[go: up one dir, main page]

ATE97515T1 - METHOD AND DEVICE FOR PROCESSING SOLID SURFACES BY PARTICLE Bombardment. - Google Patents

METHOD AND DEVICE FOR PROCESSING SOLID SURFACES BY PARTICLE Bombardment.

Info

Publication number
ATE97515T1
ATE97515T1 AT88902396T AT88902396T ATE97515T1 AT E97515 T1 ATE97515 T1 AT E97515T1 AT 88902396 T AT88902396 T AT 88902396T AT 88902396 T AT88902396 T AT 88902396T AT E97515 T1 ATE97515 T1 AT E97515T1
Authority
AT
Austria
Prior art keywords
particle bombardment
solid surfaces
processing solid
processing
bombardment
Prior art date
Application number
AT88902396T
Other languages
German (de)
Inventor
Hans Professor Dr Rer Oechsner
Original Assignee
Hans Professor Dr Rer Oechsner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19873708717 external-priority patent/DE3708717A1/en
Application filed by Hans Professor Dr Rer Oechsner filed Critical Hans Professor Dr Rer Oechsner
Application granted granted Critical
Publication of ATE97515T1 publication Critical patent/ATE97515T1/en

Links

AT88902396T 1987-03-18 1988-03-16 METHOD AND DEVICE FOR PROCESSING SOLID SURFACES BY PARTICLE Bombardment. ATE97515T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19873708717 DE3708717A1 (en) 1987-03-18 1987-03-18 METHOD AND DEVICE FOR PROCESSING SOLID BODY SURFACES BY PARTICLE Bombardment
EP88902396A EP0349556B1 (en) 1987-03-18 1988-03-16 Process and device for the surface treatment of semiconductors by particle bombardment
PCT/DE1988/000157 WO1988007262A1 (en) 1987-03-18 1988-03-16 Process and device for the surface treatment of semiconductors by particle bombardment

Publications (1)

Publication Number Publication Date
ATE97515T1 true ATE97515T1 (en) 1993-12-15

Family

ID=25853611

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88902396T ATE97515T1 (en) 1987-03-18 1988-03-16 METHOD AND DEVICE FOR PROCESSING SOLID SURFACES BY PARTICLE Bombardment.

Country Status (1)

Country Link
AT (1) ATE97515T1 (en)

Similar Documents

Publication Publication Date Title
DE3885739D1 (en) METHOD AND DEVICE FOR PROCESSING SOLID SURFACE SURFACES BY PARTICLE Bombardment.
DE3750808D1 (en) Method and device for ion etching.
DE3586559D1 (en) METHOD AND DEVICE FOR PROCESSING RADIATION IMAGES.
DE69023107D1 (en) Particle analysis method and apparatus.
DE69012321D1 (en) METHOD AND DEVICE FOR IDENTIFYING PARTICLES.
DE3280259D1 (en) METHOD AND DEVICE FOR MAINTENANCE PROCESSING.
DE69000870D1 (en) METHOD AND DEVICE FOR WASTE ELIMINATION.
DE3585204D1 (en) METHOD AND DEVICE FOR DISCOVERING AN OBJECT.
DE3483911D1 (en) METHOD AND DEVICE FOR DETECTING MOVABLE OBJECTS.
DE69009091D1 (en) Method and device for signal processing.
DE3484334D1 (en) DEVICE AND METHOD FOR ION IMPLANTATION.
DE69008477D1 (en) Method and device for target recognition.
DE3751540D1 (en) Method and device for data processing.
DE3861354D1 (en) DEVICE AND METHOD FOR SEPARATING GASES.
DE3774350D1 (en) METHOD AND DEVICE FOR TREATING POWDER.
DE3885284D1 (en) METHOD AND DEVICE FOR FORMING DROPS.
DE69009368D1 (en) Device and method for wire processing.
AT389073B (en) METHOD FOR PROCESSING ROUND WOOD IN ALL-SIDED EDGEED BOARDS, BEAMS OR THE LIKE. AND DEVICE FOR IMPLEMENTING THE METHOD
DE69115234D1 (en) Method and device for handling wafers.
DE3688048D1 (en) METHOD AND DEVICE FOR PROCESSING ELECTRICAL IMPULS PRODUCED BY PARTICLES.
DE3586700D1 (en) DEVICE AND METHOD FOR DATA PROCESSING.
DE3850029D1 (en) Method and device for processing picture element signals.
DE3766124D1 (en) METHOD AND DEVICE FOR VOICE PROCESSING.
AT389267B (en) METHOD AND DEVICE FOR PROCESSING SURFACES
DE3862645D1 (en) DEVICE AND METHOD FOR PRODUCING SPHERICAL PARTICLES.

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee