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AU2002241545A1 - Automated wafer handling with graphic user interface - Google Patents

Automated wafer handling with graphic user interface

Info

Publication number
AU2002241545A1
AU2002241545A1 AU2002241545A AU4154502A AU2002241545A1 AU 2002241545 A1 AU2002241545 A1 AU 2002241545A1 AU 2002241545 A AU2002241545 A AU 2002241545A AU 4154502 A AU4154502 A AU 4154502A AU 2002241545 A1 AU2002241545 A1 AU 2002241545A1
Authority
AU
Australia
Prior art keywords
user interface
graphic user
wafer handling
automated wafer
automated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002241545A
Inventor
Chen Chen Hsueh
Tom Kozub
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Emcore Corp
Original Assignee
Emcore Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Emcore Corp filed Critical Emcore Corp
Publication of AU2002241545A1 publication Critical patent/AU2002241545A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10P72/0612—
    • H10P72/3411—
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40099—Graphical user interface for robotics, visual robot user interface
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45032—Wafer manufacture; interlock, load-lock module
AU2002241545A 2000-12-07 2001-11-29 Automated wafer handling with graphic user interface Abandoned AU2002241545A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25176600P 2000-12-07 2000-12-07
US60/251,766 2000-12-07
PCT/US2001/045238 WO2002046864A2 (en) 2000-12-07 2001-11-29 Automated wafer handling with graphic user interface

Publications (1)

Publication Number Publication Date
AU2002241545A1 true AU2002241545A1 (en) 2002-06-18

Family

ID=22953315

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002241545A Abandoned AU2002241545A1 (en) 2000-12-07 2001-11-29 Automated wafer handling with graphic user interface

Country Status (3)

Country Link
US (1) US20020070983A1 (en)
AU (1) AU2002241545A1 (en)
WO (1) WO2002046864A2 (en)

