[go: up one dir, main page]

AU2001259568A1 - Filters employing both acidic polymers and physical-absorption media - Google Patents

Filters employing both acidic polymers and physical-absorption media

Info

Publication number
AU2001259568A1
AU2001259568A1 AU2001259568A AU5956801A AU2001259568A1 AU 2001259568 A1 AU2001259568 A1 AU 2001259568A1 AU 2001259568 A AU2001259568 A AU 2001259568A AU 5956801 A AU5956801 A AU 5956801A AU 2001259568 A1 AU2001259568 A1 AU 2001259568A1
Authority
AU
Australia
Prior art keywords
physical
acidic polymers
absorption media
filters employing
filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001259568A
Inventor
William M. Goodwin
Anatoly Grayfer
Devon Kinkead
Oleg P. Kishkovich
David Ruede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Extraction Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Extraction Systems Inc filed Critical Extraction Systems Inc
Publication of AU2001259568A1 publication Critical patent/AU2001259568A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/20—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbon; comprising carbon obtained by carbonising processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/22—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising organic material
    • B01J20/26—Synthetic macromolecular compounds
    • B01J20/261—Synthetic macromolecular compounds obtained by reactions only involving carbon to carbon unsaturated bonds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/20—Organic adsorbents
    • B01D2253/202—Polymeric adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/308—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/406—Ammonia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B01D2259/4009—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating using hot gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0454—Controlling adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S95/00—Gas separation: processes
    • Y10S95/90—Solid sorbent
    • Y10S95/901—Activated carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Filtering Materials (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Control Or Security For Electrophotography (AREA)
AU2001259568A 2000-05-05 2001-05-04 Filters employing both acidic polymers and physical-absorption media Abandoned AU2001259568A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US20192800P 2000-05-05 2000-05-05
US60/201,928 2000-05-05
US22524800P 2000-08-15 2000-08-15
US60/225,248 2000-08-15
PCT/US2001/014655 WO2001085308A2 (en) 2000-05-05 2001-05-04 Filters employing both acidic polymers and physical-absorption media

Publications (1)

Publication Number Publication Date
AU2001259568A1 true AU2001259568A1 (en) 2001-11-20

Family

ID=26897215

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001259568A Abandoned AU2001259568A1 (en) 2000-05-05 2001-05-04 Filters employing both acidic polymers and physical-absorption media

Country Status (7)

Country Link
US (4) US6740147B2 (en)
EP (2) EP2269710A1 (en)
JP (2) JP5595627B2 (en)
KR (1) KR100825146B1 (en)
AU (1) AU2001259568A1 (en)
CA (1) CA2406703A1 (en)
WO (1) WO2001085308A2 (en)

Families Citing this family (83)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000010687A1 (en) * 1998-08-20 2000-03-02 Extraction Systems, Inc. Filters employing porous strongly acidic polymers
WO2001085308A2 (en) 2000-05-05 2001-11-15 Extraction Systems, Inc. Filters employing both acidic polymers and physical-absorption media
US7540901B2 (en) 2000-05-05 2009-06-02 Entegris, Inc. Filters employing both acidic polymers and physical-adsorption media
US6533847B2 (en) * 2001-02-13 2003-03-18 Donaldson Company, Inc. Adsorption apparatus
EP1247558A1 (en) * 2001-04-07 2002-10-09 3M Innovative Properties Company A combination filter for filtering fluids
JP2003001028A (en) * 2001-06-22 2003-01-07 Bridgestone Corp Filter
US7092077B2 (en) * 2001-09-24 2006-08-15 Entegris, Inc. System and method for monitoring contamination
US20040023419A1 (en) * 2001-09-24 2004-02-05 Extraction Systems, Inc System and method for monitoring contamination
JP2003286012A (en) * 2002-03-28 2003-10-07 Toshiba Corp Gas recycle system and method, gas insulation instrument, sulfur hexafluoride supply system and power industry system
US7008209B2 (en) * 2002-07-03 2006-03-07 Therics, Llc Apparatus, systems and methods for use in three-dimensional printing
US7341618B2 (en) * 2002-10-24 2008-03-11 Georgia Tech Research Corporation Filters and methods of making and using the same
US7105037B2 (en) * 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
FI20031207A7 (en) * 2003-05-13 2005-02-08 Oy Hydrocell Ltd Filtration method and filter device
US6905536B2 (en) * 2003-06-11 2005-06-14 Arvin Technologies, Inc. Increased surface area hydrocarbon adsorber
US7132011B2 (en) * 2003-09-02 2006-11-07 Entegris, Inc. Reactive gas filter
EP1713556A4 (en) * 2003-10-17 2008-12-17 Kx Technologies Llc Tangential in-line air filter
US7430893B2 (en) * 2003-12-03 2008-10-07 Entegris, Inc. Systems and methods for detecting contaminants
US20050120775A1 (en) * 2003-12-03 2005-06-09 Extraction Systems, Inc. Systems and methods for detecting contaminants
US20050217484A1 (en) * 2004-01-06 2005-10-06 Claude Bourgault Method and portable apparatus for cooling and heating structures
WO2006083290A2 (en) * 2004-06-07 2006-08-10 Entegris, Inc. System and method for removing contaminants
US7314506B2 (en) * 2004-10-25 2008-01-01 Matheson Tri-Gas, Inc. Fluid purification system with low temperature purifier
US7400383B2 (en) * 2005-04-04 2008-07-15 Entegris, Inc. Environmental control in a reticle SMIF pod
US20060249027A1 (en) * 2005-05-05 2006-11-09 Adolphsen Tony L Rigid adsorption apparatus, and methods
US7850766B1 (en) * 2005-08-31 2010-12-14 Cocona, Inc. Systems and methods for preferentially heating active particles and articles produced thereof
JP4828198B2 (en) * 2005-10-06 2011-11-30 サンデン株式会社 Air purification filter and manufacturing method thereof
US7789949B2 (en) * 2005-11-23 2010-09-07 Integrated Sensing Systems, Inc. Getter device
US7628845B2 (en) * 2006-03-10 2009-12-08 Macronix International Co., Ltd. Filtering device and filtering method thereof and semiconductor fabricating method
AU2007238304A1 (en) * 2006-04-10 2007-10-25 Meadwestvaco Corporation Control of vapor emissions from gasoline stations
US20070277536A1 (en) * 2006-05-30 2007-12-06 Johnson Coltrols Technology Company Filter for vapor compression systems
CN101506087B (en) 2006-06-19 2011-09-21 诚实公司 System for purging reticle storage
TWI417130B (en) 2006-07-13 2013-12-01 Entegris Inc Filtering system
JP4965953B2 (en) * 2006-09-29 2012-07-04 株式会社東芝 Method for handling polysilazane or polysilazane solution, method for producing polysilazane solution, and semiconductor device
EP2122014A4 (en) * 2007-02-28 2014-09-17 Entegris Inc Purge system for a substrate container
US20080226534A1 (en) * 2007-03-13 2008-09-18 Gidumal Rajan H Adsorbent Articles for Disk Drives
WO2009012189A2 (en) * 2007-07-13 2009-01-22 Donaldson Company, Inc. Media for removal of organic compounds
WO2009091367A1 (en) * 2008-01-17 2009-07-23 Carrier Corporation Filters for removal of volatile siloxanes and lifetime extension of photcatalytic devices
US7572976B1 (en) * 2008-02-06 2009-08-11 Victor Merrill Quick connect electrical box
US20090211453A1 (en) * 2008-02-26 2009-08-27 Nassivera Terry W Filtration Media for the Removal of Basic Molecular Contaminants for Use in a Clean Environment
US8147592B2 (en) * 2008-03-14 2012-04-03 The Boeing Company Using a metallocene to remove oxygen from a stream of gas
US8007555B2 (en) * 2008-03-30 2011-08-30 Lack Nicholas L Filter with multiple sections of different media
JP2012506799A (en) * 2008-10-31 2012-03-22 ビーエーエスエフ ソシエタス・ヨーロピア Ion exchanger molded product and method for producing the same
US8182589B2 (en) * 2008-12-05 2012-05-22 Matheson Tri-Gas, Inc. Acetylene process gas purification methods and systems
TWI515035B (en) * 2009-03-02 2016-01-01 科邁實業有限公司 Regenerable pleated filter medium
US8157892B2 (en) 2010-05-17 2012-04-17 Enverid Systems, Inc. Method and system for improved-efficiency air-conditioning
US8409337B1 (en) 2010-06-08 2013-04-02 Aaf-Mcquay Inc. Air handling filtration equipment with adjustable media bed and method of use
CA2706495A1 (en) * 2010-06-08 2011-12-08 Alan B. Morison Particulate scavenger medium canister
US8518166B2 (en) * 2010-09-13 2013-08-27 Atomic Energy Council-Institute Of Nuclear Energy Research Air filtering system capable of enhancing inspection convenience
US20120145005A1 (en) * 2010-12-10 2012-06-14 General Electric Company New panel filter augmentation technique for particulate capture gains
US8690999B2 (en) 2011-02-09 2014-04-08 Enverid Systems, Inc. Modular, high-throughput air treatment system
JP2014522298A (en) 2011-05-17 2014-09-04 エンベリッド システムズ， インコーポレイテッド Sorbents for the reduction of carbon dioxide from indoor air
JP2015500452A (en) 2011-11-17 2015-01-05 エンベリッド システムズ， インコーポレイテッド Method and system for regulating air in a closed environment with a distributed air circulation system
CN104254741B (en) 2012-01-10 2017-07-07 恩弗里德系统公司 For the method and system that the air quality and energy that manage in air-conditioning system are used
WO2013177290A2 (en) 2012-05-22 2013-11-28 Enverid Systems, Inc. Efficient use of adsorbents for indoor air scrubbing
JP2015528743A (en) 2012-07-18 2015-10-01 エンベリッド システムズ， インコーポレイテッド Regenerated absorbent for indoor air purification
WO2014047632A1 (en) 2012-09-24 2014-03-27 Enverid Systems, Inc. Air handling system with integrated air treatment
US11428832B2 (en) 2012-11-12 2022-08-30 Image Insight, Inc. Crowd-sourced hardware calibration
CN107744714A (en) 2012-11-15 2018-03-02 恩沃德系统公司 Method and system suitable for reducing the pernicious gas room air
JP2014217811A (en) * 2013-05-09 2014-11-20 清水建設株式会社 Cleaning filter device
SG11201601251RA (en) * 2013-09-06 2016-03-30 Entegris Inc Liquid-free sample traps and analytical method for measuring trace level acidic and basic amc
US9919257B2 (en) 2013-09-17 2018-03-20 Enverid Systems, Inc. Systems and methods for efficient heating of sorbents in an indoor air scrubber
WO2015143133A1 (en) 2014-03-19 2015-09-24 Entegris, Inc. System and method for removing airborne molecular contaminants from gas streams
DE102014004692A1 (en) * 2014-03-31 2015-10-15 Voxeljet Ag Method and apparatus for 3D printing with conditioned process control
CN104759189A (en) 2015-03-12 2015-07-08 同方威视技术股份有限公司 Sustainably-working gas purification apparatus in ion mobility spectrometer
CN107708838A (en) 2015-05-11 2018-02-16 恩弗里德系统公司 Reduce the method and system of room air excessive gas
WO2017035254A1 (en) 2015-08-24 2017-03-02 Enverid Systems, Inc. Scrubber for hvac system
WO2017184780A1 (en) 2016-04-19 2017-10-26 Enverid Systems, Inc. Systems and methods for closed-loop heating and regeneration of sorbents
KR102283479B1 (en) * 2016-04-28 2021-07-29 엔테그리스, 아이엔씨. Airborne Molecular Contamination Filter Cartridge System With Combustible Filter Cartridge and Reusable Frame
US10278656B2 (en) 2016-05-09 2019-05-07 Image Insight, Inc. Medical devices for diagnostic imaging
TWI822658B (en) * 2016-09-02 2023-11-21 日商富士軟片股份有限公司 Method for purifying organic solvent and purification device of organic solvent
US11110387B2 (en) 2016-11-10 2021-09-07 Enverid Systems, Inc. Low noise, ceiling mounted indoor air scrubber
CN108159840A (en) * 2016-12-07 2018-06-15 杰智环境科技股份有限公司 Rotating wheel structure with better structural strength
US10898834B2 (en) 2017-01-13 2021-01-26 Gvs Filtration Inc. Method of manufacturing a fluid filter
CN107081039A (en) * 2017-06-14 2017-08-22 上海安居乐环保科技股份有限公司 A kind of new VOCs Adsorption Concentrations runner
CN109141973B (en) * 2017-06-28 2021-09-21 西安市宇驰检测技术有限公司 Device and method for collecting acid mist in atmosphere of fixed pollution source
GB201802917D0 (en) 2018-02-22 2018-04-11 Micromass Ltd Charge detection mass spectrometry
EP3765481A2 (en) * 2018-03-15 2021-01-20 Klawego GmbH & Co. KG Composite materials for the depletion of contaminants from solutions
CN108956750B (en) * 2018-06-01 2021-07-27 清华大学深圳研究生院 Ion mobility spectrometry device working under low-pressure condition
CN108854281B (en) * 2018-07-03 2020-11-17 江苏爱科固体废物处理有限公司 Environment-friendly air suction device for chemical workshop and using method of environment-friendly air suction device
DE102018119408A1 (en) * 2018-08-09 2020-02-13 Innovative Sensor Technology ISTAG Filters for a moisture sensor
DE102018128963A1 (en) * 2018-11-19 2020-05-20 Mann+Hummel Gmbh Filter body, filter element and filter arrangement
EP3897924A4 (en) 2018-12-20 2023-01-04 Entegris, Inc. Active wet scrubbing filtration system
EP4074739A4 (en) 2019-12-09 2023-06-14 FUJIFILM Corporation Treatment liquid and pattern forming method
US11842891B2 (en) 2020-04-09 2023-12-12 Waters Technologies Corporation Ion detector

Family Cites Families (108)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2430861A (en) * 1944-02-24 1947-11-18 John H Carpenter Gas purification method
US3019127A (en) 1957-10-07 1962-01-30 American Air Filter Co Filtering medium and method of making the same
US4224415A (en) 1958-07-18 1980-09-23 Rohm And Haas Company Polymerization processes and products therefrom
US3409691A (en) 1966-02-01 1968-11-05 Dow Chemical Co Porous cation exchange resins as selective sorbents in organic systems
US3607706A (en) 1967-08-04 1971-09-21 Ionics Method of making stable laminated cation-exchange membranes
USRE29410E (en) 1970-05-23 1977-09-20 C. Weinberger & Co., Ltd. Process for manufacturing of deodorizing air filters
CA957214A (en) 1970-12-24 1974-11-05 Teijin Limited Conjugate fiber
US3961920A (en) * 1974-01-24 1976-06-08 Humphrey Gilbert Gas adsorber cell test sampler
JPS568901Y2 (en) 1975-07-23 1981-02-26
US4135896A (en) * 1975-12-11 1979-01-23 Cvi Corporation Gas purifier having rechargeable adsorber filter with removeable rechargeable sample canister
US4055075A (en) * 1976-04-08 1977-10-25 Flanders Filters, Inc. Method and apparatus for the leak testing of filters
JPS5414478A (en) 1977-07-04 1979-02-02 Kurashiki Boseki Kk Method of uniformly pushing powdery substance to porous material
US4313832A (en) 1980-06-12 1982-02-02 Rohm And Haas Company Method for treatment of aqueous solutions with ion exchange fibers
US4322230A (en) 1980-09-08 1982-03-30 Donaldson Company, Inc. Unitized gas-particulate filter and housing
JPS6071830A (en) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd Recombinant local environmental control room
IT1179369B (en) 1984-05-15 1987-09-16 Ital Idee Srl MULTIPLE FILTER GROUP, ESPECIALLY FOR VENTILATION AND AIR CONDITIONING SYSTEMS FOR MOTOR VEHICLES AND CLOSED ENVIRONMENTS, EQUIPPED WITH MEANS OF CONTROL OF EFFICIENCY
US4904343A (en) 1985-04-23 1990-02-27 American Cyanamid Company Non-woven activated carbon fabric
US5133864A (en) 1985-09-16 1992-07-28 The Dow Chemical Company Filters employing particulate porous polymers
JPS63119233A (en) * 1986-11-07 1988-05-23 Hitachi Ltd X-ray transfer device
AU598606B2 (en) 1986-11-27 1990-06-28 Unitika Ltd. Adsorptive fiber sheet
JPH0338212Y2 (en) 1987-02-03 1991-08-13
US4760423A (en) * 1987-03-12 1988-07-26 Savin Corporation Apparatus and method for reducing hydrocarbon emissions from a liquid-based electrophotographic copying machine
US5143552A (en) * 1988-03-09 1992-09-01 Tokyo Electron Limited Coating equipment
EP0335034A1 (en) 1988-03-30 1989-10-04 Uop An integrated process for the removal of sulfur compounds from fluid streams
DE3813563C2 (en) 1988-04-22 2002-01-17 Mhb Filtration Gmbh & Co Kg Adsorption filter with high air permeability
JPH0663333B2 (en) 1988-06-09 1994-08-22 四国化成工業株式会社 Surface finishing material for trowel coating and its manufacturing method
JPH0226612A (en) * 1988-07-18 1990-01-29 Shin Etsu Handotai Co Ltd Method for capturing trace of ion in gas, method for purifying gas, and filter equipment for gas purification
US5023654A (en) * 1988-10-31 1991-06-11 Brother Kogyo Kabushiki Kaisha Thermal fixing device for image recording apparatus
JP2736662B2 (en) * 1988-11-04 1998-04-02 東芝セラミックス株式会社 Semiconductor wafer fogging prevention device
US5582865A (en) 1988-12-12 1996-12-10 Extraction Systems, Inc. Non-woven filter composite
US5626820A (en) 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
IT1229757B (en) 1989-05-18 1991-09-10 Fabrizio Mariani AIR CLEANING FILTER, PARTICULARLY DESIGNED FOR OFFICES, HOUSES AND INDUSTRIAL ENVIRONMENTS.
US4946480A (en) * 1989-09-27 1990-08-07 Hauville Francois P Filter apparatus with improved filtration and saturation level detector
US5130743A (en) * 1989-10-23 1992-07-14 Brother Kogyo Kabushiki Kaisha Image forming apparatus having means for indicating timing of heat-fixing filter
US5204055A (en) 1989-12-08 1993-04-20 Massachusetts Institute Of Technology Three-dimensional printing techniques
US5387380A (en) 1989-12-08 1995-02-07 Massachusetts Institute Of Technology Three-dimensional printing techniques
JP2536957B2 (en) * 1990-08-31 1996-09-25 日立プラント建設株式会社 Clean room
US5219464A (en) * 1990-10-09 1993-06-15 Tokyo Electron Limited Clean air apparatus
US5181819A (en) * 1990-10-09 1993-01-26 Tokyo Electron Sagami Limited Apparatus for processing semiconductors
US5328758A (en) 1991-10-11 1994-07-12 Minnesota Mining And Manufacturing Company Particle-loaded nonwoven fibrous article for separations and purifications
US5166530A (en) 1991-12-20 1992-11-24 General Signal Corporation Illuminator for microlithographic integrated circuit manufacture
US5200554A (en) 1992-01-21 1993-04-06 Nasman Jan Anders H Bisphosphonic acid derivatives and their use
JPH0824534B2 (en) 1992-03-02 1996-03-13 カンバーランド・パツキング・コーポレーシヨン Method for producing spread such as margarine having natural butter flavor
US5302354A (en) * 1992-06-26 1994-04-12 Pall Corporation Filtration device
US5430303A (en) 1992-07-01 1995-07-04 Nikon Corporation Exposure apparatus
US5306321A (en) 1992-07-07 1994-04-26 Donaldson Company, Inc. Layered air filter medium having improved efficiency and pleatability
JPH0763578B2 (en) 1992-08-04 1995-07-12 インターナショナル・ビジネス・マシーンズ・コーポレイション Method for reducing cyclic alkylene carbonate by flushing
JP3238495B2 (en) * 1992-11-02 2001-12-17 日本原子力研究所 Purification method of trace contaminated air in clean room
JPH06198123A (en) 1992-11-05 1994-07-19 Toshiba Eng & Constr Co Ltd Method for purifying gas and filter for gas filtration
DE69316027T2 (en) 1992-11-18 1998-05-14 Hoechst Celanese Corp METHOD OF MANUFACTURING A FIBROUS STRUCTURE WITH IMMOBILIZED PARTICULATE MATERIAL
JPH06154545A (en) * 1992-11-18 1994-06-03 Sekisui Plastics Co Ltd Deodorizer
US5399377A (en) 1992-12-31 1995-03-21 The Board Of Trustees Of The University Of Illinois Borazine oligomers and composite materials including boron nitride and methods of making the same
US5290345A (en) 1993-01-13 1994-03-01 Donaldson Company, Inc. Refillable gas adsorption bed assembly and counterflow adsorber module
EP0743089B1 (en) 1993-01-25 2000-05-17 Daikin Industries, Limited Porous polytetrafluoroethylene film
US5514196A (en) * 1993-02-04 1996-05-07 Tokyo Electron Limited Air cleaning apparatus
JP3334929B2 (en) * 1993-02-04 2002-10-15 東京エレクトロン株式会社 Heat treatment equipment
KR100242530B1 (en) * 1993-05-18 2000-02-01 히가시 데쓰로 Filter apparatus
US5647356A (en) 1993-07-28 1997-07-15 Donaldson Company, Inc. Respirator cartridge with sealing fit test structure and method of use
JP3448670B2 (en) 1993-09-02 2003-09-22 株式会社ニコン Exposure apparatus and element manufacturing method
JP3489891B2 (en) * 1993-11-30 2004-01-26 野村マイクロ・サイエンス株式会社 Multifunctional air filter and air circulation type clean unit incorporating the filter
US5772738A (en) * 1993-11-30 1998-06-30 Purex Co., Ltd. Multifunctional air filter and air-circulating clean unit with the same incorporated therein
US5607647A (en) 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
US5462485A (en) 1993-12-03 1995-10-31 Extraction Systems, Inc. Controlling air quality
US5453313A (en) * 1994-01-26 1995-09-26 Environmental, L.L.C. Elastomeric polysulfide composites and method
DE4407149B4 (en) * 1994-03-04 2006-06-29 Mhb Filtration Gmbh & Co. Kg Method for producing a multilayer adsorption filter layer
SE509743C2 (en) 1994-06-17 1999-03-01 Bluecher Hasso Von Adsorptionsfilterskikt
SE515506C2 (en) 1994-06-17 2001-08-20 Mhb Filtration Gmbh & Co Kg Odor filter for ventilation outlet hoods
US5685895A (en) 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus
US5675752A (en) 1994-09-15 1997-10-07 Sony Corporation Interactive applications generator for an interactive presentation environment
TW288051B (en) 1994-11-22 1996-10-11 Ebara Corp
JPH08168628A (en) 1994-11-29 1996-07-02 Piyuaretsukusu:Kk Polyfunctional air filter and air circulating clean device having filter incorporated therein
US5856198A (en) 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
SE9501369D0 (en) * 1995-04-12 1995-04-12 Curt Lindhe Konsult & Foervalt Multiple filter unit
JP3346680B2 (en) 1995-05-11 2002-11-18 株式会社西部技研 Adsorbent for moisture exchange
US5833726A (en) 1995-05-26 1998-11-10 Extraction System, Inc. Storing substrates between process steps within a processing facility
US5834114A (en) 1995-05-31 1998-11-10 The Board Of Trustees Of The University Of Illinois Coated absorbent fibers
WO1997041941A1 (en) 1996-05-03 1997-11-13 Mhb Filtration Gmbh & Co. Kg Filtering material and process for the production thereof, and adsorption filter produced from said filtering material
KR100197900B1 (en) * 1996-07-24 1999-06-15 윤종용 Air Conditioning System for Semiconductor Clean Room
US5743927A (en) 1996-07-31 1998-04-28 Donaldson Company, Inc. Air filter element; assembly; and, method
JPH10165744A (en) 1996-12-04 1998-06-23 Takasago Thermal Eng Co Ltd Gaseous organic impurity treatment system
JPH10165730A (en) 1996-12-16 1998-06-23 Takasago Thermal Eng Co Ltd Gaseous impurity adsorption filter
JPH10192624A (en) 1996-12-27 1998-07-28 Ebara Corp Pleats air filter of combined film materials of different types
JP3552140B2 (en) * 1997-01-31 2004-08-11 株式会社荏原製作所 Gas cleaning method and apparatus
JPH10230117A (en) * 1997-02-18 1998-09-02 Ebara Corp Chemical filter device and its control method
US6096267A (en) * 1997-02-28 2000-08-01 Extraction Systems, Inc. System for detecting base contaminants in air
US5928792A (en) 1997-05-01 1999-07-27 Millipore Corporation Process for making surface modified porous membrane with perfluorocarbon copolymer
US6033573A (en) 1997-05-29 2000-03-07 The United States Of America As Represented By The Secretary Of Agriculture Activated nutshell carbons from agricultural waste
US5964927A (en) * 1997-07-11 1999-10-12 Donaldson Company, Inc. Adsorption apparatus
US6056805A (en) 1997-08-15 2000-05-02 Guardian Environmental Technologies, Inc. Method and apparatus for the absorption of non-polar organic molecules on hydrocarbon block copolymers
JP3342838B2 (en) * 1997-09-22 2002-11-11 東京エレクトロン株式会社 Processing device and processing method
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
US6013821A (en) 1998-06-25 2000-01-11 Abbott Laboratories Removal of silylated compounds from solvent and gas waste streams
CA2296477A1 (en) 1998-08-05 2000-02-05 Toray Industries, Inc. Chemical filter unit and gas cleaning system
WO2000010687A1 (en) 1998-08-20 2000-03-02 Extraction Systems, Inc. Filters employing porous strongly acidic polymers
EP1402943B1 (en) 1998-08-20 2013-04-10 Entegris, Inc. Filters employing porous strongly acidic polymers
DE19844167A1 (en) 1998-09-25 2000-04-06 Ticona Gmbh Activated carbon filter
WO2000025896A1 (en) 1998-11-03 2000-05-11 Donaldson Company, Inc. Gas chemical filter having compression mechanism; and methods
JP2980124B1 (en) * 1998-11-26 1999-11-22 日本電気株式会社 Chemical filter and its replacement determination method, and gas purification device
DE19859788C1 (en) * 1998-12-23 2000-03-23 Draeger Sicherheitstech Gmbh Apparatus for monitoring the effectiveness of a gas mask comprises comparing a range of pollution readings rather than relying on a calibrated sensor
US6207460B1 (en) * 1999-01-14 2001-03-27 Extraction Systems, Inc. Detection of base contaminants in gas samples
WO2001085308A2 (en) 2000-05-05 2001-11-15 Extraction Systems, Inc. Filters employing both acidic polymers and physical-absorption media
US7540901B2 (en) 2000-05-05 2009-06-02 Entegris, Inc. Filters employing both acidic polymers and physical-adsorption media
JP2001317000A (en) 2000-05-08 2001-11-16 Osaka Gas Co Ltd Activated carbon-containing paper and air filter
AU2001266998A1 (en) 2000-06-23 2002-01-08 Honeywell International, Inc. Method to restore hydrophobicity in dielectric films and materials
US6533847B2 (en) 2001-02-13 2003-03-18 Donaldson Company, Inc. Adsorption apparatus
US7264648B1 (en) 2003-06-19 2007-09-04 Applied Filter Technology, Inc. Removing siloxanes from a gas using a segmented filtration system customized to the gas composition
US7132011B2 (en) 2003-09-02 2006-11-07 Entegris, Inc. Reactive gas filter
TWI417130B (en) 2006-07-13 2013-12-01 Entegris Inc Filtering system

Also Published As

Publication number Publication date
US6761753B2 (en) 2004-07-13
US7014693B2 (en) 2006-03-21
WO2001085308A2 (en) 2001-11-15
JP2013150979A (en) 2013-08-08
JP5595627B2 (en) 2014-09-24
US20020178923A1 (en) 2002-12-05
WO2001085308A3 (en) 2003-09-12
KR20030001471A (en) 2003-01-06
US6740147B2 (en) 2004-05-25
USRE44536E1 (en) 2013-10-15
US20020078828A1 (en) 2002-06-27
KR100825146B1 (en) 2008-04-24
EP1357998A2 (en) 2003-11-05
CA2406703A1 (en) 2001-11-15
JP2003533339A (en) 2003-11-11
EP1357998B1 (en) 2014-12-03
EP2269710A1 (en) 2011-01-05
US20050051030A1 (en) 2005-03-10
WO2001085308A8 (en) 2002-09-06

Similar Documents

Publication Publication Date Title
AU2001259568A1 (en) Filters employing both acidic polymers and physical-absorption media
AU4474700A (en) Filter media
AU2001275441A1 (en) Filter arrangement and methods
AU2001234581A1 (en) Connected audio and other media objects
AU2001280665A1 (en) Media return system
AU2001255653A1 (en) Air filtration device
AU2002221933A1 (en) Filter element
AU2001284988A1 (en) Filter construction for disk drives, and use
AU2001293090A1 (en) Static filtration media vessels
AU1999900A (en) Deep media filter
AUPR216100A0 (en) Porous polymers
AU2001272509A1 (en) Filter
GB2349104B (en) Filter media configuration
GB0010264D0 (en) Media validation
AU2001285032A1 (en) Composite polymer blast media
AU4221401A (en) Filter silencer
AU2001241085A1 (en) Novel leukapheretic filter
AU2001271708A1 (en) Mechanical signal filter
AU2001293908A1 (en) Filtering device with several filtering media and bag system comprising same
GB0104748D0 (en) Improved filter media
AU2001231741A1 (en) Filter element
AU2001244361A1 (en) Magnetic filter
AU2001274291A1 (en) Filter assemblies
AU2001254849A1 (en) Filtering device
AU7431500A (en) Filtration media and the manufacture thereof