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AU469872B2 - Method and apparatus for vapor depositing coating on substrates - Google Patents

Method and apparatus for vapor depositing coating on substrates

Info

Publication number
AU469872B2
AU469872B2 AU33297/71A AU3329771A AU469872B2 AU 469872 B2 AU469872 B2 AU 469872B2 AU 33297/71 A AU33297/71 A AU 33297/71A AU 3329771 A AU3329771 A AU 3329771A AU 469872 B2 AU469872 B2 AU 469872B2
Authority
AU
Australia
Prior art keywords
substrates
vapor depositing
depositing coating
coating
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU33297/71A
Other versions
AU3329771A (en
Inventor
Francis Butler And William John Babyak John
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jones and Laughlin Steel Corp
Original Assignee
Jones and Laughlin Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jones and Laughlin Steel Corp filed Critical Jones and Laughlin Steel Corp
Publication of AU3329771A publication Critical patent/AU3329771A/en
Application granted granted Critical
Publication of AU469872B2 publication Critical patent/AU469872B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating With Molten Metal (AREA)
AU33297/71A 1970-10-13 1971-09-09 Method and apparatus for vapor depositing coating on substrates Expired AU469872B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US8030570A 1970-10-13 1970-10-13
USUS80305 1970-10-13

Publications (2)

Publication Number Publication Date
AU3329771A AU3329771A (en) 1973-03-15
AU469872B2 true AU469872B2 (en) 1976-02-26

Family

ID=22156537

Family Applications (1)

Application Number Title Priority Date Filing Date
AU33297/71A Expired AU469872B2 (en) 1970-10-13 1971-09-09 Method and apparatus for vapor depositing coating on substrates

Country Status (5)

Country Link
AU (1) AU469872B2 (en)
CA (1) CA934240A (en)
DE (1) DE2144368C3 (en)
GB (1) GB1318509A (en)
NL (1) NL7114089A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6461667B1 (en) * 2000-04-04 2002-10-08 Eastman Kodak Company Apparatus and method for vapor depositing lubricant coating on a web

Also Published As

Publication number Publication date
DE2144368B2 (en) 1978-09-21
NL7114089A (en) 1972-04-17
DE2144368C3 (en) 1979-05-31
GB1318509A (en) 1973-05-31
DE2144368A1 (en) 1972-04-20
CA934240A (en) 1973-09-25
AU3329771A (en) 1973-03-15

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