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AU4407993A - Large stage system for scanning probe microscopes and other instruments - Google Patents

Large stage system for scanning probe microscopes and other instruments

Info

Publication number
AU4407993A
AU4407993A AU44079/93A AU4407993A AU4407993A AU 4407993 A AU4407993 A AU 4407993A AU 44079/93 A AU44079/93 A AU 44079/93A AU 4407993 A AU4407993 A AU 4407993A AU 4407993 A AU4407993 A AU 4407993A
Authority
AU
Australia
Prior art keywords
instruments
scanning probe
stage system
probe microscopes
large stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU44079/93A
Inventor
Ronald H Arima
Michael D Kirk
Sangil Park
Ian R Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Park Scientific Instruments Corp
Original Assignee
Park Scientific Instruments Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Park Scientific Instruments Corp filed Critical Park Scientific Instruments Corp
Publication of AU4407993A publication Critical patent/AU4407993A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
AU44079/93A 1992-06-12 1993-06-10 Large stage system for scanning probe microscopes and other instruments Abandoned AU4407993A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US89765792A 1992-06-12 1992-06-12
PCT/US1993/005393 WO1993025928A1 (en) 1992-06-12 1993-06-10 Large stage system for scanning probe microscopes and other instruments
US897657 2001-06-29

Publications (1)

Publication Number Publication Date
AU4407993A true AU4407993A (en) 1994-01-04

Family

ID=25408207

Family Applications (1)

Application Number Title Priority Date Filing Date
AU44079/93A Abandoned AU4407993A (en) 1992-06-12 1993-06-10 Large stage system for scanning probe microscopes and other instruments

Country Status (2)

Country Link
AU (1) AU4407993A (en)
WO (1) WO1993025928A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2125165B1 (en) * 1996-04-30 1999-12-01 Baro Vidal Arturo LOW NOISE FORCES MICROSCOPE WITH WIDE FIELD OF VISIBILITY.
US5854487A (en) * 1997-02-28 1998-12-29 Park Scientific Instruments Scanning probe microscope providing unobstructed top down and bottom up views
JPH11211732A (en) 1998-01-27 1999-08-06 Hitachi Constr Mach Co Ltd Scanning-type probe microscope
EP3257621B1 (en) * 2016-06-13 2019-11-13 Eitel, Rudolf Device for variable and guided positioning of an object or an object holder to be measured and/or machined
CN113252945B (en) * 2021-05-18 2022-08-23 中国科学院苏州纳米技术与纳米仿生研究所 Apparatus and method for moving samples in a scanning tunneling microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4556317A (en) * 1984-02-22 1985-12-03 Kla Instruments Corporation X-Y Stage for a patterned wafer automatic inspection system
US4999494A (en) * 1989-09-11 1991-03-12 Digital Instruments, Inc. System for scanning large sample areas with a scanning probe microscope

Also Published As

Publication number Publication date
WO1993025928A1 (en) 1993-12-23

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