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EP1419820A1 (en) * 2002-11-14 2004-05-19 F. Hoffmann-La Roche Ag Method, system and reaction vessel for processing a biological sample contained in a liquid
CN101390253B (en) 2004-10-01 2013-02-27 L.皮尔·德罗什蒙 Ceramic antenna module and manufacturing method thereof
JP4945561B2 (en) 2005-06-30 2012-06-06 デ，ロシェモント，エル．，ピエール Electrical component and method of manufacturing the same
US8821099B2 (en) 2005-07-11 2014-09-02 Brooks Automation, Inc. Load port module
US8354294B2 (en) 2006-01-24 2013-01-15 De Rochemont L Pierre Liquid chemical deposition apparatus and process and products therefrom
US9117859B2 (en) 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
JP5123690B2 (en) * 2008-02-27 2013-01-23 キヤノン株式会社 Screen data processing apparatus, screen data processing method, and computer program
US7959598B2 (en) 2008-08-20 2011-06-14 Asante Solutions, Inc. Infusion pump systems and methods
US8922347B1 (en) 2009-06-17 2014-12-30 L. Pierre de Rochemont R.F. energy collection circuit for wireless devices
US8952858B2 (en) 2009-06-17 2015-02-10 L. Pierre de Rochemont Frequency-selective dipole antennas
US8552708B2 (en) 2010-06-02 2013-10-08 L. Pierre de Rochemont Monolithic DC/DC power management module with surface FET
US9023493B2 (en) 2010-07-13 2015-05-05 L. Pierre de Rochemont Chemically complex ablative max-phase material and method of manufacture
JP6223828B2 (en) 2010-11-03 2017-11-01 デ，ロシェモント，エル．，ピエール Semiconductor chip carrier having monolithically integrated quantum dot device and manufacturing method thereof
US9561324B2 (en) 2013-07-19 2017-02-07 Bigfoot Biomedical, Inc. Infusion pump system and method
JP6121832B2 (en) * 2013-07-29 2017-04-26 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing apparatus, substrate processing method, and substrate processing system
EP3374905A1 (en) 2016-01-13 2018-09-19 Bigfoot Biomedical, Inc. User interface for diabetes management system
US10610643B2 (en) 2016-01-14 2020-04-07 Bigfoot Biomedical, Inc. Occlusion resolution in medication delivery devices, systems, and methods
WO2017124006A1 (en) 2016-01-14 2017-07-20 Bigfoot Biomedical, Inc. Adjusting insulin delivery rates
US12383166B2 (en) 2016-05-23 2025-08-12 Insulet Corporation Insulin delivery system and methods with risk-based set points
US10363374B2 (en) 2016-05-26 2019-07-30 Insulet Corporation Multi-dose drug delivery device
AU2017376111B2 (en) 2016-12-12 2023-02-02 Bigfoot Biomedical, Inc. Alarms and alerts for medication delivery devices and related systems and methods
EP3568862A1 (en) 2017-01-13 2019-11-20 Bigfoot Biomedical, Inc. System and method for adjusting insulin delivery
US10610644B2 (en) 2017-01-13 2020-04-07 Bigfoot Biomedical, Inc. Insulin delivery methods, systems and devices
US11027063B2 (en) 2017-01-13 2021-06-08 Bigfoot Biomedical, Inc. Insulin delivery methods, systems and devices
US10758675B2 (en) 2017-01-13 2020-09-01 Bigfoot Biomedical, Inc. System and method for adjusting insulin delivery
US10500334B2 (en) 2017-01-13 2019-12-10 Bigfoot Biomedical, Inc. System and method for adjusting insulin delivery
USD874471S1 (en) 2017-06-08 2020-02-04 Insulet Corporation Display screen with a graphical user interface
USD928199S1 (en) 2018-04-02 2021-08-17 Bigfoot Biomedical, Inc. Medication delivery device with icons
US11409276B2 (en) * 2018-08-17 2022-08-09 Michael Isakov Method and system for controlling robots within in an interactive arena and generating a virtual overlayed
USD920343S1 (en) 2019-01-09 2021-05-25 Bigfoot Biomedical, Inc. Display screen or portion thereof with graphical user interface associated with insulin delivery
USD977502S1 (en) 2020-06-09 2023-02-07 Insulet Corporation Display screen with graphical user interface
EP4264621A1 (en) 2020-12-18 2023-10-25 Insulet Corporation Scheduling of medicament bolus deliveries by a medicament delivery device at future dates and times with a computing device
US12514980B2 (en) 2021-06-30 2026-01-06 Insulet Corporation Adjustment of medicament delivery by a medicament delivery device based on menstrual cycle phase
US12521486B2 (en) 2021-07-16 2026-01-13 Insulet Corporation Method for modification of insulin delivery during pregnancy in automatic insulin delivery systems
CN114005768B (en) * 2021-10-29 2025-07-29 北京北方华创微电子装备有限公司 Semiconductor process equipment, trays and cassettes
KR20250129777A (en) 2023-01-06 2025-08-29 인슐렛 코포레이션 Automatically or manually initiated food bolus delivery with subsequent automatic safety constraint relief

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US5751581A (en) * 1995-11-13 1998-05-12 Advanced Micro Devices Material movement server
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US6128588A (en) * 1997-10-01 2000-10-03 Sony Corporation Integrated wafer fab time standard (machine tact) database
US6097887A (en) * 1997-10-27 2000-08-01 Kla-Tencor Corporation Software system and method for graphically building customized recipe flowcharts
US6470227B1 (en) * 1997-12-02 2002-10-22 Murali D. Rangachari Method and apparatus for automating a microelectric manufacturing process
US6122566A (en) * 1998-03-03 2000-09-19 Applied Materials Inc. Method and apparatus for sequencing wafers in a multiple chamber, semiconductor wafer processing system
US6728590B1 (en) * 1999-07-14 2004-04-27 Nec Electronics, Inc. Identifying wafer fabrication system impacts resulting from specified actions
US6560507B1 (en) * 2000-10-20 2003-05-06 Novellus Systems Inc. Module classification approach for moving semiconductor wafers in a wafer processing system

Also Published As

Publication number Publication date
WO2002046864A2 (en) 2002-06-13
WO2002046864A9 (en) 2003-04-17
US20020070983A1 (en) 2002-06-13
WO2002046864A3 (en) 2002-09-06

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