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AU465750B2 - Cathode sputtering apparatus - Google Patents

Cathode sputtering apparatus

Info

Publication number
AU465750B2
AU465750B2 AU30938/71A AU3093871A AU465750B2 AU 465750 B2 AU465750 B2 AU 465750B2 AU 30938/71 A AU30938/71 A AU 30938/71A AU 3093871 A AU3093871 A AU 3093871A AU 465750 B2 AU465750 B2 AU 465750B2
Authority
AU
Australia
Prior art keywords
sputtering apparatus
cathode sputtering
cathode
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU30938/71A
Other versions
AU3093871A (en
Inventor
LABEDAN and ROBERT MASOTTI PIERRE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orogil SA
Original Assignee
Orogil SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orogil SA filed Critical Orogil SA
Application granted granted Critical
Publication of AU3093871A publication Critical patent/AU3093871A/en
Publication of AU465750B2 publication Critical patent/AU465750B2/en
Expired legal-status Critical Current

Links

AU30938/71A 1970-07-10 1971-07-07 Cathode sputtering apparatus Expired AU465750B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FRFR7026730 1970-07-10

Publications (2)

Publication Number Publication Date
AU3093871A AU3093871A (en) 1973-01-11
AU465750B2 true AU465750B2 (en) 1973-01-11

Family

ID=

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309315A (en) 1978-12-27 1982-01-05 Nissan Motor Company, Ltd. Surface-activated functional materials and a method of producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309315A (en) 1978-12-27 1982-01-05 Nissan Motor Company, Ltd. Surface-activated functional materials and a method of producing the same

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