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AU2003223125A8 - Micro piezoelectric actuator and method for fabricating same - Google Patents

Micro piezoelectric actuator and method for fabricating same

Info

Publication number
AU2003223125A8
AU2003223125A8 AU2003223125A AU2003223125A AU2003223125A8 AU 2003223125 A8 AU2003223125 A8 AU 2003223125A8 AU 2003223125 A AU2003223125 A AU 2003223125A AU 2003223125 A AU2003223125 A AU 2003223125A AU 2003223125 A8 AU2003223125 A8 AU 2003223125A8
Authority
AU
Australia
Prior art keywords
piezoelectric actuator
fabricating same
micro piezoelectric
micro
fabricating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003223125A
Other versions
AU2003223125A1 (en
Inventor
Kyu-Ho Hwang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M2N Inc
Original Assignee
M2N Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/KR2002/000701 external-priority patent/WO2002084753A1/en
Application filed by M2N Inc filed Critical M2N Inc
Publication of AU2003223125A1 publication Critical patent/AU2003223125A1/en
Publication of AU2003223125A8 publication Critical patent/AU2003223125A8/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
AU2003223125A 2002-04-17 2003-04-17 Micro piezoelectric actuator and method for fabricating same Abandoned AU2003223125A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/KR2002/000701 WO2002084753A1 (en) 2001-04-17 2002-04-17 Micro piezoelectric actuator and method for fabricating same
AU2002307709 2002-04-17
PCT/KR2003/000785 WO2003089957A2 (en) 2002-04-17 2003-04-17 Micro piezoelectric actuator and method for fabricating same

Publications (2)

Publication Number Publication Date
AU2003223125A1 AU2003223125A1 (en) 2003-11-03
AU2003223125A8 true AU2003223125A8 (en) 2003-11-03

Family

ID=29244672

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003223125A Abandoned AU2003223125A1 (en) 2002-04-17 2003-04-17 Micro piezoelectric actuator and method for fabricating same

Country Status (3)

Country Link
KR (1) KR20040103977A (en)
AU (1) AU2003223125A1 (en)
WO (1) WO2003089957A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111697042A (en) * 2014-02-12 2020-09-22 三星显示有限公司 Display device

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4550653B2 (en) * 2005-04-15 2010-09-22 富士通株式会社 Micro movable element and optical switching device
DE102007027428A1 (en) * 2007-06-14 2008-12-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Component with a vibration element
DE102009026506A1 (en) 2009-05-27 2010-12-02 Robert Bosch Gmbh Micromechanical component and production method for a micromechanical component
WO2012003529A1 (en) * 2010-07-05 2012-01-12 Newsouth Innovations Pty Limited Piezo-electric based micro-electro-mechanical lens actuation system
DE102017200055A1 (en) * 2017-01-04 2018-07-05 Robert Bosch Gmbh MEMS sensor device and method for manufacturing a MEMS sensor device
CN109723945B (en) * 2019-01-10 2021-04-06 北京机械设备研究所 Precise pointing platform based on flexible parallelogram mechanism
WO2024261200A1 (en) 2023-06-20 2024-12-26 OQmented GmbH Mems device having a holding structure comprising a spring structure, inner frame structure and/or lever structure
DE102023116051A1 (en) * 2023-06-20 2024-12-24 OQmented GmbH MEMS DEVICE WITH A LEVER STRUCTURE

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
JP3552601B2 (en) * 1998-11-16 2004-08-11 日本ビクター株式会社 Optical deflector and display device using the same
GB2371119A (en) * 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111697042A (en) * 2014-02-12 2020-09-22 三星显示有限公司 Display device
CN111697042B (en) * 2014-02-12 2023-09-22 三星显示有限公司 display device

Also Published As

Publication number Publication date
AU2003223125A1 (en) 2003-11-03
WO2003089957A3 (en) 2003-12-04
WO2003089957A2 (en) 2003-10-30
KR20040103977A (en) 2004-12-09

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase