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AU448926B2 - Cutting apparatus for semiconductor materials - Google Patents

Cutting apparatus for semiconductor materials

Info

Publication number
AU448926B2
AU448926B2 AU23684/70A AU2368470A AU448926B2 AU 448926 B2 AU448926 B2 AU 448926B2 AU 23684/70 A AU23684/70 A AU 23684/70A AU 2368470 A AU2368470 A AU 2368470A AU 448926 B2 AU448926 B2 AU 448926B2
Authority
AU
Australia
Prior art keywords
cutting apparatus
semiconductor materials
semiconductor
cutting
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU23684/70A
Other versions
AU2368470A (en
Inventor
GRANDIN and ROBERT LEWIS ROHR JOHANNES
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of AU448926B2 publication Critical patent/AU448926B2/en
Publication of AU2368470A publication Critical patent/AU2368470A/en
Expired legal-status Critical Current

Links

AU23684/70A 1969-12-30 1970-12-22 Cutting apparatus for semiconductor materials Expired AU448926B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS889,2 1969-12-30

Publications (2)

Publication Number Publication Date
AU448926B2 true AU448926B2 (en) 1972-06-29
AU2368470A AU2368470A (en) 1972-06-29

Family

ID=

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