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AU5386396A - Mfc-quick change method and apparatus - Google Patents

Mfc-quick change method and apparatus

Info

Publication number
AU5386396A
AU5386396A AU53863/96A AU5386396A AU5386396A AU 5386396 A AU5386396 A AU 5386396A AU 53863/96 A AU53863/96 A AU 53863/96A AU 5386396 A AU5386396 A AU 5386396A AU 5386396 A AU5386396 A AU 5386396A
Authority
AU
Australia
Prior art keywords
mfc
quick change
change method
quick
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU53863/96A
Inventor
Frank R. Balma
Brent D Elliot
Michael R Green
Benjamin R. Strong Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Insync Systems Inc
Original Assignee
Insync Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Insync Systems Inc filed Critical Insync Systems Inc
Publication of AU5386396A publication Critical patent/AU5386396A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
    • B08B9/0323—Arrangements specially designed for simultaneous and parallel cleaning of a plurality of conduits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
    • B08B9/0325—Control mechanisms therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Drying Of Semiconductors (AREA)
AU53863/96A 1995-05-05 1996-04-04 Mfc-quick change method and apparatus Abandoned AU5386396A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US437093 1982-10-27
US43709395A 1995-05-05 1995-05-05
PCT/US1996/004708 WO1996034705A1 (en) 1995-05-05 1996-04-04 Mfc-quick change method and apparatus

Publications (1)

Publication Number Publication Date
AU5386396A true AU5386396A (en) 1996-11-21

Family

ID=23735042

Family Applications (1)

Application Number Title Priority Date Filing Date
AU53863/96A Abandoned AU5386396A (en) 1995-05-05 1996-04-04 Mfc-quick change method and apparatus

Country Status (2)

Country Link
AU (1) AU5386396A (en)
WO (1) WO1996034705A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5810031A (en) * 1996-02-21 1998-09-22 Aeroquip Corporation Ultra high purity gas distribution component with integral valved coupling and methods for its use
US6293310B1 (en) 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6394138B1 (en) 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
JP3997338B2 (en) 1997-02-14 2007-10-24 忠弘 大見 Fluid control device
WO1998048215A1 (en) * 1997-04-22 1998-10-29 Air Liquide Japan, Ltd. Gas supply facility
WO2000031462A1 (en) * 1998-11-20 2000-06-02 Mykrolis Corporation System and method for integrating gas components
WO2002093053A1 (en) 2001-05-16 2002-11-21 Unit Instruments, Inc. Fluid flow system
US7575616B2 (en) 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4741354A (en) * 1987-04-06 1988-05-03 Spire Corporation Radial gas manifold
JP2602880B2 (en) * 1988-03-05 1997-04-23 忠弘 大見 Cylinder cabinet plumbing equipment
JPH0644986B2 (en) * 1988-05-08 1994-06-15 忠弘 大見 Process gas supply piping device
US5368062A (en) * 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus

Also Published As

Publication number Publication date
WO1996034705A1 (en) 1996-11-07

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