AU5224499A - Membrane probing system - Google Patents

Membrane probing system

Info

Publication number: AU5224499A
Authority: AU; Australia
Prior art keywords: probing system; membrane probing; membrane; probing
Prior art date: 1999-07-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU52244/99A

Inventor

Michael A. Bayne

Martin Koxxy

Timothy Lesher

Gleason K. Reed

Kenneth A. Smith

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

FormFactor Beaverton Inc

Original Assignee

Cascade Microtech Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-07-21

Filing date

1999-07-21

Publication date

2001-02-13

1999-07-21 Application filed by Cascade Microtech Inc filed Critical Cascade Microtech Inc

2001-02-13 Publication of AU5224499A publication Critical patent/AU5224499A/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06744—Microprobes, i.e. having dimensions as IC details
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Geometry (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
General Engineering & Computer Science (AREA)
Measuring Leads Or Probes (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)
Testing Of Individual Semiconductor Devices (AREA)

AU52244/99A 1999-07-21 1999-07-21 Membrane probing system Abandoned AU5224499A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/US1999/016653 WO2001007207A1 (en)	1999-07-21	1999-07-21	Membrane probing system

Publications (1)

Publication Number	Publication Date
AU5224499A true AU5224499A (en)	2001-02-13

Family

ID=22273259

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU52244/99A Abandoned AU5224499A (en)	1999-07-21	1999-07-21	Membrane probing system

Country Status (6)

Country	Link
EP (1)	EP1210208A4 (en)
JP (1)	JP2003505871A (en)
KR (1)	KR100724131B1 (en)
CN (1)	CN1174836C (en)
AU (1)	AU5224499A (en)
WO (1)	WO2001007207A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6256882B1 (en)	1998-07-14	2001-07-10	Cascade Microtech, Inc.	Membrane probing system
WO2003052435A1 (en)	2001-08-21	2003-06-26	Cascade Microtech, Inc.	Membrane probing system
US7420381B2 (en)	2004-09-13	2008-09-02	Cascade Microtech, Inc.	Double sided probing structures
WO2010059247A2 (en)	2008-11-21	2010-05-27	Cascade Microtech, Inc.	Replaceable coupon for a probing apparatus
JP2020016626A (en) *	2018-07-27	2020-01-30	日置電機株式会社	Measuring apparatus
CN112771387A (en) *	2018-07-27	2021-05-07	日置电机株式会社	Measuring device
JP2020115155A (en) *	2020-05-07	2020-07-30	日置電機株式会社	Measurement device
KR102309675B1 (en)	2021-07-30	2021-10-07	김재길	Probe card in film type

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3596228A (en)	1969-05-29	1971-07-27	Ibm	Fluid actuated contactor
NL8403755A (en) *	1984-12-11	1986-07-01	Philips Nv	METHOD FOR MANUFACTURING A MULTI-LAYER PRINTED WIRING WITH SEW-THROUGH TRACKS IN DIFFERENT LAYERS AND MULTI-LAYER PRINTED WIRES MADE BY THE METHOD
US5323035A (en) *	1992-10-13	1994-06-21	Glenn Leedy	Interconnection structure for integrated circuits and method for making same
US5126286A (en) *	1990-10-05	1992-06-30	Micron Technology, Inc.	Method of manufacturing edge connected semiconductor die
US5229782A (en) *	1991-07-19	1993-07-20	Conifer Corporation	Stacked dual dipole MMDS feed
US5537372A (en) *	1991-11-15	1996-07-16	International Business Machines Corporation	High density data storage system with topographic contact sensor
JP2710544B2 (en) *	1993-09-30	1998-02-10	インターナショナル・ビジネス・マシーンズ・コーポレイション	Probe structure, method of forming probe structure
US6002266A (en) *	1995-05-23	1999-12-14	Digital Equipment Corporation	Socket including centrally distributed test tips for testing unpackaged singulated die
US5814847A (en) *	1996-02-02	1998-09-29	National Semiconductor Corp.	General purpose assembly programmable multi-chip package substrate
KR100324064B1 (en) *	1996-05-17	2002-06-22	이고르 와이. 칸드로스	Contact tip structure for microelectronic interconnection element and its manufacturing method
KR100674534B1 (en) *	1996-05-17	2007-04-25	폼팩터, 인크.	Microelectronic contact structure and method of making same
US5914613A (en) *	1996-08-08	1999-06-22	Cascade Microtech, Inc.	Membrane probing system with local contact scrub

1999
- 1999-07-21 JP JP2001512067A patent/JP2003505871A/en active Pending
- 1999-07-21 AU AU52244/99A patent/AU5224499A/en not_active Abandoned
- 1999-07-21 CN CNB998168165A patent/CN1174836C/en not_active Expired - Fee Related
- 1999-07-21 WO PCT/US1999/016653 patent/WO2001007207A1/en active IP Right Grant
- 1999-07-21 KR KR1020027000301A patent/KR100724131B1/en not_active IP Right Cessation
- 1999-07-21 EP EP99937404A patent/EP1210208A4/en not_active Withdrawn

Also Published As

Publication number	Publication date
CN1174836C (en)	2004-11-10
WO2001007207A1 (en)	2001-02-01
EP1210208A1 (en)	2002-06-05
CN1361725A (en)	2002-07-31
KR100724131B1 (en)	2007-06-04
KR20020027483A (en)	2002-04-13
JP2003505871A (en)	2003-02-12
EP1210208A4 (en)	2005-07-06

Publication	Publication Date	Title
AU2001238550A1 (en)	2001-09-03	Membrane probing system
AU2297001A (en)	2001-04-30	Telestrator system
AU6906800A (en)	2001-03-13	Membrane associated proteins
AU6197600A (en)	2000-12-05	Tactiovisual distance-to-exit exit-finding system
AU7360200A (en)	2001-04-10	Fuel system
AU5282900A (en)	2000-12-18	Acoustic counter-sniper system
EP1026499B8 (en)	2006-03-01	Inspection system
AU1991000A (en)	2000-08-01	An electrosurgical system
AUPQ297099A0 (en)	1999-10-14	Seating system
AU1405301A (en)	2001-05-30	Electrosurgical system
AU3706700A (en)	2000-09-14	Positively charged membrane
AU3440900A (en)	2000-10-16	Assay system
AU5003600A (en)	2000-12-05	Charged membrane
AU2002327490A1 (en)	2003-06-30	Membrane probing system
AU2001235435A1 (en)	2001-07-31	System for connecting elements
AU5869900A (en)	2000-12-28	Uv-imager system
AU7136200A (en)	2001-02-19	Range measuring system
AUPQ002399A0 (en)	1999-05-20	Model membrane systems
AU3716500A (en)	2000-09-21	Interface independent test system
AU2001272273A1 (en)	2002-01-30	Laser-ultrasonic testing system
AUPQ592700A0 (en)	2000-03-23	Instrument reference system
AU5224499A (en)	2001-02-13	Membrane probing system
AU2002222954A1 (en)	2002-01-30	Seat complete measuring system
AU1716001A (en)	2001-06-12	Detection system
AU2001227395A1 (en)	2004-03-04	Block system

Legal Events

Date	Code	Title	Description
2002-05-02	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase