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AU2592297A - Laser light window cleaning - Google Patents

Laser light window cleaning

Info

Publication number
AU2592297A
AU2592297A AU25922/97A AU2592297A AU2592297A AU 2592297 A AU2592297 A AU 2592297A AU 25922/97 A AU25922/97 A AU 25922/97A AU 2592297 A AU2592297 A AU 2592297A AU 2592297 A AU2592297 A AU 2592297A
Authority
AU
Australia
Prior art keywords
laser light
window cleaning
light window
cleaning
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU25922/97A
Inventor
James W. Early
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
University of California Berkeley
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California, University of California Berkeley filed Critical University of California
Publication of AU2592297A publication Critical patent/AU2592297A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
AU25922/97A 1996-03-28 1997-03-27 Laser light window cleaning Abandoned AU2592297A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US1434896P 1996-03-28 1996-03-28
US60014348 1996-03-28
US64238396A 1996-05-03 1996-05-03
US08642383 1996-05-03
PCT/US1997/005007 WO1997035685A1 (en) 1996-03-28 1997-03-27 Laser light window cleaning

Publications (1)

Publication Number Publication Date
AU2592297A true AU2592297A (en) 1997-10-17

Family

ID=26685994

Family Applications (1)

Application Number Title Priority Date Filing Date
AU25922/97A Abandoned AU2592297A (en) 1996-03-28 1997-03-27 Laser light window cleaning

Country Status (2)

Country Link
AU (1) AU2592297A (en)
WO (1) WO1997035685A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO316113B1 (en) 2002-01-24 2003-12-15 Proanalysis As Method, probe and system for laser-based cleaning mechanism
DE10310797B4 (en) * 2003-03-12 2005-11-03 Siemens Ag Device for processing substrates, in particular of electrical circuit substrates, with laser

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187338A (en) * 1984-10-05 1986-05-02 Nec Corp Method of dry cleaning silicon surface irradiated with multiple beams
JPS63154940A (en) * 1986-12-19 1988-06-28 Hitachi Ltd Cleaning of internal observation window for apparatus utilizing plasma
JPH0681151A (en) * 1992-09-01 1994-03-22 Mitsubishi Materials Corp Cleaning method of window for container

Also Published As

Publication number Publication date
WO1997035685A1 (en) 1997-10-02

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