) 1985-05-03
AU3378884A (en) 1985-05-02
AU596208B2 (en) 1990-04-26
GB2149119B (en) 1987-07-15
GB8424163D0 (en) 1984-10-31
GB8621084D0 (en) 1986-10-08
GB8621083D0 (en) 1986-10-08
FR2554223B1 (en) 1987-05-22
GB2178172B (en) 1987-07-15
GB2178171A (en) 1987-02-04
GB2149119A (en) 1985-06-05

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