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AU2001245938A1 - Method and apparatus for controlling power delivered to a multiple segment electrode - Google Patents

Method and apparatus for controlling power delivered to a multiple segment electrode

Info

Publication number
AU2001245938A1
AU2001245938A1 AU2001245938A AU4593801A AU2001245938A1 AU 2001245938 A1 AU2001245938 A1 AU 2001245938A1 AU 2001245938 A AU2001245938 A AU 2001245938A AU 4593801 A AU4593801 A AU 4593801A AU 2001245938 A1 AU2001245938 A1 AU 2001245938A1
Authority
AU
Australia
Prior art keywords
controlling power
power delivered
segment electrode
multiple segment
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001245938A
Inventor
Richard Parsons
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2001245938A1 publication Critical patent/AU2001245938A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
AU2001245938A 2000-03-28 2001-03-23 Method and apparatus for controlling power delivered to a multiple segment electrode Abandoned AU2001245938A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19250800P 2000-03-28 2000-03-28
US60192508 2000-03-28
PCT/US2001/009199 WO2001073814A2 (en) 2000-03-28 2001-03-23 Method and apparatus for controlling power delivered to a multiple segment electrode

Publications (1)

Publication Number Publication Date
AU2001245938A1 true AU2001245938A1 (en) 2001-10-08

Family

ID=22709959

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001245938A Abandoned AU2001245938A1 (en) 2000-03-28 2001-03-23 Method and apparatus for controlling power delivered to a multiple segment electrode

Country Status (5)

Country Link
US (1) US6884635B2 (en)
JP (1) JP4718093B2 (en)
AU (1) AU2001245938A1 (en)
TW (1) TW495793B (en)
WO (1) WO2001073814A2 (en)

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Also Published As

Publication number Publication date
WO2001073814A3 (en) 2002-06-27
TW495793B (en) 2002-07-21
JP2003529216A (en) 2003-09-30
JP4718093B2 (en) 2011-07-06
US20030052085A1 (en) 2003-03-20
WO2001073814A2 (en) 2001-10-04
US6884635B2 (en) 2005-04-26

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