AU2003288242A1 - Differential pressure sensor - Google Patents

Differential pressure sensor

Info

Publication number: AU2003288242A1
Authority: AU; Australia
Prior art keywords: pressure sensor; differential pressure; differential; sensor; pressure
Prior art date: 2002-12-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003288242A

Inventor

Dietfried Burczyk

Thomas Gessner

Karla Hiller

Steffen Kurth

Friedrich Schwabe

Thomas Velten

Maik Wiemer

Norbert Zichner

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Endress and Hauser SE and Co KG

Original Assignee

Endress and Hauser SE and Co KG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-12-19

Filing date

2003-12-08

Publication date

2004-07-14

2003-12-08 Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG

2004-07-14 Publication of AU2003288242A1 publication Critical patent/AU2003288242A1/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)

AU2003288242A 2002-12-19 2003-12-08 Differential pressure sensor Abandoned AU2003288242A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
DE10260086		2002-12-19
DE10260086.4		2002-12-19
PCT/EP2003/013891 WO2004057291A1 (en)	2002-12-19	2003-12-08	Differential pressure sensor

Publications (1)

Publication Number	Publication Date
AU2003288242A1 true AU2003288242A1 (en)	2004-07-14

Family

ID=32667526

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003288242A Abandoned AU2003288242A1 (en)	2002-12-19	2003-12-08	Differential pressure sensor

Country Status (3)

Country	Link
AU (1)	AU2003288242A1 (en)
DE (1)	DE10393943B3 (en)
WO (1)	WO2004057291A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5558198B2 (en)	2010-05-13	2014-07-23	三菱電機株式会社	Semiconductor pressure sensor
DE102014108748A1 (en)	2014-06-23	2015-12-24	Endress + Hauser Gmbh + Co. Kg	Capacitive differential pressure sensor and method for its manufacture
DE102014115803A1 (en) *	2014-10-30	2016-05-19	Endress + Hauser Gmbh + Co. Kg	MEMS sensor, in particular differential pressure sensor
DE102014115802A1 (en) *	2014-10-30	2016-05-04	Endress + Hauser Gmbh + Co. Kg	Capacitive pressure sensor and method for its manufacture
DE102015103485A1 (en) *	2015-03-10	2016-09-15	Endress + Hauser Gmbh + Co. Kg	MEMS sensor, esp. Pressure sensor
DE102015119272A1 (en)	2015-11-09	2017-05-11	Endress+Hauser Gmbh+Co. Kg	Capacitive pressure sensor and method for its manufacture
DE102015120074A1 (en)	2015-11-19	2017-05-24	Endress+Hauser Gmbh+Co. Kg	Capacitive differential pressure sensor and method for its production
DE102015121625A1 (en)	2015-12-11	2017-06-14	Endress+Hauser Gmbh+Co. Kg	Method for producing a pressure measuring device
DE102016106117A1 (en)	2016-04-04	2017-10-05	Endress + Hauser Gmbh + Co. Kg	Capacitive pressure sensor
DE102016107235B3 (en)	2016-04-19	2017-01-26	Endress + Hauser Gmbh + Co. Kg	Differential pressure measuring cell
DE102017130430A1 (en)	2017-12-19	2019-06-19	Endress+Hauser SE+Co. KG	pressure sensor
DE102018119943A1 (en) *	2018-08-16	2020-02-20	Endress+Hauser SE+Co. KG	pressure sensor
JP2022059145A (en) *	2020-10-01	2022-04-13	長野計器株式会社	Pressure detection element

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH061228B2 (en) *	1987-08-13	1994-01-05	富士電機株式会社	Capacitive pressure detector
JP2639159B2 (en) *	1989-04-14	1997-08-06	富士電機株式会社	Capacitive differential pressure detector
DE19648424C1 (en) *	1996-11-22	1998-06-25	Siemens Ag	Micromechanical sensor
DE59911611D1 (en) *	1999-12-10	2005-03-17	Endress & Hauser Gmbh & Co Kg	pressure monitor
DE50114896D1 (en) *	2000-07-26	2009-06-25	Endress & Hauser Gmbh & Co Kg	CAPACITIVE PRESSURE SENSOR

2003
- 2003-12-08 AU AU2003288242A patent/AU2003288242A1/en not_active Abandoned
- 2003-12-08 DE DE10393943A patent/DE10393943B3/en not_active Expired - Fee Related
- 2003-12-08 WO PCT/EP2003/013891 patent/WO2004057291A1/en not_active Application Discontinuation

Also Published As

Publication number	Publication date
WO2004057291A1 (en)	2004-07-08
DE10393943B3 (en)	2012-06-14

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Legal Events

Date	Code	Title	Description
2005-09-08	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase