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ATE95251T1 - PROCESS FOR FORMING A DEPOSITED FILM. - Google Patents

PROCESS FOR FORMING A DEPOSITED FILM.

Info

Publication number
ATE95251T1
ATE95251T1 AT87302782T AT87302782T ATE95251T1 AT E95251 T1 ATE95251 T1 AT E95251T1 AT 87302782 T AT87302782 T AT 87302782T AT 87302782 T AT87302782 T AT 87302782T AT E95251 T1 ATE95251 T1 AT E95251T1
Authority
AT
Austria
Prior art keywords
forming
deposited film
deposited
film
Prior art date
Application number
AT87302782T
Other languages
German (de)
Inventor
Jinsho Matsuyama
Yutaka Hirai
Masao Ueki
Akira Sakai
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61073091A external-priority patent/JPH0647735B2/en
Priority claimed from JP61073094A external-priority patent/JPS62228472A/en
Application filed by Canon Kk filed Critical Canon Kk
Priority claimed from EP87302782A external-priority patent/EP0240306B1/en
Application granted granted Critical
Publication of ATE95251T1 publication Critical patent/ATE95251T1/en

Links

AT87302782T 1986-03-31 1987-03-31 PROCESS FOR FORMING A DEPOSITED FILM. ATE95251T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61073091A JPH0647735B2 (en) 1986-03-31 1986-03-31 Deposited film formation method
JP61073094A JPS62228472A (en) 1986-03-31 1986-03-31 Formation of deposited film
EP87302782A EP0240306B1 (en) 1986-03-31 1987-03-31 Method for forming deposited film

Publications (1)

Publication Number Publication Date
ATE95251T1 true ATE95251T1 (en) 1993-10-15

Family

ID=27230367

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87302782T ATE95251T1 (en) 1986-03-31 1987-03-31 PROCESS FOR FORMING A DEPOSITED FILM.

Country Status (1)

Country Link
AT (1) ATE95251T1 (en)

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties