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AU2002220975A1 - Material sensor with protective layer - Google Patents

Material sensor with protective layer

Info

Publication number
AU2002220975A1
AU2002220975A1 AU2002220975A AU2097502A AU2002220975A1 AU 2002220975 A1 AU2002220975 A1 AU 2002220975A1 AU 2002220975 A AU2002220975 A AU 2002220975A AU 2097502 A AU2097502 A AU 2097502A AU 2002220975 A1 AU2002220975 A1 AU 2002220975A1
Authority
AU
Australia
Prior art keywords
protective layer
material sensor
sensor
protective
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002220975A
Inventor
Mark Hornung
Rene Hummel
Felix Mayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensirion AG
Original Assignee
Sensirion AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensirion AG filed Critical Sensirion AG
Publication of AU2002220975A1 publication Critical patent/AU2002220975A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AU2002220975A 2000-12-15 2001-12-10 Material sensor with protective layer Abandoned AU2002220975A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH2454/00 2000-12-15
CH24542000 2000-12-15
PCT/IB2001/002393 WO2002048702A2 (en) 2000-12-15 2001-12-10 Material sensor with protective layer

Publications (1)

Publication Number Publication Date
AU2002220975A1 true AU2002220975A1 (en) 2002-06-24

Family

ID=4569357

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002220975A Abandoned AU2002220975A1 (en) 2000-12-15 2001-12-10 Material sensor with protective layer

Country Status (2)

Country Link
AU (1) AU2002220975A1 (en)
WO (1) WO2002048702A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8110906B2 (en) 2007-01-23 2012-02-07 Infineon Technologies Ag Semiconductor device including isolation layer
US7923823B2 (en) 2007-01-23 2011-04-12 Infineon Technologies Ag Semiconductor device with parylene coating
DE102009004393A1 (en) * 2009-01-08 2010-11-11 Eads Deutschland Gmbh Accumulating humidity sensor
EP2287596B1 (en) * 2009-08-11 2014-03-19 Sensirion AG Sensor with glob-top and method for manufacturing the same
DE102013204663A1 (en) * 2013-03-18 2014-09-18 Robert Bosch Gmbh Humidity sensor for determining a humidity of a measuring medium in an environment of the humidity sensor and method for protecting a humidity sensor
FR3041758B1 (en) * 2015-09-29 2017-09-15 Commissariat Energie Atomique DEVICE AND METHOD FOR QUANTIFYING A GASEOUS ENTITY FLOW WITHIN A POROUS MEDIUM

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3270451D1 (en) * 1981-09-28 1986-05-15 Hitachi Ltd Humidity sensor and method for preparing a humidity sensor
GB2178539B (en) * 1985-06-26 1989-02-08 Eps Group Limited Improvements in or relating to a humidity sensor
US4816748A (en) * 1986-08-28 1989-03-28 Nippon Mining Co., Ltd. Electronic thermohygrometer with square-wave pulse signal generator
US5798556A (en) * 1996-03-25 1998-08-25 Motorola, Inc. Sensor and method of fabrication

Also Published As

Publication number Publication date
WO2002048702A2 (en) 2002-06-20
WO2002048702A3 (en) 2002-10-17

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