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AU263945B2 - Method and apparatus for deposition of thin film metal networks without the use of masks - Google Patents

Method and apparatus for deposition of thin film metal networks without the use of masks

Info

Publication number
AU263945B2
AU263945B2 AU23427/62A AU2342762A AU263945B2 AU 263945 B2 AU263945 B2 AU 263945B2 AU 23427/62 A AU23427/62 A AU 23427/62A AU 2342762 A AU2342762 A AU 2342762A AU 263945 B2 AU263945 B2 AU 263945B2
Authority
AU
Australia
Prior art keywords
masks
deposition
thin film
film metal
metal networks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU23427/62A
Other versions
AU2342762A (en
Inventor
Leland Caswell Hollis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of AU2342762A publication Critical patent/AU2342762A/en
Publication of AU263945B2 publication Critical patent/AU263945B2/en
Expired legal-status Critical Current

Links

AU23427/62A 1961-10-27 1962-10-22 Method and apparatus for deposition of thin film metal networks without the use of masks Expired AU263945B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS148148 1961-10-27

Publications (2)

Publication Number Publication Date
AU2342762A AU2342762A (en) 1964-04-23
AU263945B2 true AU263945B2 (en) 1964-04-23

Family

ID=

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