AU2003231385A1 - Mounting method and mounting system - Google Patents
Mounting method and mounting systemInfo
- Publication number
- AU2003231385A1 AU2003231385A1 AU2003231385A AU2003231385A AU2003231385A1 AU 2003231385 A1 AU2003231385 A1 AU 2003231385A1 AU 2003231385 A AU2003231385 A AU 2003231385A AU 2003231385 A AU2003231385 A AU 2003231385A AU 2003231385 A1 AU2003231385 A1 AU 2003231385A1
- Authority
- AU
- Australia
- Prior art keywords
- mounting
- mounting system
- mounting method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H10P72/0414—
-
- H10W72/0711—
-
- H10W72/07118—
-
- H10W72/07125—
-
- H10W72/07236—
-
- H10W72/07251—
-
- H10W72/20—
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002-125816 | 2002-04-26 | ||
| JP2002125816 | 2002-04-26 | ||
| JP2003-66586 | 2003-03-12 | ||
| JP2003066586A JP2004006707A (en) | 2002-04-26 | 2003-03-12 | Mounting method and mounting device |
| PCT/JP2003/005121 WO2003092054A1 (en) | 2002-04-26 | 2003-04-22 | Mounting method and mounting system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2003231385A1 true AU2003231385A1 (en) | 2003-11-10 |
Family
ID=29272362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2003231385A Abandoned AU2003231385A1 (en) | 2002-04-26 | 2003-04-22 | Mounting method and mounting system |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2004006707A (en) |
| AU (1) | AU2003231385A1 (en) |
| TW (1) | TW200403790A (en) |
| WO (1) | WO2003092054A1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4608890B2 (en) * | 2004-01-29 | 2011-01-12 | 富士ゼロックス株式会社 | Method and apparatus for manufacturing microstructure |
| JP4864591B2 (en) * | 2006-08-08 | 2012-02-01 | 神港精機株式会社 | Soldering method and soldering apparatus |
| KR100841376B1 (en) | 2007-06-12 | 2008-06-26 | 삼성에스디아이 주식회사 | Bonding method and manufacturing method of organic light emitting display device using the same |
| KR100841375B1 (en) | 2007-06-12 | 2008-06-26 | 삼성에스디아이 주식회사 | Bonding method and manufacturing method of organic light emitting display device using the same |
| KR100889625B1 (en) | 2007-07-19 | 2009-03-20 | 삼성모바일디스플레이주식회사 | Bonding method and manufacturing method of organic light emitting display device using the same |
| US9443820B2 (en) | 2012-05-30 | 2016-09-13 | Ev Group E. Thallner Gmbh | Device and method for bonding substrates |
| JP2014160743A (en) * | 2013-02-19 | 2014-09-04 | Tokyo Ohka Kogyo Co Ltd | Bonding apparatus and cleaning method of the same |
| KR102039233B1 (en) * | 2017-12-26 | 2019-11-26 | 캐논 톡키 가부시키가이샤 | Electrostatic chuck, film forming apparatus including electrostatic chuck, substrate holding and separating method, film forming method including the same, and manufacturing method of electronic device using the same |
| JPWO2022176798A1 (en) * | 2021-02-16 | 2022-08-25 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5198634A (en) * | 1990-05-21 | 1993-03-30 | Mattson Brad S | Plasma contamination removal process |
| JP2791429B2 (en) * | 1996-09-18 | 1998-08-27 | 工業技術院長 | Room-temperature bonding of silicon wafers |
| JP2002064268A (en) * | 2000-08-18 | 2002-02-28 | Toray Eng Co Ltd | Mounting method and device |
-
2003
- 2003-03-12 JP JP2003066586A patent/JP2004006707A/en active Pending
- 2003-04-22 AU AU2003231385A patent/AU2003231385A1/en not_active Abandoned
- 2003-04-22 WO PCT/JP2003/005121 patent/WO2003092054A1/en not_active Ceased
- 2003-04-25 TW TW092109691A patent/TW200403790A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004006707A (en) | 2004-01-08 |
| WO2003092054A1 (en) | 2003-11-06 |
| TW200403790A (en) | 2004-03-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |